DE60045755D1 - Halbleiterbauelement und dessen Herstellungsverfahren - Google Patents

Halbleiterbauelement und dessen Herstellungsverfahren

Info

Publication number
DE60045755D1
DE60045755D1 DE60045755T DE60045755T DE60045755D1 DE 60045755 D1 DE60045755 D1 DE 60045755D1 DE 60045755 T DE60045755 T DE 60045755T DE 60045755 T DE60045755 T DE 60045755T DE 60045755 D1 DE60045755 D1 DE 60045755D1
Authority
DE
Germany
Prior art keywords
manufacturing
semiconductor component
semiconductor
component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60045755T
Other languages
English (en)
Inventor
Hiroshi Shibata
Atsuo Isobe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Application granted granted Critical
Publication of DE60045755D1 publication Critical patent/DE60045755D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H01L27/1248—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition or shape of the interlayer dielectric specially adapted to the circuit arrangement
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136213—Storage capacitors associated with the pixel electrode
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136227—Through-hole connection of the pixel electrode to the active element through an insulation layer
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136286—Wiring, e.g. gate line, drain line
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H01L27/1255—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs integrated with passive devices, e.g. auxiliary capacitors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/13—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body combined with thin-film or thick-film passive components
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/40—Arrangements for improving the aperture ratio
DE60045755T 1999-09-27 2000-09-27 Halbleiterbauelement und dessen Herstellungsverfahren Expired - Lifetime DE60045755D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27258399A JP4700156B2 (ja) 1999-09-27 1999-09-27 半導体装置

Publications (1)

Publication Number Publication Date
DE60045755D1 true DE60045755D1 (de) 2011-05-05

Family

ID=17515952

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60045755T Expired - Lifetime DE60045755D1 (de) 1999-09-27 2000-09-27 Halbleiterbauelement und dessen Herstellungsverfahren

Country Status (6)

Country Link
US (5) US6392255B1 (de)
EP (1) EP1087438B1 (de)
JP (1) JP4700156B2 (de)
KR (2) KR100663879B1 (de)
CN (3) CN1276468C (de)
DE (1) DE60045755D1 (de)

Families Citing this family (57)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW478014B (en) 1999-08-31 2002-03-01 Semiconductor Energy Lab Semiconductor device and method of manufacturing thereof
JP4700156B2 (ja) * 1999-09-27 2011-06-15 株式会社半導体エネルギー研究所 半導体装置
JP2001177103A (ja) * 1999-12-20 2001-06-29 Sony Corp 薄膜半導体装置及び表示装置とその製造方法
US7023021B2 (en) 2000-02-22 2006-04-04 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method of manufacturing the same
TW521303B (en) 2000-02-28 2003-02-21 Semiconductor Energy Lab Electronic device
JP3767305B2 (ja) * 2000-03-01 2006-04-19 ソニー株式会社 表示装置およびその製造方法
TW513753B (en) 2000-03-27 2002-12-11 Semiconductor Energy Lab Semiconductor display device and manufacturing method thereof
US6789910B2 (en) 2000-04-12 2004-09-14 Semiconductor Energy Laboratory, Co., Ltd. Illumination apparatus
TW504846B (en) 2000-06-28 2002-10-01 Semiconductor Energy Lab Semiconductor device and manufacturing method thereof
US7456911B2 (en) * 2000-08-14 2008-11-25 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
US6509616B2 (en) * 2000-09-29 2003-01-21 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and its manufacturing method
TW525216B (en) * 2000-12-11 2003-03-21 Semiconductor Energy Lab Semiconductor device, and manufacturing method thereof
SG111923A1 (en) 2000-12-21 2005-06-29 Semiconductor Energy Lab Light emitting device and method of manufacturing the same
JP4210041B2 (ja) * 2001-03-30 2009-01-14 東京エレクトロン株式会社 熱処理装置
JP2002319679A (ja) 2001-04-20 2002-10-31 Semiconductor Energy Lab Co Ltd 半導体装置
JP4831885B2 (ja) 2001-04-27 2011-12-07 株式会社半導体エネルギー研究所 半導体装置の作製方法
US6897477B2 (en) * 2001-06-01 2005-05-24 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device, manufacturing method thereof, and display device
JP2003045874A (ja) 2001-07-27 2003-02-14 Semiconductor Energy Lab Co Ltd 金属配線およびその作製方法、並びに金属配線基板およびその作製方法
JP3445585B2 (ja) 2001-08-31 2003-09-08 沖電気工業株式会社 半導体装置の製造方法
CN1325984C (zh) 2001-09-26 2007-07-11 三星电子株式会社 液晶显示器的薄膜晶体管阵列板
KR100840318B1 (ko) 2001-12-10 2008-06-20 삼성전자주식회사 박막 트랜지스터 기판 및 그의 제조 방법과 액정 표시 장치
JP4798907B2 (ja) 2001-09-26 2011-10-19 株式会社半導体エネルギー研究所 半導体装置
JP4202012B2 (ja) * 2001-11-09 2008-12-24 株式会社半導体エネルギー研究所 発光装置及び電流記憶回路
JP3800404B2 (ja) * 2001-12-19 2006-07-26 株式会社日立製作所 画像表示装置
KR100484591B1 (ko) * 2001-12-29 2005-04-20 엘지.필립스 엘시디 주식회사 능동행렬 유기전기발광소자 및 그의 제조 방법
JP4101533B2 (ja) * 2002-03-01 2008-06-18 株式会社半導体エネルギー研究所 半透過型の液晶表示装置の作製方法
US7148508B2 (en) * 2002-03-20 2006-12-12 Seiko Epson Corporation Wiring substrate, electronic device, electro-optical device, and electronic apparatus
US7256421B2 (en) 2002-05-17 2007-08-14 Semiconductor Energy Laboratory, Co., Ltd. Display device having a structure for preventing the deterioration of a light emitting device
WO2004063799A1 (en) * 2002-12-03 2004-07-29 Quanta Display Inc. Method for manufacturing the thin film transistor array
JP2005045017A (ja) * 2003-07-22 2005-02-17 Sharp Corp アクティブマトリクス基板およびそれを備えた表示装置
JP4099672B2 (ja) * 2004-12-21 2008-06-11 セイコーエプソン株式会社 半導体装置
KR101251993B1 (ko) * 2005-02-25 2013-04-08 삼성디스플레이 주식회사 박막 트랜지스터 표시판
US8305507B2 (en) * 2005-02-25 2012-11-06 Samsung Display Co., Ltd. Thin film transistor array panel having improved storage capacitance and manufacturing method thereof
JP4341570B2 (ja) * 2005-03-25 2009-10-07 セイコーエプソン株式会社 電気光学装置及び電子機器
JP4301259B2 (ja) 2005-09-13 2009-07-22 エプソンイメージングデバイス株式会社 液晶表示装置及びその製造方法
CN100485470C (zh) * 2005-09-13 2009-05-06 爱普生映像元器件有限公司 液晶显示器及其制造方法
EP1995787A3 (de) * 2005-09-29 2012-01-18 Semiconductor Energy Laboratory Co, Ltd. Halbleitervorrichtung mit halbleitender Oxidschicht und Herstellungsverfahren dafür
KR101204365B1 (ko) * 2006-01-16 2012-11-26 삼성디스플레이 주식회사 액정 표시 패널 및 그 제조 방법
US7863612B2 (en) 2006-07-21 2011-01-04 Semiconductor Energy Laboratory Co., Ltd. Display device and semiconductor device
CN101140938B (zh) * 2006-09-07 2010-05-12 中华映管股份有限公司 薄膜晶体管阵列基板及其制造方法
JP2008112136A (ja) * 2006-10-04 2008-05-15 Mitsubishi Electric Corp 表示装置及びその製造方法
JP5258277B2 (ja) * 2006-12-26 2013-08-07 株式会社半導体エネルギー研究所 液晶表示装置
KR101318753B1 (ko) * 2008-06-05 2013-10-16 엘지디스플레이 주식회사 유기전계발광표시장치
US8022621B2 (en) * 2008-07-31 2011-09-20 Lg Display Co., Ltd. Organic light emitting display device
JP6019329B2 (ja) * 2011-03-31 2016-11-02 株式会社Ｊｏｌｅｄ 表示装置および電子機器
US9012993B2 (en) * 2011-07-22 2015-04-21 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
JP5909746B2 (ja) * 2011-11-30 2016-05-11 株式会社Ｊｏｌｅｄ 半導体装置及び表示装置
JP2012142571A (ja) * 2011-12-26 2012-07-26 Semiconductor Energy Lab Co Ltd 半導体装置
CN103268878B (zh) * 2012-11-07 2016-02-24 厦门天马微电子有限公司 Tft阵列基板、tft阵列基板的制作方法及显示装置
US8928829B2 (en) * 2013-05-31 2015-01-06 Innolux Corporation Display device
JP6486660B2 (ja) * 2013-11-27 2019-03-20 株式会社半導体エネルギー研究所 表示装置
KR102433316B1 (ko) * 2015-08-06 2022-08-17 삼성디스플레이 주식회사 유기 발광 표시 장치
TWI552322B (zh) * 2015-08-06 2016-10-01 友達光電股份有限公司 畫素結構
US10241370B2 (en) * 2015-11-18 2019-03-26 Sony Corporation Semiconductor device and projection-type display unit
JP6068767B2 (ja) * 2016-02-03 2017-01-25 株式会社半導体エネルギー研究所 半導体装置
JP6154976B1 (ja) * 2017-03-10 2017-06-28 株式会社半導体エネルギー研究所 半導体装置
KR20200110573A (ko) * 2019-03-15 2020-09-24 삼성디스플레이 주식회사 표시 장치

Family Cites Families (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59121876A (ja) 1982-12-28 1984-07-14 Toshiba Corp 薄膜デバイス用ガラス基板
US5283566A (en) * 1988-04-06 1994-02-01 Hitachi, Ltd. Plane display
JPH02234128A (ja) 1989-03-08 1990-09-17 Hitachi Ltd 液晶表示装置の製造方法
JP2906470B2 (ja) 1989-08-23 1999-06-21 セイコーエプソン株式会社 アクティブマトリックス基板
JP2622183B2 (ja) * 1990-04-05 1997-06-18 シャープ株式会社 アクティブマトリクス表示装置
JPH0824193B2 (ja) 1990-10-16 1996-03-06 工業技術院長 平板型光弁駆動用半導体装置の製造方法
JP3024661B2 (ja) 1990-11-09 2000-03-21 セイコーエプソン株式会社 アクティブマトリクス基板及びその製造方法
JP2998255B2 (ja) 1991-04-04 2000-01-11 セイコーエプソン株式会社 薄膜トランジスタ装置及びその製造方法
JPH05273592A (ja) * 1992-01-31 1993-10-22 Canon Inc アクティブマトリクス型液晶表示素子及びその製造方法
JPH06167722A (ja) * 1992-11-30 1994-06-14 Sharp Corp アクティブマトリクス基板及びその製造方法
JPH0728093A (ja) 1993-07-13 1995-01-31 Sony Corp 表示用アクティブマトリクス基板
JP3109967B2 (ja) * 1993-12-28 2000-11-20 キヤノン株式会社 アクティブマトリクス基板の製造方法
CN1230919C (zh) 1994-06-02 2005-12-07 株式会社半导体能源研究所 有源矩阵显示器和电光元件
JP3312083B2 (ja) 1994-06-13 2002-08-05 株式会社半導体エネルギー研究所 表示装置
JP3137839B2 (ja) * 1994-07-30 2001-02-26 株式会社半導体エネルギー研究所 アクティブマトリクス回路
JP3464287B2 (ja) 1994-09-05 2003-11-05 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP3544572B2 (ja) * 1995-02-01 2004-07-21 株式会社日立製作所 液晶パネルおよび液晶表示装置
CN2237857Y (zh) * 1995-05-16 1996-10-16 南亚塑胶工业股份有限公司 一种薄膜电晶体液晶显示器的储存电容结构
JP3307181B2 (ja) 1995-07-31 2002-07-24 ソニー株式会社 透過型表示装置
JP3490216B2 (ja) * 1996-04-24 2004-01-26 シャープ株式会社 スイッチング素子基板の製造方法
US5917563A (en) 1995-10-16 1999-06-29 Sharp Kabushiki Kaisha Liquid crystal display device having an insulation film made of organic material between an additional capacity and a bus line
KR100205373B1 (ko) * 1996-06-11 1999-07-01 구자홍 액정표시소자의 제조방법
KR100209620B1 (ko) * 1996-08-31 1999-07-15 구자홍 액정 표시 장치 및 그 제조방법
KR100476125B1 (ko) * 1996-09-26 2005-08-12 세이코 엡슨 가부시키가이샤 표시장치
JP3468003B2 (ja) * 1996-12-20 2003-11-17 ソニー株式会社 表示用薄膜半導体装置
JPH10268360A (ja) * 1997-03-26 1998-10-09 Semiconductor Energy Lab Co Ltd 表示装置
US5889302A (en) * 1997-04-21 1999-03-30 Advanced Micro Devices, Inc. Multilayer floating gate field effect transistor structure for use in integrated circuit devices
JP3980178B2 (ja) * 1997-08-29 2007-09-26 株式会社半導体エネルギー研究所 不揮発性メモリおよび半導体装置
JP4312851B2 (ja) 1998-04-27 2009-08-12 株式会社半導体エネルギー研究所 半導体装置およびその作製方法
JP3702096B2 (ja) 1998-06-08 2005-10-05 三洋電機株式会社 薄膜トランジスタ及び表示装置
JP3141860B2 (ja) 1998-10-28 2001-03-07 ソニー株式会社 液晶表示装置の製造方法
EP1020920B1 (de) * 1999-01-11 2010-06-02 Sel Semiconductor Energy Laboratory Co., Ltd. Halbleiteranordnung mit Treiber-TFT und Pixel-TFT auf einem Substrat
EP2284605A3 (de) 1999-02-23 2017-10-18 Semiconductor Energy Laboratory Co, Ltd. Halbleiterbauelement und Verfahren zu dessen Herstellung
TW478014B (en) 1999-08-31 2002-03-01 Semiconductor Energy Lab Semiconductor device and method of manufacturing thereof
JP4700156B2 (ja) * 1999-09-27 2011-06-15 株式会社半導体エネルギー研究所 半導体装置

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US6392255B1 (en) 2002-05-21
US7282737B2 (en) 2007-10-16
CN1290039A (zh) 2001-04-04
US7541618B2 (en) 2009-06-02
EP1087438B1 (de) 2011-03-23
JP2001094112A (ja) 2001-04-06
KR20050105113A (ko) 2005-11-03
CN1276468C (zh) 2006-09-20
EP1087438A2 (de) 2001-03-28
KR20010039920A (ko) 2001-05-15
CN1540716A (zh) 2004-10-27
US20060194375A1 (en) 2006-08-31
US20040058483A1 (en) 2004-03-25
CN1163968C (zh) 2004-08-25
KR100661850B1 (ko) 2006-12-28
US20020132399A1 (en) 2002-09-19
US6624012B2 (en) 2003-09-23
KR100663879B1 (ko) 2007-01-03
US20080036935A1 (en) 2008-02-14
EP1087438A3 (de) 2007-05-23
CN100426489C (zh) 2008-10-15
US6998299B2 (en) 2006-02-14
CN1901167A (zh) 2007-01-24

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