DE60134621D1 - Fest montiertes akustisches Volumenwellenfilter mit mehreren Resonatoren und mit einem gemusterten akustischen Spiegel - Google Patents

Fest montiertes akustisches Volumenwellenfilter mit mehreren Resonatoren und mit einem gemusterten akustischen Spiegel

Info

Publication number
DE60134621D1
DE60134621D1 DE60134621T DE60134621T DE60134621D1 DE 60134621 D1 DE60134621 D1 DE 60134621D1 DE 60134621 T DE60134621 T DE 60134621T DE 60134621 T DE60134621 T DE 60134621T DE 60134621 D1 DE60134621 D1 DE 60134621D1
Authority
DE
Germany
Prior art keywords
resonator
layers
filter
metallic
acoustic mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60134621T
Other languages
English (en)
Inventor
Juha Ella
Jyrki Kaitila
Meeri Talvikki Partanen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Avago Technologies International Sales Pte Ltd
Original Assignee
Nokia Oyj
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nokia Oyj filed Critical Nokia Oyj
Application granted granted Critical
Publication of DE60134621D1 publication Critical patent/DE60134621D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/02125—Means for compensation or elimination of undesirable effects of parasitic elements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezo-electric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/564—Monolithic crystal filters implemented with thin-film techniques
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
DE60134621T 2001-01-02 2001-12-28 Fest montiertes akustisches Volumenwellenfilter mit mehreren Resonatoren und mit einem gemusterten akustischen Spiegel Expired - Lifetime DE60134621D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/753,214 US6496085B2 (en) 2001-01-02 2001-01-02 Solidly mounted multi-resonator bulk acoustic wave filter with a patterned acoustic mirror

Publications (1)

Publication Number Publication Date
DE60134621D1 true DE60134621D1 (de) 2008-08-14

Family

ID=25029665

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60134621T Expired - Lifetime DE60134621D1 (de) 2001-01-02 2001-12-28 Fest montiertes akustisches Volumenwellenfilter mit mehreren Resonatoren und mit einem gemusterten akustischen Spiegel

Country Status (6)

Country Link
US (1) US6496085B2 (de)
EP (1) EP1227582B8 (de)
JP (2) JP4248177B2 (de)
CN (1) CN1208898C (de)
AT (1) ATE400084T1 (de)
DE (1) DE60134621D1 (de)

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US7791435B2 (en) 2007-09-28 2010-09-07 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Single stack coupled resonators having differential output
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US8512800B2 (en) * 2007-12-04 2013-08-20 Triquint Semiconductor, Inc. Optimal acoustic impedance materials for polished substrate coating to suppress passband ripple in BAW resonators and filters
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Also Published As

Publication number Publication date
JP4838292B2 (ja) 2011-12-14
CN1208898C (zh) 2005-06-29
ATE400084T1 (de) 2008-07-15
EP1227582B1 (de) 2008-07-02
US6496085B2 (en) 2002-12-17
JP2002251190A (ja) 2002-09-06
CN1365186A (zh) 2002-08-21
JP4248177B2 (ja) 2009-04-02
JP2009022052A (ja) 2009-01-29
EP1227582A3 (de) 2004-09-22
US20020084873A1 (en) 2002-07-04
EP1227582A2 (de) 2002-07-31
EP1227582B8 (de) 2008-08-13

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: AVAGO TECHNOLOGIES WIRELESS IP (SINGAPORE) PTE, SG

8364 No opposition during term of opposition