DE60139130D1 - Schaltungsstrukturen für hohe temperaturen - Google Patents

Schaltungsstrukturen für hohe temperaturen

Info

Publication number
DE60139130D1
DE60139130D1 DE60139130T DE60139130T DE60139130D1 DE 60139130 D1 DE60139130 D1 DE 60139130D1 DE 60139130 T DE60139130 T DE 60139130T DE 60139130 T DE60139130 T DE 60139130T DE 60139130 D1 DE60139130 D1 DE 60139130D1
Authority
DE
Germany
Prior art keywords
high temperatures
circuit structures
structures
circuit
temperatures
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60139130T
Other languages
English (en)
Inventor
James D Parsons
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Heetronix Corp
Original Assignee
Heetronix Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=24588800&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE60139130(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Heetronix Corp filed Critical Heetronix Corp
Application granted granted Critical
Publication of DE60139130D1 publication Critical patent/DE60139130D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/02—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having positive temperature coefficient
    • H01C7/022—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having positive temperature coefficient mainly consisting of non-metallic substances
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
DE60139130T 2000-08-24 2001-07-20 Schaltungsstrukturen für hohe temperaturen Expired - Fee Related DE60139130D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/645,383 US6576972B1 (en) 2000-08-24 2000-08-24 High temperature circuit structures with expansion matched SiC, AlN and/or AlxGa1-xN(x>0.69) circuit device
PCT/US2001/023008 WO2002016897A2 (en) 2000-08-24 2001-07-20 High temperature circuit structures

Publications (1)

Publication Number Publication Date
DE60139130D1 true DE60139130D1 (de) 2009-08-13

Family

ID=24588800

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60139130T Expired - Fee Related DE60139130D1 (de) 2000-08-24 2001-07-20 Schaltungsstrukturen für hohe temperaturen

Country Status (8)

Country Link
US (3) US6576972B1 (de)
EP (1) EP1311815B1 (de)
JP (1) JP3796218B2 (de)
CN (2) CN1773231A (de)
AU (1) AU2001280676A1 (de)
DE (1) DE60139130D1 (de)
RU (1) RU2248538C2 (de)
WO (1) WO2002016897A2 (de)

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US6989574B2 (en) * 2000-08-24 2006-01-24 Heetronix High temperature circuit structures with thin film layer
DE10061299A1 (de) * 2000-12-08 2002-06-27 Siemens Ag Vorrichtung zur Feststellung und/oder Weiterleitung zumindest eines Umwelteinflusses, Herstellungsverfahren und Verwendung dazu
US6995691B2 (en) * 2001-02-14 2006-02-07 Heetronix Bonded structure using reacted borosilicate mixture
US6546796B2 (en) * 2001-03-15 2003-04-15 Therm-O-Disc, Incorporated Liquid level sensor
US7129519B2 (en) * 2002-05-08 2006-10-31 Advanced Technology Materials, Inc. Monitoring system comprising infrared thermopile detector
US6617175B1 (en) * 2002-05-08 2003-09-09 Advanced Technology Materials, Inc. Infrared thermopile detector system for semiconductor process monitoring and control
US7106167B2 (en) * 2002-06-28 2006-09-12 Heetronix Stable high temperature sensor system with tungsten on AlN
US6845664B1 (en) * 2002-10-03 2005-01-25 The United States Of America As Represented By The Administrator Of National Aeronautics And Space Administration MEMS direct chip attach packaging methodologies and apparatuses for harsh environments
US7080545B2 (en) 2002-10-17 2006-07-25 Advanced Technology Materials, Inc. Apparatus and process for sensing fluoro species in semiconductor processing systems
US7391005B2 (en) * 2002-10-25 2008-06-24 Gennum Corporation Direct attach optical receiver module and method of testing
US7224910B2 (en) * 2002-10-25 2007-05-29 Gennum Corporation Direct attach optical receiver module and method of testing
US7004622B2 (en) * 2002-11-22 2006-02-28 General Electric Company Systems and methods for determining conditions of articles and methods of making such systems
US7049558B2 (en) * 2003-01-27 2006-05-23 Arcturas Bioscience, Inc. Apparatus and method for heating microfluidic volumes and moving fluids
WO2004088415A2 (en) * 2003-03-28 2004-10-14 Advanced Technology Materials Inc. Photometrically modulated delivery of reagents
US7063097B2 (en) 2003-03-28 2006-06-20 Advanced Technology Materials, Inc. In-situ gas blending and dilution system for delivery of dilute gas at a predetermined concentration
US7306967B1 (en) 2003-05-28 2007-12-11 Adsem, Inc. Method of forming high temperature thermistors
DE10328660B3 (de) * 2003-06-26 2004-12-02 Infineon Technologies Ag Verfahren zum Bestimmen der Temperatur eines Halbleiterwafers
US7187161B2 (en) 2003-07-11 2007-03-06 Wabash Magnetics, Llc Transient protection of sensors
EP1500982A1 (de) 2003-07-24 2005-01-26 ASML Netherlands B.V. Lithographischer Apparat und Verfahren zur Herstellung eines Artikels
WO2005050257A2 (en) * 2003-11-18 2005-06-02 Halliburton Energy Services, Inc. High temperature imaging device
JP2005203734A (ja) * 2003-12-15 2005-07-28 Toshiba Ceramics Co Ltd 金属部材埋設セラミックス品とその製造方法
US7292132B1 (en) * 2003-12-17 2007-11-06 Adsem, Inc. NTC thermistor probe
US7812705B1 (en) 2003-12-17 2010-10-12 Adsem, Inc. High temperature thermistor probe
DE102004017799A1 (de) * 2004-04-05 2005-10-20 Ego Elektro Geraetebau Gmbh Temperatursensor und Verfahren zur Justierung eines solchen
US7361946B2 (en) * 2004-06-28 2008-04-22 Nitronex Corporation Semiconductor device-based sensors
US20060211253A1 (en) * 2005-03-16 2006-09-21 Ing-Shin Chen Method and apparatus for monitoring plasma conditions in an etching plasma processing facility
US20080006775A1 (en) * 2006-06-22 2008-01-10 Arno Jose I Infrared gas detection systems and methods
US7412881B2 (en) * 2006-07-31 2008-08-19 Chevron U.S.A. Inc. Fluid flowrate determination
DE202006017648U1 (de) * 2006-11-20 2007-02-15 Atlas Material Testing Technology Gmbh Vorrichtung zum Ableiten von Flüssigkeitstropfen von einem Temperatursensor
US20080311360A1 (en) * 2006-12-18 2008-12-18 Koa Corporation Thick film circuit component and method for manufacturing the same
US8138027B2 (en) 2008-03-07 2012-03-20 Stats Chippac, Ltd. Optical semiconductor device having pre-molded leadframe with window and method therefor
US20090251960A1 (en) * 2008-04-07 2009-10-08 Halliburton Energy Services, Inc. High temperature memory device
DE102008036837A1 (de) 2008-08-07 2010-02-18 Epcos Ag Sensorvorrichtung und Verfahren zur Herstellung
FR2936097B1 (fr) * 2008-09-12 2010-10-29 Alstom Transport Sa Procede d'encapsulation d'un composant electronique a semi-conducteur.
US7938016B2 (en) * 2009-03-20 2011-05-10 Freescale Semiconductor, Inc. Multiple layer strain gauge
US9340878B2 (en) 2009-05-29 2016-05-17 Entegris, Inc. TPIR apparatus for monitoring tungsten hexafluoride processing to detect gas phase nucleation, and method and system utilizing same
TWI421477B (zh) * 2010-08-30 2014-01-01 Emcom Technology Inc 溫度變化感應裝置及其方法
US10346276B2 (en) 2010-12-16 2019-07-09 Microsoft Technology Licensing, Llc Kernel awareness of physical environment
JP2012189571A (ja) * 2011-02-24 2012-10-04 Renesas Electronics Corp 半導体装置及びその製造方法
US9046426B1 (en) 2012-06-15 2015-06-02 The United States Of America As Represented By The Administrator Of National Aeronautics And Space Administration Modular apparatus and method for attaching multiple devices
CN102842398B (zh) * 2012-08-27 2015-08-26 华中科技大学 一种片式陶瓷敏感元件的制备方法及其相应产品
DE102012109704A1 (de) * 2012-10-11 2014-04-17 Epcos Ag Keramisches Bauelement mit Schutzschicht und Verfahren zu dessen Herstellung
JP1528936S (de) * 2015-01-14 2015-07-13
JP1528485S (de) * 2015-01-14 2015-07-13
JP1528484S (de) * 2015-01-14 2015-07-13
TWD190983S (zh) * 2017-02-17 2018-06-11 三星電子股份有限公司 固態硬碟儲存裝置
KR101923074B1 (ko) 2017-03-21 2018-11-28 부경대학교 산학협력단 저온 센서용 금 나노입자-실리콘 복합소재
JP6874863B2 (ja) * 2017-12-27 2021-05-19 株式会社村田製作所 貼付型体温計
USD869470S1 (en) * 2018-04-09 2019-12-10 Samsung Electronics Co., Ltd. SSD storage device
USD869469S1 (en) * 2018-04-09 2019-12-10 Samsung Electronics Co., Ltd. SSD storage device
US11371892B2 (en) * 2019-06-28 2022-06-28 Fluke Corporation Platinum resistance temperature sensor having floating platinum member
US11482449B2 (en) 2020-08-03 2022-10-25 General Electric Company Electrical component with a dielectric passivation stack

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JPS6019641B2 (ja) * 1980-02-26 1985-05-17 松下電器産業株式会社 サ−ミスタ
ATE42637T1 (de) * 1985-09-11 1989-05-15 Kunz Manfred Drucksensor.
JP3118667B2 (ja) * 1992-03-09 2000-12-18 株式会社トーキン 絶対湿度センサ
US5363084A (en) * 1993-02-26 1994-11-08 Lake Shore Cryotronics, Inc. Film resistors having trimmable electrodes
US5635635A (en) * 1993-11-18 1997-06-03 Unisia Jecs Corporation Method and apparatus for detecting the intake air quantity of an engine
US5668524A (en) * 1994-02-09 1997-09-16 Kyocera Corporation Ceramic resistor and electrostatic chuck having an aluminum nitride crystal phase
EP0878707A4 (de) * 1996-10-22 2000-06-28 Riken Kk Sensor mit heizung
US6025609A (en) * 1996-12-05 2000-02-15 Quick; Nathaniel R. Laser synthesized ceramic electronic devices and circuits and method for making
US6319757B1 (en) * 1998-07-08 2001-11-20 Caldus Semiconductor, Inc. Adhesion and/or encapsulation of silicon carbide-based semiconductor devices on ceramic substrates
US6239432B1 (en) * 1999-05-21 2001-05-29 Hetron IR radiation sensing with SIC
US6291884B1 (en) * 1999-11-09 2001-09-18 Amkor Technology, Inc. Chip-size semiconductor packages

Also Published As

Publication number Publication date
US20020179992A1 (en) 2002-12-05
CN1471632A (zh) 2004-01-28
JP3796218B2 (ja) 2006-07-12
WO2002016897A3 (en) 2002-05-02
US20030146502A1 (en) 2003-08-07
US6649994B2 (en) 2003-11-18
WO2002016897A2 (en) 2002-02-28
JP2004507728A (ja) 2004-03-11
US6765278B2 (en) 2004-07-20
CN1256575C (zh) 2006-05-17
AU2001280676A1 (en) 2002-03-04
RU2248538C2 (ru) 2005-03-20
US6576972B1 (en) 2003-06-10
EP1311815B1 (de) 2009-07-01
CN1773231A (zh) 2006-05-17
EP1311815A2 (de) 2003-05-21

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee