DE60141055D1 - Push-Planung für Halbleiterfertigung - Google Patents

Push-Planung für Halbleiterfertigung

Info

Publication number
DE60141055D1
DE60141055D1 DE60141055T DE60141055T DE60141055D1 DE 60141055 D1 DE60141055 D1 DE 60141055D1 DE 60141055 T DE60141055 T DE 60141055T DE 60141055 T DE60141055 T DE 60141055T DE 60141055 D1 DE60141055 D1 DE 60141055D1
Authority
DE
Germany
Prior art keywords
semiconductor manufacturing
planning
push
push planning
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60141055T
Other languages
English (en)
Inventor
Raymond Browning
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE60141055D1 publication Critical patent/DE60141055D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
    • G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
DE60141055T 2000-02-28 2001-02-26 Push-Planung für Halbleiterfertigung Expired - Lifetime DE60141055D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/514,864 US6714830B2 (en) 2000-02-28 2000-02-28 Push-type scheduling for semiconductor fabrication

Publications (1)

Publication Number Publication Date
DE60141055D1 true DE60141055D1 (de) 2010-03-04

Family

ID=24048985

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60141055T Expired - Lifetime DE60141055D1 (de) 2000-02-28 2001-02-26 Push-Planung für Halbleiterfertigung

Country Status (6)

Country Link
US (1) US6714830B2 (de)
EP (1) EP1128246B1 (de)
JP (1) JP2001332464A (de)
KR (1) KR100426757B1 (de)
DE (1) DE60141055D1 (de)
TW (1) TW526404B (de)

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US7151972B2 (en) * 2005-01-05 2006-12-19 International Business Machines Corporation Method for autonomic control of a manufacturing system
CN100386702C (zh) * 2005-06-10 2008-05-07 同济大学 基于信息素的用于半导体生产线的动态调度方法
US7966089B1 (en) * 2005-07-05 2011-06-21 Advanced Micro Devices, Inc. Method and apparatus for automated fab control
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US9747575B2 (en) * 2007-04-17 2017-08-29 Zih Corp. Flow metering of vehicles using RTLS tracking
US7937177B2 (en) * 2007-06-27 2011-05-03 International Business Machines Corporation Manufacturing work in process management system
US8965539B2 (en) * 2008-09-27 2015-02-24 Jda Software Group, Inc. System and method for a demand driven lean production control system
CN102253662A (zh) * 2011-04-11 2011-11-23 同济大学 基于多蚁群优化的半导体生产线排程方法
WO2012143555A2 (en) * 2011-04-22 2012-10-26 Mapper Lithography Ip B.V. Network architecture for lithography machine cluster
US10054936B2 (en) * 2014-02-28 2018-08-21 Schneider Electric Software, Llc Manufacturing execution system and method of determining production metrics for a line
CN104244605B (zh) * 2014-09-03 2017-03-22 东莞市诸葛流智能系统有限公司 一种提高smt贴片生产效率和设备使用率的方法
US10295979B2 (en) * 2015-09-15 2019-05-21 Applied Materials, Inc. Scheduling in manufacturing environments
CN106444649B (zh) * 2016-07-05 2019-01-11 同济大学 一种半导体生产线闭环调度控制方法
CN107871194B (zh) * 2016-09-28 2020-10-16 北京北方华创微电子装备有限公司 一种生产线设备的调度方法和装置
TWI758578B (zh) * 2018-03-01 2022-03-21 日商荏原製作所股份有限公司 排程器、基板處理裝置、及基板搬送方法
FR3081740B1 (fr) * 2018-06-05 2021-03-12 Psa Automobiles Sa Procede d’assemblage de pieces sur une ligne d’assemblage
CN111258277A (zh) * 2018-12-03 2020-06-09 威纶科技股份有限公司 生产设备的控制方法及生产设备控制系统
US20220011757A1 (en) * 2020-06-22 2022-01-13 Changxin Memory Technologies, Inc. Laser Machine Automatic Operating Method and System
TWI755299B (zh) * 2021-03-10 2022-02-11 財團法人工業技術研究院 產線排程方法、產線系統及電腦可讀取媒體

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KR20000003307A (ko) * 1998-06-27 2000-01-15 윤종용 반도체 제조설비 관리시스템의 로트 플로우 제어방법
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Also Published As

Publication number Publication date
EP1128246A3 (de) 2004-10-27
US6714830B2 (en) 2004-03-30
KR100426757B1 (ko) 2004-04-13
EP1128246A2 (de) 2001-08-29
EP1128246B1 (de) 2010-01-13
KR20010085714A (ko) 2001-09-07
US20030158618A1 (en) 2003-08-21
JP2001332464A (ja) 2001-11-30
TW526404B (en) 2003-04-01

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