DE602004029353D1 - Baffle mit einer steuerung der ablagerung von verunreinigungen mit einem kapazitaetsdifferenz - druckwandler - Google Patents

Baffle mit einer steuerung der ablagerung von verunreinigungen mit einem kapazitaetsdifferenz - druckwandler

Info

Publication number
DE602004029353D1
DE602004029353D1 DE602004029353T DE602004029353T DE602004029353D1 DE 602004029353 D1 DE602004029353 D1 DE 602004029353D1 DE 602004029353 T DE602004029353 T DE 602004029353T DE 602004029353 T DE602004029353 T DE 602004029353T DE 602004029353 D1 DE602004029353 D1 DE 602004029353D1
Authority
DE
Germany
Prior art keywords
contamination
baffle
deposition
control
pressure transmitter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602004029353T
Other languages
English (en)
Inventor
Jeffrey D Lischer
Robert Traverso
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MKS Instruments Inc
Original Assignee
MKS Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MKS Instruments Inc filed Critical MKS Instruments Inc
Publication of DE602004029353D1 publication Critical patent/DE602004029353D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0636—Protection against aggressive medium in general using particle filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
DE602004029353T 2003-05-16 2004-05-10 Baffle mit einer steuerung der ablagerung von verunreinigungen mit einem kapazitaetsdifferenz - druckwandler Active DE602004029353D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/440,391 US6993973B2 (en) 2003-05-16 2003-05-16 Contaminant deposition control baffle for a capacitive pressure transducer
PCT/US2004/014639 WO2004104543A1 (en) 2003-05-16 2004-05-10 Contaminant deposition control baffle with capacitance difference pressure transducer

Publications (1)

Publication Number Publication Date
DE602004029353D1 true DE602004029353D1 (de) 2010-11-11

Family

ID=33417996

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004029353T Active DE602004029353D1 (de) 2003-05-16 2004-05-10 Baffle mit einer steuerung der ablagerung von verunreinigungen mit einem kapazitaetsdifferenz - druckwandler

Country Status (7)

Country Link
US (1) US6993973B2 (de)
EP (1) EP1627214B1 (de)
JP (1) JP4607889B2 (de)
KR (1) KR101061408B1 (de)
DE (1) DE602004029353D1 (de)
TW (1) TWI316602B (de)
WO (1) WO2004104543A1 (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200535566A (en) * 2004-01-15 2005-11-01 Jsr Corp Upper layer film forming composition for liquid immersion and method of forming photoresist pattern
US7191660B2 (en) * 2004-04-15 2007-03-20 Davidson Instruments Inc. Flame shield for high temperature pressure transducer
JP4177294B2 (ja) * 2004-06-07 2008-11-05 三菱電機株式会社 圧力センサ装置
CH697766B1 (de) * 2005-11-25 2009-02-13 Inficon Gmbh Blendenanordnung für eine Vakuummesszelle.
US8006571B2 (en) * 2007-09-19 2011-08-30 Siemens Industry, Inc. Air flow measurement
US7841240B2 (en) * 2008-04-16 2010-11-30 Kulite Semiconductor Products, Inc. Header for a differential pressure transducer
FR2947629B1 (fr) * 2009-07-06 2012-03-30 Tronic S Microsystems Dispositif de mesure de pression et son procede de fabrication
KR101423063B1 (ko) 2010-02-02 2014-08-13 엠케이에스 인스트루먼츠, 인코포레이티드 용량성 압력 센서
JP5997771B2 (ja) 2011-09-29 2016-09-28 エム ケー エス インストルメンツ インコーポレーテッドＭｋｓ Ｉｎｓｔｒｕｍｅｎｔｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 改良された電極構造体を有する静電容量型圧力センサ
KR101588725B1 (ko) 2011-10-11 2016-01-26 엠케이에스 인스트루먼츠, 인코포레이티드 압력 센서
JP6002016B2 (ja) * 2012-11-30 2016-10-05 アズビル株式会社 静電容量型圧力センサ
JP2014126504A (ja) * 2012-12-27 2014-07-07 Azbil Corp 静電容量型圧力センサ
US10107315B2 (en) * 2013-04-30 2018-10-23 Mks Instruments, Inc. MEMS pressure sensors with integrated baffles
JP6231812B2 (ja) * 2013-08-09 2017-11-15 アズビル株式会社 静電容量型圧力センサ
US9671302B2 (en) 2013-09-30 2017-06-06 Mks Instruments, Inc. Cold cathode ionization vacuum gauge
TWI550261B (zh) * 2014-03-17 2016-09-21 立錡科技股份有限公司 微機電壓力計以及其製作方法
JP6126545B2 (ja) * 2014-03-20 2017-05-10 アズビル株式会社 静電容量型圧力センサ
US20170328800A1 (en) * 2014-07-11 2017-11-16 Richtek Technology Corporation Combo micro-electro-mechanical system device and manufacturing method thereof
TW201634219A (zh) 2015-01-15 2016-10-01 Ｍｋｓ儀器公司 聚合物複合物真空組件
US20190064022A1 (en) * 2016-02-25 2019-02-28 Inficon ag Capacitive vacuum measuring cell having a multi-electrode
CN107976279A (zh) * 2017-12-15 2018-05-01 北京创昱科技有限公司 一种真空测量装置
DK3737926T3 (da) * 2018-01-09 2023-01-16 Kistler Holding Ag Beskyttelsesanordning
JP7085898B2 (ja) * 2018-05-25 2022-06-17 東京エレクトロン株式会社 ラジカル失活部品及びこれを用いたプラズマ処理装置
CN110132484A (zh) * 2019-05-31 2019-08-16 江苏鲁汶仪器有限公司 一种离子束刻蚀系统的真空测量工具的保护装置
CN110987282A (zh) * 2019-11-29 2020-04-10 中国科学院微电子研究所 一种防沉积匀气环
KR102252221B1 (ko) * 2020-02-26 2021-05-14 엠케이프리시젼 주식회사 축전 용량식 진공게이지
US11287342B2 (en) 2020-03-20 2022-03-29 Mks Instruments, Inc. Capacitance manometer with improved baffle for improved detection accuracy
CN114264403A (zh) * 2021-12-03 2022-04-01 北京晨晶精仪电子有限公司 真空规颗粒阻挡结构
US11841284B2 (en) * 2022-03-24 2023-12-12 Adaptive Plasma Technology Corp. Particle trapping apparatus for preventing an error of a pressure measurement

Family Cites Families (133)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2416557A (en) * 1947-02-25 Electroacoustic transducer
US3000215A (en) * 1951-09-27 1961-09-19 John V Atanasoff Microbarophone
US2800796A (en) * 1952-08-05 1957-07-30 Trans Souics Inc Pressure measuring device
US2753515A (en) * 1952-09-03 1956-07-03 Edward J Rickner Capacitor type differential pressure switch
US2755419A (en) * 1953-06-12 1956-07-17 Hans E Hollmann Electromechanical nonlinear capacitor
US2751530A (en) * 1954-01-04 1956-06-19 Honeywell Regulator Co Differential pressure sensing unit
US2907320A (en) 1954-01-11 1959-10-06 Texas Instruments Inc Pressure capacitance transducer
US3113456A (en) 1956-06-15 1963-12-10 Acoustica Associates Inc Liquid volume sensing system
US2999386A (en) * 1956-11-02 1961-09-12 Trans Sonics Inc High precision diaphragm type instruments
US3318153A (en) * 1962-12-04 1967-05-09 Rosemount Eng Co Ltd Diode loop capacitor comparative circuit including a pair of transformer windings coupled in phase
US3243998A (en) * 1964-11-17 1966-04-05 Robert E Vosteen Capacitor measuring and detecting device
US3371537A (en) * 1965-09-16 1968-03-05 William J. Kiene Pressure indicator
US3354721A (en) 1965-10-23 1967-11-28 Augustus H Fiske Pressure gaging systems of apparatus
US3620083A (en) 1969-12-04 1971-11-16 Nasa Wide range dynamic pressure sensor
US3619742A (en) 1970-05-21 1971-11-09 Rosemount Eng Co Ltd Shielded capacitance pressure sensor
US3675072A (en) * 1971-01-28 1972-07-04 Atomic Energy Commission Fast-closing valve system for cyclotrons
US3858097A (en) 1973-12-26 1974-12-31 Bendix Corp Pressure-sensing capacitor
GB1450709A (en) * 1973-12-31 1976-09-29 Birchall D J Pressure transducers
DE2443559C2 (de) * 1974-09-11 1984-01-12 Interatom Internationale Atomreaktorbau Gmbh, 5060 Bergisch Gladbach Vorrichtung zur Entnahme von Proben aus einem Flüssigmetall führenden Kreislauf
US4008619A (en) * 1975-11-17 1977-02-22 Mks Instruments, Inc. Vacuum monitoring
US4426673A (en) * 1976-03-12 1984-01-17 Kavlico Corporation Capacitive pressure transducer and method of making same
US4084438A (en) * 1976-03-29 1978-04-18 Setra Systems, Inc. Capacitive pressure sensing device
US4020674A (en) * 1976-05-19 1977-05-03 Harry Robert Fechter Pipeline leak detector with baffles
US4176557A (en) 1976-06-07 1979-12-04 Bunker Ramo Corporation Pressure sensor
US4120206A (en) 1977-01-17 1978-10-17 Rosemount Inc. Differential pressure sensor capsule with low acceleration sensitivity
US4168518A (en) * 1977-05-10 1979-09-18 Lee Shih Y Capacitor transducer
US4168517A (en) * 1977-11-10 1979-09-18 Lee Shih Y Capacitive pressure transducer
US4136603A (en) * 1977-11-14 1979-01-30 The Foxboro Company Diaphragm assembly
US4229776A (en) 1978-11-21 1980-10-21 Vaisala Oy Capacitive capsule for aneroid pressure gauge
US4322775A (en) * 1979-10-29 1982-03-30 Delatorre Leroy C Capacitive pressure sensor
US4357834A (en) 1980-09-03 1982-11-09 Hokushin Electric Works, Ltd. Displacement converter
US4358814A (en) 1980-10-27 1982-11-09 Setra Systems, Inc. Capacitive pressure sensor
US4434203A (en) * 1980-10-27 1984-02-28 Setra Systems, Inc. Diaphragm
US4458537A (en) * 1981-05-11 1984-07-10 Combustion Engineering, Inc. High accuracy differential pressure capacitive transducer
US4464725A (en) * 1981-05-19 1984-08-07 Setra Systems, Inc. Temperature compensated measuring system
JPS5855732A (ja) * 1981-09-30 1983-04-02 Hitachi Ltd 静電容量型圧力センサ
US4422125A (en) 1982-05-21 1983-12-20 The Bendix Corporation Pressure transducer with an invariable reference capacitor
JPS58210534A (ja) * 1982-06-01 1983-12-07 Citizen Watch Co Ltd 圧力検出装置
US4425799A (en) * 1982-06-03 1984-01-17 Kavlico Corporation Liquid capacitance pressure transducer technique
US4424713A (en) * 1982-06-11 1984-01-10 General Signal Corporation Silicon diaphragm capacitive pressure transducer
US4433580A (en) * 1982-07-22 1984-02-28 Tward 2001 Limited Pressure transducer
US4598381A (en) * 1983-03-24 1986-07-01 Rosemount Inc. Pressure compensated differential pressure sensor and method
US4499773A (en) * 1983-04-28 1985-02-19 Dresser Industries, Inc. Variable capacitance pressure transducer
JPS59188917U (ja) * 1983-06-02 1984-12-14 トヨタ自動車株式会社 フイルタ再生式デイ−ゼル排気固形微粒子捕集装置の排気ガス背圧測定装置の背圧導入用口金
US4567773A (en) * 1984-01-05 1986-02-04 Energy Utilization Laboratories, Inc. Pressure transducer system
FI74350C (fi) 1984-02-21 1988-01-11 Vaisala Oy Kapacitiv absoluttryckgivare.
US4572204A (en) * 1984-03-21 1986-02-25 Hewlett-Packard Company Pressure dome with compliant chamber
US4542436A (en) * 1984-04-10 1985-09-17 Johnson Service Company Linearized capacitive pressure transducer
US4562742A (en) * 1984-08-07 1986-01-07 Bell Microcomponents, Inc. Capacitive pressure transducer
US4603371A (en) * 1984-10-12 1986-07-29 Rosemount Inc. Capacitive sensing cell made of brittle material
NL8500139A (nl) * 1985-01-21 1986-08-18 Advanced Micro Electronic Capacitief weegtoestel.
US4587851A (en) * 1985-02-26 1986-05-13 Edward Mortberg High vacuum capacitance manometer having Px side open housing
JPH064371B2 (ja) * 1985-04-22 1994-01-19 日本電気ホームエレクトロニクス株式会社 車高制御装置
US4670733A (en) * 1985-07-01 1987-06-02 Bell Microsensors, Inc. Differential pressure transducer
US4735098A (en) * 1985-11-19 1988-04-05 Kavlico Corporation Dual diaphragm differential pressure transducer
GB2184841B (en) * 1985-11-22 1989-12-28 Mitutoyo Mfg Co Ltd Electronic display measuring device
US4691574A (en) * 1986-02-25 1987-09-08 Delatorre Leroy C Capacitance transducer
US5279163A (en) * 1986-02-28 1994-01-18 Antonio Nicholas F D Sensor and transducer apparatus
US4815324A (en) * 1986-04-24 1989-03-28 Mitsubishi Denki Kabushiki Kaisha Intake air meter for an internal combustion engine
US4774626A (en) * 1986-05-05 1988-09-27 Texas Instruments Incorporated Pressure sensor with improved capacitive pressure transducer
US4714464A (en) 1986-10-27 1987-12-22 Entravision, Inc. Mechanism for coupling the aspirant line of an irrigation/aspiration machine to the pressure monitoring section
US4735090A (en) * 1986-11-28 1988-04-05 Honeywell Inc. Flange mounted pressure transmitter
JPS63149531A (ja) * 1986-12-12 1988-06-22 Fuji Electric Co Ltd 静電容量式圧力センサ
SE459887B (sv) * 1987-02-12 1989-08-14 Hydrolab Ab Tryckgivare
FI872049A (fi) * 1987-05-08 1988-11-09 Vaisala Oy Kondensatorkonstruktion foer anvaendning vid tryckgivare.
US4785669A (en) 1987-05-18 1988-11-22 Mks Instruments, Inc. Absolute capacitance manometers
US4851015A (en) * 1987-08-21 1989-07-25 Donaldson Company, Inc. Muffler apparatus with filter trap and method of use
JPH0812123B2 (ja) * 1987-11-27 1996-02-07 日本碍子株式会社 圧力センサ
US4850227A (en) * 1987-12-22 1989-07-25 Delco Electronics Corporation Pressure sensor and method of fabrication thereof
US4807477A (en) * 1988-02-01 1989-02-28 Motorola, Inc. Capacitive temperature compensation for a pressure sensor
US5497620A (en) * 1988-04-08 1996-03-12 Stobbe; Per Method of filtering particles from a flue gas, a flue gas filter means and a vehicle
US4823603A (en) * 1988-05-03 1989-04-25 Vacuum General, Inc. Capacitance manometer having stress relief for fixed electrode
SE461300B (sv) 1988-05-17 1990-01-29 Hydrolab Ab Tryckmaetare
DE3901492A1 (de) * 1988-07-22 1990-01-25 Endress Hauser Gmbh Co Drucksensor und verfahren zu seiner herstellung
US4977480A (en) 1988-09-14 1990-12-11 Fuji Koki Mfg. Co., Ltd. Variable-capacitance type sensor and variable-capacitance type sensor system using the same
US4944187A (en) * 1988-12-23 1990-07-31 Rosemount Inc. Multimodulus pressure sensor
DE3910646A1 (de) * 1989-04-01 1990-10-04 Endress Hauser Gmbh Co Kapazitiver drucksensor und verfahren zu seiner herstellung
US5165281A (en) 1989-09-22 1992-11-24 Bell Robert L High pressure capacitive transducer
FR2656698B1 (fr) * 1989-12-29 1992-05-07 Vectavib Dispositif de mesure des variations de la capacite d'un condensateur formant, notamment, un capteur.
US5050034A (en) * 1990-01-22 1991-09-17 Endress U. Hauser Gmbh U. Co. Pressure sensor and method of manufacturing same
US5020377A (en) * 1990-01-23 1991-06-04 Kavlico Corporation Low pressure transducer using metal foil diaphragm
DE4129414A1 (de) 1990-11-13 1993-03-11 Endress Hauser Gmbh Co Verwendung eines speziellen tiegels beim melt-spinning einer aktivlot-legierung
ES2055639T3 (es) * 1991-05-26 1994-08-16 Endress Hauser Gmbh Co Contacto pasante de una pieza de material aislante.
US5291534A (en) * 1991-06-22 1994-03-01 Toyoda Koki Kabushiki Kaisha Capacitive sensing device
US5150275A (en) * 1991-07-01 1992-09-22 Setra Systems, Inc. Capacitive pressure sensor
US5155653A (en) 1991-08-14 1992-10-13 Maclean-Fogg Company Capacitive pressure sensor
EP0544934B1 (de) * 1991-11-30 1996-10-02 Endress U. Hauser Gmbh U. Co. Verfahren zum Stabilisieren der Oberflächeneigenschaften von in Vakuum temperaturzubehandelnden Gegenständen
US5369228A (en) 1991-11-30 1994-11-29 Signagraphics Corporation Data input device with a pressure-sensitive input surface
US5271277A (en) * 1991-12-23 1993-12-21 The Boc Group, Inc. Capacitance pressure transducer
JP2896725B2 (ja) * 1991-12-26 1999-05-31 株式会社山武 静電容量式圧力センサ
US5348568A (en) * 1992-02-05 1994-09-20 Asahi Glass Company Ltd. Filtering method of flue gas of a boiler and a filter apparatus for hot gas
US5189591A (en) * 1992-06-12 1993-02-23 Allied-Signal Inc. Aluminosilicate glass pressure transducer
US5499533A (en) * 1992-08-26 1996-03-19 Miller; Mark Downhole pressure gauge converter
US5275055A (en) * 1992-08-31 1994-01-04 Honeywell Inc. Resonant gauge with microbeam driven in constant electric field
US5351548A (en) 1992-12-02 1994-10-04 Walbro Corporation Capacitive pressure sensor
US5315877A (en) * 1993-02-19 1994-05-31 Kavlico Corporation Low cost versatile pressure transducer
US5561247A (en) 1993-03-30 1996-10-01 Honda Motor Co., Ltd. Pressure sensor
US5349637A (en) 1993-06-03 1994-09-20 Miller Larry P Security bracket for portable telephones
US5333637A (en) * 1993-06-11 1994-08-02 Rosemount Inc. Pneumatic instrument particle trap
US5442962A (en) * 1993-08-20 1995-08-22 Setra Systems, Inc. Capacitive pressure sensor having a pedestal supported electrode
US5541561A (en) * 1993-12-03 1996-07-30 Eaton Corporation Integral electrical circuit controller
US5542300A (en) * 1994-01-24 1996-08-06 Setra Systems, Inc. Low cost, center-mounted capacitive pressure sensor
SE506558C2 (sv) * 1994-04-14 1998-01-12 Cecap Ab Givarelement för tryckgivare
US5536114A (en) * 1994-05-20 1996-07-16 Stir-Melter, Inc. Apparatus for vitrifcation of hazardous waste
US5485345A (en) * 1994-11-14 1996-01-16 Texas Instruments Incorporated Pressure transducer apparatus
US5499158A (en) * 1994-11-14 1996-03-12 Texas Instruments Incorporated Pressure transducer apparatus with monolithic body of ceramic material
US5604315A (en) * 1995-01-12 1997-02-18 Setra Systems, Inc. Apparatus using a feedback network to measure fluid pressures
US5625152A (en) * 1996-01-16 1997-04-29 Mks Instruments, Inc. Heated pressure transducer assembly
US5808206A (en) * 1996-01-16 1998-09-15 Mks Instruments, Inc. Heated pressure transducer assembly
JP3107516B2 (ja) * 1996-05-01 2000-11-13 株式会社日立製作所 複合センサ
US5672808A (en) * 1996-06-11 1997-09-30 Moore Products Co. Transducer having redundant pressure sensors
JP3147778B2 (ja) * 1996-07-01 2001-03-19 富士電機株式会社 静電容量式差圧検出器
US5811685A (en) * 1996-12-11 1998-09-22 Mks Instruments, Inc. Fluid pressure sensor with contaminant exclusion system
SE9700612D0 (sv) * 1997-02-20 1997-02-20 Cecap Ab Sensorelement med integrerat referenstryck
US5942692A (en) * 1997-04-10 1999-08-24 Mks Instruments, Inc. Capacitive pressure sensing method and apparatus avoiding interelectrode capacitance by driving with in-phase excitation signals
US5911162A (en) * 1997-06-20 1999-06-08 Mks Instruments, Inc. Capacitive pressure transducer with improved electrode support
DK0915326T3 (da) * 1997-10-10 2002-03-25 Wika Alexander Wiegand Gmbh Fremgangsmåde til fremstilling af en trykmåletransducer samt trykmåletransducer
US5939639A (en) * 1997-12-04 1999-08-17 Setra Systems, Inc. Pressure transducer housing with barometric pressure isolation
US6029525A (en) * 1998-02-04 2000-02-29 Mks Instruments, Inc. Capacitive based pressure sensor design
US6568274B1 (en) * 1998-02-04 2003-05-27 Mks Instruments, Inc. Capacitive based pressure sensor design
US5948169A (en) * 1998-03-11 1999-09-07 Vanguard International Semiconductor Corporation Apparatus for preventing particle deposition in a capacitance diaphragm gauge
US6209398B1 (en) * 1998-09-18 2001-04-03 Texas Instruments Incorporated Fluid pressure transducer apparatus and method for assembling
US6340929B1 (en) * 1998-11-19 2002-01-22 Pacific Industrial Co., Ltd Transmitter and external controller of tire inflation pressure monitor
US6423949B1 (en) * 1999-05-19 2002-07-23 Applied Materials, Inc. Multi-zone resistive heater
US6105436A (en) * 1999-07-23 2000-08-22 Mks Instruments, Inc. Capacitive pressure transducer with improved electrode support
US6443015B1 (en) * 1999-09-10 2002-09-03 Mks Instruments, Inc. Baffle for a capacitive pressure sensor
US6698294B2 (en) * 2000-09-07 2004-03-02 Vega Grieshaber Kg Pressure cell with temperature sensors and pressure measuring method
US6451159B1 (en) 2000-09-20 2002-09-17 Lam Research Corporation Grounded centering ring for inhibiting polymer build-up on the diaphragm of a manometer
US6772640B1 (en) * 2000-10-10 2004-08-10 Mks Instruments, Inc. Multi-temperature heater for use with pressure transducers
JP4522567B2 (ja) * 2000-10-24 2010-08-11 株式会社プリモ 圧力センサ
US6581471B1 (en) * 2001-11-30 2003-06-24 Mks Instruments, Inc. Output device for pressure transducer
US7252011B2 (en) * 2002-03-11 2007-08-07 Mks Instruments, Inc. Surface area deposition trap
US6588280B1 (en) * 2002-04-22 2003-07-08 Mks Instruments, Inc. Pressure transducer with compensation for thermal transients

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US6993973B2 (en) 2006-02-07
EP1627214B1 (de) 2010-09-29
KR20060012297A (ko) 2006-02-07
EP1627214A1 (de) 2006-02-22
TWI316602B (en) 2009-11-01
US20040226382A1 (en) 2004-11-18
TW200513638A (en) 2005-04-16
JP2007502433A (ja) 2007-02-08
WO2004104543A1 (en) 2004-12-02
JP4607889B2 (ja) 2011-01-05
KR101061408B1 (ko) 2011-09-01

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