DE602005007563D1 - Lithografische Vorrichtung und Verfahren zur Herstellung einer Vorrichtung - Google Patents
Lithografische Vorrichtung und Verfahren zur Herstellung einer VorrichtungInfo
- Publication number
- DE602005007563D1 DE602005007563D1 DE602005007563T DE602005007563T DE602005007563D1 DE 602005007563 D1 DE602005007563 D1 DE 602005007563D1 DE 602005007563 T DE602005007563 T DE 602005007563T DE 602005007563 T DE602005007563 T DE 602005007563T DE 602005007563 D1 DE602005007563 D1 DE 602005007563D1
- Authority
- DE
- Germany
- Prior art keywords
- making
- lithographic apparatus
- lithographic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
- G03F7/70558—Dose control, i.e. achievement of a desired dose
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70275—Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70283—Mask effects on the imaging process
- G03F7/70291—Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
- G03F7/70466—Multiple exposures, e.g. combination of fine and coarse exposures, double patterning or multiple exposures for printing a single feature
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
- G03F7/70475—Stitching, i.e. connecting image fields to produce a device field, the field occupied by a device such as a memory chip, processor chip, CCD, flat panel display
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/020,642 US7126672B2 (en) | 2004-12-27 | 2004-12-27 | Lithographic apparatus and device manufacturing method |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602005007563D1 true DE602005007563D1 (de) | 2008-07-31 |
Family
ID=35892520
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602005007563T Active DE602005007563D1 (de) | 2004-12-27 | 2005-12-15 | Lithografische Vorrichtung und Verfahren zur Herstellung einer Vorrichtung |
Country Status (8)
Country | Link |
---|---|
US (2) | US7126672B2 (de) |
EP (1) | EP1674934B1 (de) |
JP (1) | JP4223036B2 (de) |
KR (1) | KR100734594B1 (de) |
CN (1) | CN100524030C (de) |
DE (1) | DE602005007563D1 (de) |
SG (1) | SG123688A1 (de) |
TW (1) | TW200629000A (de) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9188874B1 (en) | 2011-05-09 | 2015-11-17 | Kenneth C. Johnson | Spot-array imaging system for maskless lithography and parallel confocal microscopy |
US8994920B1 (en) | 2010-05-07 | 2015-03-31 | Kenneth C. Johnson | Optical systems and methods for absorbance modulation |
US9097983B2 (en) * | 2011-05-09 | 2015-08-04 | Kenneth C. Johnson | Scanned-spot-array EUV lithography system |
US7126672B2 (en) * | 2004-12-27 | 2006-10-24 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7317510B2 (en) * | 2004-12-27 | 2008-01-08 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
DE602006002044D1 (de) * | 2005-02-23 | 2008-09-18 | Asml Masktools Bv | Methode und Apparat zur Optimierung der Beleuchtung einer Schicht eines vollständigen Chips |
US7209275B2 (en) * | 2005-06-30 | 2007-04-24 | Asml Holding N.V. | Method and system for maskless lithography real-time pattern rasterization and using computationally coupled mirrors to achieve optimum feature representation |
DE102006019963B4 (de) * | 2006-04-28 | 2023-12-07 | Envisiontec Gmbh | Vorrichtung und Verfahren zur Herstellung eines dreidimensionalen Objekts durch schichtweises Verfestigen eines unter Einwirkung von elektromagnetischer Strahlung verfestigbaren Materials mittels Maskenbelichtung |
US7695950B2 (en) * | 2006-05-17 | 2010-04-13 | E. I. Du Pont De Nemours And Company | Δ5 desaturase and its use in making polyunsaturated fatty acids |
US7707538B2 (en) * | 2007-06-15 | 2010-04-27 | Brion Technologies, Inc. | Multivariable solver for optical proximity correction |
US20090199152A1 (en) * | 2008-02-06 | 2009-08-06 | Micronic Laser Systems Ab | Methods and apparatuses for reducing mura effects in generated patterns |
KR101680754B1 (ko) * | 2010-02-18 | 2016-12-13 | 삼성디스플레이 주식회사 | 광학 헤드의 중첩 거리 결정 방법 및 이를 이용한 디지털 노광 장치 |
JP5709465B2 (ja) * | 2010-10-29 | 2015-04-30 | キヤノン株式会社 | 描画装置、および、物品の製造方法 |
US8660786B2 (en) * | 2011-08-17 | 2014-02-25 | Raytheon Company | Positioning module |
CN103946750B (zh) * | 2011-11-29 | 2019-03-29 | Asml荷兰有限公司 | 光刻设备、器件制造方法和计算机程序 |
NL2009817A (en) | 2011-12-06 | 2013-06-10 | Asml Netherlands Bv | A lithography apparatus, an apparatus for providing setpoint data, a device manufacturing method, a method of calculating setpoint data and a computer program. |
JP5905126B2 (ja) | 2012-01-17 | 2016-04-20 | エーエスエムエル ネザーランズ ビー.ブイ. | リソグラフィ装置及びデバイス製造方法 |
US8584057B2 (en) * | 2012-03-01 | 2013-11-12 | Taiwan Semiconductor Manufacturing Copmany, Ltd. | Non-directional dithering methods |
KR102125088B1 (ko) | 2012-03-26 | 2020-06-19 | 가부시키가이샤 니콘 | 패턴 형성 장치 |
WO2014140047A2 (en) * | 2013-03-12 | 2014-09-18 | Micronic Mydata AB | Method and device for writing photomasks with reduced mura errors |
US9754360B2 (en) | 2014-12-22 | 2017-09-05 | The Research Foundation For The State University Of New York | Determination of spatial distribution of charged particle beams |
JP6723564B2 (ja) * | 2018-02-20 | 2020-07-15 | 株式会社ピーエムティー | 露光方法 |
KR102637105B1 (ko) * | 2018-07-13 | 2024-02-15 | 삼성전자주식회사 | 영상 데이터를 처리하는 방법 및 장치 |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5523193A (en) * | 1988-05-31 | 1996-06-04 | Texas Instruments Incorporated | Method and apparatus for patterning and imaging member |
DE59105735D1 (de) * | 1990-05-02 | 1995-07-20 | Fraunhofer Ges Forschung | Belichtungsvorrichtung. |
US5229872A (en) * | 1992-01-21 | 1993-07-20 | Hughes Aircraft Company | Exposure device including an electrically aligned electronic mask for micropatterning |
US6219015B1 (en) * | 1992-04-28 | 2001-04-17 | The Board Of Directors Of The Leland Stanford, Junior University | Method and apparatus for using an array of grating light valves to produce multicolor optical images |
JP3224041B2 (ja) * | 1992-07-29 | 2001-10-29 | 株式会社ニコン | 露光方法及び装置 |
US5729331A (en) * | 1993-06-30 | 1998-03-17 | Nikon Corporation | Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus |
JP3339149B2 (ja) * | 1993-12-08 | 2002-10-28 | 株式会社ニコン | 走査型露光装置ならびに露光方法 |
US5677703A (en) * | 1995-01-06 | 1997-10-14 | Texas Instruments Incorporated | Data loading circuit for digital micro-mirror device |
US5530482A (en) * | 1995-03-21 | 1996-06-25 | Texas Instruments Incorporated | Pixel data processing for spatial light modulator having staggered pixels |
AU1975197A (en) * | 1996-02-28 | 1997-10-01 | Kenneth C. Johnson | Microlens scanner for microlithography and wide-field confocal microscopy |
JP4126096B2 (ja) | 1997-01-29 | 2008-07-30 | マイクロニック レーザー システムズ アクチボラゲット | 感光性被覆を有する基板上に集束レーザ放射により構造物を製作する方法と装置 |
US6177980B1 (en) * | 1997-02-20 | 2001-01-23 | Kenneth C. Johnson | High-throughput, maskless lithography system |
SE509062C2 (sv) | 1997-02-28 | 1998-11-30 | Micronic Laser Systems Ab | Dataomvandlingsmetod för en laserskrivare med flera strålar för mycket komplexa mikrokolitografiska mönster |
US5982553A (en) * | 1997-03-20 | 1999-11-09 | Silicon Light Machines | Display device incorporating one-dimensional grating light-valve array |
SE9800665D0 (sv) * | 1998-03-02 | 1998-03-02 | Micronic Laser Systems Ab | Improved method for projection printing using a micromirror SLM |
US6720565B2 (en) * | 1999-06-30 | 2004-04-13 | Applied Materials, Inc. | Real-time prediction of and correction of proximity resist heating in raster scan particle beam lithography |
US6811953B2 (en) * | 2000-05-22 | 2004-11-02 | Nikon Corporation | Exposure apparatus, method for manufacturing therof, method for exposing and method for manufacturing microdevice |
WO2003038518A1 (en) * | 2001-10-30 | 2003-05-08 | Pixelligent Technologies Llc | Advanced exposure techniques for programmable lithography |
US6897941B2 (en) * | 2001-11-07 | 2005-05-24 | Applied Materials, Inc. | Optical spot grid array printer |
US6841787B2 (en) * | 2001-11-07 | 2005-01-11 | Applied Materials, Inc. | Maskless photon-electron spot-grid array printer |
JP3563384B2 (ja) * | 2001-11-08 | 2004-09-08 | 大日本スクリーン製造株式会社 | 画像記録装置 |
KR100545297B1 (ko) | 2002-06-12 | 2006-01-24 | 에이에스엠엘 네델란즈 비.브이. | 리소그래피장치 및 디바이스 제조방법 |
US6870554B2 (en) * | 2003-01-07 | 2005-03-22 | Anvik Corporation | Maskless lithography with multiplexed spatial light modulators |
EP1482373A1 (de) * | 2003-05-30 | 2004-12-01 | ASML Netherlands B.V. | Lithographischer Apparat und Verfahren zur Herstellung eines Artikels |
SG125970A1 (en) * | 2003-12-19 | 2006-10-30 | Asml Masktools Bv | Feature optimization using interference mapping lithography |
US7317510B2 (en) * | 2004-12-27 | 2008-01-08 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7126672B2 (en) | 2004-12-27 | 2006-10-24 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
-
2004
- 2004-12-27 US US11/020,642 patent/US7126672B2/en active Active
-
2005
- 2005-12-06 SG SG200507861A patent/SG123688A1/en unknown
- 2005-12-14 TW TW094144281A patent/TW200629000A/zh unknown
- 2005-12-15 DE DE602005007563T patent/DE602005007563D1/de active Active
- 2005-12-15 EP EP05257741A patent/EP1674934B1/de not_active Expired - Fee Related
- 2005-12-23 CN CNB2005100035482A patent/CN100524030C/zh active Active
- 2005-12-26 JP JP2005371835A patent/JP4223036B2/ja active Active
- 2005-12-26 KR KR1020050129720A patent/KR100734594B1/ko active IP Right Grant
-
2006
- 2006-10-12 US US11/546,394 patent/US7239373B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
JP2006186364A (ja) | 2006-07-13 |
EP1674934B1 (de) | 2008-06-18 |
US20060139600A1 (en) | 2006-06-29 |
KR100734594B1 (ko) | 2007-07-02 |
KR20060074870A (ko) | 2006-07-03 |
EP1674934A1 (de) | 2006-06-28 |
JP4223036B2 (ja) | 2009-02-12 |
US20070030470A1 (en) | 2007-02-08 |
SG123688A1 (en) | 2006-07-26 |
US7126672B2 (en) | 2006-10-24 |
TW200629000A (en) | 2006-08-16 |
CN1797207A (zh) | 2006-07-05 |
CN100524030C (zh) | 2009-08-05 |
US7239373B2 (en) | 2007-07-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |