DE602005027589D1 - Zusammengesetzter Verbinder in einem interferometrischen optischen Modulator und Herstellungsverfahren - Google Patents

Zusammengesetzter Verbinder in einem interferometrischen optischen Modulator und Herstellungsverfahren

Info

Publication number
DE602005027589D1
DE602005027589D1 DE602005027589T DE602005027589T DE602005027589D1 DE 602005027589 D1 DE602005027589 D1 DE 602005027589D1 DE 602005027589 T DE602005027589 T DE 602005027589T DE 602005027589 T DE602005027589 T DE 602005027589T DE 602005027589 D1 DE602005027589 D1 DE 602005027589D1
Authority
DE
Germany
Prior art keywords
manufacturing
optical modulator
connector
composite connector
interferometric optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005027589T
Other languages
English (en)
Inventor
Clarence Chui
Jeffrey B Sampsell
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qualcomm MEMS Technologies Inc
Original Assignee
Qualcomm MEMS Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qualcomm MEMS Technologies Inc filed Critical Qualcomm MEMS Technologies Inc
Publication of DE602005027589D1 publication Critical patent/DE602005027589D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • B81B3/007—For controlling stiffness, e.g. ribs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/3433—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices
    • G09G3/3466—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices based on interferometric effect
DE602005027589T 2004-09-27 2005-09-15 Zusammengesetzter Verbinder in einem interferometrischen optischen Modulator und Herstellungsverfahren Active DE602005027589D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US61347504P 2004-09-27 2004-09-27
US11/208,809 US7684104B2 (en) 2004-09-27 2005-08-22 MEMS using filler material and method
PCT/US2005/032647 WO2006036542A1 (en) 2004-09-27 2005-09-15 Interferometric optical modulator using filler material and method

Publications (1)

Publication Number Publication Date
DE602005027589D1 true DE602005027589D1 (de) 2011-06-01

Family

ID=35447261

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005027589T Active DE602005027589D1 (de) 2004-09-27 2005-09-15 Zusammengesetzter Verbinder in einem interferometrischen optischen Modulator und Herstellungsverfahren

Country Status (9)

Country Link
US (1) US7684104B2 (de)
EP (1) EP1805099B1 (de)
JP (1) JP4575452B2 (de)
AT (1) ATE506320T1 (de)
DE (1) DE602005027589D1 (de)
MX (1) MX2007003600A (de)
RU (1) RU2007115891A (de)
TW (1) TWI422859B (de)
WO (1) WO2006036542A1 (de)

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ATE506320T1 (de) 2011-05-15
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RU2007115891A (ru) 2008-11-10
WO2006036542A1 (en) 2006-04-06
US20060066936A1 (en) 2006-03-30
US7684104B2 (en) 2010-03-23
JP4575452B2 (ja) 2010-11-04
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MX2007003600A (es) 2007-05-23
TW200626957A (en) 2006-08-01

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