DE602006004289D1 - Piezoelektrischer Dünnschichtresonator und Filter - Google Patents
Piezoelektrischer Dünnschichtresonator und FilterInfo
- Publication number
- DE602006004289D1 DE602006004289D1 DE200660004289 DE602006004289T DE602006004289D1 DE 602006004289 D1 DE602006004289 D1 DE 602006004289D1 DE 200660004289 DE200660004289 DE 200660004289 DE 602006004289 T DE602006004289 T DE 602006004289T DE 602006004289 D1 DE602006004289 D1 DE 602006004289D1
- Authority
- DE
- Germany
- Prior art keywords
- filter
- piezoelectric thin
- film resonator
- resonator
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000010409 thin film Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezo-electric or electrostrictive material
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
- H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
- H03H9/02133—Means for compensation or elimination of undesirable effects of stress
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/173—Air-gaps
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezo-electric or electrostrictive material
- H03H9/56—Monolithic crystal filters
- H03H9/566—Electric coupling means therefor
- H03H9/568—Electric coupling means therefor consisting of a ladder configuration
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H2003/021—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks the resonators or networks being of the air-gap type
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005312094A JP4707533B2 (ja) | 2005-10-27 | 2005-10-27 | 圧電薄膜共振器およびフィルタ |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE602006004289D1 true DE602006004289D1 (de) | 2009-01-29 |
Family
ID=37682623
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE200660004289 Active DE602006004289D1 (de) | 2005-10-27 | 2006-10-24 | Piezoelektrischer Dünnschichtresonator und Filter |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7482738B2 (de) |
| EP (1) | EP1783903B1 (de) |
| JP (1) | JP4707533B2 (de) |
| KR (1) | KR100819669B1 (de) |
| CN (1) | CN100576734C (de) |
| DE (1) | DE602006004289D1 (de) |
Families Citing this family (103)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020082621A1 (en) | 2000-09-22 | 2002-06-27 | Schurr Marc O. | Methods and devices for folding and securing tissue |
| ES2268384T3 (es) | 2002-06-17 | 2007-03-16 | Tyco Healthcare Group Lp | Estructuras anulares de soporte. |
| JP2005073175A (ja) * | 2003-08-27 | 2005-03-17 | Fujitsu Media Device Kk | 圧電薄膜共振子及びその製造方法 |
| US7938307B2 (en) | 2004-10-18 | 2011-05-10 | Tyco Healthcare Group Lp | Support structures and methods of using the same |
| US7845536B2 (en) | 2004-10-18 | 2010-12-07 | Tyco Healthcare Group Lp | Annular adhesive structure |
| US9364229B2 (en) | 2005-03-15 | 2016-06-14 | Covidien Lp | Circular anastomosis structures |
| JP4968900B2 (ja) * | 2006-10-17 | 2012-07-04 | 太陽誘電株式会社 | ラダー型フィルタの製造方法 |
| ES2627615T3 (es) | 2006-10-26 | 2017-07-28 | Covidien Lp | Dispositivo que utiliza aleaciones con memoria de forma para conexión de contrafuerte |
| US7845533B2 (en) | 2007-06-22 | 2010-12-07 | Tyco Healthcare Group Lp | Detachable buttress material retention systems for use with a surgical stapling device |
| CA2680148C (en) | 2007-03-06 | 2015-09-01 | Tyco Healthcare Group Lp | Surgical stapling apparatus |
| JP5080858B2 (ja) * | 2007-05-17 | 2012-11-21 | 太陽誘電株式会社 | 圧電薄膜共振器およびフィルタ |
| US8038045B2 (en) | 2007-05-25 | 2011-10-18 | Tyco Healthcare Group Lp | Staple buttress retention system |
| US7665646B2 (en) | 2007-06-18 | 2010-02-23 | Tyco Healthcare Group Lp | Interlocking buttress material retention system |
| US8062330B2 (en) | 2007-06-27 | 2011-11-22 | Tyco Healthcare Group Lp | Buttress and surgical stapling apparatus |
| JP5279068B2 (ja) * | 2008-02-15 | 2013-09-04 | 太陽誘電株式会社 | 圧電薄膜共振子、フィルタ、通信モジュール、および通信装置 |
| JP5191762B2 (ja) * | 2008-03-06 | 2013-05-08 | 太陽誘電株式会社 | 圧電薄膜共振器、フィルタ、および通信装置 |
| JP5226409B2 (ja) * | 2008-07-17 | 2013-07-03 | 太陽誘電株式会社 | 共振デバイス、通信モジュール、通信装置、共振デバイスの製造方法 |
| US20100147921A1 (en) | 2008-12-16 | 2010-06-17 | Lee Olson | Surgical Apparatus Including Surgical Buttress |
| JP2010205921A (ja) * | 2009-03-03 | 2010-09-16 | Olympus Corp | 半導体装置および半導体装置の製造方法 |
| US7967179B2 (en) | 2009-03-31 | 2011-06-28 | Tyco Healthcare Group Lp | Center cinch and release of buttress material |
| US8365972B2 (en) | 2009-03-31 | 2013-02-05 | Covidien Lp | Surgical stapling apparatus |
| US9486215B2 (en) | 2009-03-31 | 2016-11-08 | Covidien Lp | Surgical stapling apparatus |
| US8016178B2 (en) | 2009-03-31 | 2011-09-13 | Tyco Healthcare Group Lp | Surgical stapling apparatus |
| US9693772B2 (en) | 2009-10-15 | 2017-07-04 | Covidien Lp | Staple line reinforcement for anvil and cartridge |
| US8157151B2 (en) | 2009-10-15 | 2012-04-17 | Tyco Healthcare Group Lp | Staple line reinforcement for anvil and cartridge |
| US10842485B2 (en) | 2009-10-15 | 2020-11-24 | Covidien Lp | Brachytherapy buttress |
| US10293553B2 (en) | 2009-10-15 | 2019-05-21 | Covidien Lp | Buttress brachytherapy and integrated staple line markers for margin identification |
| US20150231409A1 (en) | 2009-10-15 | 2015-08-20 | Covidien Lp | Buttress brachytherapy and integrated staple line markers for margin identification |
| US9610080B2 (en) | 2009-10-15 | 2017-04-04 | Covidien Lp | Staple line reinforcement for anvil and cartridge |
| US8479968B2 (en) | 2011-03-10 | 2013-07-09 | Covidien Lp | Surgical instrument buttress attachment |
| US8789737B2 (en) | 2011-04-27 | 2014-07-29 | Covidien Lp | Circular stapler and staple line reinforcement material |
| US8584920B2 (en) | 2011-11-04 | 2013-11-19 | Covidien Lp | Surgical stapling apparatus including releasable buttress |
| US9351731B2 (en) | 2011-12-14 | 2016-05-31 | Covidien Lp | Surgical stapling apparatus including releasable surgical buttress |
| US9113885B2 (en) | 2011-12-14 | 2015-08-25 | Covidien Lp | Buttress assembly for use with surgical stapling device |
| US8967448B2 (en) | 2011-12-14 | 2015-03-03 | Covidien Lp | Surgical stapling apparatus including buttress attachment via tabs |
| US9237892B2 (en) | 2011-12-14 | 2016-01-19 | Covidien Lp | Buttress attachment to the cartridge surface |
| US9010609B2 (en) | 2012-01-26 | 2015-04-21 | Covidien Lp | Circular stapler including buttress |
| US9010612B2 (en) | 2012-01-26 | 2015-04-21 | Covidien Lp | Buttress support design for EEA anvil |
| US9326773B2 (en) | 2012-01-26 | 2016-05-03 | Covidien Lp | Surgical device including buttress material |
| US9931116B2 (en) | 2012-02-10 | 2018-04-03 | Covidien Lp | Buttress composition |
| US8820606B2 (en) | 2012-02-24 | 2014-09-02 | Covidien Lp | Buttress retention system for linear endostaplers |
| US9572576B2 (en) | 2012-07-18 | 2017-02-21 | Covidien Lp | Surgical apparatus including surgical buttress |
| US20140048580A1 (en) | 2012-08-20 | 2014-02-20 | Covidien Lp | Buttress attachment features for surgical stapling apparatus |
| US9161753B2 (en) | 2012-10-10 | 2015-10-20 | Covidien Lp | Buttress fixation for a circular stapler |
| US9192384B2 (en) | 2012-11-09 | 2015-11-24 | Covidien Lp | Recessed groove for better suture retention |
| US20140131418A1 (en) | 2012-11-09 | 2014-05-15 | Covidien Lp | Surgical Stapling Apparatus Including Buttress Attachment |
| US9295466B2 (en) | 2012-11-30 | 2016-03-29 | Covidien Lp | Surgical apparatus including surgical buttress |
| US9681936B2 (en) | 2012-11-30 | 2017-06-20 | Covidien Lp | Multi-layer porous film material |
| US9402627B2 (en) | 2012-12-13 | 2016-08-02 | Covidien Lp | Folded buttress for use with a surgical apparatus |
| US9204881B2 (en) | 2013-01-11 | 2015-12-08 | Covidien Lp | Buttress retainer for EEA anvil |
| US9433420B2 (en) | 2013-01-23 | 2016-09-06 | Covidien Lp | Surgical apparatus including surgical buttress |
| US9414839B2 (en) | 2013-02-04 | 2016-08-16 | Covidien Lp | Buttress attachment for circular stapling device |
| US9192383B2 (en) | 2013-02-04 | 2015-11-24 | Covidien Lp | Circular stapling device including buttress material |
| US9504470B2 (en) | 2013-02-25 | 2016-11-29 | Covidien Lp | Circular stapling device with buttress |
| US20140239047A1 (en) | 2013-02-28 | 2014-08-28 | Covidien Lp | Adherence concepts for non-woven absorbable felt buttresses |
| US9782173B2 (en) | 2013-03-07 | 2017-10-10 | Covidien Lp | Circular stapling device including buttress release mechanism |
| US9655620B2 (en) | 2013-10-28 | 2017-05-23 | Covidien Lp | Circular surgical stapling device including buttress material |
| JP6333540B2 (ja) * | 2013-11-11 | 2018-05-30 | 太陽誘電株式会社 | 圧電薄膜共振子、フィルタ、及び分波器 |
| US9844378B2 (en) | 2014-04-29 | 2017-12-19 | Covidien Lp | Surgical stapling apparatus and methods of adhering a surgical buttress thereto |
| US10835216B2 (en) | 2014-12-24 | 2020-11-17 | Covidien Lp | Spinneret for manufacture of melt blown nonwoven fabric |
| US10470767B2 (en) | 2015-02-10 | 2019-11-12 | Covidien Lp | Surgical stapling instrument having ultrasonic energy delivery |
| US11020578B2 (en) | 2015-04-10 | 2021-06-01 | Covidien Lp | Surgical stapler with integrated bladder |
| JP6368298B2 (ja) | 2015-12-14 | 2018-08-01 | 太陽誘電株式会社 | 圧電薄膜共振器、フィルタおよびデュプレクサ |
| US10959731B2 (en) | 2016-06-14 | 2021-03-30 | Covidien Lp | Buttress attachment for surgical stapling instrument |
| US11026686B2 (en) | 2016-11-08 | 2021-06-08 | Covidien Lp | Structure for attaching buttress to anvil and/or cartridge of surgical stapling instrument |
| US10874768B2 (en) | 2017-01-20 | 2020-12-29 | Covidien Lp | Drug eluting medical device |
| US10925607B2 (en) | 2017-02-28 | 2021-02-23 | Covidien Lp | Surgical stapling apparatus with staple sheath |
| US10368868B2 (en) | 2017-03-09 | 2019-08-06 | Covidien Lp | Structure for attaching buttress material to anvil and cartridge of surgical stapling instrument |
| US11096610B2 (en) | 2017-03-28 | 2021-08-24 | Covidien Lp | Surgical implants including sensing fibers |
| US10849625B2 (en) | 2017-08-07 | 2020-12-01 | Covidien Lp | Surgical buttress retention systems for surgical stapling apparatus |
| US10945733B2 (en) | 2017-08-23 | 2021-03-16 | Covidien Lp | Surgical buttress reload and tip attachment assemblies for surgical stapling apparatus |
| US11141151B2 (en) | 2017-12-08 | 2021-10-12 | Covidien Lp | Surgical buttress for circular stapling |
| US11065000B2 (en) | 2018-02-22 | 2021-07-20 | Covidien Lp | Surgical buttresses for surgical stapling apparatus |
| CN108512520B (zh) * | 2018-02-27 | 2022-04-29 | 苏州汉天下电子有限公司 | 体声波谐振器与电容器的单片集成结构及其制造方法、滤波器、双工器以及射频通信模块 |
| US10758237B2 (en) | 2018-04-30 | 2020-09-01 | Covidien Lp | Circular stapling apparatus with pinned buttress |
| US11432818B2 (en) | 2018-05-09 | 2022-09-06 | Covidien Lp | Surgical buttress assemblies |
| US11284896B2 (en) | 2018-05-09 | 2022-03-29 | Covidien Lp | Surgical buttress loading and attaching/detaching assemblies |
| US11219460B2 (en) | 2018-07-02 | 2022-01-11 | Covidien Lp | Surgical stapling apparatus with anvil buttress |
| US10806459B2 (en) | 2018-09-14 | 2020-10-20 | Covidien Lp | Drug patterned reinforcement material for circular anastomosis |
| KR20200031541A (ko) * | 2018-09-14 | 2020-03-24 | 스카이워크스 솔루션즈, 인코포레이티드 | 희생 층 에칭을 위한 릴리스 포트들의 위치들 |
| US10952729B2 (en) | 2018-10-03 | 2021-03-23 | Covidien Lp | Universal linear buttress retention/release assemblies and methods |
| CN111010102B (zh) * | 2019-03-18 | 2023-12-15 | 天津大学 | 考虑形状的薄膜封装的mems器件组件及电子设备 |
| CN110868177B (zh) * | 2019-04-23 | 2023-08-15 | 中国电子科技集团公司第十三研究所 | 谐振器和滤波器 |
| US11730472B2 (en) | 2019-04-25 | 2023-08-22 | Covidien Lp | Surgical system and surgical loading units thereof |
| US11478245B2 (en) | 2019-05-08 | 2022-10-25 | Covidien Lp | Surgical stapling device |
| US11596403B2 (en) | 2019-05-08 | 2023-03-07 | Covidien Lp | Surgical stapling device |
| US11571208B2 (en) | 2019-10-11 | 2023-02-07 | Covidien Lp | Surgical buttress loading units |
| CN111082776B (zh) * | 2019-12-11 | 2021-06-01 | 诺思(天津)微系统有限责任公司 | 电极具有空隙层的体声波谐振器、滤波器及电子设备 |
| US11523824B2 (en) | 2019-12-12 | 2022-12-13 | Covidien Lp | Anvil buttress loading for a surgical stapling apparatus |
| CN111262542B (zh) * | 2020-02-27 | 2022-03-25 | 见闻录(浙江)半导体有限公司 | 一种具有散热结构的体声波谐振器及制造工艺 |
| US11547407B2 (en) | 2020-03-19 | 2023-01-10 | Covidien Lp | Staple line reinforcement for surgical stapling apparatus |
| US11337699B2 (en) | 2020-04-28 | 2022-05-24 | Covidien Lp | Magnesium infused surgical buttress for surgical stapler |
| US11707276B2 (en) | 2020-09-08 | 2023-07-25 | Covidien Lp | Surgical buttress assemblies and techniques for surgical stapling |
| US11399833B2 (en) | 2020-10-19 | 2022-08-02 | Covidien Lp | Anvil buttress attachment for surgical stapling apparatus |
| US11534170B2 (en) | 2021-01-04 | 2022-12-27 | Covidien Lp | Anvil buttress attachment for surgical stapling apparatus |
| US11510670B1 (en) | 2021-06-23 | 2022-11-29 | Covidien Lp | Buttress attachment for surgical stapling apparatus |
| US11596399B2 (en) | 2021-06-23 | 2023-03-07 | Covidien Lp | Anvil buttress attachment for surgical stapling apparatus |
| US11672538B2 (en) | 2021-06-24 | 2023-06-13 | Covidien Lp | Surgical stapling device including a buttress retention assembly |
| US11678879B2 (en) | 2021-07-01 | 2023-06-20 | Covidien Lp | Buttress attachment for surgical stapling apparatus |
| US11684368B2 (en) | 2021-07-14 | 2023-06-27 | Covidien Lp | Surgical stapling device including a buttress retention assembly |
| US11801052B2 (en) | 2021-08-30 | 2023-10-31 | Covidien Lp | Assemblies for surgical stapling instruments |
| US11751875B2 (en) | 2021-10-13 | 2023-09-12 | Coviden Lp | Surgical buttress attachment assemblies for surgical stapling apparatus |
| US11806017B2 (en) | 2021-11-23 | 2023-11-07 | Covidien Lp | Anvil buttress loading system for surgical stapling apparatus |
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|---|---|---|---|---|
| DE3320441A1 (de) | 1983-06-06 | 1984-12-06 | Siemens AG, 1000 Berlin und 8000 München | Mit fluessigkeitstroepfchen arbeitendes schreibgeraet mit an beiden enden starr mit einer duesenplatte verbundenen stabfoermigen piezoelektrischen wandlern |
| JPS60189307A (ja) | 1984-03-09 | 1985-09-26 | Toshiba Corp | 圧電薄膜共振器およびその製造方法 |
| JPH0688218A (ja) * | 1990-11-15 | 1994-03-29 | Tosoh Corp | 酸化亜鉛系焼結体及びその製造方法並びに用途 |
| US6060818A (en) | 1998-06-02 | 2000-05-09 | Hewlett-Packard Company | SBAR structures and method of fabrication of SBAR.FBAR film processing techniques for the manufacturing of SBAR/BAR filters |
| US6215375B1 (en) * | 1999-03-30 | 2001-04-10 | Agilent Technologies, Inc. | Bulk acoustic wave resonator with improved lateral mode suppression |
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| US6424237B1 (en) * | 2000-12-21 | 2002-07-23 | Agilent Technologies, Inc. | Bulk acoustic resonator perimeter reflection system |
| KR100518103B1 (ko) | 2001-08-10 | 2005-10-04 | 쌍신전자통신주식회사 | 압전박막 공진기 및 그 제조방법 |
| CN1168208C (zh) | 2001-09-10 | 2004-09-22 | 华邦电子股份有限公司 | 高频薄膜本体滤波器的制法及其装置 |
| JP3954395B2 (ja) * | 2001-10-26 | 2007-08-08 | 富士通株式会社 | 圧電薄膜共振子、フィルタ、および圧電薄膜共振子の製造方法 |
| KR20030039446A (ko) * | 2001-11-13 | 2003-05-22 | 삼성전자주식회사 | Ｆｂａｒ 제조방법 |
| JP3854212B2 (ja) * | 2002-03-29 | 2006-12-06 | 株式会社東芝 | 高周波フィルタ |
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| JP4111139B2 (ja) * | 2003-06-03 | 2008-07-02 | 株式会社村田製作所 | エネルギー閉じ込め型圧電共振部品 |
| JP2005045694A (ja) * | 2003-07-25 | 2005-02-17 | Sony Corp | 薄膜バルク音響共振子およびその製造方法 |
| JP4024741B2 (ja) | 2003-10-20 | 2007-12-19 | 富士通メディアデバイス株式会社 | 圧電薄膜共振子及びフィルタ |
| EP1533896B1 (de) * | 2003-11-20 | 2011-11-02 | Panasonic Corporation | Piezoelektrisches Element als solches sowie in Zusammensetzung, in einem Filter, in einem Duplexer oder in Kommunikationsvorrichtung |
| JP4149416B2 (ja) * | 2004-05-31 | 2008-09-10 | 富士通メディアデバイス株式会社 | 圧電薄膜共振子およびフィルタならびにそれらの製造方法 |
| JP4149444B2 (ja) * | 2005-01-12 | 2008-09-10 | 富士通メディアデバイス株式会社 | 圧電薄膜共振子及びこれを用いたフィルタ |
-
2005
- 2005-10-27 JP JP2005312094A patent/JP4707533B2/ja active Active
-
2006
- 2006-10-24 EP EP20060122886 patent/EP1783903B1/de not_active Expired - Fee Related
- 2006-10-24 DE DE200660004289 patent/DE602006004289D1/de active Active
- 2006-10-26 US US11/586,731 patent/US7482738B2/en active Active
- 2006-10-26 KR KR20060104353A patent/KR100819669B1/ko active IP Right Grant
- 2006-10-27 CN CN200610137474A patent/CN100576734C/zh active Active
Also Published As
| Publication number | Publication date |
|---|---|
| KR100819669B1 (ko) | 2008-04-04 |
| KR20070045945A (ko) | 2007-05-02 |
| JP2007124166A (ja) | 2007-05-17 |
| US7482738B2 (en) | 2009-01-27 |
| JP4707533B2 (ja) | 2011-06-22 |
| EP1783903A3 (de) | 2007-11-07 |
| CN100576734C (zh) | 2009-12-30 |
| CN1956324A (zh) | 2007-05-02 |
| EP1783903B1 (de) | 2008-12-17 |
| US20070096597A1 (en) | 2007-05-03 |
| EP1783903A2 (de) | 2007-05-09 |
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| 8327 | Change in the person/name/address of the patent owner |
Owner name: TAIYO YUDEN CO., LTD., TOKIO/TOKYO, JP |