DE60223193D1 - Herstellung von intergrierten fluidischen Vorrichtungen - Google Patents

Herstellung von intergrierten fluidischen Vorrichtungen

Info

Publication number
DE60223193D1
DE60223193D1 DE60223193T DE60223193T DE60223193D1 DE 60223193 D1 DE60223193 D1 DE 60223193D1 DE 60223193 T DE60223193 T DE 60223193T DE 60223193 T DE60223193 T DE 60223193T DE 60223193 D1 DE60223193 D1 DE 60223193D1
Authority
DE
Germany
Prior art keywords
layer
etchable material
opening
support layer
production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60223193T
Other languages
English (en)
Other versions
DE60223193T2 (de
Inventor
Luc Quellet
Heather Tyler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teledyne Digital Imaging Inc
Original Assignee
Dalsa Semiconductor Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dalsa Semiconductor Inc filed Critical Dalsa Semiconductor Inc
Publication of DE60223193D1 publication Critical patent/DE60223193D1/de
Application granted granted Critical
Publication of DE60223193T2 publication Critical patent/DE60223193T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/12—Specific details about manufacturing devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/06—Auxiliary integrated devices, integrated components
    • B01L2300/0627—Sensor or part of a sensor is integrated
    • B01L2300/0645—Electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
    • B01L2400/0415—Moving fluids with specific forces or mechanical means specific forces electrical forces, e.g. electrokinetic
DE60223193T 2001-04-27 2002-04-29 Herstellung von integrierten fluidischen Vorrichtungen Expired - Lifetime DE60223193T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/842,836 US6602791B2 (en) 2001-04-27 2001-04-27 Manufacture of integrated fluidic devices
US842836 2001-04-27

Publications (2)

Publication Number Publication Date
DE60223193D1 true DE60223193D1 (de) 2007-12-13
DE60223193T2 DE60223193T2 (de) 2008-08-14

Family

ID=25288361

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60223193T Expired - Lifetime DE60223193T2 (de) 2001-04-27 2002-04-29 Herstellung von integrierten fluidischen Vorrichtungen

Country Status (5)

Country Link
US (1) US6602791B2 (de)
EP (1) EP1254717B1 (de)
JP (1) JP2003039396A (de)
AT (1) ATE376881T1 (de)
DE (1) DE60223193T2 (de)

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JP5233302B2 (ja) * 2008-02-07 2013-07-10 セイコーエプソン株式会社 電子装置、共振子、及び電子装置の製造方法
US7733552B2 (en) 2007-03-21 2010-06-08 Qualcomm Mems Technologies, Inc MEMS cavity-coating layers and methods
US7719752B2 (en) 2007-05-11 2010-05-18 Qualcomm Mems Technologies, Inc. MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same
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US8310016B2 (en) * 2007-07-17 2012-11-13 Kwj Engineering, Inc. Apparatus and method for microfabricated multi-dimensional sensors and sensing systems
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US9312370B2 (en) * 2014-06-10 2016-04-12 Globalfoundries Inc. Bipolar transistor with extrinsic base region and methods of fabrication
JP6514776B2 (ja) * 2014-12-08 2019-05-15 バークレー ライツ，インコーポレイテッド 横方向／垂直方向トランジスタ構造を含むマイクロ流体デバイスならびにそれを作製および使用するプロセス
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TWI644102B (zh) * 2017-12-18 2018-12-11 友達光電股份有限公司 微流體感測元件及其製作方法
CN110961167B (zh) * 2018-09-29 2022-04-01 中国科学院微电子研究所 一种微流道网络芯片
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Also Published As

Publication number Publication date
US20020160561A1 (en) 2002-10-31
EP1254717A1 (de) 2002-11-06
US6602791B2 (en) 2003-08-05
ATE376881T1 (de) 2007-11-15
DE60223193T2 (de) 2008-08-14
JP2003039396A (ja) 2003-02-13
EP1254717B1 (de) 2007-10-31

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