DE60314510D1 - Mikromechanischer schalter, herstellungsverfahren und anwendung des mikromechanischen schalters - Google Patents

Mikromechanischer schalter, herstellungsverfahren und anwendung des mikromechanischen schalters

Info

Publication number
DE60314510D1
DE60314510D1 DE60314510T DE60314510T DE60314510D1 DE 60314510 D1 DE60314510 D1 DE 60314510D1 DE 60314510 T DE60314510 T DE 60314510T DE 60314510 T DE60314510 T DE 60314510T DE 60314510 D1 DE60314510 D1 DE 60314510D1
Authority
DE
Germany
Prior art keywords
dielectric layer
membrane
switch
micromechanical switch
manufacture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60314510T
Other languages
English (en)
Other versions
DE60314510T2 (de
Inventor
Brandon W Pillans
David I Forehand
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Co
Original Assignee
Raytheon Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Raytheon Co filed Critical Raytheon Co
Application granted granted Critical
Publication of DE60314510D1 publication Critical patent/DE60314510D1/de
Publication of DE60314510T2 publication Critical patent/DE60314510T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
    • B81B3/0008—Structures for avoiding electrostatic attraction, e.g. avoiding charge accumulation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
    • B81B3/001—Structures having a reduced contact area, e.g. with bumps or with a textured surface
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/01—Switches
    • B81B2201/012—Switches characterised by the shape
    • B81B2201/014—Switches characterised by the shape having a cantilever fixed on one side connected to one or more dimples
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0118—Cantilevers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/04—Electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/06—Contacts characterised by the shape or structure of the contact-making surface, e.g. grooved
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0018—Special provisions for avoiding charge trapping, e.g. insulation layer between actuating electrodes being permanently polarised by charge trapping so that actuating or release voltage is altered
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0072—Electrostatic relays; Electro-adhesion relays making use of micromechanics with stoppers or protrusions for maintaining a gap, reducing the contact area or for preventing stiction between the movable and the fixed electrode in the attracted position
DE60314510T 2002-05-07 2003-04-30 Mikromechanischer schalter, herstellungsverfahren und anwendung des mikromechanischen schalters Expired - Lifetime DE60314510T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US140658 1993-10-21
US10/140,658 US6791441B2 (en) 2002-05-07 2002-05-07 Micro-electro-mechanical switch, and methods of making and using it
PCT/US2003/013317 WO2003096368A1 (en) 2002-05-07 2003-04-30 Micro-electro-mechanical switch, and methods of making and using it.

Publications (2)

Publication Number Publication Date
DE60314510D1 true DE60314510D1 (de) 2007-08-02
DE60314510T2 DE60314510T2 (de) 2008-02-21

Family

ID=29418391

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60314510T Expired - Lifetime DE60314510T2 (de) 2002-05-07 2003-04-30 Mikromechanischer schalter, herstellungsverfahren und anwendung des mikromechanischen schalters

Country Status (6)

Country Link
US (2) US6791441B2 (de)
EP (1) EP1502273B1 (de)
AT (1) ATE365372T1 (de)
AU (1) AU2003223770A1 (de)
DE (1) DE60314510T2 (de)
WO (1) WO2003096368A1 (de)

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Also Published As

Publication number Publication date
AU2003223770A1 (en) 2003-11-11
US7002441B2 (en) 2006-02-21
EP1502273A1 (de) 2005-02-02
US20040124073A1 (en) 2004-07-01
DE60314510T2 (de) 2008-02-21
ATE365372T1 (de) 2007-07-15
US20050012577A1 (en) 2005-01-20
EP1502273B1 (de) 2007-06-20
WO2003096368A1 (en) 2003-11-20
US6791441B2 (en) 2004-09-14

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