DE60314715D1 - Piezoelektrischer resonierender Filter und Duplexer - Google Patents

Piezoelektrischer resonierender Filter und Duplexer

Info

Publication number
DE60314715D1
DE60314715D1 DE60314715T DE60314715T DE60314715D1 DE 60314715 D1 DE60314715 D1 DE 60314715D1 DE 60314715 T DE60314715 T DE 60314715T DE 60314715 T DE60314715 T DE 60314715T DE 60314715 D1 DE60314715 D1 DE 60314715D1
Authority
DE
Germany
Prior art keywords
duplexer
piezoelectric resonating
resonating filter
filter
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60314715T
Other languages
English (en)
Other versions
DE60314715T2 (de
Inventor
Eiju Komuro
Hisatoshi Saitou
Takao Noguchi
Hidenori Abe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Publication of DE60314715D1 publication Critical patent/DE60314715D1/de
Application granted granted Critical
Publication of DE60314715T2 publication Critical patent/DE60314715T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/175—Acoustic mirrors
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/02102—Means for compensation or elimination of undesirable effects of temperature influence
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/02149—Means for compensation or elimination of undesirable effects of ageing changes of characteristics, e.g. electro-acousto-migration
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/174—Membranes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezo-electric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/60—Electric coupling means therefor
    • H03H9/605—Electric coupling means therefor consisting of a ladder configuration
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/70—Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
    • H03H9/703—Networks using bulk acoustic wave devices
    • H03H9/706—Duplexers
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • H03H2003/0407—Temperature coefficient

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
DE60314715T 2002-12-11 2003-12-10 Piezoelektrischer resonierender Filter und Duplexer Expired - Lifetime DE60314715T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002359027A JP3889351B2 (ja) 2002-12-11 2002-12-11 デュプレクサ
JP2002359027 2002-12-11

Publications (2)

Publication Number Publication Date
DE60314715D1 true DE60314715D1 (de) 2007-08-16
DE60314715T2 DE60314715T2 (de) 2007-10-18

Family

ID=32463451

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60314715T Expired - Lifetime DE60314715T2 (de) 2002-12-11 2003-12-10 Piezoelektrischer resonierender Filter und Duplexer

Country Status (7)

Country Link
US (1) US6989723B2 (de)
EP (1) EP1434346B1 (de)
JP (1) JP3889351B2 (de)
KR (1) KR100756096B1 (de)
CN (1) CN100571030C (de)
DE (1) DE60314715T2 (de)
TW (1) TWI244259B (de)

Families Citing this family (112)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6261754A (ja) * 1985-09-11 1987-03-18 Asahi Malleable Iron Co Ltd 複合中子鋳型を用いた鋳造法
US7275292B2 (en) 2003-03-07 2007-10-02 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Method for fabricating an acoustical resonator on a substrate
US7242270B2 (en) * 2003-10-30 2007-07-10 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Decoupled stacked bulk acoustic resonator-based band-pass filter
US7019605B2 (en) * 2003-10-30 2006-03-28 Larson Iii John D Stacked bulk acoustic resonator band-pass filter with controllable pass bandwidth
US7358831B2 (en) * 2003-10-30 2008-04-15 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator (FBAR) devices with simplified packaging
EP1528677B1 (de) * 2003-10-30 2006-05-10 Agilent Technologies, Inc. Akustisch gekoppelter Dünnschicht-Transformator mit zwei piezoelektrischen Elementen, welche entgegengesetzte C-Axen Orientierung besitzten
US6946928B2 (en) * 2003-10-30 2005-09-20 Agilent Technologies, Inc. Thin-film acoustically-coupled transformer
US7391285B2 (en) * 2003-10-30 2008-06-24 Avago Technologies Wireless Ip Pte Ltd Film acoustically-coupled transformer
GB0402007D0 (en) * 2004-01-30 2004-03-03 Smiths Group Plc Acoustic devices and fluid-gauging
JP4259576B2 (ja) * 2004-03-12 2009-04-30 株式会社村田製作所 分波器及び弾性表面波フィルタ
US7446629B2 (en) * 2004-08-04 2008-11-04 Matsushita Electric Industrial Co., Ltd. Antenna duplexer, and RF module and communication apparatus using the same
WO2006018788A1 (en) * 2004-08-20 2006-02-23 Philips Intellectual Property & Standards Gmbh Narrow band bulk acoustic wave filter
US7388454B2 (en) * 2004-10-01 2008-06-17 Avago Technologies Wireless Ip Pte Ltd Acoustic resonator performance enhancement using alternating frame structure
US8981876B2 (en) * 2004-11-15 2015-03-17 Avago Technologies General Ip (Singapore) Pte. Ltd. Piezoelectric resonator structures and electrical filters having frame elements
US7202560B2 (en) 2004-12-15 2007-04-10 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Wafer bonding of micro-electro mechanical systems to active circuitry
US7791434B2 (en) 2004-12-22 2010-09-07 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic resonator performance enhancement using selective metal etch and having a trench in the piezoelectric
DE102004062312B3 (de) * 2004-12-23 2006-06-01 Infineon Technologies Ag Piezoelektrischer Resonator mit verbesserter Temperaturkompensation und Verfahren zum Herstellen desselben
US7427819B2 (en) * 2005-03-04 2008-09-23 Avago Wireless Ip Pte Ltd Film-bulk acoustic wave resonator with motion plate and method
US7369013B2 (en) * 2005-04-06 2008-05-06 Avago Technologies Wireless Ip Pte Ltd Acoustic resonator performance enhancement using filled recessed region
US7436269B2 (en) * 2005-04-18 2008-10-14 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustically coupled resonators and method of making the same
US7934884B2 (en) * 2005-04-27 2011-05-03 Lockhart Industries, Inc. Ring binder cover
US7443269B2 (en) 2005-07-27 2008-10-28 Avago Technologies General Ip (Singapore) Pte. Ltd. Method and apparatus for selectively blocking radio frequency (RF) signals in a radio frequency (RF) switching circuit
US7868522B2 (en) * 2005-09-09 2011-01-11 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Adjusted frequency temperature coefficient resonator
US7391286B2 (en) * 2005-10-06 2008-06-24 Avago Wireless Ip Pte Ltd Impedance matching and parasitic capacitor resonance of FBAR resonators and coupled filters
US7525398B2 (en) * 2005-10-18 2009-04-28 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustically communicating data signals across an electrical isolation barrier
US7675390B2 (en) * 2005-10-18 2010-03-09 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic galvanic isolator incorporating single decoupled stacked bulk acoustic resonator
US7423503B2 (en) * 2005-10-18 2008-09-09 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic galvanic isolator incorporating film acoustically-coupled transformer
US7737807B2 (en) 2005-10-18 2010-06-15 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic galvanic isolator incorporating series-connected decoupled stacked bulk acoustic resonators
US7463499B2 (en) * 2005-10-31 2008-12-09 Avago Technologies General Ip (Singapore) Pte Ltd. AC-DC power converter
US7561009B2 (en) * 2005-11-30 2009-07-14 Avago Technologies General Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator (FBAR) devices with temperature compensation
US7612636B2 (en) * 2006-01-30 2009-11-03 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Impedance transforming bulk acoustic wave baluns
US20070210724A1 (en) * 2006-03-09 2007-09-13 Mark Unkrich Power adapter and DC-DC converter having acoustic transformer
US7746677B2 (en) 2006-03-09 2010-06-29 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. AC-DC converter circuit and power supply
US7479685B2 (en) * 2006-03-10 2009-01-20 Avago Technologies General Ip (Singapore) Pte. Ltd. Electronic device on substrate with cavity and mitigated parasitic leakage path
US7508286B2 (en) * 2006-09-28 2009-03-24 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. HBAR oscillator and method of manufacture
US20080202239A1 (en) * 2007-02-28 2008-08-28 Fazzio R Shane Piezoelectric acceleration sensor
US7903592B2 (en) * 2007-03-02 2011-03-08 Alcatel Lucent Systems and methods of efficient band amplification
US8027699B2 (en) * 2007-03-02 2011-09-27 Alcatel Lucent Systems and methods of band amplification with a shared amplifier
ES2308938B1 (es) * 2007-06-20 2010-01-08 Indiba, S.A. "circuito para dispositivos de radiofrecuencia aplicables a los tejidos vivos y dispositivo que lo contiene".
US20090079514A1 (en) * 2007-09-24 2009-03-26 Tiberiu Jamneala Hybrid acoustic resonator-based filters
US7791435B2 (en) * 2007-09-28 2010-09-07 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Single stack coupled resonators having differential output
FR2922696B1 (fr) * 2007-10-22 2010-03-12 St Microelectronics Sa Resonateur a ondes de lamb
JP5242185B2 (ja) * 2008-01-30 2013-07-24 京セラ株式会社 送受信用電子機器およびその制御方法、並びにプログラム
US7855618B2 (en) * 2008-04-30 2010-12-21 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic resonator electrical impedance transformers
US7732977B2 (en) * 2008-04-30 2010-06-08 Avago Technologies Wireless Ip (Singapore) Transceiver circuit for film bulk acoustic resonator (FBAR) transducers
JP2010091467A (ja) * 2008-10-09 2010-04-22 Rohm Co Ltd 圧力センサおよび圧力センサの製造方法
US8030823B2 (en) * 2009-01-26 2011-10-04 Resonance Semiconductor Corporation Protected resonator
US9735338B2 (en) 2009-01-26 2017-08-15 Cymatics Laboratories Corp. Protected resonator
US8291559B2 (en) * 2009-02-24 2012-10-23 Epcos Ag Process for adapting resonance frequency of a BAW resonator
US8723620B2 (en) * 2009-04-23 2014-05-13 Panasonic Corporation Antenna sharer with a ladder filter
US9041486B2 (en) * 2009-06-18 2015-05-26 Skyworks Panasonic Filter Solutions Japan Co., Ltd Ladder type surface acoustic wave filter and duplexer using same
US8902023B2 (en) * 2009-06-24 2014-12-02 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator structure having an electrode with a cantilevered portion
US8248185B2 (en) * 2009-06-24 2012-08-21 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic resonator structure comprising a bridge
KR101634339B1 (ko) * 2009-08-04 2016-06-28 삼성전자주식회사 Ｂａｗｒ을 이용한 듀얼-입력 듀얼-출력의 필터링 장치 및 상기 ｂａｗｒ로서 이용할 수 있는 공진 장치
FR2951026B1 (fr) 2009-10-01 2011-12-02 St Microelectronics Sa Procede de fabrication de resonateurs baw sur une tranche semiconductrice
FR2951023B1 (fr) * 2009-10-01 2012-03-09 St Microelectronics Sa Procede de fabrication d'oscillateurs monolithiques a resonateurs baw
FR2951024B1 (fr) * 2009-10-01 2012-03-23 St Microelectronics Sa Procede de fabrication de resonateur baw a facteur de qualite eleve
US8193877B2 (en) * 2009-11-30 2012-06-05 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Duplexer with negative phase shifting circuit
US8796904B2 (en) 2011-10-31 2014-08-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic resonator comprising piezoelectric layer and inverse piezoelectric layer
US9243316B2 (en) 2010-01-22 2016-01-26 Avago Technologies General Ip (Singapore) Pte. Ltd. Method of fabricating piezoelectric material with selected c-axis orientation
US8962443B2 (en) 2011-01-31 2015-02-24 Avago Technologies General Ip (Singapore) Pte. Ltd. Semiconductor device having an airbridge and method of fabricating the same
US9425764B2 (en) 2012-10-25 2016-08-23 Avago Technologies General Ip (Singapore) Pte. Ltd. Accoustic resonator having composite electrodes with integrated lateral features
US9203374B2 (en) 2011-02-28 2015-12-01 Avago Technologies General Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator comprising a bridge
US9148117B2 (en) 2011-02-28 2015-09-29 Avago Technologies General Ip (Singapore) Pte. Ltd. Coupled resonator filter comprising a bridge and frame elements
US9136818B2 (en) 2011-02-28 2015-09-15 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked acoustic resonator comprising a bridge
US9048812B2 (en) 2011-02-28 2015-06-02 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic wave resonator comprising bridge formed within piezoelectric layer
US9154112B2 (en) 2011-02-28 2015-10-06 Avago Technologies General Ip (Singapore) Pte. Ltd. Coupled resonator filter comprising a bridge
US9083302B2 (en) 2011-02-28 2015-07-14 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked bulk acoustic resonator comprising a bridge and an acoustic reflector along a perimeter of the resonator
US9748918B2 (en) * 2013-02-14 2017-08-29 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator comprising integrated structures for improved performance
US8575820B2 (en) 2011-03-29 2013-11-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked bulk acoustic resonator
US9444426B2 (en) 2012-10-25 2016-09-13 Avago Technologies General Ip (Singapore) Pte. Ltd. Accoustic resonator having integrated lateral feature and temperature compensation feature
US8350445B1 (en) 2011-06-16 2013-01-08 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic resonator comprising non-piezoelectric layer and bridge
KR101853740B1 (ko) * 2011-07-27 2018-06-14 삼성전자주식회사 체적 음향 공진기 및 체적 음향 공진기를 이용한 듀플렉서
JP2013038471A (ja) * 2011-08-03 2013-02-21 Taiyo Yuden Co Ltd 弾性波フィルタ
US8922302B2 (en) 2011-08-24 2014-12-30 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator formed on a pedestal
US9099986B2 (en) 2011-09-30 2015-08-04 Qualcomm Mems Technologies, Inc. Cross-sectional dilation mode resonators
US8600330B2 (en) * 2011-10-05 2013-12-03 Kathrein-Werke Kg Filter arrangement
US8923794B2 (en) * 2011-11-02 2014-12-30 Triquint Semiconductor, Inc. Temperature compensation of acoustic resonators in the electrical domain
JP5877043B2 (ja) 2011-11-22 2016-03-02 太陽誘電株式会社 デュプレクサ
CN103959647B (zh) * 2011-11-30 2016-08-17 天工松下滤波方案日本有限公司 梯型弹性波滤波器和利用该梯型弹性波滤波器的天线共用器
KR101959204B1 (ko) 2013-01-09 2019-07-04 삼성전자주식회사 무선 주파수 필터 및 무선 주파수 필터의 제조방법
JP6185292B2 (ja) * 2013-06-10 2017-08-23 太陽誘電株式会社 弾性波デバイス
JP6374653B2 (ja) 2013-11-18 2018-08-15 太陽誘電株式会社 弾性波フィルタ及び分波器
JP6368214B2 (ja) 2014-10-03 2018-08-01 太陽誘電株式会社 弾性波デバイス
DE102014117238B4 (de) * 2014-11-25 2017-11-02 Snaptrack, Inc. BAW-Resonator mit verringerter Eigenerwärmung, HF-Filter mit BAW-Resonator, Duplexer mit HF-Filter und Verfahren zur Herstellung
CN105141262B (zh) * 2015-07-21 2018-06-05 苏州能讯高能半导体有限公司 一种适用于f类或逆f类功率放大器的放大模块
WO2017219251A1 (zh) * 2016-06-21 2017-12-28 诺思（天津）微系统有限公司 一种梯形结构宽带压电滤波器
KR20180017941A (ko) * 2016-08-11 2018-02-21 삼성전기주식회사 탄성파 필터 장치 및 그 제조방법
JP6885533B2 (ja) * 2017-01-27 2021-06-16 新日本無線株式会社 バルク弾性波共振器の製造方法
KR102369436B1 (ko) * 2017-04-19 2022-03-03 삼성전기주식회사 체적 음향 공진기
CN107453729B (zh) * 2017-06-28 2021-04-06 中国电子科技集团公司第五十五研究所 一种基于复合结构的温度补偿薄膜体声波谐振器
US10498001B2 (en) 2017-08-21 2019-12-03 Texas Instruments Incorporated Launch structures for a hermetically sealed cavity
US10775422B2 (en) 2017-09-05 2020-09-15 Texas Instruments Incorporated Molecular spectroscopy cell with resonant cavity
US10589986B2 (en) 2017-09-06 2020-03-17 Texas Instruments Incorporated Packaging a sealed cavity in an electronic device
US10131115B1 (en) * 2017-09-07 2018-11-20 Texas Instruments Incorporated Hermetically sealed molecular spectroscopy cell with dual wafer bonding
US10444102B2 (en) 2017-09-07 2019-10-15 Texas Instruments Incorporated Pressure measurement based on electromagnetic signal output of a cavity
US10424523B2 (en) 2017-09-07 2019-09-24 Texas Instruments Incorporated Hermetically sealed molecular spectroscopy cell with buried ground plane
US10549986B2 (en) 2017-09-07 2020-02-04 Texas Instruments Incorporated Hermetically sealed molecular spectroscopy cell
US10551265B2 (en) 2017-09-07 2020-02-04 Texas Instruments Incorporated Pressure sensing using quantum molecular rotational state transitions
US10544039B2 (en) 2017-09-08 2020-01-28 Texas Instruments Incorporated Methods for depositing a measured amount of a species in a sealed cavity
US20210211115A1 (en) * 2017-11-14 2021-07-08 Anhui Yunta Electronic Technologies Co., Ltd. Piezoelectric resonator and manufacturing method of piezoelectric resonator
CN107733395A (zh) * 2017-11-14 2018-02-23 安徽云塔电子科技有限公司 一种压电谐振器和压电谐振器的制备方法
JP2019145895A (ja) * 2018-02-16 2019-08-29 株式会社村田製作所 弾性波装置、マルチプレクサ、高周波フロントエンド回路及び通信装置
SG10201902753RA (en) * 2018-04-12 2019-11-28 Skyworks Solutions Inc Filter Including Two Types Of Acoustic Wave Resonators
CN111384909A (zh) * 2018-12-27 2020-07-07 天津大学 电极厚度不对称的体声波谐振器、滤波器和电子设备
CN110417373A (zh) * 2019-07-25 2019-11-05 华南理工大学 一种频率可调的横向场激励薄膜体声波谐振器及制备方法
CN111224641B (zh) * 2020-01-22 2021-08-10 诺思(天津)微系统有限责任公司 一种滤波器、双工器、高频前端电路及通信装置
CN111327295B (zh) * 2020-02-12 2020-11-27 诺思(天津)微系统有限责任公司 压电滤波器及其质量负载实现方法和含压电滤波器的装置
JP7456799B2 (ja) 2020-02-26 2024-03-27 太陽誘電株式会社 フィルタおよびマルチプレクサ
CN112054777A (zh) * 2020-05-09 2020-12-08 诺思(天津)微系统有限责任公司 体声波谐振器组件及制造方法、滤波器及电子设备
CN111884791B (zh) * 2020-07-01 2021-08-10 诺思(天津)微系统有限责任公司 一种双工器、多工器及通信装置
CN112653417A (zh) * 2020-12-18 2021-04-13 广东广纳芯科技有限公司 声表面波谐振器及该声表面波谐振器的制造方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58137317A (ja) 1982-02-09 1983-08-15 Nec Corp 圧電薄膜複合振動子
JPS58153412A (ja) 1982-03-08 1983-09-12 Nec Corp 圧電薄膜複合振動子
JPS59141813A (ja) 1983-02-02 1984-08-14 Nec Corp 薄膜圧電振動子
JPS6068711A (ja) 1983-09-26 1985-04-19 Toshiba Corp 圧電薄膜共振子
JPS60171822A (ja) 1984-02-16 1985-09-05 Toshiba Corp 圧電薄膜共振子
JPS60189307A (ja) 1984-03-09 1985-09-26 Toshiba Corp 圧電薄膜共振器およびその製造方法
JPS6424547A (en) * 1987-07-20 1989-01-26 Nippon Telegraph & Telephone Delay telephone calling equipment
US5692279A (en) 1995-08-17 1997-12-02 Motorola Method of making a monolithic thin film resonator lattice filter
FI962815A0 (fi) * 1996-07-11 1996-07-11 Lk Products Oy Duplex-filter
US6051907A (en) 1996-10-10 2000-04-18 Nokia Mobile Phones Limited Method for performing on-wafer tuning of thin film bulk acoustic wave resonators (FBARS)
US5910756A (en) * 1997-05-21 1999-06-08 Nokia Mobile Phones Limited Filters and duplexers utilizing thin film stacked crystal filter structures and thin film bulk acoustic wave resonators
JP3468143B2 (ja) * 1999-01-28 2003-11-17 株式会社村田製作所 誘電体フィルタ、誘電体ディプレクサおよび通信機
US6262637B1 (en) * 1999-06-02 2001-07-17 Agilent Technologies, Inc. Duplexer incorporating thin-film bulk acoustic resonators (FBARs)
US6307447B1 (en) * 1999-11-01 2001-10-23 Agere Systems Guardian Corp. Tuning mechanical resonators for electrical filter
US6441539B1 (en) * 1999-11-11 2002-08-27 Murata Manufacturing Co., Ltd. Piezoelectric resonator
EP1170862B1 (de) * 2000-06-23 2012-10-10 Murata Manufacturing Co., Ltd. Piezoelektrischer Resonator und diesen enthaltendes piezoelektrisches Filter
US6407649B1 (en) * 2001-01-05 2002-06-18 Nokia Corporation Monolithic FBAR duplexer and method of making the same

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CN100571030C (zh) 2009-12-16
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JP2004193929A (ja) 2004-07-08
EP1434346A1 (de) 2004-06-30
US6989723B2 (en) 2006-01-24
CN1507152A (zh) 2004-06-23
TW200415850A (en) 2004-08-16
US20040113720A1 (en) 2004-06-17
JP3889351B2 (ja) 2007-03-07
DE60314715T2 (de) 2007-10-18
TWI244259B (en) 2005-11-21

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