DE60317124D1 - Waschflüssigkeitzusammensetzung für ein Halbleitersubstrat - Google Patents
Waschflüssigkeitzusammensetzung für ein HalbleitersubstratInfo
- Publication number
- DE60317124D1 DE60317124D1 DE60317124T DE60317124T DE60317124D1 DE 60317124 D1 DE60317124 D1 DE 60317124D1 DE 60317124 T DE60317124 T DE 60317124T DE 60317124 T DE60317124 T DE 60317124T DE 60317124 D1 DE60317124 D1 DE 60317124D1
- Authority
- DE
- Germany
- Prior art keywords
- semiconductor substrate
- liquid composition
- washing liquid
- washing
- composition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000007788 liquid Substances 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- 239000000758 substrate Substances 0.000 title 1
- 238000005406 washing Methods 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/37—Polymers
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/20—Organic compounds containing oxygen
- C11D3/2075—Carboxylic acids-salts thereof
- C11D3/2082—Polycarboxylic acids-salts thereof
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/20—Organic compounds containing oxygen
- C11D3/2075—Carboxylic acids-salts thereof
- C11D3/2086—Hydroxy carboxylic acids-salts thereof
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
- C11D1/004—Surface-active compounds containing F
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
- C11D1/02—Anionic compounds
- C11D1/12—Sulfonic acids or sulfuric acid esters; Salts thereof
- C11D1/22—Sulfonic acids or sulfuric acid esters; Salts thereof derived from aromatic compounds
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
- C11D1/02—Anionic compounds
- C11D1/12—Sulfonic acids or sulfuric acid esters; Salts thereof
- C11D1/22—Sulfonic acids or sulfuric acid esters; Salts thereof derived from aromatic compounds
- C11D1/24—Sulfonic acids or sulfuric acid esters; Salts thereof derived from aromatic compounds containing ester or ether groups directly attached to the nucleus
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
- C11D1/02—Anionic compounds
- C11D1/34—Derivatives of acids of phosphorus
- C11D1/345—Phosphates or phosphites
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
- C11D1/66—Non-ionic compounds
- C11D1/72—Ethers of polyoxyalkylene glycols
-
- C11D2111/22—
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002041393 | 2002-02-19 | ||
JP2002041393 | 2002-02-19 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60317124D1 true DE60317124D1 (de) | 2007-12-13 |
DE60317124T2 DE60317124T2 (de) | 2008-08-14 |
Family
ID=27621494
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60317124T Expired - Lifetime DE60317124T2 (de) | 2002-02-19 | 2003-02-18 | Waschflüssigkeitzusammensetzung für ein Halbleitersubstrat |
Country Status (7)
Country | Link |
---|---|
US (1) | US7138362B2 (de) |
EP (1) | EP1336650B1 (de) |
JP (1) | JP4931953B2 (de) |
KR (1) | KR100959162B1 (de) |
CN (1) | CN1297642C (de) |
DE (1) | DE60317124T2 (de) |
TW (1) | TWI339680B (de) |
Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4375991B2 (ja) * | 2003-04-09 | 2009-12-02 | 関東化学株式会社 | 半導体基板洗浄液組成物 |
CN1918698B (zh) * | 2004-02-09 | 2010-04-07 | 三菱化学株式会社 | 半导体装置用基板的洗涤液及洗涤方法 |
US7939131B2 (en) | 2004-08-16 | 2011-05-10 | Molecular Imprints, Inc. | Method to provide a layer with uniform etch characteristics |
US20060062922A1 (en) | 2004-09-23 | 2006-03-23 | Molecular Imprints, Inc. | Polymerization technique to attenuate oxygen inhibition of solidification of liquids and composition therefor |
US20060081557A1 (en) | 2004-10-18 | 2006-04-20 | Molecular Imprints, Inc. | Low-k dielectric functional imprinting materials |
US7208325B2 (en) | 2005-01-18 | 2007-04-24 | Applied Materials, Inc. | Refreshing wafers having low-k dielectric materials |
US8557351B2 (en) | 2005-07-22 | 2013-10-15 | Molecular Imprints, Inc. | Method for adhering materials together |
US8808808B2 (en) | 2005-07-22 | 2014-08-19 | Molecular Imprints, Inc. | Method for imprint lithography utilizing an adhesion primer layer |
US7759407B2 (en) | 2005-07-22 | 2010-07-20 | Molecular Imprints, Inc. | Composition for adhering materials together |
US8480810B2 (en) * | 2005-12-30 | 2013-07-09 | Lam Research Corporation | Method and apparatus for particle removal |
JP4777197B2 (ja) * | 2006-09-11 | 2011-09-21 | 富士フイルム株式会社 | 洗浄液及びそれを用いた洗浄方法 |
WO2009067241A1 (en) * | 2007-11-21 | 2009-05-28 | Molecular Imprints, Inc. | Porous template and imprinting stack for nano-imprint lithography |
WO2010019722A2 (en) * | 2008-08-13 | 2010-02-18 | Intermolecular, Inc. | Combinatorial approach to the development of cleaning formulations for glue removal in semiconductor applications |
US20100072671A1 (en) * | 2008-09-25 | 2010-03-25 | Molecular Imprints, Inc. | Nano-imprint lithography template fabrication and treatment |
US8470188B2 (en) * | 2008-10-02 | 2013-06-25 | Molecular Imprints, Inc. | Nano-imprint lithography templates |
US20100104852A1 (en) * | 2008-10-23 | 2010-04-29 | Molecular Imprints, Inc. | Fabrication of High-Throughput Nano-Imprint Lithography Templates |
JP2010226089A (ja) * | 2009-01-14 | 2010-10-07 | Rohm & Haas Electronic Materials Llc | 半導体ウェハをクリーニングする方法 |
US8765653B2 (en) * | 2009-07-07 | 2014-07-01 | Air Products And Chemicals, Inc. | Formulations and method for post-CMP cleaning |
JP5206622B2 (ja) | 2009-08-07 | 2013-06-12 | 三菱瓦斯化学株式会社 | 金属微細構造体のパターン倒壊抑制用処理液及びこれを用いた金属微細構造体の製造方法 |
KR20120116389A (ko) * | 2009-10-22 | 2012-10-22 | 미츠비시 가스 가가쿠 가부시키가이샤 | 금속 미세 구조체의 패턴 도괴 억제용 처리액 및 이것을 이용한 금속 미세 구조체의 제조 방법 |
CN102086431B (zh) * | 2009-12-07 | 2012-09-26 | 奇美实业股份有限公司 | 用于太阳能电池基板的洗净液组成物 |
US8616873B2 (en) * | 2010-01-26 | 2013-12-31 | Molecular Imprints, Inc. | Micro-conformal templates for nanoimprint lithography |
TW201144091A (en) * | 2010-01-29 | 2011-12-16 | Molecular Imprints Inc | Ultra-compliant nanoimprint lithography templates |
JP2013133458A (ja) * | 2011-12-27 | 2013-07-08 | Idemitsu Kosan Co Ltd | 水性洗浄剤 |
US20160122696A1 (en) * | 2013-05-17 | 2016-05-05 | Advanced Technology Materials, Inc. | Compositions and methods for removing ceria particles from a surface |
CN106350296B (zh) * | 2016-08-25 | 2018-10-23 | 大连奥首科技有限公司 | 一种高效环保led芯片清洗剂及使用方法 |
SG11201901590SA (en) | 2016-09-21 | 2019-03-28 | Fujimi Inc | Composition for surface treatment |
CN107243783B (zh) * | 2017-08-09 | 2018-08-28 | 睿力集成电路有限公司 | 化学机械研磨方法、设备及清洗液 |
JP7150433B2 (ja) * | 2017-12-28 | 2022-10-11 | 東京応化工業株式会社 | リワーク方法、及び酸性洗浄液 |
CN115232001A (zh) * | 2021-04-25 | 2022-10-25 | 中国石油化工股份有限公司 | 氢化均苯四甲酸合成方法 |
JP7011098B1 (ja) | 2021-06-14 | 2022-01-26 | 富士フイルムエレクトロニクスマテリアルズ株式会社 | 洗浄組成物、半導体基板の洗浄方法、および、半導体素子の製造方法 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3169024B2 (ja) * | 1991-07-12 | 2001-05-21 | 三菱瓦斯化学株式会社 | シリコンウエハーおよび半導体素子洗浄液 |
JP3435698B2 (ja) * | 1992-03-11 | 2003-08-11 | 三菱瓦斯化学株式会社 | 半導体基板の洗浄液 |
US6103627A (en) * | 1996-02-21 | 2000-08-15 | Micron Technology, Inc. | Treatment of a surface having an exposed silicon/silica interface |
TW416987B (en) | 1996-06-05 | 2001-01-01 | Wako Pure Chem Ind Ltd | A composition for cleaning the semiconductor substrate surface |
JP3219020B2 (ja) | 1996-06-05 | 2001-10-15 | 和光純薬工業株式会社 | 洗浄処理剤 |
US6410494B2 (en) * | 1996-06-05 | 2002-06-25 | Wako Pure Chemical Industries, Ltd. | Cleaning agent |
JP3165801B2 (ja) | 1997-08-12 | 2001-05-14 | 関東化学株式会社 | 洗浄液 |
TW387936B (en) | 1997-08-12 | 2000-04-21 | Kanto Kagaku | Washing solution |
US6165956A (en) * | 1997-10-21 | 2000-12-26 | Lam Research Corporation | Methods and apparatus for cleaning semiconductor substrates after polishing of copper film |
CN1126152C (zh) * | 1998-08-31 | 2003-10-29 | 长兴化学工业股份有限公司 | 半导体制程用的化学机械研磨组合物 |
JP3003684B1 (ja) * | 1998-09-07 | 2000-01-31 | 日本電気株式会社 | 基板洗浄方法および基板洗浄液 |
JP4516176B2 (ja) * | 1999-04-20 | 2010-08-04 | 関東化学株式会社 | 電子材料用基板洗浄液 |
US6147002A (en) * | 1999-05-26 | 2000-11-14 | Ashland Inc. | Process for removing contaminant from a surface and composition useful therefor |
US6395693B1 (en) * | 1999-09-27 | 2002-05-28 | Cabot Microelectronics Corporation | Cleaning solution for semiconductor surfaces following chemical-mechanical polishing |
JP2002017215A (ja) * | 2000-06-30 | 2002-01-22 | Daiwa Seiko Inc | 魚釣用電動リール |
JP2002020787A (ja) * | 2000-07-05 | 2002-01-23 | Wako Pure Chem Ind Ltd | 銅配線半導体基板洗浄剤 |
US6498131B1 (en) * | 2000-08-07 | 2002-12-24 | Ekc Technology, Inc. | Composition for cleaning chemical mechanical planarization apparatus |
DE60124473T2 (de) * | 2000-09-08 | 2007-09-06 | Kanto Kagaku K.K. | Ätzflüssigkeitszusammensetzung |
-
2003
- 2003-02-17 TW TW092103248A patent/TWI339680B/zh not_active IP Right Cessation
- 2003-02-18 EP EP03003155A patent/EP1336650B1/de not_active Expired - Fee Related
- 2003-02-18 DE DE60317124T patent/DE60317124T2/de not_active Expired - Lifetime
- 2003-02-19 US US10/369,877 patent/US7138362B2/en not_active Expired - Fee Related
- 2003-02-19 KR KR1020030010476A patent/KR100959162B1/ko not_active IP Right Cessation
- 2003-02-19 CN CNB031037887A patent/CN1297642C/zh not_active Expired - Fee Related
-
2009
- 2009-03-30 JP JP2009080912A patent/JP4931953B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
TW200304945A (en) | 2003-10-16 |
EP1336650B1 (de) | 2007-10-31 |
KR100959162B1 (ko) | 2010-05-24 |
EP1336650A1 (de) | 2003-08-20 |
TWI339680B (en) | 2011-04-01 |
DE60317124T2 (de) | 2008-08-14 |
JP2009147389A (ja) | 2009-07-02 |
US20030171233A1 (en) | 2003-09-11 |
KR20030069119A (ko) | 2003-08-25 |
US7138362B2 (en) | 2006-11-21 |
CN1439701A (zh) | 2003-09-03 |
CN1297642C (zh) | 2007-01-31 |
JP4931953B2 (ja) | 2012-05-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
R082 | Change of representative |
Ref document number: 1336650 Country of ref document: EP Representative=s name: DR. VOLKER VOSSIUS, CORINNA VOSSIUS, TILMAN VO, DE |
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R081 | Change of applicant/patentee |
Ref document number: 1336650 Country of ref document: EP Owner name: KANTO KAGAKU K.K., JP Free format text: FORMER OWNER: NEC ELECTRONICS CORP., KANTO KAGAKU K.K., , JP Effective date: 20120828 Ref document number: 1336650 Country of ref document: EP Owner name: RENESAS ELECTRONICS CORPORATION, JP Free format text: FORMER OWNER: NEC ELECTRONICS CORP., KANTO KAGAKU K.K., , JP Effective date: 20120828 |
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R082 | Change of representative |
Ref document number: 1336650 Country of ref document: EP Representative=s name: DR. VOLKER VOSSIUS, CORINNA VOSSIUS, TILMAN VO, DE Effective date: 20120828 |