DE60317959D1 - Elektrostatischer bimorpher Aktor - Google Patents

Elektrostatischer bimorpher Aktor

Info

Publication number
DE60317959D1
DE60317959D1 DE60317959T DE60317959T DE60317959D1 DE 60317959 D1 DE60317959 D1 DE 60317959D1 DE 60317959 T DE60317959 T DE 60317959T DE 60317959 T DE60317959 T DE 60317959T DE 60317959 D1 DE60317959 D1 DE 60317959D1
Authority
DE
Germany
Prior art keywords
bimorph
substrate
bimorph arm
arm
insulated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60317959T
Other languages
English (en)
Other versions
DE60317959T2 (de
Inventor
Michael J Sinclair
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Microsoft Corp
Original Assignee
Microsoft Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Microsoft Corp filed Critical Microsoft Corp
Application granted granted Critical
Publication of DE60317959D1 publication Critical patent/DE60317959D1/de
Publication of DE60317959T2 publication Critical patent/DE60317959T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0054For holding or placing an element in a given position
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00Specific applications of microelectromechanical systems
    • B81B2201/03Microengines and actuators
    • B81B2201/032Bimorph and unimorph actuators, e.g. piezo and thermo
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00Specific applications of microelectromechanical systems
    • B81B2201/03Microengines and actuators
    • B81B2201/038Microengines and actuators not provided for in B81B2201/031 - B81B2201/037
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00Specific applications of microelectromechanical systems
    • B81B2201/04Optical MEMS
    • B81B2201/045Optical switches
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00Specific applications of microelectromechanical systems
    • B81B2201/04Optical MEMS
    • B81B2201/047Optical MEMS not provided for in B81B2201/042 - B81B2201/045
DE60317959T 2002-03-29 2003-01-30 Elektrostatischer bimorpher Aktor Expired - Lifetime DE60317959T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US112369 2002-03-29
US10/112,369 US7053519B2 (en) 2002-03-29 2002-03-29 Electrostatic bimorph actuator

Publications (2)

Publication Number Publication Date
DE60317959D1 true DE60317959D1 (de) 2008-01-24
DE60317959T2 DE60317959T2 (de) 2008-12-11

Family

ID=28041017

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60317959T Expired - Lifetime DE60317959T2 (de) 2002-03-29 2003-01-30 Elektrostatischer bimorpher Aktor

Country Status (5)

Country Link
US (2) US7053519B2 (de)
EP (1) EP1350758B1 (de)
JP (1) JP4544826B2 (de)
AT (1) ATE380777T1 (de)
DE (1) DE60317959T2 (de)

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Also Published As

Publication number Publication date
JP2004001196A (ja) 2004-01-08
DE60317959T2 (de) 2008-12-11
JP4544826B2 (ja) 2010-09-15
EP1350758A2 (de) 2003-10-08
EP1350758A3 (de) 2004-12-15
US7053519B2 (en) 2006-05-30
US7249856B2 (en) 2007-07-31
ATE380777T1 (de) 2007-12-15
EP1350758B1 (de) 2007-12-12
US20030184189A1 (en) 2003-10-02
US20040227428A1 (en) 2004-11-18

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