DE60323484D1 - Verfahren zur kalibrierung und de-embedding, geräte für de-embedding und netzwerk-vektoranalysator - Google Patents

Verfahren zur kalibrierung und de-embedding, geräte für de-embedding und netzwerk-vektoranalysator

Info

Publication number
DE60323484D1
DE60323484D1 DE60323484T DE60323484T DE60323484D1 DE 60323484 D1 DE60323484 D1 DE 60323484D1 DE 60323484 T DE60323484 T DE 60323484T DE 60323484 T DE60323484 T DE 60323484T DE 60323484 D1 DE60323484 D1 DE 60323484D1
Authority
DE
Germany
Prior art keywords
embedding
load device
calibration
substantially identical
parameter values
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60323484T
Other languages
English (en)
Inventor
Lukas F Tiemeijer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NXP BV
Original Assignee
NXP BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NXP BV filed Critical NXP BV
Application granted granted Critical
Publication of DE60323484D1 publication Critical patent/DE60323484D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/28—Measuring attenuation, gain, phase shift or derived characteristics of electric four pole networks, i.e. two-port networks; Measuring transient response
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
    • G01R35/005—Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references
DE60323484T 2002-05-16 2003-05-08 Verfahren zur kalibrierung und de-embedding, geräte für de-embedding und netzwerk-vektoranalysator Expired - Lifetime DE60323484D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP02076911 2002-05-16
PCT/IB2003/001932 WO2003098255A1 (en) 2002-05-16 2003-05-08 Method for calibrating and de-embedding, set of devices for de-embedding and vector network analyzer

Publications (1)

Publication Number Publication Date
DE60323484D1 true DE60323484D1 (de) 2008-10-23

Family

ID=29433146

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60323484T Expired - Lifetime DE60323484D1 (de) 2002-05-16 2003-05-08 Verfahren zur kalibrierung und de-embedding, geräte für de-embedding und netzwerk-vektoranalysator

Country Status (9)

Country Link
US (2) US7026829B2 (de)
EP (1) EP1506428B1 (de)
JP (1) JP2005526250A (de)
CN (1) CN100541224C (de)
AT (1) ATE408149T1 (de)
AU (1) AU2003224379A1 (de)
DE (1) DE60323484D1 (de)
TW (1) TWI306705B (de)
WO (1) WO2003098255A1 (de)

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DE10143173A1 (de) 2000-12-04 2002-06-06 Cascade Microtech Inc Wafersonde
AU2003233659A1 (en) * 2002-05-23 2003-12-12 Cascade Microtech, Inc. Probe for testing a device under test
US7057404B2 (en) 2003-05-23 2006-06-06 Sharp Laboratories Of America, Inc. Shielded probe for testing a device under test
KR100960496B1 (ko) * 2003-10-31 2010-06-01 엘지디스플레이 주식회사 액정표시소자의 러빙방법
DE202004021093U1 (de) 2003-12-24 2006-09-28 Cascade Microtech, Inc., Beaverton Aktiver Halbleiterscheibenmessfühler
DE202005021435U1 (de) 2004-09-13 2008-02-28 Cascade Microtech, Inc., Beaverton Doppelseitige Prüfaufbauten
US7723999B2 (en) * 2006-06-12 2010-05-25 Cascade Microtech, Inc. Calibration structures for differential signal probing
US7764072B2 (en) 2006-06-12 2010-07-27 Cascade Microtech, Inc. Differential signal probing system
US7403028B2 (en) * 2006-06-12 2008-07-22 Cascade Microtech, Inc. Test structure and probe for differential signals
JP2010503472A (ja) * 2006-09-13 2010-02-04 スリーエム イノベイティブ プロパティズ カンパニー 予備成形済みの展性のある中実のクラウン
US7518378B2 (en) * 2007-02-13 2009-04-14 Keithley Instruments, Inc. Cable compensation for pulsed I-V measurements
US7876114B2 (en) 2007-08-08 2011-01-25 Cascade Microtech, Inc. Differential waveguide probe
US7741857B2 (en) * 2008-03-06 2010-06-22 International Business Machines Corporation System and method for de-embedding a device under test employing a parametrized netlist
US8350586B2 (en) * 2009-07-02 2013-01-08 Taiwan Semiconductor Manufacturing Company, Ltd. Method and apparatus of deembedding
US8436626B2 (en) * 2009-12-17 2013-05-07 Taiwan Semiconductor Manfacturing Company, Ltd. Cascaded-based de-embedding methodology
CN102147434B (zh) * 2010-02-09 2013-10-30 中芯国际集成电路制造(上海)有限公司 一种测试电感的方法
CN102156235B (zh) * 2010-02-12 2013-05-08 中芯国际集成电路制造(上海)有限公司 射频电路中电感的短路测试装置及短路测试方法
CN102375101B (zh) * 2010-08-19 2013-12-18 上海华虹Nec电子有限公司 采用不同层金属引线连出的无源器件测试去嵌方法
US8917083B2 (en) 2010-11-24 2014-12-23 International Business Machines Corporation Structures and methods for RF de-embedding
CN102645625B (zh) * 2011-02-17 2016-01-20 台湾积体电路制造股份有限公司 短路虚拟架构、解内嵌的方法及装置
US8681945B2 (en) * 2011-12-22 2014-03-25 Telefonaktiebolaget Lm Ericsson (Publ) Calibration of a line driving device
US9581675B2 (en) * 2012-08-24 2017-02-28 Tektronix, Inc. Virtual model adapter removal and substitution technique for cascaded networks
CN103063999B (zh) * 2012-12-21 2016-03-16 上海华虹宏力半导体制造有限公司 去嵌入的方法
CN103364751B (zh) * 2013-07-11 2016-09-07 中国电子科技集团公司第四十一研究所 一种矢量网络分析仪电子校准件及校准方法
CN104569734B (zh) * 2013-10-12 2017-07-18 北京航天计量测试技术研究所 一种电缆网冗余线故障诊断方法
CN103675457B (zh) * 2013-11-05 2017-02-08 中国人民解放军国防科学技术大学 一种微波器件阻抗测量校准方法
CN103630864B (zh) * 2013-11-26 2016-12-07 中国电子科技集团公司第四十一研究所 一种用于自由空间材料电磁参数测试系统的校准方法
US11543448B2 (en) 2013-12-23 2023-01-03 Keysight Technologies, Inc. Dynamically determining measurement uncertainty (MU) of measurement devices
CN103983931B (zh) * 2014-05-06 2016-06-08 中国电子科技集团公司第十三研究所 矢量网络分析仪s参数测量不确定度的确定方法
US11215655B2 (en) * 2014-10-12 2022-01-04 Compass Technology Group, LLC Correction of transmission line induced phase and amplitude errors in reflectivity measurements
WO2016065531A1 (zh) * 2014-10-28 2016-05-06 上海集成电路研发中心有限公司 利用引入器件判断射频器件去嵌入精度的测试结构及方法
CN104635135A (zh) * 2015-01-30 2015-05-20 中国科学院微电子研究所 一种化合物半导体器件的去嵌入方法
CN105891628B (zh) * 2016-03-30 2018-05-29 清华大学 通用四端口在片高频去嵌入方法
US10164106B2 (en) 2016-12-29 2018-12-25 Taiwan Semiconductor Manufacturing Co., Ltd. Semiconductor device and a method for fabricating the same
CN108646208B (zh) * 2018-06-08 2020-06-05 中国电子科技集团公司第四十一研究所 一种多端口夹具自动去嵌入方法
CN109524214B (zh) * 2018-11-22 2020-06-12 上海华力集成电路制造有限公司 螺旋电感去嵌入的开路结构及其去嵌入方法
CN112666506A (zh) * 2020-12-10 2021-04-16 中国电子技术标准化研究院 集成电路校准用在片电容标准样片
US11812879B2 (en) 2021-02-28 2023-11-14 Born Outdoor Group, Ltd. Modular portable bedding system

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JP2800881B2 (ja) * 1995-07-31 1998-09-21 日本電気株式会社 配線寄生負荷算出方法
US6249128B1 (en) * 1997-10-22 2001-06-19 Teradyne, Inc. Automated microwave test system with improved accuracy
US6060888A (en) * 1998-04-24 2000-05-09 Hewlett-Packard Company Error correction method for reflection measurements of reciprocal devices in vector network analyzers
US6643597B1 (en) * 2001-08-24 2003-11-04 Agilent Technologies, Inc. Calibrating a test system using unknown standards
US6744262B2 (en) * 2002-03-14 2004-06-01 Agilent Technologies, Inc. Method, apparatus, and article of manufacture for characterizing a device and predicting electrical behavior of the device in a circuit
US6832170B2 (en) * 2002-05-02 2004-12-14 Anritsu Company Methods for embedding and de-embedding using a circulator
US6895343B2 (en) * 2002-07-12 2005-05-17 Agilent Technologies, Inc. System and method for measuring essential power amplification functions
US7019535B2 (en) * 2002-09-16 2006-03-28 Agilent Technologies, Inc. Method and system for calibrating a measurement device path and for measuring a device under test in the calibrated measurement device path
US7034548B2 (en) * 2003-04-11 2006-04-25 Agilent Technologies, Inc. Balanced device characterization including test system calibration

Also Published As

Publication number Publication date
CN1735815A (zh) 2006-02-15
US7071707B2 (en) 2006-07-04
EP1506428A1 (de) 2005-02-16
EP1506428B1 (de) 2008-09-10
AU2003224379A1 (en) 2003-12-02
US20050179444A1 (en) 2005-08-18
TWI306705B (en) 2009-02-21
US7026829B2 (en) 2006-04-11
JP2005526250A (ja) 2005-09-02
CN100541224C (zh) 2009-09-16
WO2003098255A1 (en) 2003-11-27
TW200400718A (en) 2004-01-01
ATE408149T1 (de) 2008-09-15
US20060114004A1 (en) 2006-06-01

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