DE60330809D1 - Metallbeschichtetes nanokristallines silizium als aktives substrat für oberflächenverstärkte ramanspektroskopie (sers) - Google Patents

Metallbeschichtetes nanokristallines silizium als aktives substrat für oberflächenverstärkte ramanspektroskopie (sers)

Info

Publication number
DE60330809D1
DE60330809D1 DE60330809T DE60330809T DE60330809D1 DE 60330809 D1 DE60330809 D1 DE 60330809D1 DE 60330809 T DE60330809 T DE 60330809T DE 60330809 T DE60330809 T DE 60330809T DE 60330809 D1 DE60330809 D1 DE 60330809D1
Authority
DE
Germany
Prior art keywords
metal
methods
porous silicon
scroscopy
sers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60330809T
Other languages
English (en)
Inventor
Selena Chan
Andrew Berlin
Sunghoon Kwon
Narayan Sundararajan
Mineo Yamakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Intel Corp
Original Assignee
Intel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intel Corp filed Critical Intel Corp
Application granted granted Critical
Publication of DE60330809D1 publication Critical patent/DE60330809D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G01N21/658—Raman scattering enhancement Raman, e.g. surface plasmons
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0053—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes
    • B01D67/006—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods
    • B01D67/0062—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods by micromachining techniques, e.g. using masking and etching steps, photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0081—After-treatment of organic or inorganic membranes
    • B01D67/0086—Mechanical after-treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0081—After-treatment of organic or inorganic membranes
    • B01D67/0088—Physical treatment with compounds, e.g. swelling, coating or impregnation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/0213—Silicon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/0215—Silicon carbide; Silicon nitride; Silicon oxycarbide
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • C—CHEMISTRY; METALLURGY
    • C12—BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
    • C12Q—MEASURING OR TESTING PROCESSES INVOLVING ENZYMES, NUCLEIC ACIDS OR MICROORGANISMS; COMPOSITIONS OR TEST PAPERS THEREFOR; PROCESSES OF PREPARING SUCH COMPOSITIONS; CONDITION-RESPONSIVE CONTROL IN MICROBIOLOGICAL OR ENZYMOLOGICAL PROCESSES
    • C12Q1/00—Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions
    • C12Q1/68—Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions involving nucleic acids
    • C12Q1/6813—Hybridisation assays
    • C12Q1/6816—Hybridisation assays characterised by the detection means
    • C12Q1/6825—Nucleic acid detection involving sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6428—Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes"
    • G01N2021/6439—Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes" with indicators, stains, dyes, tags, labels, marks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G01N2021/653—Coherent methods [CARS]
    • G01N2021/655—Stimulated Raman
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G01N2021/653—Coherent methods [CARS]
    • G01N2021/656—Raman microprobe
DE60330809T 2003-02-18 2003-10-07 Metallbeschichtetes nanokristallines silizium als aktives substrat für oberflächenverstärkte ramanspektroskopie (sers) Expired - Lifetime DE60330809D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/368,976 US7361313B2 (en) 2003-02-18 2003-02-18 Methods for uniform metal impregnation into a nanoporous material
PCT/US2003/031784 WO2004074790A1 (en) 2003-02-18 2003-10-07 Metal coated nanocrystalline silicon as an active surface enhanced raman spectroscopy (sers) substrate

Publications (1)

Publication Number Publication Date
DE60330809D1 true DE60330809D1 (de) 2010-02-11

Family

ID=32850255

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60330809T Expired - Lifetime DE60330809D1 (de) 2003-02-18 2003-10-07 Metallbeschichtetes nanokristallines silizium als aktives substrat für oberflächenverstärkte ramanspektroskopie (sers)

Country Status (8)

Country Link
US (5) US7361313B2 (de)
EP (1) EP1595120B1 (de)
JP (3) JP5085006B2 (de)
CN (1) CN100498247C (de)
AT (1) ATE453853T1 (de)
AU (1) AU2003282750A1 (de)
DE (1) DE60330809D1 (de)
WO (1) WO2004074790A1 (de)

Families Citing this family (115)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7361313B2 (en) * 2003-02-18 2008-04-22 Intel Corporation Methods for uniform metal impregnation into a nanoporous material
US20050084980A1 (en) * 2003-10-17 2005-04-21 Intel Corporation Method and device for detecting a small number of molecules using surface-enhanced coherant anti-stokes raman spectroscopy
JP2007509322A (ja) * 2003-10-17 2007-04-12 インテル・コーポレーション 表面増感コヒーレント反ストークスラマン分光を用いた少数の分子を検出する方法および装置
US7511285B2 (en) * 2004-07-16 2009-03-31 The Charles Stark Draper Laboratory, Inc. Methods and apparatus for biomolecule identification
US8617906B2 (en) * 2004-10-13 2013-12-31 Pharmagenesis, Inc. Identification and screening of triptolide target molecules
US7583379B2 (en) * 2005-07-28 2009-09-01 University Of Georgia Research Foundation Surface enhanced raman spectroscopy (SERS) systems and methods of use thereof
US7656525B2 (en) * 2004-10-21 2010-02-02 University Of Georgia Research Foundation, Inc. Fiber optic SERS sensor systems and SERS probes
US7880876B2 (en) * 2004-10-21 2011-02-01 University Of Georgia Research Foundation, Inc. Methods of use for surface enhanced raman spectroscopy (SERS) systems for the detection of bacteria
US7738096B2 (en) 2004-10-21 2010-06-15 University Of Georgia Research Foundation, Inc. Surface enhanced Raman spectroscopy (SERS) systems, substrates, fabrication thereof, and methods of use thereof
EP1817571B1 (de) * 2004-11-04 2011-09-07 Renishaw Diagnostics Limited Metall-nanoleervolumen-photonenkristall zur verbesserten raman-spektroskopie
GB2420850A (en) * 2004-12-03 2006-06-07 Orion Diagnostica Oy Particle based binding assay
JP4685650B2 (ja) * 2005-02-14 2011-05-18 富士フイルム株式会社 ラマン分光用デバイス、及びラマン分光装置
US20060284075A1 (en) * 2005-02-28 2006-12-21 Honeywell International Inc. No-fragmentation micro mass spectrometer system
US7889334B2 (en) 2005-03-15 2011-02-15 University Of Georgia Research Foundation, Inc. Surface enhanced Raman spectroscopy (SERS) systems for the detection of bacteria and methods of use thereof
US7940387B2 (en) * 2005-03-15 2011-05-10 Univeristy Of Georgia Research Foundation, Inc. Surface enhanced Raman spectroscopy (SERS) systems for the detection of viruses and methods of use thereof
CN100420623C (zh) * 2005-04-12 2008-09-24 中国科学院理化技术研究所 化学沉积法制备卤化银/氧化铝纳米介孔复合材料的方法
EP1874443A4 (de) * 2005-04-29 2009-09-16 Univ Rochester Ultradünne poröse nanoskalige membranen, herstellungsverfahren dafür und verwendungen davon
US7560085B2 (en) * 2005-05-09 2009-07-14 Vesta Research, Ltd. Porous silicon particles
US8851294B2 (en) 2005-05-25 2014-10-07 W. L. Gore & Associates, Inc. Aqueous delivery system for low surface energy structures
JP2006349462A (ja) * 2005-06-15 2006-12-28 Canon Inc 表面増強ラマン分光分析用治具及びその製造方法
EP1919847A4 (de) * 2005-07-08 2012-11-14 Portendo Ab Sensorstrukturen, zugehörige herstellungsverfahren und mit den sensorstrukturen ausgestattete detektoren
JP2007101498A (ja) * 2005-10-07 2007-04-19 Fujifilm Corp 蛍光プローブ及び蛍光検出方法
US20070092870A1 (en) * 2005-10-20 2007-04-26 Yiping Zhao Detection of biomolecules
JP5110254B2 (ja) * 2006-10-10 2012-12-26 富士レビオ株式会社 蛍光測定法と、蛍光測定のための測定用チップ及びその製造方法
EP2162412A1 (de) * 2007-05-08 2010-03-17 Vesta Research, Ltd. Geformter, flexibler brennstoff und energiereiches system daraus
EP2221893A3 (de) 2007-08-21 2013-09-18 The Regents of the University of California Nanostrukturen mit thermoelektrischen Hochleistungseigenschaften
US20090160314A1 (en) * 2007-12-20 2009-06-25 General Electric Company Emissive structures and systems
CN102037560B (zh) * 2008-03-21 2012-09-26 Rise技术有限责任公司 通过将多孔硅转变成多孔金属或陶瓷来制作微结构的方法
CN101629906A (zh) * 2008-07-20 2010-01-20 欧普图垂斯科技有限公司 检测被测对象中特定化学物质的方法及系统
US8389054B2 (en) * 2008-08-14 2013-03-05 Schlumberger Technology Corporation Fabrication technique for metallic devices with embedded optical elements, optical devices, or optical and electrical feedthroughs
US8828729B1 (en) 2009-01-28 2014-09-09 Cabot Corporation Methods and apparatus for the detection of taggants by surface enhanced raman scattering
US8138675B2 (en) * 2009-02-27 2012-03-20 General Electric Company Stabilized emissive structures and methods of making
US8663506B2 (en) * 2009-05-04 2014-03-04 Laird Technologies, Inc. Process for uniform and higher loading of metallic fillers into a polymer matrix using a highly porous host material
US8427639B2 (en) * 2009-05-07 2013-04-23 Nant Holdings Ip, Llc Surfaced enhanced Raman spectroscopy substrates
US8926904B2 (en) * 2009-05-12 2015-01-06 Daniel Wai-Cheong So Method and apparatus for the analysis and identification of molecules
CN102472666A (zh) 2009-07-08 2012-05-23 惠普开发有限公司 用于表面增强拉曼光谱术的光放大装置
CN102483354B (zh) 2009-09-17 2015-12-16 惠普发展公司，有限责任合伙企业 用于表面增强拉曼光谱术的电驱动设备
US20110114146A1 (en) * 2009-11-13 2011-05-19 Alphabet Energy, Inc. Uniwafer thermoelectric modules
CN103278491B (zh) * 2009-11-25 2017-07-07 欧普图斯(苏州)光学纳米科技有限公司 用基于纳米结构的光谱检测方法检测化学物和生化物杂质
CN102103086B (zh) * 2009-12-16 2012-12-26 中国科学院理化技术研究所 基于表面增强拉曼效应的单根硅纳米线实时检测单分子的方法
US20120273261A1 (en) 2010-10-20 2012-11-01 Taiwan Green Point Enterprises Co., Ltd. Circuit substrate having a circuit pattern and method for making the same
US8952919B2 (en) 2011-02-25 2015-02-10 Taiwan Green Point Enterprises Co., Ltd. Capacitive touch sensitive housing and method for making the same
US8621749B2 (en) 2010-03-12 2014-01-07 Taiwan Green Point Enterprises Co., Ltd Non-deleterious technique for creating continuous conductive circuits
US20130071619A1 (en) * 2010-05-28 2013-03-21 Nippon Steel & Sumikin Chemical Co., Ltd. Metal fine-particle composite and method for fabricating the same
JP5552007B2 (ja) 2010-09-17 2014-07-16 富士フイルム株式会社 光電場増強デバイス
JP5553717B2 (ja) 2010-09-17 2014-07-16 富士フイルム株式会社 光電場増強デバイスを用いた光の測定方法および測定装置
US9240328B2 (en) 2010-11-19 2016-01-19 Alphabet Energy, Inc. Arrays of long nanostructures in semiconductor materials and methods thereof
US8736011B2 (en) 2010-12-03 2014-05-27 Alphabet Energy, Inc. Low thermal conductivity matrices with embedded nanostructures and methods thereof
US20130329272A1 (en) * 2011-02-09 2013-12-12 Nippon Steel & Sumikin Chemical Co., Ltd. Metal fine-particle dispersed composite, method for fabricating the same, and substrate capable of inducing localized surface plasmon resonance
FR2972117B1 (fr) * 2011-03-04 2013-12-20 Centre Nat Rech Scient Systeme microfluidique pour controler un profil de concentration de molecules susceptibles de stimuler une cible
FR2972300A1 (fr) * 2011-03-04 2012-09-07 St Microelectronics Sa Element pour boitier, en particulier pour biopile, et procede de fabrication
FR2972301A1 (fr) * 2011-03-04 2012-09-07 St Microelectronics Sa Procede de fabrication d'une membrane poreuse electriquement conductrice, et dispositif correspondant.
JP5848013B2 (ja) 2011-03-22 2016-01-27 富士フイルム株式会社 光電場増強デバイスおよび該デバイスを備えた測定装置
US20120282435A1 (en) * 2011-03-24 2012-11-08 University Of Massachusetts Nanostructured Silicon with Useful Thermoelectric Properties
JP5801587B2 (ja) 2011-03-31 2015-10-28 富士フイルム株式会社 光電場増強デバイスの製造方法
US20120280273A1 (en) * 2011-05-02 2012-11-08 Aptina Imaging Corporation Methods and substrates for laser annealing
JP2012242167A (ja) 2011-05-17 2012-12-10 Fujifilm Corp ラマン分光測定方法および装置
CN102788777B (zh) * 2011-05-19 2015-08-19 北京大学 微流控表面增强拉曼散射检测器件及其制备方法与应用
CN102841085A (zh) * 2011-06-24 2012-12-26 华东理工大学 一种在多孔材料表面进行表面增强拉曼光谱检测的方法
JP5948746B2 (ja) * 2011-07-08 2016-07-06 セイコーエプソン株式会社 検出装置
US9255842B2 (en) * 2011-07-13 2016-02-09 Thermo Scientific Portable Analytical Instruments Inc. Heroin detection by raman spectroscopy from impure compositions comprising an interfering fluorescent contaminant
CN102877094A (zh) * 2011-07-15 2013-01-16 中国科学院合肥物质科学研究院 金纳米颗粒基微-纳复合结构有序孔阵列及其制备方法
JP5852245B2 (ja) * 2011-09-22 2016-02-03 イースト チャイナ ユニバーシティ オブ サイエンス アンド テクノロジー 金属ナノ粒子ならびにその調製および使用のための方法
US9255843B2 (en) * 2011-09-26 2016-02-09 University Of Maryland, College Park Porous SERS analytical devices and methods of detecting a target analyte
US9518986B2 (en) 2011-11-02 2016-12-13 University Of Cape Town Method of detecting and/or quantifying an analyte in a biological sample
US8810789B2 (en) 2011-11-07 2014-08-19 University Of Georgia Research Foundation, Inc. Thin layer chromatography-surfaced enhanced Raman spectroscopy chips and methods of use
US9051175B2 (en) 2012-03-07 2015-06-09 Alphabet Energy, Inc. Bulk nano-ribbon and/or nano-porous structures for thermoelectric devices and methods for making the same
WO2013138313A1 (en) * 2012-03-12 2013-09-19 University Of Houston System Nanoporous gold nanoparticles as high-payload molecular cargos, photothermal/photodynamic therapeutic agents, and ultrahigh surface-to-volume plasmonic sensors
KR101319771B1 (ko) 2012-04-05 2013-10-17 공주대학교 산학협력단 박막 면의 광학적 특성 변화를 이용한 다기능 측정 장치와 그곳에 사용될 수 있는 감지막 및 그 제조방법
CN103364390A (zh) * 2012-04-10 2013-10-23 国家纳米科学中心 一种表面增强拉曼基底及其制备方法和应用
WO2013174387A1 (en) 2012-05-23 2013-11-28 Danmarks Tekniske Universitet A system for obtaining an optical spectrum
CN102692405B (zh) * 2012-06-07 2015-05-27 中国科学院合肥物质科学研究院 米粒状氟化物/银复合纳米材料、制备方法及应用
US9257627B2 (en) 2012-07-23 2016-02-09 Alphabet Energy, Inc. Method and structure for thermoelectric unicouple assembly
WO2014019099A1 (es) * 2012-07-31 2014-02-06 Juan Carlos Jaime Procedimiento para obtener y detectar un marcador de objetos a identificar, el marcador, método para la autenticación y método para la verificación
JP6145861B2 (ja) 2012-08-15 2017-06-14 富士フイルム株式会社 光電場増強デバイス、光測定装置および方法
JP5947182B2 (ja) 2012-09-28 2016-07-06 富士フイルム株式会社 光電場増強デバイスを用いた測定装置
JP5947181B2 (ja) 2012-09-28 2016-07-06 富士フイルム株式会社 光電場増強デバイスを用いた光測定装置
US9082930B1 (en) 2012-10-25 2015-07-14 Alphabet Energy, Inc. Nanostructured thermolectric elements and methods of making the same
KR20140068758A (ko) * 2012-11-28 2014-06-09 서울대학교산학협력단 미세 유체칩을 이용한 나노입자 분리 및 이를 이용한 생체물질분석방법
CN103048307A (zh) * 2012-12-23 2013-04-17 吉林大学 一种基于天然生物超疏水结构表面的增强拉曼检测基底及其制备方法
CN103149194B (zh) * 2013-02-28 2015-08-26 西安交通大学 一种表面增强拉曼散射基体的制备方法
JP2014190834A (ja) 2013-03-27 2014-10-06 Fujifilm Corp 光電場増強デバイスおよびその製造方法
CN103257132B (zh) * 2013-04-16 2015-03-25 上海大学 银纳米帽阵列表面增强拉曼活性基底及其制备方法
JP6423137B2 (ja) * 2013-04-30 2018-11-14 学校法人 東洋大学 表面増強分光用基板の製造方法
US20150048301A1 (en) * 2013-08-19 2015-02-19 Micron Technology, Inc. Engineered substrates having mechanically weak structures and associated systems and methods
KR101533646B1 (ko) * 2013-10-22 2015-07-03 한국과학기술원 금속 박막 패터닝 방법 및 이에 의해 제조된 검출기판을 이용한 생물화학 대상물질 검출 방법 방법
US20160322632A1 (en) * 2013-12-23 2016-11-03 Universitat Stuttgart Method for producing a porous nanocrystalline semiconductor layer, porous nanocrystalline semiconductor layer, use thereof, anode, and secondary lithium-ion battery
CN103745917B (zh) * 2013-12-31 2016-02-10 沈阳建筑大学 一种电场控制在单晶硅基片表面制备纳米结构的方法
US9691849B2 (en) 2014-04-10 2017-06-27 Alphabet Energy, Inc. Ultra-long silicon nanostructures, and methods of forming and transferring the same
CN105092555B (zh) * 2014-05-07 2018-05-29 中国科学院物理研究所 微流控表面增强拉曼测试芯片及其制备方法
JP6337127B2 (ja) * 2014-08-27 2018-06-06 富士フイルム株式会社 光電場増強デバイスおよび光電場増強デバイスの製造方法
CN104215625B (zh) * 2014-09-18 2017-09-26 浙江工业大学 电沉积法制作的表面增强拉曼光谱基底背景信号去除方法
CN104406953B (zh) * 2014-11-21 2017-10-27 中国科学院电子学研究所 多孔膜增敏的大面积均匀拉曼检测芯片及其制备方法
CN104597029B (zh) * 2015-01-21 2017-10-31 杭州电子科技大学 一种基于纳米多层结构增强的流体物质检测方法
CN104897640B (zh) * 2015-05-12 2017-10-20 吉林大学 一种在热点区域添加承载平台制备表面增强拉曼散射基底的方法
CN106918585B (zh) * 2016-03-25 2020-05-26 五邑大学 一种用于表面增强拉曼散射的基底系统及其制备方法
TWI592651B (zh) * 2016-08-31 2017-07-21 國立清華大學 金屬離子檢測設備及金屬離子檢測方法
CN110177618B (zh) 2016-10-03 2021-12-14 纳生科技有限公司 用于分析和识别分子的方法与装置
JP2017032580A (ja) * 2016-10-05 2017-02-09 ヒューレット−パッカード デベロップメント カンパニー エル.ピー.Hewlett‐Packard Development Company, L.P. 化学的な検知器
US10702866B2 (en) 2017-02-15 2020-07-07 International Business Machines Corporation Layered silicon and stacking of microfluidic chips
EP3401670A1 (de) * 2017-05-10 2018-11-14 ETH Zurich Verfahren, verwendungen von und vorrichtung zur oberflächenverstärkten raman-spektroskopie
CN111770837B (zh) * 2018-01-15 2023-01-10 南洋理工大学 用于感知尿代谢物和毒素的超疏水性平台
CN108872185B (zh) * 2018-03-22 2021-07-27 苏州英菲尼纳米科技有限公司 一种sers芯片的制备方法
KR102208108B1 (ko) * 2018-10-25 2021-01-27 서강대학교산학협력단 금속 나노 구조체의 정전기적 인력을 활용한 표면증강라만산란법 기반 생물전환 대사산물 검출 장치 및 방법
CN113330304A (zh) * 2018-12-05 2021-08-31 传感技术股份有限公司 使用多种金属减少体内分析物信号降解
CN109794172B (zh) * 2019-01-25 2021-05-14 广东省医疗器械研究所 一种用于血液净化的抗菌中空纤维膜的制备方法
US20220228992A1 (en) * 2019-05-06 2022-07-21 The Research Foundation For The State University Of New York Substrates for surface-enhanced raman spectroscopy and methods for manufacturing same
JP7280110B2 (ja) * 2019-05-28 2023-05-23 兵庫県公立大学法人 測定用基材及びその製造方法、並びに発光分光分析装置及び発光分光分析方法
CN110441284B (zh) * 2019-07-23 2022-02-15 海南大学 一种可用于痕量检测的表面增强拉曼散射芯片的制备方法及所得产品和应用
CN110579465A (zh) * 2019-10-24 2019-12-17 汎锶科艺股份有限公司 二硫代氨基甲酸盐类农药的检测方法
CN112014337B (zh) * 2020-08-25 2022-04-19 西湖大学 病原体的自动化检测装置及自动化检测方法
CN112547147B (zh) * 2020-11-23 2022-06-14 北京康敏生物科技有限公司 一种免疫检测芯片及其制备方法
CN113237867B (zh) * 2021-06-02 2022-07-05 江南大学 一种微流控与等离子体技术耦合制备表面增强拉曼基底的装置及方法
CN113567413A (zh) * 2021-06-18 2021-10-29 南京大学 一种基于低频拉曼散射技术检测单胺类神经递质的方法
WO2023288075A1 (en) * 2021-07-16 2023-01-19 Switchback Systems, Inc. Electrochemical fluidic valve and devices containing the same

Family Cites Families (85)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1988012A (en) * 1932-10-27 1935-01-15 Aluminum Co Of America Metal deposites in oxide coatings
GB590479A (en) 1943-08-11 1947-07-18 Shell Dev Production of olefin oxides
US3492151A (en) * 1966-04-06 1970-01-27 Du Pont Metallizing process
US3725307A (en) * 1967-01-30 1973-04-03 Halcon International Inc Process for preparing a silver-supported catalyst
US3702259A (en) * 1970-12-02 1972-11-07 Shell Oil Co Chemical production of metallic silver deposits
US3883307A (en) * 1971-10-21 1975-05-13 Ambac Ind Gas analyzer resistance element
US3932548A (en) * 1972-10-26 1976-01-13 Universal Oil Products Company Dehydrogenation method and multimetallic catalytic composite for use therein
US4102820A (en) * 1975-12-29 1978-07-25 Texaco Development Corp. Silver catalyst for ethylene epoxidation
US4097414A (en) * 1976-08-30 1978-06-27 Texaco Development Corp. Modified ethylene oxide catalyst and a process for its preparation
NL7915013A (nl) * 1978-03-08 1980-06-30 British Gas Corp Voor gas gevoelig element en een werkwijze voor de vervaardiging daarvan.
US4248741A (en) * 1979-05-29 1981-02-03 The Dow Chemical Company Method of making catalysts for the production of ethylene oxide
JPH0623725B2 (ja) * 1985-12-25 1994-03-30 日本特殊陶業株式会社 ガスセンサの調整法
US4801380A (en) * 1987-12-23 1989-01-31 The Texas A&M University System Method of producing a silicon film with micropores
JPH0312269A (ja) * 1989-06-12 1991-01-21 Mitsubishi Rayon Co Ltd 塗膜の形成方法
US5376556A (en) 1989-10-27 1994-12-27 Abbott Laboratories Surface-enhanced Raman spectroscopy immunoassay
US5255067A (en) 1990-11-30 1993-10-19 Eic Laboratories, Inc. Substrate and apparatus for surface enhanced Raman spectroscopy
GB9108176D0 (en) * 1991-04-17 1991-06-05 Secr Defence Electroluminescent silicon device
US5153489A (en) * 1991-06-10 1992-10-06 Unsworth Peter J Electric current measurement apparatus for a solid state motor controller
US5306403A (en) * 1992-08-24 1994-04-26 Martin Marietta Energy Systems, Inc. Raman-based system for DNA sequencing-mapping and other separations
WO1994013257A1 (en) * 1992-12-16 1994-06-23 Creative Products Resource Associates, Ltd. Occlusive/semi-occlusive lotion for treatment of a skin disease or disorder
US6893816B1 (en) * 1993-10-28 2005-05-17 Houston Advanced Research Center Microfabricated, flowthrough porous apparatus for discrete detection of binding reactions
US6001229A (en) * 1994-08-01 1999-12-14 Lockheed Martin Energy Systems, Inc. Apparatus and method for performing microfluidic manipulations for chemical analysis
DE4427921C2 (de) * 1994-08-06 2002-09-26 Forschungszentrum Juelich Gmbh Chemische Sensoren, insbesondere Biosensoren, auf Siliciumbasis
US5733507A (en) * 1995-06-07 1998-03-31 Inphocyte, Inc. Biological cell sample holder for use in infrared and/or Raman spectroscopy analysis holder
GB9611437D0 (en) * 1995-08-03 1996-08-07 Secr Defence Biomaterial
US5961815A (en) * 1995-08-28 1999-10-05 Catalytic Distillation Technologies Hydroconversion process
US6174677B1 (en) * 1995-10-13 2001-01-16 Ut-Battelle, Llc Advanced surface-enhanced Raman gene probe systems and methods thereof
US6040191A (en) * 1996-06-13 2000-03-21 Grow; Ann E. Raman spectroscopic method for determining the ligand binding capacity of biologicals
US5919364A (en) * 1996-06-24 1999-07-06 Regents Of The University Of California Microfabricated filter and shell constructed with a permeable membrane
DE19641777C2 (de) * 1996-10-10 2001-09-27 Micronas Gmbh Verfahren zum Herstellen eines Sensors mit einer Metallelektrode in einer MOS-Anordnung
US6002471A (en) * 1996-11-04 1999-12-14 California Institute Of Technology High resolution scanning raman microscope
US5852306A (en) * 1997-01-29 1998-12-22 Micron Technology, Inc. Flash memory with nanocrystalline silicon film floating gate
WO1998037417A1 (en) * 1997-02-20 1998-08-27 The Regents Of The University Of California Plasmon resonant particles, methods and apparatus
US6344272B1 (en) * 1997-03-12 2002-02-05 Wm. Marsh Rice University Metal nanoshells
US5994164A (en) * 1997-03-18 1999-11-30 The Penn State Research Foundation Nanostructure tailoring of material properties using controlled crystallization
US6017773A (en) * 1997-04-04 2000-01-25 University Of Rochester Stabilizing process for porous silicon and resulting light emitting device
US5850064A (en) * 1997-04-11 1998-12-15 Starfire Electronics Development & Marketing, Ltd. Method for photolytic liquid phase synthesis of silicon and germanium nanocrystalline materials
US5770022A (en) * 1997-06-05 1998-06-23 Dow Corning Corporation Method of making silica nanoparticles
US6096496A (en) * 1997-06-19 2000-08-01 Frankel; Robert D. Supports incorporating vertical cavity emitting lasers and tracking apparatus for use in combinatorial synthesis
AUPO912797A0 (en) * 1997-09-11 1997-10-02 Australian National University, The Ultrafast laser deposition method
US6406984B1 (en) * 1997-10-06 2002-06-18 The United States Of America As Represented By The Secretary Of The Navy Method of making improved electrical contact to porous silicon using intercalated conductive materials
US6149868A (en) * 1997-10-28 2000-11-21 The Penn State Research Foundation Surface enhanced raman scattering from metal nanoparticle-analyte-noble metal substrate sandwiches
TW391022B (en) * 1997-10-29 2000-05-21 Mitsubishi Rayon Co Field emission electron source, method of producing the same, and use of the same
US6197503B1 (en) * 1997-11-26 2001-03-06 Ut-Battelle, Llc Integrated circuit biochip microsystem containing lens
US7267948B2 (en) * 1997-11-26 2007-09-11 Ut-Battelle, Llc SERS diagnostic platforms, methods and systems microarrays, biosensors and biochips
US6426126B1 (en) * 1997-12-19 2002-07-30 Amt Holdings, Inc. Preparation of metal coatings
US6136389A (en) * 1997-12-19 2000-10-24 Amt Holdings, Inc. Preparation of metal coatings
US6153489A (en) * 1997-12-22 2000-11-28 Electronics And Telecommunications Research Institute Fabrication method of inductor devices using a substrate conversion technique
JP2002501001A (ja) * 1998-01-22 2002-01-15 パーデュー・リサーチ・ファウンデーション 官能性多孔性珪素表面
US6226082B1 (en) * 1998-06-25 2001-05-01 Amira Medical Method and apparatus for the quantitative analysis of a liquid sample with surface enhanced spectroscopy
EP0984269A1 (de) 1998-08-04 2000-03-08 Alusuisse Technology & Management AG (Alusuisse Technology & Management SA) (Alusuisse Technology & Management Ltd.) Trägersubstrat für Raman-spektrometrische Analysen
US6263286B1 (en) * 1998-08-13 2001-07-17 U.S. Genomics, Inc. Methods of analyzing polymers using a spatial network of fluorophores and fluorescence resonance energy transfer
US6136689A (en) * 1998-08-14 2000-10-24 Micron Technology, Inc. Method of forming a micro solder ball for use in C4 bonding process
CN1118103C (zh) * 1998-10-21 2003-08-13 李韫言 微细加工热辐射红外传感器
US6171945B1 (en) * 1998-10-22 2001-01-09 Applied Materials, Inc. CVD nanoporous silica low dielectric constant films
GB9828285D0 (en) * 1998-12-22 1999-02-17 Ecc Int Ltd Porous inorganic granular material
US6749814B1 (en) * 1999-03-03 2004-06-15 Symyx Technologies, Inc. Chemical processing microsystems comprising parallel flow microreactors and methods for using same
JP2000307112A (ja) * 1999-04-26 2000-11-02 Mitsubishi Electric Corp 半導体装置及びその製造方法
KR20020012214A (ko) * 1999-05-06 2002-02-15 추후제출 퓨얼 셀 및 멤브레인
US6136704A (en) * 1999-05-26 2000-10-24 Ut-Battelle, Llc Method for forming porous platinum films
US6399177B1 (en) 1999-06-03 2002-06-04 The Penn State Research Foundation Deposited thin film void-column network materials
US6504292B1 (en) * 1999-07-15 2003-01-07 Agere Systems Inc. Field emitting device comprising metallized nanostructures and method for making the same
US6417135B1 (en) * 1999-08-27 2002-07-09 Huntsman Petrochemical Corporation Advances in dehydrogenation catalysis
US6376177B1 (en) * 1999-10-06 2002-04-23 Virtual Pro, Inc. Apparatus and method for the analysis of nucleic acids hybridization on high density NA chips
US6623977B1 (en) * 1999-11-05 2003-09-23 Real-Time Analyzers, Inc. Material for surface-enhanced Raman spectroscopy, and SER sensors and method for preparing same
JP3989148B2 (ja) * 1999-12-01 2007-10-10 独立行政法人科学技術振興機構 金属微粒子の光固定化方法
US6294442B1 (en) * 1999-12-10 2001-09-25 National Semiconductor Corporation Method for the formation of a polysilicon layer with a controlled, small silicon grain size during semiconductor device fabrication
US7427526B2 (en) 1999-12-20 2008-09-23 The Penn State Research Foundation Deposited thin films and their use in separation and sacrificial layer applications
JP5057318B2 (ja) * 1999-12-30 2012-10-24 アドビオン インコーポレイテッド 多重電気噴霧装置、システム、および方法
US6673644B2 (en) * 2001-03-29 2004-01-06 Georgia Tech Research Corporation Porous gas sensors and method of preparation thereof
US6330193B1 (en) * 2000-03-31 2001-12-11 Rambus, Inc. Method and apparatus for low capacitance, high output impedance driver
GB2373367A (en) 2000-12-12 2002-09-18 Univ Montfort Formation and processing of porous semiconductors using etching solution of oxidant and fluorine-containing Lewis acid
US6861263B2 (en) * 2001-01-26 2005-03-01 Surromed, Inc. Surface-enhanced spectroscopy-active sandwich nanoparticles
GB0112238D0 (en) * 2001-05-18 2001-07-11 Medical Biosystems Ltd Sequencing method
US7238477B2 (en) * 2001-09-24 2007-07-03 Intel Corporation Methods to increase nucleotide signals by Raman scattering
US6972173B2 (en) * 2002-03-14 2005-12-06 Intel Corporation Methods to increase nucleotide signals by raman scattering
JP4270792B2 (ja) * 2002-01-23 2009-06-03 富士通株式会社 導電性材料及びビアホールの充填方法
US6797405B1 (en) * 2002-05-01 2004-09-28 The Ohio State University Method for uniform electrochemical reduction of apertures to micron and submicron dimensions using commercial biperiodic metallic mesh arrays and devices derived therefrom
US6989897B2 (en) * 2002-06-12 2006-01-24 Intel Corporation Metal coated nanocrystalline silicon as an active surface enhanced Raman spectroscopy (SERS) substrate
US7361313B2 (en) * 2003-02-18 2008-04-22 Intel Corporation Methods for uniform metal impregnation into a nanoporous material
US6970239B2 (en) * 2002-06-12 2005-11-29 Intel Corporation Metal coated nanocrystalline silicon as an active surface enhanced Raman spectroscopy (SERS) substrate
GB0220755D0 (en) * 2002-09-06 2002-10-16 Univ Cambridge Tech Terahertz spectroscopy
US6806543B2 (en) * 2002-09-12 2004-10-19 Intel Corporation Microfluidic apparatus with integrated porous-substrate/sensor for real-time (bio)chemical molecule detection
US7192703B2 (en) * 2003-02-14 2007-03-20 Intel Corporation, Inc. Biomolecule analysis by rolling circle amplification and SERS detection
US7442339B2 (en) * 2004-03-31 2008-10-28 Intel Corporation Microfluidic apparatus, Raman spectroscopy systems, and methods for performing molecular reactions

Also Published As

Publication number Publication date
JP2006514286A (ja) 2006-04-27
US7608305B2 (en) 2009-10-27
US20070116882A1 (en) 2007-05-24
US20040161369A1 (en) 2004-08-19
US7361313B2 (en) 2008-04-22
ATE453853T1 (de) 2010-01-15
US8367017B2 (en) 2013-02-05
US7771661B2 (en) 2010-08-10
AU2003282750A1 (en) 2004-09-09
US20130243656A1 (en) 2013-09-19
WO2004074790A1 (en) 2004-09-02
US20070116605A1 (en) 2007-05-24
EP1595120B1 (de) 2009-12-30
JP2014178327A (ja) 2014-09-25
JP5085006B2 (ja) 2012-11-28
EP1595120A1 (de) 2005-11-16
CN1745291A (zh) 2006-03-08
JP2011221032A (ja) 2011-11-04
JP6029614B2 (ja) 2016-11-24
CN100498247C (zh) 2009-06-10
US20100171950A1 (en) 2010-07-08
US8709355B2 (en) 2014-04-29

Similar Documents

Publication Publication Date Title
DE60330809D1 (de) Metallbeschichtetes nanokristallines silizium als aktives substrat für oberflächenverstärkte ramanspektroskopie (sers)
Han et al. Effect of oxidation on surface-enhanced Raman scattering activity of silver nanoparticles: a quantitative correlation
Stiger et al. Investigations of electrochemical silver nanocrystal growth on hydrogen-terminated silicon (100)
Williamson et al. Porous GaN as a template to produce surface-enhanced Raman scattering-active surfaces
Mardegan et al. Electroanalysis of trace inorganic arsenic with gold nanoelectrode ensembles
MY134271A (en) Metal coated nanocrystalline silicon as an active surface enhanced raman spectroscopy (sers) substrate
Baron et al. SERS and electrochemical studies of the gold–electrolyte interface under thiosulfate based leaching conditions
Sefer et al. Electrochemical deposition of gold at liquid–liquid interfaces studied by thin organic film-modified electrodes
Mengoli et al. Enhanced Raman scattering from iron electrodes
Ko et al. Cu2O nanowires in an alumina template: Electrochemical conditions for the synthesis and photoluminescence characteristics
WO2009124180A3 (en) In situ plating and soldering of materials covered with a surface film
WO2007058913A3 (en) Hydrogen transport membrane fabrication method
TW200502084A (en) Production method for drilled porous resin substrate, and making the inner-wall of penetrated hole of the porous resin substrate conductive
EP1160846A3 (de) Verfahren zur elektrischen Vorspannung zur Verbesserung von Metallabcheidung
Zhang et al. Three-dimensional gallium nitride nanoflowers supports decorated by gold or silver nanoparticles to fabricate surface-enhanced Raman scattering substrates
Öhl et al. Optimized Ag nanovoid structures for probing electrocatalytic carbon dioxide reduction using operando surface-enhanced Raman spectroscopy
Cheon et al. The effect of bath conditions on the electroless nickel plating on the porous carbon substrate
TW200632146A (en) Immersion process for electroplating applications
Li et al. Studies on the electrochemical reduction processes of HTeO 2+ by CV and EIS
Gonnissen et al. Investigation of the mechanism of silver deposition from thiosulphate solutions by means of ac impedance measurements and surface-enhanced Raman spectroscopy
Uma Rani et al. Studies on black electroless nickel coatings on titanium alloys for spacecraft thermal control applications
Jin et al. Novel and Green Chemical Compound of HAu (Cys) 2: Toward a Simple and Sustainable Electrolyte Recipe for Cyanide-Free Gold Electrodeposition
Hyun et al. Simple Electrodeposition of Dendritic Au Rods from Sulfite‐Based Au (I) Electrolytes with High Electrocatalytic and SERS Activities
Accogli et al. Understanding the failure mode of electroless nickel immersion gold process: in situ-Raman spectroscopy and electrochemical characterization
Lee et al. Fabrication of nanoporous gold thin films on glass substrates for amperometric sensing of aniline

Legal Events

Date Code Title Description
8364 No opposition during term of opposition