DE68908722D1 - Dampf-Phasen-Verfahren zur Herstellung eines Diamanten. - Google Patents

Dampf-Phasen-Verfahren zur Herstellung eines Diamanten.

Info

Publication number
DE68908722D1
DE68908722D1 DE89300049T DE68908722T DE68908722D1 DE 68908722 D1 DE68908722 D1 DE 68908722D1 DE 89300049 T DE89300049 T DE 89300049T DE 68908722 T DE68908722 T DE 68908722T DE 68908722 D1 DE68908722 D1 DE 68908722D1
Authority
DE
Germany
Prior art keywords
diamond
making
vapor phase
phase process
vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE89300049T
Other languages
English (en)
Other versions
DE68908722T2 (de
Inventor
Yoichi Hirose
Kunio Komaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Holdings Corp
Original Assignee
Showa Denko KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko KK filed Critical Showa Denko KK
Application granted granted Critical
Publication of DE68908722D1 publication Critical patent/DE68908722D1/de
Publication of DE68908722T2 publication Critical patent/DE68908722T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/25—Diamond
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only
    • C23C16/275—Diamond only using combustion torches
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/25—Diamond
    • C01B32/26—Preparation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/453—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/04—Diamond
DE89300049T 1988-01-14 1989-01-05 Dampf-Phasen-Verfahren zur Herstellung eines Diamanten. Expired - Fee Related DE68908722T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP478088 1988-01-14
JP63071758A JP2597497B2 (ja) 1988-01-14 1988-03-28 気相法ダイヤモンドの合成法

Publications (2)

Publication Number Publication Date
DE68908722D1 true DE68908722D1 (de) 1993-10-07
DE68908722T2 DE68908722T2 (de) 1993-12-16

Family

ID=26338616

Family Applications (1)

Application Number Title Priority Date Filing Date
DE89300049T Expired - Fee Related DE68908722T2 (de) 1988-01-14 1989-01-05 Dampf-Phasen-Verfahren zur Herstellung eines Diamanten.

Country Status (5)

Country Link
US (1) US4938940A (de)
EP (1) EP0324538B1 (de)
JP (1) JP2597497B2 (de)
KR (1) KR920000781B1 (de)
DE (1) DE68908722T2 (de)

Families Citing this family (53)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1988007599A1 (en) * 1987-03-23 1988-10-06 Showa Denko Kabushiki Kaisha Composite diamond particles
US5268201A (en) * 1987-10-20 1993-12-07 Showa Denko Kabushiki Kaisha Composite diamond grain and method for production thereof
US5071708A (en) * 1987-10-20 1991-12-10 Showa Denko K.K. Composite diamond grain
JPH08757B2 (ja) * 1988-12-26 1996-01-10 住友電気工業株式会社 ダイヤモンドおよびその気相合成法
WO1989011556A1 (en) * 1988-05-28 1989-11-30 Sumitomo Electric Industries, Ltd. Process for vapor-phase synthesis of diamond
US5258206A (en) * 1989-01-13 1993-11-02 Idemitsu Petrochemical Co., Ltd. Method and apparatus for producing diamond thin films
JPH0794360B2 (ja) * 1989-01-24 1995-10-11 住友電気工業株式会社 ダイヤモンドの気相合成法
JPH0780718B2 (ja) * 1989-08-04 1995-08-30 トヨタ自動車株式会社 ダイヤモンドの合成方法および合成装置
EP0445305B1 (de) * 1989-09-22 1995-03-29 Showa Denko Kabushiki Kaisha Verfahren zur herstellung von diamant mittels dampfniederschlag auf elektrochemisch behandeltem substrat
US5273618A (en) * 1989-11-28 1993-12-28 Showa Denko K.K. Apparatus for vapor-phase synthesis of diamond and method for vapor-phase synthesis of diamond
US5154945A (en) * 1990-03-05 1992-10-13 Iowa Laser Technology, Inc. Methods using lasers to produce deposition of diamond thin films on substrates
GB2243150B (en) * 1990-03-28 1994-06-29 Kobe Steel Ltd Method for synthesizing diamond by combustion
US5704976A (en) * 1990-07-06 1998-01-06 The United States Of America As Represented By The Secretary Of The Navy High temperature, high rate, epitaxial synthesis of diamond in a laminar plasma
US5215788A (en) * 1990-07-06 1993-06-01 Kabushiki Kaisha Toyota Chuo Kenkyusho Combustion flame method for forming diamond films
JPH0492892A (ja) * 1990-08-03 1992-03-25 Japan Steel Works Ltd:The ダイヤモンドの製造方法
US5174983A (en) * 1990-09-24 1992-12-29 The United States Of America, As Represented By The Secretary Of The Navy Flame or plasma synthesis of diamond under turbulent and transition flow conditions
DE4030675C2 (de) * 1990-09-28 1998-10-29 Philips Patentverwaltung Vorrichtung und Verfahren zur Abscheidung von Materialien auf einem Substrat
JP2579071B2 (ja) * 1991-03-18 1997-02-05 富士通株式会社 ダイヤモンド膜形成方法及びその形成装置
DE69125118T2 (de) * 1990-12-15 1997-06-19 Fujitsu Ltd Verfahren zur Herstellung eines Diamant-Überzuges
US5246746A (en) * 1991-04-26 1993-09-21 Michalske Terry A Method for forming hermetic coatings for optical fibers
US5374414A (en) * 1991-05-10 1994-12-20 The United States Of America As Represented By The Secretary Of The Navy Self-supporting diamond filaments
DE4115930C1 (de) * 1991-05-16 1992-08-27 Utp Schweissmaterial Gmbh & Co Kg, 7812 Bad Krozingen, De
US5381755A (en) * 1991-08-20 1995-01-17 The United States Of America As Represented By The Secretary Of The Navy Method of synthesizing high quality, doped diamond and diamonds and devices obtained therefrom
US5240749A (en) * 1991-08-27 1993-08-31 University Of Central Florida Method for growing a diamond thin film on a substrate by plasma enhanced chemical vapor deposition
US5411758A (en) * 1991-10-09 1995-05-02 Norton Company Method of making synthetic diamond wear component
CA2077773A1 (en) * 1991-10-25 1993-04-26 Thomas R. Anthony Microwave, rf, or ac/dc discharge assisted flame deposition of cvd diamond
JP3121102B2 (ja) * 1992-03-26 2000-12-25 キヤノン株式会社 平板ダイヤモンド結晶、及びその形成方法
US5276338A (en) * 1992-05-15 1994-01-04 International Business Machines Corporation Bonded wafer structure having a buried insulation layer
US5665430A (en) * 1992-09-30 1997-09-09 The United States Of America As Represented By The Secretary Of The Navy Chemical vapor deposition method for depositing diamond using a high temperature vacuum substrate mount
US5837081A (en) * 1993-04-07 1998-11-17 Applied Sciences, Inc. Method for making a carbon-carbon composite
US5389400A (en) * 1993-04-07 1995-02-14 Applied Sciences, Inc. Method for making a diamond/carbon/carbon composite useful as an integral dielectric heat sink
US5318801A (en) * 1993-05-18 1994-06-07 United States Of America As Represented By The Secretary Of The Navy Substrate temperature control apparatus and technique for CVD reactors
US5433977A (en) * 1993-05-21 1995-07-18 Trustees Of Boston University Enhanced adherence of diamond coatings by combustion flame CVD
US5674572A (en) * 1993-05-21 1997-10-07 Trustees Of Boston University Enhanced adherence of diamond coatings employing pretreatment process
US5643343A (en) * 1993-11-23 1997-07-01 Selifanov; Oleg Vladimirovich Abrasive material for precision surface treatment and a method for the manufacturing thereof
US5731046A (en) * 1994-01-18 1998-03-24 Qqc, Inc. Fabrication of diamond and diamond-like carbon coatings
US5620754A (en) * 1994-01-21 1997-04-15 Qqc, Inc. Method of treating and coating substrates
US5554415A (en) * 1994-01-18 1996-09-10 Qqc, Inc. Substrate coating techniques, including fabricating materials on a surface of a substrate
ATE180021T1 (de) * 1994-02-23 1999-05-15 Linde Ag Verfahren zur herstellung von diamantschichten
US5711773A (en) * 1994-11-17 1998-01-27 Plasmoteg Engineering Center Abrasive material for precision surface treatment and a method for the manufacturing thereof
WO1998046812A1 (fr) * 1997-04-16 1998-10-22 Ooo 'vysokie Tekhnologii' Procede de production de pellicules de diamant selon la methode de synthese en phase vapeur
US6214473B1 (en) 1998-05-13 2001-04-10 Andrew Tye Hunt Corrosion-resistant multilayer coatings
US6660329B2 (en) 2001-09-05 2003-12-09 Kennametal Inc. Method for making diamond coated cutting tool
DE60315846T2 (de) 2002-10-04 2008-05-21 Tyco Healthcare Group Lp, Norwalk Zusammenbau von chirurgischem klammerwerkzeug
US20040122515A1 (en) * 2002-11-21 2004-06-24 Xi Chu Prosthetic valves and methods of manufacturing
US8555921B2 (en) 2002-12-18 2013-10-15 Vapor Technologies Inc. Faucet component with coating
US8220489B2 (en) 2002-12-18 2012-07-17 Vapor Technologies Inc. Faucet with wear-resistant valve component
US7866343B2 (en) 2002-12-18 2011-01-11 Masco Corporation Of Indiana Faucet
US7866342B2 (en) 2002-12-18 2011-01-11 Vapor Technologies, Inc. Valve component for faucet
DE10335470A1 (de) * 2003-08-02 2005-02-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zur Beschichtung oder Modifizierung von Oberflächen
EP1888810A2 (de) * 2004-12-10 2008-02-20 Koninklijke Philips Electronics N.V. Substrattemperatursteuerung für verbrennungs-cvd
EP1874978A2 (de) * 2004-12-10 2008-01-09 Koninklijke Philips Electronics N.V. Verbrennungs-cvd auf temperaturempfindlichen substraten
CN106362808A (zh) * 2016-08-31 2017-02-01 上海甘澍环境科技有限公司 一种火焰气相沉积装置以及原位负载光催化材料的制备方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3030188A (en) * 1958-07-23 1962-04-17 Union Carbide Corp Synthesis of diamond
US3030187A (en) * 1958-07-23 1962-04-17 Union Carbide Corp Synthesis of diamond
US3371996A (en) * 1964-01-20 1968-03-05 Henry J. Hibshman Diamond growth process
US3661526A (en) * 1969-06-24 1972-05-09 Univ Case Western Reserve Process for the catalytic growth of metastable crystals from the vapor phase
GB1298369A (en) * 1970-05-01 1972-11-29 Inst Fizicheskoi Khim An Sssr A method of synthesising diamond
US3714334A (en) * 1971-05-03 1973-01-30 Diamond Squared Ind Inc Process for epitaxial growth of diamonds
CH582621A5 (de) * 1972-02-03 1976-12-15 I Fizicheskoi Khim Akademii Na
FR2479174A1 (fr) * 1978-08-04 1981-10-02 Duchaine Marcel Procede pour la reproduction du diamant
SE442305B (sv) * 1984-06-27 1985-12-16 Santrade Ltd Forfarande for kemisk gasutfellning (cvd) for framstellning av en diamantbelagd sammansatt kropp samt anvendning av kroppen
JPS61163195A (ja) * 1985-01-09 1986-07-23 Showa Denko Kk ダイヤモンド気相合成法及びその装置
JPS61286299A (ja) * 1985-06-07 1986-12-16 Asahi Chem Ind Co Ltd ダイヤモンドの製造方法
JPS62113796A (ja) * 1985-11-14 1987-05-25 Asahi Chem Ind Co Ltd ダイヤモンド膜の製造方法
US4816286A (en) * 1985-11-25 1989-03-28 Showa Denko Kabushiki Kaisha Process for synthesis of diamond by CVD
DE3612340A1 (de) * 1986-04-11 1987-10-15 Wilhelm Knapp Verfahren fuer diamantwachstum

Also Published As

Publication number Publication date
EP0324538A1 (de) 1989-07-19
EP0324538B1 (de) 1993-09-01
DE68908722T2 (de) 1993-12-16
JP2597497B2 (ja) 1997-04-09
JPH01282193A (ja) 1989-11-14
KR890011777A (ko) 1989-08-22
US4938940A (en) 1990-07-03
KR920000781B1 (ko) 1992-01-23

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee