DE69003339D1 - Beschleunigungsmesser mit koplanaren symmetrischen kraftübertragern. - Google Patents

Beschleunigungsmesser mit koplanaren symmetrischen kraftübertragern.

Info

Publication number
DE69003339D1
DE69003339D1 DE90903104T DE69003339T DE69003339D1 DE 69003339 D1 DE69003339 D1 DE 69003339D1 DE 90903104 T DE90903104 T DE 90903104T DE 69003339 T DE69003339 T DE 69003339T DE 69003339 D1 DE69003339 D1 DE 69003339D1
Authority
DE
Germany
Prior art keywords
accelerometer
transmissions
coplanar
symmetric
coplanar symmetric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE90903104T
Other languages
English (en)
Other versions
DE69003339T2 (de
Inventor
Mitchell Novak
Brian Norling
James Woodruff
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sundstrand Corp
Original Assignee
Sundstrand Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sundstrand Corp filed Critical Sundstrand Corp
Publication of DE69003339D1 publication Critical patent/DE69003339D1/de
Application granted granted Critical
Publication of DE69003339T2 publication Critical patent/DE69003339T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
DE90903104T 1989-02-27 1990-01-08 Beschleunigungsmesser mit koplanaren symmetrischen kraftübertragern. Expired - Lifetime DE69003339T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/316,399 US5005413A (en) 1989-02-27 1989-02-27 Accelerometer with coplanar push-pull force transducers

Publications (2)

Publication Number Publication Date
DE69003339D1 true DE69003339D1 (de) 1993-10-21
DE69003339T2 DE69003339T2 (de) 1994-02-17

Family

ID=23228877

Family Applications (1)

Application Number Title Priority Date Filing Date
DE90903104T Expired - Lifetime DE69003339T2 (de) 1989-02-27 1990-01-08 Beschleunigungsmesser mit koplanaren symmetrischen kraftübertragern.

Country Status (7)

Country Link
US (1) US5005413A (de)
EP (1) EP0419596B1 (de)
JP (1) JPH0830717B2 (de)
CN (1) CN1045297A (de)
CA (1) CA2010610A1 (de)
DE (1) DE69003339T2 (de)
WO (1) WO1990010237A1 (de)

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WO1992003740A1 (en) * 1990-08-17 1992-03-05 Analog Devices, Inc. Monolithic accelerometer
US5314572A (en) * 1990-08-17 1994-05-24 Analog Devices, Inc. Method for fabricating microstructures
US5417111A (en) * 1990-08-17 1995-05-23 Analog Devices, Inc. Monolithic chip containing integrated circuitry and suspended microstructure
US5326726A (en) * 1990-08-17 1994-07-05 Analog Devices, Inc. Method for fabricating monolithic chip containing integrated circuitry and suspended microstructure
US5241861A (en) * 1991-02-08 1993-09-07 Sundstrand Corporation Micromachined rate and acceleration sensor
JPH04309866A (ja) * 1991-04-05 1992-11-02 Japan Aviation Electron Ind Ltd 振動式加速度計
US5289719A (en) * 1991-11-13 1994-03-01 New Sd, Inc. Accelerometer with temperature compensation and matched force transducers
US5391844A (en) 1992-04-03 1995-02-21 Weigh-Tronix Inc Load cell
US5442146A (en) 1992-04-03 1995-08-15 Weigh-Tronix, Inc. Counting scale and load cell assembly therefor
US5313023A (en) 1992-04-03 1994-05-17 Weigh-Tronix, Inc. Load cell
US5336854A (en) 1992-04-03 1994-08-09 Weigh-Tronix, Inc. Electronic force sensing load cell
US5379639A (en) * 1992-12-10 1995-01-10 Alliedsignal Inc. Combined force transducer and temperature sensor
US5456110A (en) * 1993-11-12 1995-10-10 Alliedsignal Inc. Dual pendulum vibrating beam accelerometer
US5456111A (en) * 1994-01-24 1995-10-10 Alliedsignal Inc. Capacitive drive vibrating beam accelerometer
FR2720509B1 (fr) * 1994-05-27 1996-08-23 Sextant Avionique Microaccéléromètre à résonateur compensé en température.
US5594170A (en) * 1994-06-15 1997-01-14 Alliedsignal Inc. Kip cancellation in a pendulous silicon accelerometer
DE69509312T2 (de) * 1994-06-29 1999-11-04 New Sd Inc Beschleunigungsmesser sowie Verfahren zu seiner Herstellung
US5962788A (en) * 1994-08-18 1999-10-05 Btg International Limited Transducer
US5886259A (en) * 1996-04-01 1999-03-23 Alliedsignal Inc. Axis aligned rate and acceleration sensor
US5948981A (en) * 1996-05-21 1999-09-07 Alliedsignal Inc. Vibrating beam accelerometer
EP0904544B1 (de) * 1996-06-11 2003-01-15 AlliedSignal Inc. Kompensation von nichtlinearitäten zweiter ordnung in sensoren mit doppelend-stimmgabeln
US5739431A (en) * 1996-06-13 1998-04-14 Alliedsignal, Inc. Miniature magnetometer-accelerometer
US5996411A (en) * 1996-11-25 1999-12-07 Alliedsignal Inc. Vibrating beam accelerometer and method for manufacturing the same
US6106776A (en) * 1997-04-11 2000-08-22 University Of Pittsburgh Membrane apparatus with enhanced mass transfer via active mixing
US6723284B1 (en) 1997-04-11 2004-04-20 University Of Pittsburgh Membrane apparatus with enhanced mass transfer, heat transfer and pumping capabilities via active mixing
US5962784A (en) * 1997-05-27 1999-10-05 Alliedsignal Inc. Micromachined rate and acceleration sensor
US6230565B1 (en) 1997-05-29 2001-05-15 Alliedsignal Inc. Pressure-compensated transducers, pressure-compensated accelerometers, force-sensing methods, and acceleration-sensing methods
US6161440A (en) 1997-08-14 2000-12-19 Alliedsignal Inc. Low metalization creep sensor
US6351891B1 (en) 1997-12-18 2002-03-05 Honeywell International, Inc. Miniature directional indication instrument
US5948982A (en) * 1998-02-23 1999-09-07 Alliedsignal Inc. Vibrating beam accelerometers and methods of forming vibrating beam accelerometers
FR2784752B1 (fr) * 1998-10-20 2000-11-17 Onera (Off Nat Aerospatiale) Accelerometre miniature monolithique
US6257060B1 (en) * 1999-06-22 2001-07-10 Alliedsignal Inc. Combined enhanced shock load capability and stress isolation structure for an improved performance silicon micro-machined accelerometer
WO2002057799A2 (en) * 2001-01-17 2002-07-25 Honeywell International Inc. Accelerometer whose seismic mass is shaped as whiffletree
US6701786B2 (en) 2002-04-29 2004-03-09 L-3 Communications Corporation Closed loop analog gyro rate sensor
ES2300746T3 (es) 2003-02-20 2008-06-16 Covidien Ag Detector del movimiento para controlar la salida electroquirurgica.
US7069790B1 (en) * 2005-05-17 2006-07-04 Honeywell International Inc. Systems and methods for measuring relative thermal expansion coefficient of low thermal coefficient of expansion materials
US7467553B2 (en) 2005-12-22 2008-12-23 Honeywell International Inc. Capacitively coupled resonator drive
US7444883B2 (en) * 2005-12-22 2008-11-04 Honeywell International Inc. Vibrating beam force transducer
US7498728B2 (en) 2006-06-21 2009-03-03 Pressure Systems, Inc. Vibrating beam force sensor of improved ruggedness and mountability
JP4784436B2 (ja) * 2006-08-09 2011-10-05 エプソントヨコム株式会社 加速度センサ
JP2008309731A (ja) * 2007-06-18 2008-12-25 Epson Toyocom Corp 加速度検知ユニット及び加速度センサ
FR2941533B1 (fr) * 2009-01-23 2011-03-11 Commissariat Energie Atomique Capteur inertiel ou resonnant en technologie de surface, a detection hors plan par jauge de contrainte.
US8307710B2 (en) * 2009-07-09 2012-11-13 Honeywell International Inc. Translational mass in-plane MEMS accelerometer
JP2011117944A (ja) * 2009-10-29 2011-06-16 Seiko Epson Corp 加速度センサー
GB201009062D0 (en) * 2010-05-28 2010-07-14 Cambridge Entpr Ltd MEMS inertial sensor and method of inertial sensing
JP5641296B2 (ja) * 2010-06-16 2014-12-17 セイコーエプソン株式会社 周波数計測装置、並びに同装置を備えるニオイセンサー及び電子機器
GB2505875A (en) * 2012-09-04 2014-03-19 Cambridge Entpr Ltd Dual and triple axis inertial sensors and methods of inertial sensing
WO2014126019A1 (ja) * 2013-02-13 2014-08-21 株式会社村田製作所 加速度センサ
KR101531093B1 (ko) * 2013-07-31 2015-06-23 삼성전기주식회사 가속도 센서 및 각속도 센서
US10823754B2 (en) 2014-11-14 2020-11-03 Honeywell International Inc. Accelerometer with strain compensation
US9689888B2 (en) * 2014-11-14 2017-06-27 Honeywell International Inc. In-plane vibrating beam accelerometer
GB2561887B (en) 2017-04-27 2022-10-05 Cambridge Entpr Ltd High performance micro-electro-mechanical systems accelerometer with suspended sensor arrangement
CN111289773B (zh) * 2018-12-06 2022-08-09 航天科工惯性技术有限公司 一种加速度计振动整流误差试验装置及方法
FR3094709B1 (fr) * 2019-04-08 2022-10-07 Commissariat Energie Atomique Charniere offrant une sensibilite aux contraintes internes reduite

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US4215570A (en) * 1979-04-20 1980-08-05 The United States Of America As Represented By The United States Department Of Energy Miniature quartz resonator force transducer
US4221131A (en) * 1979-05-29 1980-09-09 The Singer Company Vibrating beam accelerometer
JPS5719449Y2 (de) * 1980-02-22 1982-04-23
US4372173A (en) * 1980-10-20 1983-02-08 Quartex, Inc. Resonator force transducer
US4488445A (en) * 1983-10-28 1984-12-18 Honeywell Inc. Integrated silicon accelerometer with cross-axis compensation
GB8418914D0 (en) * 1984-07-25 1984-08-30 Standard Telephones Cables Ltd Transducer
US4793194A (en) * 1985-03-26 1988-12-27 Endevco Corporation Piezoresistive transducer
JPS62221164A (ja) * 1986-03-24 1987-09-29 Mitsubishi Electric Corp 半導体加速度センサ
US4751849A (en) * 1986-06-17 1988-06-21 Paroscientific, Inc. Force-sensitive resonator load cell
US4718275A (en) * 1986-06-27 1988-01-12 Sundstrand Data Control, Inc. Accelerometer with floating beam temperature compensation
EP0273048B1 (de) * 1986-06-27 1993-05-05 Sundstrand Corporation Translationsbeschleunigungsmesser
JPS63252257A (ja) * 1986-11-20 1988-10-19 Aisin Seiki Co Ltd 加速度検出装置
JPS63222464A (ja) * 1987-03-11 1988-09-16 Fujitsu Ltd 半導体加速度センサ
US4879914A (en) * 1989-02-27 1989-11-14 Sundstrand Data Control, Inc. Unitary push-pull force transducer

Also Published As

Publication number Publication date
DE69003339T2 (de) 1994-02-17
WO1990010237A1 (en) 1990-09-07
EP0419596A1 (de) 1991-04-03
CA2010610A1 (en) 1990-08-31
JPH03501530A (ja) 1991-04-04
EP0419596A4 (en) 1991-07-24
US5005413A (en) 1991-04-09
CN1045297A (zh) 1990-09-12
EP0419596B1 (de) 1993-09-15
JPH0830717B2 (ja) 1996-03-27

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