DE69009088T2 - Verbindungsverfahren für Schaltungen und Klebefilm dafür. - Google Patents

Verbindungsverfahren für Schaltungen und Klebefilm dafür.

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Publication number
DE69009088T2
DE69009088T2 DE69009088T DE69009088T DE69009088T2 DE 69009088 T2 DE69009088 T2 DE 69009088T2 DE 69009088 T DE69009088 T DE 69009088T DE 69009088 T DE69009088 T DE 69009088T DE 69009088 T2 DE69009088 T2 DE 69009088T2
Authority
DE
Germany
Prior art keywords
circuits
adhesive film
connection method
film therefor
therefor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69009088T
Other languages
English (en)
Other versions
DE69009088D1 (de
Inventor
Isao Tsukagoshi
Yutaka Yamaguchi
Atsuo Nakajima
Yasushi Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Showa Denko Materials Co ltd
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=26397760&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69009088(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Application granted granted Critical
Publication of DE69009088D1 publication Critical patent/DE69009088D1/de
Publication of DE69009088T2 publication Critical patent/DE69009088T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
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    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
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    • H01ELECTRIC ELEMENTS
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    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/563Encapsulation of active face of flip-chip device, e.g. underfilling or underencapsulation of flip-chip, encapsulation preform on chip or mounting substrate
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    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/60Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation
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    • H01L23/00Details of semiconductor or other solid state devices
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    • H01L23/482Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body
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    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
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    • H01L2924/15151Shape the die mounting substrate comprising an aperture, e.g. for underfilling, outgassing, window type wire connections
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    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/02Fillers; Particles; Fibers; Reinforcement materials
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    • H05K2201/02Fillers; Particles; Fibers; Reinforcement materials
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    • H05K2201/10Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10621Components characterised by their electrical contacts
    • H05K2201/10674Flip chip
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    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/11Treatments characterised by their effect, e.g. heating, cooling, roughening
    • H05K2203/1163Chemical reaction, e.g. heating solder by exothermic reaction
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    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/321Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by conductive adhesives
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/10Methods of surface bonding and/or assembly therefor
    • Y10T156/1052Methods of surface bonding and/or assembly therefor with cutting, punching, tearing or severing
    • Y10T156/1062Prior to assembly
    • Y10T156/1075Prior to assembly of plural laminae from single stock and assembling to each other or to additional lamina
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/4913Assembling to base an electrical component, e.g., capacitor, etc.
DE69009088T 1989-03-09 1990-03-08 Verbindungsverfahren für Schaltungen und Klebefilm dafür. Expired - Lifetime DE69009088T2 (de)

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Families Citing this family (137)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7158031B2 (en) 1992-08-12 2007-01-02 Micron Technology, Inc. Thin, flexible, RFID label and system for use
JP2937705B2 (ja) * 1993-08-31 1999-08-23 アルプス電気株式会社 プリント配線板の接続方法
DE69535512T2 (de) * 1994-08-12 2008-02-21 Pac Tech-Packaging Technologies Gmbh Flip-chip-verbindung mit nichtleitendem klebmittel
WO1996042107A1 (en) * 1995-06-13 1996-12-27 Hitachi Chemical Company, Ltd. Semiconductor device, wiring board for mounting semiconductor and method of production of semiconductor device
DE19529490A1 (de) * 1995-08-10 1997-02-13 Fraunhofer Ges Forschung Chipkontaktierungsverfahren, damit hergestellte elektronische Schaltung und Trägersubstrat zur Kontaktierung von Chips
US6303873B1 (en) * 1995-10-31 2001-10-16 Ibiden Co., Ltd. Electronic part module and process for manufacturing the same
JP3610999B2 (ja) * 1996-06-07 2005-01-19 松下電器産業株式会社 半導体素子の実装方法
WO1998003047A1 (en) * 1996-07-15 1998-01-22 Hitachi Chemical Company, Ltd. Film-like adhesive for connecting circuit and circuit board
JPH1041694A (ja) * 1996-07-25 1998-02-13 Sharp Corp 半導体素子の基板実装構造及びその実装方法
KR100467897B1 (ko) * 1996-12-24 2005-01-24 닛토덴코 가부시키가이샤 반도체 장치 및 이의 제조방법
EP1448033A1 (de) * 1996-12-27 2004-08-18 Matsushita Electric Industrial Co., Ltd. Verfahren und Vorrichtung zum Befestigen eines elektronischen Bauteils auf einer Leiterplatte
JPH1142797A (ja) * 1997-03-27 1999-02-16 Lexmark Internatl Inc フレキシブル回路を高分子容器に結合する方法、及び、フレキシブル回路及び他の要素の区域上に封入材を用いて遮断層を形成する方法
US6077382A (en) * 1997-05-09 2000-06-20 Citizen Watch Co., Ltd Mounting method of semiconductor chip
JPH1129748A (ja) * 1997-05-12 1999-02-02 Fujitsu Ltd 接着剤、接着方法及び実装基板の組み立て体
JP3030271B2 (ja) * 1997-05-19 2000-04-10 富士通株式会社 半導体部品の実装方法
JP3678547B2 (ja) * 1997-07-24 2005-08-03 ソニーケミカル株式会社 多層異方導電性接着剤およびその製造方法
US6339385B1 (en) 1997-08-20 2002-01-15 Micron Technology, Inc. Electronic communication devices, methods of forming electrical communication devices, and communication methods
US6326241B1 (en) * 1997-12-29 2001-12-04 Visteon Global Technologies, Inc. Solderless flip-chip assembly and method and material for same
JP3381601B2 (ja) * 1998-01-26 2003-03-04 松下電器産業株式会社 バンプ付電子部品の実装方法
SG97759A1 (en) * 1998-02-06 2003-08-20 Texas Instr Singapore Pte Ltd Mehtod for assembling an integrated circuit package
US6030423A (en) * 1998-02-12 2000-02-29 Micron Technology, Inc. Thin profile battery bonding method and method of conductively interconnecting electronic components
US6315856B1 (en) * 1998-03-19 2001-11-13 Kabushiki Kaisha Toshiba Method of mounting electronic component
JP3625646B2 (ja) 1998-03-23 2005-03-02 東レエンジニアリング株式会社 フリップチップ実装方法
JP2000012609A (ja) * 1998-06-17 2000-01-14 Shinko Electric Ind Co Ltd 回路基板への半導体チップの実装方法
JP3278055B2 (ja) * 1998-06-30 2002-04-30 セイコーインスツルメンツ株式会社 電子回路装置
JP3957244B2 (ja) * 1998-07-17 2007-08-15 日東電工株式会社 半導体装置の製法
JP2000091285A (ja) * 1998-09-08 2000-03-31 Disco Abrasive Syst Ltd 半導体物品の研削方法
US6189208B1 (en) 1998-09-11 2001-02-20 Polymer Flip Chip Corp. Flip chip mounting technique
SE512906C2 (sv) * 1998-10-02 2000-06-05 Ericsson Telefon Ab L M Förfarande vid lödning av ett halvledarchip samt RF-power transistor för genomförande därav
JP2000223446A (ja) * 1998-11-27 2000-08-11 Denso Corp 半導体装置およびその製造方法
US6535393B2 (en) * 1998-12-04 2003-03-18 Micron Technology, Inc. Electrical device allowing for increased device densities
US6294270B1 (en) 1998-12-23 2001-09-25 3M Innovative Properties Company Electronic circuit device comprising an epoxy-modified aromatic vinyl-conjugated diene block copolymer
DE19901623B4 (de) * 1999-01-18 2007-08-23 Pac Tech-Packaging Technologies Gmbh Verfahren und Vorrichtung zur thermischen Verbindung von Anschlußflächen zweier Substrate
DE19905807A1 (de) * 1999-02-11 2000-08-31 Ksw Microtec Ges Fuer Angewand Verfahren zur Herstellung elektrisch leitender Verbindungen
US6492251B1 (en) * 1999-03-10 2002-12-10 Tessera, Inc. Microelectronic joining processes with bonding material application
US6410415B1 (en) 1999-03-23 2002-06-25 Polymer Flip Chip Corporation Flip chip mounting technique
JP5640951B2 (ja) * 1999-03-26 2014-12-17 日立化成株式会社 回路用接続部材
JP2001072957A (ja) * 1999-03-26 2001-03-21 Hitachi Chem Co Ltd 回路用接続部材
JP3539315B2 (ja) * 1999-06-22 2004-07-07 株式会社村田製作所 電子デバイス素子の実装方法、および弾性表面波装置の製造方法
US6387986B1 (en) * 1999-06-24 2002-05-14 Ahmad Moradi-Araghi Compositions and processes for oil field applications
US6780668B1 (en) 1999-07-16 2004-08-24 Matsushita Electric Industrial Co., Ltd. Package of semiconductor device and method of manufacture thereof
JP2001031929A (ja) * 1999-07-21 2001-02-06 Sony Chem Corp 接続構造体
US6230400B1 (en) * 1999-09-17 2001-05-15 George Tzanavaras Method for forming interconnects
JP3371894B2 (ja) * 1999-09-17 2003-01-27 ソニーケミカル株式会社 接続材料
US6723620B1 (en) * 1999-11-24 2004-04-20 International Rectifier Corporation Power semiconductor die attach process using conductive adhesive film
SG99331A1 (en) * 2000-01-13 2003-10-27 Hitachi Ltd Method of producing electronic part with bumps and method of producing elctronic part
FI112288B (fi) * 2000-01-17 2003-11-14 Rafsec Oy Menetelmä älytarrasyöttörainan valmistamiseksi
JP3485513B2 (ja) * 2000-01-19 2004-01-13 沖電気工業株式会社 半導体装置の製造方法
JP2001237268A (ja) * 2000-02-22 2001-08-31 Nec Corp 半導体素子の実装方法及び製造装置
FI112287B (fi) * 2000-03-31 2003-11-14 Rafsec Oy Menetelmä tuoteanturin muodostamiseksi ja tuoteanturi
JP2002313841A (ja) * 2000-04-14 2002-10-25 Namics Corp フリップチップ実装方法
US6400033B1 (en) 2000-06-01 2002-06-04 Amkor Technology, Inc. Reinforcing solder connections of electronic devices
FI20001344A (fi) * 2000-06-06 2001-12-07 Rafsec Oy Menetelmä ja laitteisto älytarrasyöttörainan valmistamiseksi
FI111881B (fi) * 2000-06-06 2003-09-30 Rafsec Oy Älykorttiraina ja menetelmä sen valmistamiseksi
CN1217991C (zh) * 2000-06-21 2005-09-07 三井化学株式会社 塑性液晶显示元件用密封剂组合物
JP2002005951A (ja) * 2000-06-26 2002-01-09 Denso Corp 半導体力学量センサ及びその製造方法
US6750301B1 (en) * 2000-07-07 2004-06-15 National Starch And Chemical Investment Holding Corporation Die attach adhesives with epoxy compound or resin having allyl or vinyl groups
JP2002026182A (ja) * 2000-07-07 2002-01-25 Sanyo Electric Co Ltd 半導体装置の製造方法
EP1176548A3 (de) * 2000-07-28 2003-03-05 Oji Paper Co., Ltd. Gehäuse für integrierte Schaltung und dessen Herstellungsverfahren
JP3605009B2 (ja) * 2000-08-03 2004-12-22 三洋電機株式会社 半導体装置の製造方法
FI113851B (fi) * 2000-11-20 2004-06-30 Rafsec Oy Menetelmä piisirulle integroidun piirin kiinnittämiseksi älytarraan ja menetelmä piikiekon esikäsittelemiseksi
FI112121B (fi) * 2000-12-11 2003-10-31 Rafsec Oy Älytarraraina, menetelmä sen valmistamiseksi, menetelmä kantorainan valmistamiseksi ja älytarrarainan älytarran rakenneosa
US6866741B2 (en) * 2001-01-08 2005-03-15 Fujitsu Limited Method for joining large substrates
US6884313B2 (en) * 2001-01-08 2005-04-26 Fujitsu Limited Method and system for joining and an ultra-high density interconnect
US6518096B2 (en) 2001-01-08 2003-02-11 Fujitsu Limited Interconnect assembly and Z-connection method for fine pitch substrates
US6543674B2 (en) * 2001-02-06 2003-04-08 Fujitsu Limited Multilayer interconnection and method
US6518330B2 (en) * 2001-02-13 2003-02-11 Board Of Trustees Of University Of Illinois Multifunctional autonomically healing composite material
US20040135265A1 (en) * 2001-02-13 2004-07-15 Elke Zakel Contacting microchips by means of pressure
US6531340B2 (en) * 2001-02-23 2003-03-11 Micron Technology, Inc. Low temperature die attaching material for BOC packages
JP2002299378A (ja) * 2001-03-30 2002-10-11 Lintec Corp 導電体付接着シート、半導体装置製造方法および半導体装置
FI112550B (fi) * 2001-05-31 2003-12-15 Rafsec Oy Älytarra ja älytarraraina
FI117331B (fi) * 2001-07-04 2006-09-15 Rafsec Oy Menetelmä ruiskuvaletun tuotteen valmistamiseksi
US7218527B1 (en) * 2001-08-17 2007-05-15 Alien Technology Corporation Apparatuses and methods for forming smart labels
JP3566680B2 (ja) 2001-09-11 2004-09-15 富士通株式会社 半導体装置の製造方法
FI119401B (fi) * 2001-12-21 2008-10-31 Upm Raflatac Oy Älytarraraina ja menetelmä sen valmistamiseksi
JP2003243448A (ja) 2002-02-18 2003-08-29 Seiko Epson Corp 半導体装置及びその製造方法並びに電子機器
JP3886401B2 (ja) * 2002-03-25 2007-02-28 ソニーケミカル&インフォメーションデバイス株式会社 接続構造体の製造方法
US6998293B2 (en) * 2002-03-29 2006-02-14 Visteon Global Technologies, Inc. Flip-chip bonding method
JP5274744B2 (ja) * 2002-09-30 2013-08-28 日立化成株式会社 フィルム状接着剤及びこれを用いた半導体装置
JP3918708B2 (ja) 2002-10-08 2007-05-23 セイコーエプソン株式会社 回路基板及びその製造方法、転写チップ、転写元基板、電気光学装置、電子機器
US6936644B2 (en) * 2002-10-16 2005-08-30 Cookson Electronics, Inc. Releasable microcapsule and adhesive curing system using the same
KR100951347B1 (ko) * 2003-01-03 2010-04-08 삼성전자주식회사 액정 표시 장치의 제조 방법
US20050012212A1 (en) * 2003-07-17 2005-01-20 Cookson Electronics, Inc. Reconnectable chip interface and chip package
JP4397653B2 (ja) * 2003-08-26 2010-01-13 日東電工株式会社 半導体装置製造用接着シート
US7566747B2 (en) * 2004-05-07 2009-07-28 The Board Of Trustees Of The University Of Illinois Wax particles for protection of activators, and multifunctional autonomically healing composite materials
DE102004031189A1 (de) * 2004-06-28 2006-01-19 Tesa Ag Hitzeaktivierbares und vernetzbares Klebeband für die Verklebung von elektronischen Bauteilen und Leiterbahnen
US7722939B2 (en) * 2004-09-01 2010-05-25 Appleton Papers, Inc. Adhesively securable stock materials
US20060177634A1 (en) * 2004-09-01 2006-08-10 John Lazar Activator means for pre-applied adhesives
EP1784302B1 (de) * 2004-09-01 2016-07-06 Encapsys, Llc Verkapselte aushärtungssysteme
US7722940B2 (en) * 2004-09-01 2010-05-25 Appleton Papers, Inc. Adhesively securable stock packaging materials
DE102004044603A1 (de) * 2004-09-13 2006-03-30 Infineon Technologies Ag Oberflächenmontierbares Halbleiterbauteil und Schaltungsträger mit oberflächenmontiertem Halbleiterbauteil sowie Verfahren zur Herstellung derselben
JP4659420B2 (ja) * 2004-09-28 2011-03-30 京セラ株式会社 表示装置
JP4595471B2 (ja) * 2004-09-30 2010-12-08 住友電気工業株式会社 導電性ペースト、及びそれを用いた多層プリント配線板の製造方法
JP4644469B2 (ja) * 2004-11-09 2011-03-02 富士通株式会社 半導体チップのフリップチップ実装方法およびその実装装置
JP2006245453A (ja) * 2005-03-07 2006-09-14 Three M Innovative Properties Co フレキシブルプリント回路基板の他の回路基板への接続方法
WO2006104622A2 (en) * 2005-03-25 2006-10-05 Appleton Papers Inc. Adhesively securable stock materials
US7612152B2 (en) * 2005-05-06 2009-11-03 The Board Of Trustees Of The University Of Illinois Self-healing polymers
US20070075122A1 (en) * 2005-09-30 2007-04-05 Singleton Laurence E Method for fabricating a chip module and a device module fabricated therefrom
KR100693193B1 (ko) * 2005-11-03 2007-03-13 주식회사 나래나노텍 자외선을 이용한 패턴 전극의 본딩 구조 및 그 본딩 방법
JP2007157758A (ja) * 2005-11-30 2007-06-21 Sumitomo Bakelite Co Ltd 半導体用接着フィルム及びこれを用いた半導体装置
DE102005061553B4 (de) * 2005-12-22 2013-07-11 Infineon Technologies Ag Chipmodul
WO2007082153A2 (en) * 2006-01-05 2007-07-19 The Board Of Trustees Of The University Of Illinois Self-healing coating system
JP2007258207A (ja) * 2006-03-20 2007-10-04 Three M Innovative Properties Co バンプ付きチップもしくはパッケージの実装方法
WO2007123003A1 (ja) * 2006-04-12 2007-11-01 Hitachi Chemical Company, Ltd. 回路接続用接着フィルム、回路部材の接続構造及び回路部材の接続方法
US7569625B2 (en) * 2006-06-02 2009-08-04 The Board Of Trustees Of The University Of Illinois Self-healing elastomer system
KR101129762B1 (ko) 2006-06-23 2012-03-26 히다치 가세고교 가부시끼가이샤 반도체 디바이스의 제조 방법
JP2008007555A (ja) * 2006-06-27 2008-01-17 Three M Innovative Properties Co ポリヒドロキシエーテル及び有機粒子を含む接着剤組成物及びそれを用いた回路基板の接続方法
MY148064A (en) * 2006-10-30 2013-02-28 Sumitomo Bakelite Co Liquid resin composition, semiconductor wafer having adhesive layer, semiconductor element having adhesive layer, semiconductor package , process for manufacturing semiconductor element and process for manufacturing semiconductor package.
CN101578698B (zh) 2007-01-10 2011-04-20 日立化成工业株式会社 电路部件连接用粘接剂及使用该粘接剂的半导体装置
CN103106951B (zh) * 2007-03-12 2015-10-14 千住金属工业株式会社 各向异性导电材料
US20080299391A1 (en) * 2007-05-31 2008-12-04 White Scott R Capsules, methods for making capsules, and self-healing composites including the same
US20100140556A1 (en) 2007-06-13 2010-06-10 Hitachi Chemical Company, Ltd. Filmy adhesive for circuit connection
JP4788699B2 (ja) * 2007-10-18 2011-10-05 日立化成工業株式会社 Icチップ接続用接着フィルム
JP5164257B2 (ja) * 2007-11-19 2013-03-21 旭化成イーマテリアルズ株式会社 接続構造体の製造方法
US8201325B2 (en) * 2007-11-22 2012-06-19 International Business Machines Corporation Method for producing an integrated device
US20090181254A1 (en) * 2008-01-15 2009-07-16 The Board Of Trustees Of The University Of Illinois Multi-capsule system and its use for encapsulating active agents
US20110073357A1 (en) * 2008-06-02 2011-03-31 Nxp B.V. Electronic device and method of manufacturing an electronic device
EP2286445A1 (de) * 2008-06-02 2011-02-23 Nxp B.V. Herstellungsverfahren für eine elektronische vorrichtung
US8044154B2 (en) * 2009-06-12 2011-10-25 Trillion Science, Inc. Latent hardener for epoxy compositions
US8067484B2 (en) * 2010-03-12 2011-11-29 Trillion Science, Inc. Latent hardener with improved barrier properties and compatibility
CN102686690A (zh) * 2009-11-17 2012-09-19 日立化成工业株式会社 电路连接材料、使用其的连接结构体以及临时压接方法
WO2011126702A2 (en) * 2010-03-30 2011-10-13 Henkel Corporation Encapsulated curing agents
JP2012138019A (ja) * 2010-12-27 2012-07-19 Dainippon Printing Co Ltd タッチパネル付き表示装置
JP5719997B2 (ja) * 2011-09-16 2015-05-20 パナソニックIpマネジメント株式会社 電子部品の実装方法及び実装システム
JP5626179B2 (ja) * 2011-10-24 2014-11-19 日立化成株式会社 フィルム状接着剤及びこれを用いた半導体装置
US9085685B2 (en) 2011-11-28 2015-07-21 Nitto Denko Corporation Under-fill material and method for producing semiconductor device
US8796724B2 (en) * 2011-12-20 2014-08-05 Todd W Hodrinsky Light emitting systems and methods
JP2013214434A (ja) * 2012-04-03 2013-10-17 Sony Corp 積層構造体の製造方法、積層構造体および電子機器
US8907485B2 (en) * 2012-08-24 2014-12-09 Freescale Semiconductor, Inc. Copper ball bond features and structure
JP5840598B2 (ja) 2012-12-17 2016-01-06 株式会社ジャパンディスプレイ タッチ検出機能付き表示装置、電子機器及びタッチ検出機能付き表示装置の製造方法
KR101797723B1 (ko) * 2014-12-08 2017-11-14 셍기 테크놀로지 코. 엘티디. 접착용 수지 조성물, 접착용 필름 및 연성 금속 적층체
KR20160088512A (ko) * 2015-01-15 2016-07-26 삼성디스플레이 주식회사 전자기기 및 전자기기의 본딩 방법
CN112185983B (zh) * 2019-06-17 2023-03-24 成都辰显光电有限公司 显示面板及显示装置
RU194118U1 (ru) * 2019-08-12 2019-11-28 Акционерное общество "ПК Альматек" Электрод для транслингвальной нейростимуляции
CN112768362A (zh) * 2019-11-05 2021-05-07 深圳第三代半导体研究院 一种嵌入式封装器件制备方法
CN112786455A (zh) * 2019-11-07 2021-05-11 深圳第三代半导体研究院 一种嵌入式封装模块化制备方法
CN113410203A (zh) * 2020-03-17 2021-09-17 群创光电股份有限公司 电子装置

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3167602A (en) * 1962-03-12 1965-01-26 Delavan Mfg Company Method of encapsulating liquid particles in thermoplastic shell
US3395105A (en) * 1964-10-06 1968-07-30 Mc Donnell Douglas Corp Epoxy systems containing encapsulated pressure fracturable curing agents
US3600246A (en) * 1968-05-17 1971-08-17 Rca Corp Method of making laminated semiconductor devices
JPS4839832B1 (de) * 1970-08-10 1973-11-27
NL7110944A (de) * 1970-08-24 1972-02-28
US4076869A (en) * 1970-10-23 1978-02-28 Ciba-Geigy Corporation Hardenable epoxy resin compositions and process for making the same
NL158025B (nl) * 1971-02-05 1978-09-15 Philips Nv Werkwijze voor het vervaardigen van een halfgeleiderinrichting en halfgeleiderinrichting, vervaardigd volgens deze werkwijze.
GB2028828B (en) * 1978-08-04 1982-09-22 Western Electric Co Conductive adhesive system including a conductivity enhancer
US4356505A (en) * 1978-08-04 1982-10-26 Bell Telephone Laboratories, Incorporated Conductive adhesive system including a conductivity enhancer
US4423435A (en) * 1980-10-27 1983-12-27 Texas Instruments Incorporated Assembly of an electronic device on an insulative substrate
JPS57111034A (en) * 1980-12-10 1982-07-10 Hitachi Ltd Semiconductor device and its manufacture
JPS57185316A (en) * 1981-05-11 1982-11-15 Sumitomo Metal Mining Co Ltd Electrically conductive resin paste
US4469553A (en) * 1983-06-27 1984-09-04 Electronic Packaging Co. System for manufacturing, changing, repairing, and testing printed circuit boards
US4617357A (en) * 1984-09-24 1986-10-14 Ciba-Geigy Corporation Process for reducing the content of chlorine in glycidyl compounds
EP0205686A1 (de) * 1985-06-13 1986-12-30 Kidd, Inc. Elektroleitende Paste zum Bonden eines Halbleiterwürfels
US4740657A (en) * 1986-02-14 1988-04-26 Hitachi, Chemical Company, Ltd Anisotropic-electroconductive adhesive composition, method for connecting circuits using the same, and connected circuit structure thus obtained
EP0265077A3 (de) * 1986-09-25 1989-03-08 Sheldahl, Inc. Ein Anisotropisches Klebemittel zum Verbinden elektrischer Bauelemente
FR2605326A1 (fr) * 1986-10-20 1988-04-22 Rhone Poulenc Multi Tech Composition potentiellement adhesive electriquement conductrice.
US4749120A (en) * 1986-12-18 1988-06-07 Matsushita Electric Industrial Co., Ltd. Method of connecting a semiconductor device to a wiring board

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EP0387066A1 (de) 1990-09-12
DE69009088D1 (de) 1994-06-30
JPH0316147A (ja) 1991-01-24
KR930010722B1 (ko) 1993-11-08
EP0387066B1 (de) 1994-05-25
JP2833111B2 (ja) 1998-12-09
US6113728A (en) 2000-09-05

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