DE69011068D1 - Verfahren und Vorrichtung zur Reinigung, Beschichtung und Aushärtung von Empfängersubstraten in einer geschlossenen planetären Anordnung. - Google Patents

Verfahren und Vorrichtung zur Reinigung, Beschichtung und Aushärtung von Empfängersubstraten in einer geschlossenen planetären Anordnung.

Info

Publication number
DE69011068D1
DE69011068D1 DE69011068T DE69011068T DE69011068D1 DE 69011068 D1 DE69011068 D1 DE 69011068D1 DE 69011068 T DE69011068 T DE 69011068T DE 69011068 T DE69011068 T DE 69011068T DE 69011068 D1 DE69011068 D1 DE 69011068D1
Authority
DE
Germany
Prior art keywords
curing
cleaning
coating
planetary arrangement
receiver substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69011068T
Other languages
English (en)
Other versions
DE69011068T2 (de
Inventor
John M Hammond
Mark Petropoulos
Stuart B Berger
Robert W Nolley
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xerox Corp
Original Assignee
Xerox Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xerox Corp filed Critical Xerox Corp
Publication of DE69011068D1 publication Critical patent/DE69011068D1/de
Application granted granted Critical
Publication of DE69011068T2 publication Critical patent/DE69011068T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B05B13/0221Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts
    • B05B13/0242Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts the objects being individually presented to the spray heads by a rotating element, e.g. turntable
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B3/00Spraying or sprinkling apparatus with moving outlet elements or moving deflecting elements
    • B05B3/02Spraying or sprinkling apparatus with moving outlet elements or moving deflecting elements with rotating elements
    • B05B3/10Spraying or sprinkling apparatus with moving outlet elements or moving deflecting elements with rotating elements discharging over substantially the whole periphery of the rotating member, i.e. the spraying being effected by centrifugal forces
    • B05B3/1064Spraying or sprinkling apparatus with moving outlet elements or moving deflecting elements with rotating elements discharging over substantially the whole periphery of the rotating member, i.e. the spraying being effected by centrifugal forces the liquid or other fluent material to be sprayed being axially supplied to the rotating member through a hollow rotating shaft
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • B05C9/08Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
    • B05C9/14Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation involving heating or cooling
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26DRYING
    • F26BDRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B15/00Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67017Apparatus for fluid treatment
    • H01L21/67028Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67155Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/6719Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67155Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67196Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the transfer chamber
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67155Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67236Apparatus for manufacturing or treating in a plurality of work-stations the substrates being processed being not semiconductor wafers, e.g. leadframes or chips
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B3/00Spraying or sprinkling apparatus with moving outlet elements or moving deflecting elements
    • B05B3/001Spraying or sprinkling apparatus with moving outlet elements or moving deflecting elements incorporating means for heating or cooling, e.g. the material to be sprayed
DE69011068T 1989-12-27 1990-12-20 Verfahren und Vorrichtung zur Reinigung, Beschichtung und Aushärtung von Empfängersubstraten in einer geschlossenen planetären Anordnung. Expired - Fee Related DE69011068T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US07/457,926 US5090350A (en) 1989-12-27 1989-12-27 Method and apparatus for cleaning, coating and curing receptor substrates in an enclosed planetary array
US07/457,958 US5079854A (en) 1989-12-27 1989-12-27 Method and apparatus for cleaning, coating and curing receptor substrates in an enclosed planetary array
US07/457,494 US5037676A (en) 1989-12-27 1989-12-27 Method and apparatus for cleaning, coating and curing receptor substrates in an enclosed planetary array

Publications (2)

Publication Number Publication Date
DE69011068D1 true DE69011068D1 (de) 1994-09-01
DE69011068T2 DE69011068T2 (de) 1995-01-26

Family

ID=41718705

Family Applications (3)

Application Number Title Priority Date Filing Date
DE69014845T Expired - Fee Related DE69014845T2 (de) 1989-12-27 1990-12-20 Verfahren und Vorrichtung zur Beschichtung von Empfängersubstraten in einer geschlossenen planetaren Anordnung.
DE69026694T Expired - Fee Related DE69026694T2 (de) 1989-12-27 1990-12-20 Verfahren und Vorrichtung zur Aushärtung von Substraten in einer geschlossenen planetarischen Anordnung
DE69011068T Expired - Fee Related DE69011068T2 (de) 1989-12-27 1990-12-20 Verfahren und Vorrichtung zur Reinigung, Beschichtung und Aushärtung von Empfängersubstraten in einer geschlossenen planetären Anordnung.

Family Applications Before (2)

Application Number Title Priority Date Filing Date
DE69014845T Expired - Fee Related DE69014845T2 (de) 1989-12-27 1990-12-20 Verfahren und Vorrichtung zur Beschichtung von Empfängersubstraten in einer geschlossenen planetaren Anordnung.
DE69026694T Expired - Fee Related DE69026694T2 (de) 1989-12-27 1990-12-20 Verfahren und Vorrichtung zur Aushärtung von Substraten in einer geschlossenen planetarischen Anordnung

Country Status (5)

Country Link
US (4) US5079854A (de)
EP (3) EP0435568B1 (de)
JP (3) JP2523220B2 (de)
BR (3) BR9006551A (de)
DE (3) DE69014845T2 (de)

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Also Published As

Publication number Publication date
EP0435568A3 (en) 1992-02-26
EP0435567A3 (en) 1992-01-22
US5079854A (en) 1992-01-14
US5248529A (en) 1993-09-28
EP0435568A2 (de) 1991-07-03
US5090350A (en) 1992-02-25
JP2515431B2 (ja) 1996-07-10
JPH03212647A (ja) 1991-09-18
JPH03271747A (ja) 1991-12-03
JP2523221B2 (ja) 1996-08-07
EP0435577A2 (de) 1991-07-03
EP0435568B1 (de) 1994-07-27
EP0435577A3 (en) 1992-02-05
DE69014845D1 (de) 1995-01-19
DE69026694D1 (de) 1996-05-30
DE69026694T2 (de) 1996-11-21
US5037676A (en) 1991-08-06
JP2523220B2 (ja) 1996-08-07
BR9006552A (pt) 1991-10-01
DE69011068T2 (de) 1995-01-26
EP0435577B1 (de) 1994-12-07
BR9006553A (pt) 1991-10-01
DE69014845T2 (de) 1995-07-13
EP0435567B1 (de) 1996-04-24
JPH03200259A (ja) 1991-09-02
EP0435567A2 (de) 1991-07-03
BR9006551A (pt) 1991-10-01

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