DE69011068D1 - Verfahren und Vorrichtung zur Reinigung, Beschichtung und Aushärtung von Empfängersubstraten in einer geschlossenen planetären Anordnung. - Google Patents
Verfahren und Vorrichtung zur Reinigung, Beschichtung und Aushärtung von Empfängersubstraten in einer geschlossenen planetären Anordnung.Info
- Publication number
- DE69011068D1 DE69011068D1 DE69011068T DE69011068T DE69011068D1 DE 69011068 D1 DE69011068 D1 DE 69011068D1 DE 69011068 T DE69011068 T DE 69011068T DE 69011068 T DE69011068 T DE 69011068T DE 69011068 D1 DE69011068 D1 DE 69011068D1
- Authority
- DE
- Germany
- Prior art keywords
- curing
- cleaning
- coating
- planetary arrangement
- receiver substrates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
- B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
- B05B13/0221—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts
- B05B13/0242—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts the objects being individually presented to the spray heads by a rotating element, e.g. turntable
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B3/00—Spraying or sprinkling apparatus with moving outlet elements or moving deflecting elements
- B05B3/02—Spraying or sprinkling apparatus with moving outlet elements or moving deflecting elements with rotating elements
- B05B3/10—Spraying or sprinkling apparatus with moving outlet elements or moving deflecting elements with rotating elements discharging over substantially the whole periphery of the rotating member, i.e. the spraying being effected by centrifugal forces
- B05B3/1064—Spraying or sprinkling apparatus with moving outlet elements or moving deflecting elements with rotating elements discharging over substantially the whole periphery of the rotating member, i.e. the spraying being effected by centrifugal forces the liquid or other fluent material to be sprayed being axially supplied to the rotating member through a hollow rotating shaft
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
- B05C9/08—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
- B05C9/14—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation involving heating or cooling
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B15/00—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67196—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the transfer chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67236—Apparatus for manufacturing or treating in a plurality of work-stations the substrates being processed being not semiconductor wafers, e.g. leadframes or chips
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B3/00—Spraying or sprinkling apparatus with moving outlet elements or moving deflecting elements
- B05B3/001—Spraying or sprinkling apparatus with moving outlet elements or moving deflecting elements incorporating means for heating or cooling, e.g. the material to be sprayed
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/457,926 US5090350A (en) | 1989-12-27 | 1989-12-27 | Method and apparatus for cleaning, coating and curing receptor substrates in an enclosed planetary array |
US07/457,958 US5079854A (en) | 1989-12-27 | 1989-12-27 | Method and apparatus for cleaning, coating and curing receptor substrates in an enclosed planetary array |
US07/457,494 US5037676A (en) | 1989-12-27 | 1989-12-27 | Method and apparatus for cleaning, coating and curing receptor substrates in an enclosed planetary array |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69011068D1 true DE69011068D1 (de) | 1994-09-01 |
DE69011068T2 DE69011068T2 (de) | 1995-01-26 |
Family
ID=41718705
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69014845T Expired - Fee Related DE69014845T2 (de) | 1989-12-27 | 1990-12-20 | Verfahren und Vorrichtung zur Beschichtung von Empfängersubstraten in einer geschlossenen planetaren Anordnung. |
DE69026694T Expired - Fee Related DE69026694T2 (de) | 1989-12-27 | 1990-12-20 | Verfahren und Vorrichtung zur Aushärtung von Substraten in einer geschlossenen planetarischen Anordnung |
DE69011068T Expired - Fee Related DE69011068T2 (de) | 1989-12-27 | 1990-12-20 | Verfahren und Vorrichtung zur Reinigung, Beschichtung und Aushärtung von Empfängersubstraten in einer geschlossenen planetären Anordnung. |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69014845T Expired - Fee Related DE69014845T2 (de) | 1989-12-27 | 1990-12-20 | Verfahren und Vorrichtung zur Beschichtung von Empfängersubstraten in einer geschlossenen planetaren Anordnung. |
DE69026694T Expired - Fee Related DE69026694T2 (de) | 1989-12-27 | 1990-12-20 | Verfahren und Vorrichtung zur Aushärtung von Substraten in einer geschlossenen planetarischen Anordnung |
Country Status (5)
Country | Link |
---|---|
US (4) | US5079854A (de) |
EP (3) | EP0435568B1 (de) |
JP (3) | JP2523220B2 (de) |
BR (3) | BR9006551A (de) |
DE (3) | DE69014845T2 (de) |
Families Citing this family (46)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6201037B1 (en) | 1986-01-28 | 2001-03-13 | Ophthalmic Research Group International, Inc. | Plastic lens composition and method for the production thereof |
US6730244B1 (en) | 1986-01-28 | 2004-05-04 | Q2100, Inc. | Plastic lens and method for the production thereof |
US5415816A (en) | 1986-01-28 | 1995-05-16 | Q2100, Inc. | Method for the production of plastic lenses |
US5079854A (en) * | 1989-12-27 | 1992-01-14 | Xerox Corporation | Method and apparatus for cleaning, coating and curing receptor substrates in an enclosed planetary array |
JPH07122132B2 (ja) * | 1990-11-01 | 1995-12-25 | 松下電器産業株式会社 | 薄膜形成方法および薄膜形成装置 |
US5219690A (en) * | 1991-04-12 | 1993-06-15 | Xerox Corporation | Substrate and process for coating a substrate with multi-pigment charge generation layers |
CA2071083A1 (en) * | 1991-06-14 | 1992-12-15 | Matthew E. Hain | Dynamic treatment of suture strand |
US5198272A (en) * | 1992-03-24 | 1993-03-30 | Davidson Textron Inc. | Thermal evaporation in two planes |
US5287634A (en) * | 1992-02-07 | 1994-02-22 | United States Surgical Corporation | Removal of vaporizable components from polymeric products |
US5387546A (en) * | 1992-06-22 | 1995-02-07 | Canon Sales Co., Inc. | Method for manufacturing a semiconductor device |
US5378798A (en) * | 1992-07-10 | 1995-01-03 | Shell Oil Company | Composition and process for coating metallic substrates |
US5654117A (en) * | 1992-08-19 | 1997-08-05 | Xerox Corporation | Process for preparing an electrophotographic imaging member |
US5433572A (en) * | 1992-08-24 | 1995-07-18 | Xerox Corporation | Automated substrate loading and photoreceptor unloading system |
US5419058A (en) * | 1993-03-11 | 1995-05-30 | Xerox Corporation | Automated substrate loading and photoreceptor unloading system |
EP0634699A1 (de) * | 1993-07-16 | 1995-01-18 | Semiconductor Systems, Inc. | Gruppiertes fotolithografisches System |
US5766824A (en) * | 1993-07-16 | 1998-06-16 | Semiconductor Systems, Inc. | Method and apparatus for curing photoresist |
US5357687A (en) * | 1993-07-23 | 1994-10-25 | Xerox Corporation | Method and apparatus for drying/curing rigid cylindrical and flexible belt substrates |
US5514214A (en) | 1993-09-20 | 1996-05-07 | Q2100, Inc. | Eyeglass lens and mold spin coater |
US5624496A (en) * | 1995-05-23 | 1997-04-29 | Nordson Corporation | Automated coating system |
GB2308051B (en) * | 1995-12-16 | 2000-03-08 | Accles & Shelvoke Ltd | Apparatus for use in the humane slaughter of animals |
US6022498A (en) | 1996-04-19 | 2000-02-08 | Q2100, Inc. | Methods for eyeglass lens curing using ultraviolet light |
US6280171B1 (en) | 1996-06-14 | 2001-08-28 | Q2100, Inc. | El apparatus for eyeglass lens curing using ultraviolet light |
JP3779393B2 (ja) * | 1996-09-06 | 2006-05-24 | 東京エレクトロン株式会社 | 処理システム |
DE19819726A1 (de) * | 1998-05-02 | 1999-11-04 | Leybold Systems Gmbh | Vakuumbehandlungsanlage zum Aufbringen dünner, harter Schichten |
US6010573A (en) * | 1998-07-01 | 2000-01-04 | Virginia Commonwealth University | Apparatus and method for endothelial cell seeding/transfection of intravascular stents |
US6561796B1 (en) | 1999-09-07 | 2003-05-13 | Novellus Systems, Inc. | Method of semiconductor wafer heating to prevent bowing |
GB0005118D0 (en) * | 2000-03-03 | 2000-04-26 | Perplas Medical Limited | Irradiation apparatus |
US6381873B1 (en) * | 2000-08-04 | 2002-05-07 | Vladimir Peremychtchev | Method for drying a polymer coating on a substrate |
US6878203B2 (en) * | 2001-02-12 | 2005-04-12 | Axis Usa, Inc. | Resin application system for dynamo-electric machine components |
DE102004025528B4 (de) * | 2004-05-25 | 2010-03-04 | Eisenmann Anlagenbau Gmbh & Co. Kg | Verfahren und Vorrichtung zum Trocknen von beschichteten Gegenständen |
US7597762B2 (en) * | 2005-09-21 | 2009-10-06 | General Electric Company | Methods and apparatus for manufacturing components |
US7877895B2 (en) * | 2006-06-26 | 2011-02-01 | Tokyo Electron Limited | Substrate processing apparatus |
JP4762835B2 (ja) * | 2006-09-07 | 2011-08-31 | 東京エレクトロン株式会社 | 基板処理方法、基板処理装置、プログラムおよびプログラム記録媒体 |
KR20120096788A (ko) * | 2011-02-23 | 2012-08-31 | 삼성전자주식회사 | 외관 기구물의 표면 코팅 방법 및 표면 코팅 장치 |
DE102011106196A1 (de) * | 2011-06-07 | 2012-12-13 | Oerlikon Trading Ag, Trübbach | Lackieranlage |
WO2013150677A1 (ja) * | 2012-04-03 | 2013-10-10 | 株式会社ニコン | 搬送装置、及び電子デバイス形成方法 |
GB2539177A (en) * | 2015-05-18 | 2016-12-14 | Optimal Tech Ltd | Method and apparatus |
CN105597995B (zh) * | 2015-12-25 | 2018-01-12 | 苏州频发机电科技有限公司 | 一种聚氨酯滚轮的喷胶机构 |
US20210052781A1 (en) * | 2018-01-17 | 2021-02-25 | Micell Technologies, Inc. | Transfer Ring |
CN109290095B (zh) * | 2018-11-11 | 2023-10-24 | 广东新力光工业装备有限公司 | 一种机器人喷涂多功能转台 |
JP7314634B2 (ja) * | 2019-06-11 | 2023-07-26 | 東京エレクトロン株式会社 | 塗布装置及び塗布方法 |
JP6791518B1 (ja) * | 2019-11-12 | 2020-11-25 | 株式会社セルシステム | 光照射装置 |
CN111076521B (zh) * | 2019-12-13 | 2021-04-02 | 安徽省银燕工艺服饰有限公司 | 一种能够全方位受热的服装加工用烘干装置 |
DE102019008884A1 (de) * | 2019-12-19 | 2021-06-24 | Singulus Technologies Ag | Behandlungsanlage, Antriebseinheit für eine Behandlungsanlage und Verwendung der Behandlungsanlage |
DE102021112211B4 (de) * | 2021-05-11 | 2022-12-22 | Ulf Reinhardt | Trocknungsvorrichtung zur Trocknung von Reinigungsfluid aufweisenden Behältern, Steuerungsvorrichtung und Verfahren |
CN115445057B (zh) * | 2022-09-05 | 2023-08-08 | 谱创医疗科技(上海)有限公司 | 一种可提升药物吸收效果的药物输送导管的超声喷涂设备 |
Family Cites Families (40)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1566482A (en) * | 1925-12-22 | Poration | ||
US291320A (en) * | 1884-01-01 | Fruit-drier | ||
US3084088A (en) * | 1958-12-15 | 1963-04-02 | Perma Tubes Ltd | Method of forming a bituminous coated glass fiber pipe |
US3417733A (en) * | 1963-12-02 | 1968-12-24 | Fuji Photo Film Co Ltd | Apparatus for vacuum coating |
FR2312921A5 (fr) * | 1971-02-24 | 1976-12-24 | Commissariat Energie Atomique | Procede et installation pour le revetement par projection au chalumeau d'objets, et en particulier d'objets fragiles aux chocs thermiques |
US4008401A (en) | 1975-10-01 | 1977-02-15 | Dart Industries Inc. | U. V. curing system |
US4074654A (en) * | 1976-01-06 | 1978-02-21 | Takeda Chemical Industries, Ltd. | Automatic closure cleansing and coating machine |
DE2723988A1 (de) * | 1977-05-27 | 1978-11-30 | Otto Duerr Gmbh & Cco | Verfahren und vorrichtung zum abscheiden von lackresten und loesemitteln aus der abluft von spritzkammern o.dgl. |
DE2754136C3 (de) * | 1977-12-05 | 1980-06-26 | Sprimag Spritzmaschinenbau-Gesellschaft Mbh, 7312 Kirchheim | Spritzeinrichtung für horizontal zugeführte zylindrische Körper |
US4151059A (en) * | 1977-12-27 | 1979-04-24 | Coulter Stork U.S.A., Inc. | Method and apparatus for sputtering multiple cylinders simultaneously |
DE2813180C2 (de) * | 1978-03-25 | 1985-12-19 | Leybold-Heraeus GmbH, 5000 Köln | Vakuumbeschichtungsanlage zum allseitigen Beschichten von Substraten durch Rotation der Substrate im Materialstrom |
US4413585A (en) * | 1980-07-17 | 1983-11-08 | Veb Schwermaschinenbau Kombinat "Ernst Thalmann"Magdeburg | Process and arrangement for applying and drying liquid lubricant |
EP0046175A1 (de) * | 1980-08-19 | 1982-02-24 | Ames Rubber Corporation | Mit einem Elastomer beschichtete Rolle und Verfahren und Vorrichtung zu deren Herstellung |
US4343096A (en) * | 1980-11-25 | 1982-08-10 | Bobst Champlain, Inc. | System for controlling emissions of a solvent from a printing press |
US4365423A (en) * | 1981-03-27 | 1982-12-28 | Eastman Kodak Company | Method and apparatus for drying coated sheet material |
JPS5810411A (ja) * | 1981-07-10 | 1983-01-21 | Chita Kogyo Kk | 被加工物の自動連続両面加工方法 |
US4576109A (en) * | 1982-02-24 | 1986-03-18 | Edward Bok | Apparatus for applying a coating on a substrate |
US4475479A (en) * | 1982-04-13 | 1984-10-09 | Manufacture De Machines Du Haut-Rhin S.A. | Machine for the continuous coating of a body of revolution |
US4452171A (en) * | 1982-07-16 | 1984-06-05 | Jess Browning | Material handling apparatus |
DE3309343C2 (de) * | 1983-03-16 | 1986-08-14 | Du Pont de Nemours (Deutschland) GmbH, 4000 Düsseldorf | Vorrichtung zum Auftragen mindestens einer Gießschicht |
EP0122092A3 (de) * | 1983-04-06 | 1985-07-10 | General Engineering Radcliffe Limited | Vorrichtung zur Vakuumbeschichtung |
DE3471367D1 (en) * | 1983-12-19 | 1988-06-23 | Duphar Int Res | Method of drying a solid and device therefor |
JPS60184678A (ja) * | 1984-03-02 | 1985-09-20 | Canon Inc | 真空処理装置 |
CA1234688A (en) * | 1984-04-27 | 1988-04-05 | Yogiro Okawa | Coating apparatus for scratches of glass bottle |
JPS60254140A (ja) * | 1984-05-31 | 1985-12-14 | Canon Inc | 電子写真感光体の製造方法 |
US4640220A (en) * | 1984-06-06 | 1987-02-03 | Electropainting Sales Pty. Ltd. | Paint booth assembly |
JPS6115064U (ja) * | 1984-06-30 | 1986-01-28 | 京セラミタ株式会社 | 筒体のチヤツキング装置 |
JPS6119131A (ja) * | 1984-07-06 | 1986-01-28 | Toshiba Corp | レジスト処理装置 |
CH660489A5 (de) * | 1984-08-31 | 1987-04-30 | Bernhard Glaus | Verfahren und vorrichtung zum aushaerten polymerisierbarer beschichtungsmassen auf nicht textilen substraten. |
US4790921A (en) * | 1984-10-12 | 1988-12-13 | Hewlett-Packard Company | Planetary substrate carrier method and apparatus |
JPS61205136U (de) * | 1985-06-13 | 1986-12-24 | ||
US4596607A (en) * | 1985-07-01 | 1986-06-24 | Ford Motor Company | Alkaline resistant manganese-nickel-zinc phosphate conversion coatings and method of application |
US4623559A (en) * | 1985-07-12 | 1986-11-18 | Westinghouse Electric Corp. | U.V. cured flexible polyester-monoacrylate protective thermistor coatings having good edge coverage and method of coating |
US4595607A (en) * | 1985-08-05 | 1986-06-17 | Resource Engineering And Manufacturing Corp. | Combined induction heating and coating system for pipe weld joints |
US4687686A (en) * | 1985-10-28 | 1987-08-18 | George Koch Sons, Inc. | Spray booth with climate regulation system |
US4699080A (en) * | 1986-05-15 | 1987-10-13 | Dynapert-Htc Corporation | Temperature sensors for vapor processing systems |
US4722298A (en) * | 1986-05-19 | 1988-02-02 | Machine Technology, Inc. | Modular processing apparatus for processing semiconductor wafers |
US4834023A (en) * | 1986-12-19 | 1989-05-30 | Canon Kabushiki Kaisha | Apparatus for forming deposited film |
US5061529A (en) * | 1989-08-03 | 1991-10-29 | A. O. Smith Corporation | Manufacturing method and facility for coating vehicle structural components |
US5079854A (en) * | 1989-12-27 | 1992-01-14 | Xerox Corporation | Method and apparatus for cleaning, coating and curing receptor substrates in an enclosed planetary array |
-
1989
- 1989-12-27 US US07/457,958 patent/US5079854A/en not_active Expired - Fee Related
- 1989-12-27 US US07/457,494 patent/US5037676A/en not_active Expired - Lifetime
- 1989-12-27 US US07/457,926 patent/US5090350A/en not_active Expired - Lifetime
-
1990
- 1990-11-22 JP JP2320556A patent/JP2523220B2/ja not_active Expired - Fee Related
- 1990-11-22 JP JP2320560A patent/JP2515431B2/ja not_active Expired - Fee Related
- 1990-11-22 JP JP2320559A patent/JP2523221B2/ja not_active Expired - Fee Related
- 1990-12-20 EP EP90313973A patent/EP0435568B1/de not_active Expired - Lifetime
- 1990-12-20 DE DE69014845T patent/DE69014845T2/de not_active Expired - Fee Related
- 1990-12-20 EP EP90313972A patent/EP0435567B1/de not_active Expired - Lifetime
- 1990-12-20 EP EP90314010A patent/EP0435577B1/de not_active Expired - Lifetime
- 1990-12-20 DE DE69026694T patent/DE69026694T2/de not_active Expired - Fee Related
- 1990-12-20 DE DE69011068T patent/DE69011068T2/de not_active Expired - Fee Related
- 1990-12-21 BR BR909006551A patent/BR9006551A/pt not_active IP Right Cessation
- 1990-12-21 BR BR909006552A patent/BR9006552A/pt not_active IP Right Cessation
- 1990-12-21 BR BR909006553A patent/BR9006553A/pt not_active Application Discontinuation
-
1991
- 1991-06-28 US US07/915,206 patent/US5248529A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0435568A3 (en) | 1992-02-26 |
EP0435567A3 (en) | 1992-01-22 |
US5079854A (en) | 1992-01-14 |
US5248529A (en) | 1993-09-28 |
EP0435568A2 (de) | 1991-07-03 |
US5090350A (en) | 1992-02-25 |
JP2515431B2 (ja) | 1996-07-10 |
JPH03212647A (ja) | 1991-09-18 |
JPH03271747A (ja) | 1991-12-03 |
JP2523221B2 (ja) | 1996-08-07 |
EP0435577A2 (de) | 1991-07-03 |
EP0435568B1 (de) | 1994-07-27 |
EP0435577A3 (en) | 1992-02-05 |
DE69014845D1 (de) | 1995-01-19 |
DE69026694D1 (de) | 1996-05-30 |
DE69026694T2 (de) | 1996-11-21 |
US5037676A (en) | 1991-08-06 |
JP2523220B2 (ja) | 1996-08-07 |
BR9006552A (pt) | 1991-10-01 |
DE69011068T2 (de) | 1995-01-26 |
EP0435577B1 (de) | 1994-12-07 |
BR9006553A (pt) | 1991-10-01 |
DE69014845T2 (de) | 1995-07-13 |
EP0435567B1 (de) | 1996-04-24 |
JPH03200259A (ja) | 1991-09-02 |
EP0435567A2 (de) | 1991-07-03 |
BR9006551A (pt) | 1991-10-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69011068T2 (de) | Verfahren und Vorrichtung zur Reinigung, Beschichtung und Aushärtung von Empfängersubstraten in einer geschlossenen planetären Anordnung. | |
DE59101823D1 (de) | Verfahren zum Beschichten von Kunststoffsubstraten und Lack zur Verwendung in diesem Verfahren. | |
DE69115037T2 (de) | Verfahren und vorrichtung zur ausgabe von artikeln. | |
DE69510252T2 (de) | Verfahren und Vorrichtung zur Gewinnung eines sich bewegenden Objektes, mit Anwendung von Hintergrundsubstraktion | |
DE69411213D1 (de) | Verfahren und Vorrichtung zum Waschen von Substraten | |
DE59000959D1 (de) | Verfahren und vorrichtung zum beschichten eines schichttraegers. | |
DE59001543D1 (de) | Verfahren und vorrichtung zum automatischen anspinnen. | |
DE294213T1 (de) | Vorrichtung und verfahren zum kantenbeschichten. | |
DE3869623D1 (de) | Verfahren zum vorhangbeschichtungsstart und vorrichtung. | |
DE69015074D1 (de) | Verfahren und Vorrichtung zur Durchführung einer Fermentation. | |
DE59109125D1 (de) | EEPROM und Verfahren zum Ändern einer Initialisierungsroutine im EEPROM | |
DE59409608D1 (de) | Vorrichtung und verfahren zum transportieren von flachen gegenständen, insbesondere von substraten | |
DE59610455D1 (de) | Verfahren und vorrichtung zum dekorieren von gebinden mit gewölbten oberflächen | |
DE3776821D1 (de) | Vorrichtung und verfahren zum beschichten. | |
DE3878681T2 (de) | Verfahren und vorrichtung zur behandlung einer oberflaeche. | |
DE68924242D1 (de) | Vorrichtung zur Härtung einer Beschichtung auf einem bewegten Substrat und Verfahren zur Anwendung der Vorrichtung. | |
DE69008784T2 (de) | Verfahren und Gerät zur Verhinderung des Anwachsens von Ablagerungen in einer Rohrleitung. | |
DE59106855D1 (de) | Verfahren und Vorrichtung zur Minimierung von Störungen beim FM- oder PM-Empfang. | |
DE69013759D1 (de) | Verfahren und Vorrichtung zur Reinigung von Gegenständen. | |
DE69006416T2 (de) | Verfahren und Vorrichtung zur Beladung einer Flüssigkeit. | |
DE69522649T2 (de) | Vorrichtung zum Herstellen oder Beschichten einer Vorform mit einer Einrichtung zum Unterstützen der Vorform und Verfahren wobei eine solche Vorrichtung benützt wird | |
DE59902219D1 (de) | Verfahren und vorrichtung zur beschichtung von substraten im vakuum | |
DE69907300D1 (de) | Vorrichtung und Verfahren zur Reinigung von Wanderdeckelbeschlägen in einer Deckelkarde | |
DE3774119D1 (de) | Verfahren und vorrichtung zur ausfuehrung von zwei befehlsfolgen in einer im voraus bestimmten reihenfolge. | |
DE59505233D1 (de) | Verfahren und vorrichtung zur behandlung von mit feinsten löchern versehenen plattenförmigen werkstücken |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |