DE69015652T2 - Weichmagnetischer dünner Film, Verfahren zu seiner Herstellung und Magnetkopf. - Google Patents

Weichmagnetischer dünner Film, Verfahren zu seiner Herstellung und Magnetkopf.

Info

Publication number
DE69015652T2
DE69015652T2 DE69015652T DE69015652T DE69015652T2 DE 69015652 T2 DE69015652 T2 DE 69015652T2 DE 69015652 T DE69015652 T DE 69015652T DE 69015652 T DE69015652 T DE 69015652T DE 69015652 T2 DE69015652 T2 DE 69015652T2
Authority
DE
Germany
Prior art keywords
production
thin film
magnetic head
soft magnetic
magnetic thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69015652T
Other languages
English (en)
Other versions
DE69015652D1 (de
Inventor
Kanji Nakanishi
Osamu Shimizu
Satoshi Yoshida
Masaaki Katayama
Tatsuya Isomura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Corp
Original Assignee
Fuji Photo Film Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP1304811A external-priority patent/JPH0744108B2/ja
Priority claimed from JP1310607A external-priority patent/JPH0744123B2/ja
Priority claimed from JP1315361A external-priority patent/JP2866911B2/ja
Priority claimed from JP2006242A external-priority patent/JP2808547B2/ja
Application filed by Fuji Photo Film Co Ltd filed Critical Fuji Photo Film Co Ltd
Application granted granted Critical
Publication of DE69015652D1 publication Critical patent/DE69015652D1/de
Publication of DE69015652T2 publication Critical patent/DE69015652T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
    • H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
    • H01F10/18—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being compounds
    • H01F10/187—Amorphous compounds
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/147—Structure or manufacture of heads, e.g. inductive with cores being composed of metal sheets, i.e. laminated cores with cores composed of isolated magnetic layers, e.g. sheets
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
    • G11B5/1875—"Composite" pole pieces, i.e. poles composed in some parts of magnetic particles and in some other parts of magnetic metal layers
    • G11B5/1877—"Composite" pole pieces, i.e. poles composed in some parts of magnetic particles and in some other parts of magnetic metal layers including at least one magnetic thin film
    • G11B5/1878—"Composite" pole pieces, i.e. poles composed in some parts of magnetic particles and in some other parts of magnetic metal layers including at least one magnetic thin film disposed immediately adjacent to the transducing gap, e.g. "Metal-In-Gap" structure
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
    • G11B5/21—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features the pole pieces being of ferrous sheet metal or other magnetic layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3176—Structure of heads comprising at least in the transducing gap regions two magnetic thin films disposed respectively at both sides of the gaps
    • G11B5/3179—Structure of heads comprising at least in the transducing gap regions two magnetic thin films disposed respectively at both sides of the gaps the films being mainly disposed in parallel planes
    • G11B5/3186—Structure of heads comprising at least in the transducing gap regions two magnetic thin films disposed respectively at both sides of the gaps the films being mainly disposed in parallel planes parallel to the gap plane, e.g. "vertical head structure"
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/12—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
    • H01F1/14—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys
    • H01F1/147—Alloys characterised by their composition
    • H01F1/153—Amorphous metallic alloys, e.g. glassy metals
    • H01F1/15308—Amorphous metallic alloys, e.g. glassy metals based on Fe/Ni
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
    • H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
    • H01F10/12—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys
    • H01F10/13—Amorphous metallic alloys, e.g. glassy metals
    • H01F10/131—Amorphous metallic alloys, e.g. glassy metals containing iron or nickel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/26—Thin magnetic films, e.g. of one-domain structure characterised by the substrate or intermediate layers
    • H01F10/265—Magnetic multilayers non exchange-coupled
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Thin Magnetic Films (AREA)
  • Magnetic Heads (AREA)
DE69015652T 1989-01-26 1990-01-26 Weichmagnetischer dünner Film, Verfahren zu seiner Herstellung und Magnetkopf. Expired - Lifetime DE69015652T2 (de)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
JP1511289 1989-01-26
JP2751889 1989-02-08
JP3372689 1989-02-15
JP20458689 1989-08-09
JP1304811A JPH0744108B2 (ja) 1989-01-26 1989-11-27 軟磁性薄膜
JP1310607A JPH0744123B2 (ja) 1989-02-08 1989-12-01 軟磁性薄膜の製造方法
JP1315361A JP2866911B2 (ja) 1989-02-15 1989-12-06 磁気ヘッド
JP2006242A JP2808547B2 (ja) 1989-08-09 1990-01-17 複合磁気ヘッド

Publications (2)

Publication Number Publication Date
DE69015652D1 DE69015652D1 (de) 1995-02-16
DE69015652T2 true DE69015652T2 (de) 1995-05-11

Family

ID=27571574

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69015652T Expired - Lifetime DE69015652T2 (de) 1989-01-26 1990-01-26 Weichmagnetischer dünner Film, Verfahren zu seiner Herstellung und Magnetkopf.

Country Status (3)

Country Link
US (1) US5117321A (de)
EP (1) EP0380136B1 (de)
DE (1) DE69015652T2 (de)

Families Citing this family (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69101726T2 (de) * 1990-02-16 1994-08-11 Matsushita Electric Ind Co Ltd Weichmagnetische Dünnschichten aus Legierung und Magnetköpfe daraus.
JPH0785452B2 (ja) * 1990-04-20 1995-09-13 日本電気株式会社 磁性体膜とその製造方法
DE69117362T2 (de) * 1990-07-13 1996-07-11 Fuji Photo Film Co Ltd Zusammengesetzter Magnetkopf
US5262915A (en) * 1990-08-23 1993-11-16 Tdk Corporation Magnetic head comprising a soft magnetic thin film of FeNiZrN having enhanced (100) orientation
US5137750A (en) * 1990-11-06 1992-08-11 Seagate Technology, Inc. Method of making a thin film head with contoured pole face edges for undershoot reduction
DE69203029T2 (de) * 1991-04-24 1995-11-30 Nec Corp Magnetische Struktur.
US5432645A (en) * 1991-06-14 1995-07-11 Tdk Corporation Magnetic head-forming thin film
WO1993011531A1 (en) * 1991-12-02 1993-06-10 Nikko Kyodo Company, Limited Thin film magnetic head
JPH0644516A (ja) * 1992-07-24 1994-02-18 Matsushita Electric Ind Co Ltd 磁気ヘッド
JP2780588B2 (ja) * 1993-01-14 1998-07-30 松下電器産業株式会社 積層型磁気ヘッドコア
JPH06259729A (ja) * 1993-03-03 1994-09-16 Tdk Corp 磁気ヘッド
JP3291099B2 (ja) * 1993-03-05 2002-06-10 アルプス電気株式会社 軟磁性合金および平面型磁気素子
US5736921A (en) * 1994-03-23 1998-04-07 Sanyo Electric Co., Ltd. Magnetoresistive element
US5656381A (en) * 1993-03-24 1997-08-12 Sanyo Electric Co., Ltd. Magnetoresistance-effect element
US5585198A (en) * 1993-10-20 1996-12-17 Sanyo Electric Co., Ltd. Magnetorsistance effect element
JPH0785401A (ja) * 1993-09-13 1995-03-31 Sony Corp 磁気記録方式
US5695858A (en) * 1994-03-23 1997-12-09 Sanyo Electric Co., Ltd. Magnetoresistive element
JPH07268610A (ja) * 1994-03-28 1995-10-17 Alps Electric Co Ltd 軟磁性合金薄膜
US5589221A (en) * 1994-05-16 1996-12-31 Matsushita Electric Industrial Co., Ltd. Magnetic thin film, and method of manufacturing the same, and magnetic head
JPH0849062A (ja) * 1994-08-04 1996-02-20 Sanyo Electric Co Ltd 磁気抵抗効果膜
US5858548A (en) * 1994-08-12 1999-01-12 Hitachi, Ltd. Soft magnetic thin film, and magnetic head and magnetic recording device using the same
US5873955A (en) * 1994-08-12 1999-02-23 Hitachi, Ltd. Soft magnetic thin film, and magnetic head and magnetic recording device using the same
JPH08130337A (ja) * 1994-09-09 1996-05-21 Sanyo Electric Co Ltd 磁気抵抗素子及びその製造方法
US6033792A (en) * 1995-02-02 2000-03-07 Hitachi, Ltd. Soft magnetic thin film, and magnetic head and magnetic recording device using the same
JPH08212512A (ja) * 1995-02-03 1996-08-20 Hitachi Ltd 磁気記憶装置及びそれに用いる薄膜磁気ヘッドとその製造方法
US5755986A (en) * 1995-09-25 1998-05-26 Alps Electric Co., Ltd. Soft-magnetic dielectric high-frequency composite material and method for making the same
JP3707166B2 (ja) * 1996-01-29 2005-10-19 ソニー株式会社 磁気ヘッド
US5833770A (en) * 1996-02-26 1998-11-10 Alps Electric Co., Ltd. High frequency soft magnetic alloy and plane magnetic element, antenna and wave absorber comprising the same
JP3108637B2 (ja) * 1996-09-19 2000-11-13 ティーディーケイ株式会社 軟磁性薄膜の製造方法
JP3108636B2 (ja) * 1996-09-19 2000-11-13 ティーディーケイ株式会社 磁気ヘッドおよびその製造方法
JPH10162308A (ja) * 1996-11-29 1998-06-19 Alps Electric Co Ltd 磁気ヘッド
JP3517067B2 (ja) * 1996-11-29 2004-04-05 アルプス電気株式会社 磁気ヘッド
US6632520B1 (en) * 1998-09-03 2003-10-14 Matsushita Electric Industrial Co., Ltd. Magnetic film
US6093337A (en) * 1998-10-01 2000-07-25 Iowa State University Research Foundation, Inc. Material for magnetostrictive sensors and other applications based on ferrite materials
US6352649B1 (en) 1998-10-01 2002-03-05 Iowa State University Research Foundation Inc. Material for magnetostrictive sensors and other applications based on ferrite materials
WO2001085631A1 (fr) 2000-05-11 2001-11-15 Matsushita Electric Industrial Co., Ltd. Composition de verre, verre d'etancheite pour tete magnetique et tete magnetique correspondante
EP1361586A4 (de) * 2001-01-18 2008-06-11 Taiyo Yuden Kk "granularer dünner magnetfilm und verfahren zur herstellung des films, laminierter magnetfilm, magnetisches teil und elektronisches bauelement"
KR100818994B1 (ko) * 2006-01-24 2008-04-02 삼성전자주식회사 반도체 소자의 제조 방법
US20070253103A1 (en) * 2006-04-27 2007-11-01 Heraeus, Inc. Soft magnetic underlayer in magnetic media and soft magnetic alloy based sputter target
CN102240926B (zh) * 2010-05-13 2013-06-05 鸿富锦精密工业（深圳）有限公司 锆基块体非晶合金表面研磨方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60152651A (ja) * 1984-01-20 1985-08-10 Res Dev Corp Of Japan 窒素を含む非晶質合金およびその製造方法
KR940004986B1 (ko) * 1984-08-27 1994-06-09 가부시기가이샤 히다찌세이사꾸쇼 자성막의 제조방법 및 그것을 사용한 자기헤드
DE3707522A1 (de) * 1986-03-12 1987-09-24 Matsushita Electric Ind Co Ltd Magnetischer nitridfilm
JP2555057B2 (ja) * 1987-03-25 1996-11-20 株式会社日立製作所 耐食強磁性膜
JP2550996B2 (ja) * 1987-05-29 1996-11-06 ソニー株式会社 軟磁性薄膜

Also Published As

Publication number Publication date
US5117321A (en) 1992-05-26
EP0380136B1 (de) 1995-01-04
EP0380136A2 (de) 1990-08-01
DE69015652D1 (de) 1995-02-16
EP0380136A3 (de) 1991-07-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: FUJIFILM CORP., TOKIO/TOKYO, JP