DE69019491D1 - Verschiebungssensor vom Induktionstyp mit Unempfindlichkeit gegenüber externen magnetischen Feldern. - Google Patents

Verschiebungssensor vom Induktionstyp mit Unempfindlichkeit gegenüber externen magnetischen Feldern.

Info

Publication number
DE69019491D1
DE69019491D1 DE69019491T DE69019491T DE69019491D1 DE 69019491 D1 DE69019491 D1 DE 69019491D1 DE 69019491 T DE69019491 T DE 69019491T DE 69019491 T DE69019491 T DE 69019491T DE 69019491 D1 DE69019491 D1 DE 69019491D1
Authority
DE
Germany
Prior art keywords
magnetic fields
displacement sensor
external magnetic
induction type
type displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69019491T
Other languages
English (en)
Other versions
DE69019491T2 (de
Inventor
Atsushi Nakajima
Minoru Takizawa
Chikara Murakami
Yoichi Kanemitsu
Yuji Shirao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Aerospace Exploration Agentcy Chofu Tok
Ebara Corp
Ebara Research Co Ltd
Original Assignee
Ebara Corp
National Aerospace Laboratory of Japan
Ebara Research Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP34277389A external-priority patent/JP2588034B2/ja
Priority claimed from JP34277489A external-priority patent/JP2596841B2/ja
Application filed by Ebara Corp, National Aerospace Laboratory of Japan, Ebara Research Co Ltd filed Critical Ebara Corp
Application granted granted Critical
Publication of DE69019491D1 publication Critical patent/DE69019491D1/de
Publication of DE69019491T2 publication Critical patent/DE69019491T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/22—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils
    • G01D5/2208—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils by influencing the self-induction of the coils
DE69019491T 1989-12-29 1990-12-21 Verschiebungssensor vom Induktionstyp mit Unempfindlichkeit gegenüber externen magnetischen Feldern. Expired - Fee Related DE69019491T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP34277389A JP2588034B2 (ja) 1989-12-29 1989-12-29 インダクタンス形変位センサ
JP34277489A JP2596841B2 (ja) 1989-12-29 1989-12-29 インダクタンス形変位センサ

Publications (2)

Publication Number Publication Date
DE69019491D1 true DE69019491D1 (de) 1995-06-22
DE69019491T2 DE69019491T2 (de) 1996-02-22

Family

ID=26577356

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69019491T Expired - Fee Related DE69019491T2 (de) 1989-12-29 1990-12-21 Verschiebungssensor vom Induktionstyp mit Unempfindlichkeit gegenüber externen magnetischen Feldern.

Country Status (4)

Country Link
US (1) US5194805A (de)
EP (1) EP0435232B1 (de)
KR (1) KR0165893B1 (de)
DE (1) DE69019491T2 (de)

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US5696412A (en) * 1993-10-20 1997-12-09 Iannello; Victor Sensor-less position detector for an active magnetic bearing
US5524490A (en) * 1994-05-25 1996-06-11 Delco Electronics Corporation Inductive proximity sensor
US5736800A (en) * 1994-10-18 1998-04-07 Iannello; Victor Light weight, high performance radial actuator for magnetic bearing systems
GB9603966D0 (en) * 1996-02-24 1996-04-24 Glacier Metal Co Ltd Rotor arrangement including axial displacement rate transducer
US5952822A (en) * 1996-10-24 1999-09-14 Allen-Bradley Company, Llc Method and apparatus for proximity sensing in the presence of an external field
DE10014348B4 (de) * 2000-03-24 2009-03-12 Immobiliengesellschaft Helmut Fischer Gmbh & Co. Kg Vorrichtung zur zerstörungsfreien Messung der Dicke dünner Schichten
US6972560B2 (en) * 2003-04-22 2005-12-06 Delphi Technologies, Inc. Method for detecting a change in permeability of a magnetostrictive object
US7088094B2 (en) * 2004-07-20 2006-08-08 Infinia Corporation Displacement sensing system and method
JP4483497B2 (ja) * 2004-09-16 2010-06-16 富士ゼロックス株式会社 磁性体検知装置
KR100818684B1 (ko) * 2004-10-29 2008-04-01 한국기계연구원 인덕티브 센서의 제어방법
EP1679492A1 (de) * 2005-01-11 2006-07-12 Mecos Traxler AG Wirbelstromsensor und Magnetlagervorrichtung
KR101103504B1 (ko) * 2009-10-30 2012-01-10 한국전력공사 축방향 자기베어링 장치
WO2015144820A1 (en) * 2014-03-26 2015-10-01 Marposs Societa' Per Azioni Device for checking dimensions of a mechanical piece
KR102538861B1 (ko) 2017-12-26 2023-06-01 가부시키가이샤 에바라 세이사꾸쇼 자성 소자 및 그것을 사용한 와전류식 센서
KR102451071B1 (ko) * 2020-06-03 2022-10-05 주식회사 케이티앤지 인덕턴스채널을 포함하는 외부가열식 에어로졸 생성 장치

Family Cites Families (14)

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Publication number Priority date Publication date Assignee Title
US3197693A (en) * 1960-10-04 1965-07-27 Hugo L Libby Nondestructive eddy current subsurface testing device providing compensation for variation in probe-to-specimen spacing and surface irregularities
US3336525A (en) * 1963-01-08 1967-08-15 Kaman Aircraft Corp Variable impedance displacement transducer
US3368142A (en) * 1965-11-15 1968-02-06 Northrop Corp Self-testing variable transformer
GB1242414A (en) * 1968-05-08 1971-08-11 Ass Eng Ltd Inductive transducers
DE2021102C3 (de) * 1970-04-29 1974-01-03 Siemens Ag, 1000 Berlin U. 8000 Muenchen Induktiver Meßumformer zum berührungslosen Registrieren von Gegenständen
US3753096A (en) * 1971-02-04 1973-08-14 Automation Ind Inc Eddy current flaw detection system with left off compensation
US3764897A (en) * 1971-12-28 1973-10-09 Singer Co Electromagnetic thickness gauging using a transmitting coil shaped to provide a constant field over a range of measuring distances
FR2214890B1 (de) * 1973-01-18 1976-04-09 Europ Propulsion
JPS5841304A (ja) * 1981-09-04 1983-03-10 Seiko Instr & Electronics Ltd 回転体の半径方向位置検出器
JPS5967404A (ja) * 1982-09-24 1984-04-17 Seiko Instr & Electronics Ltd 回転体の半径方向変位検出器
FR2561729B1 (fr) * 1984-03-26 1986-08-22 Europ Propulsion Palier magnetique radial actif a rotor massif pour l'amortissement des frequences critiques
DE3514154A1 (de) * 1985-04-19 1986-10-23 Robert Bosch Gmbh, 7000 Stuttgart Beruehrungsfreies messverfahren
US4845429A (en) * 1986-03-12 1989-07-04 Eldec Corporation Inductance divider sensor
JPH0739930B2 (ja) * 1987-05-08 1995-05-01 光洋精工株式会社 回転体の位置検出器

Also Published As

Publication number Publication date
KR0165893B1 (ko) 1999-03-30
DE69019491T2 (de) 1996-02-22
EP0435232A1 (de) 1991-07-03
US5194805A (en) 1993-03-16
KR910012668A (ko) 1991-08-08
EP0435232B1 (de) 1995-05-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: NATIONAL AEROSPACE EXPLORATION AGENTCY, CHOFU, TOK

Owner name: EBARA RESEARCH CO., LTD., FUJISAWA, KANAGAWA, JP

Owner name: EBARA CORP., TOKIO/TOKYO, JP

8339 Ceased/non-payment of the annual fee