DE69026732T2 - Sonde - Google Patents

Sonde

Info

Publication number
DE69026732T2
DE69026732T2 DE69026732T DE69026732T DE69026732T2 DE 69026732 T2 DE69026732 T2 DE 69026732T2 DE 69026732 T DE69026732 T DE 69026732T DE 69026732 T DE69026732 T DE 69026732T DE 69026732 T2 DE69026732 T2 DE 69026732T2
Authority
DE
Germany
Prior art keywords
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69026732T
Other languages
English (en)
Other versions
DE69026732D1 (de
Inventor
Hiroko Ohta
Tsugiko Takase
Shuzo Mishima
Hirofumi Miyamoto
Takao Okada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Publication of DE69026732D1 publication Critical patent/DE69026732D1/de
Application granted granted Critical
Publication of DE69026732T2 publication Critical patent/DE69026732T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/02—Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
    • G01Q30/025—Optical microscopes coupled with SPM
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/02—Probe holders
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/861—Scanning tunneling probe
DE69026732T 1989-02-13 1990-02-07 Sonde Expired - Fee Related DE69026732T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3110489 1989-02-13

Publications (2)

Publication Number Publication Date
DE69026732D1 DE69026732D1 (de) 1996-06-05
DE69026732T2 true DE69026732T2 (de) 1996-12-05

Family

ID=12322095

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69026732T Expired - Fee Related DE69026732T2 (de) 1989-02-13 1990-02-07 Sonde

Country Status (4)

Country Link
US (1) US5041783A (de)
EP (1) EP0383182B1 (de)
JP (1) JP2985153B2 (de)
DE (1) DE69026732T2 (de)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5260824A (en) * 1989-04-24 1993-11-09 Olympus Optical Co., Ltd. Atomic force microscope
JP2815196B2 (ja) * 1989-10-02 1998-10-27 オリンパス光学工業株式会社 微細表面形状計測装置
JPH03218042A (ja) * 1990-01-23 1991-09-25 Toshiba Corp 高周波用固定カード
US5229607A (en) * 1990-04-19 1993-07-20 Hitachi, Ltd. Combination apparatus having a scanning electron microscope therein
US5198755A (en) * 1990-09-03 1993-03-30 Tokyo Electron Limited Probe apparatus
DE4041027C1 (de) * 1990-12-20 1992-06-25 Siemens Nixdorf Informationssysteme Ag, 4790 Paderborn, De
EP0491973B1 (de) * 1990-12-21 1995-11-02 International Business Machines Corporation Integriertes Rastertunnelmikroskop mit pneumatischer und elektrostatischer Steuerung und Verfahren zum Herstellen desselben
US5283437A (en) * 1990-12-21 1994-02-01 International Business Machines Corporation Pneumatically and electrostatically driven scanning tunneling microscope
US5157251A (en) * 1991-03-13 1992-10-20 Park Scientific Instruments Scanning force microscope having aligning and adjusting means
DE69226554T2 (de) * 1991-03-15 1999-03-04 Nikon Corp Mikroskop bestehend aus Rastertunnelmikroskop kombiniert mit optischem Mikroskop
EP0541139B1 (de) * 1991-08-05 2003-01-22 Koninklijke Philips Electronics N.V. Elektrooptische Messanordnung zum Messen eines elektrischen Signals in einem elektronischen Bauteil
JPH0540034A (ja) * 1991-08-08 1993-02-19 Nikon Corp 複合型顕微鏡
US5267471A (en) * 1992-04-30 1993-12-07 Ibm Corporation Double cantilever sensor for atomic force microscope
US5260577A (en) * 1992-11-09 1993-11-09 International Business Machines Corp. Sample carriage for scanning probe microscope
US5426302A (en) * 1993-04-28 1995-06-20 Board Of Regents, University Of Texas Optically guided macroscopic-scan-range/nanometer resolution probing system
DE4314301C1 (de) * 1993-04-30 1994-05-05 Imm Inst Mikrotech Abtastvorrichtung zur Untersuchung von Oberflächenstrukturen mit Auflösung im submicron-Bereich und Verfahren zu deren Herstellung
JPH0798329A (ja) * 1993-09-28 1995-04-11 Hamamatsu Photonics Kk Ｅ−ｏプローブ
JP3003974B2 (ja) * 1993-11-22 2000-01-31 富士通株式会社 電圧・変位検出プローブ及びこれを用いた電圧・変位測定装置
JPH0862229A (ja) * 1994-08-22 1996-03-08 Ryoden Semiconductor Syst Eng Kk 薄膜膜質測定装置、薄膜膜質測定方法、及び半導体装置の製造方法
US5874668A (en) * 1995-10-24 1999-02-23 Arch Development Corporation Atomic force microscope for biological specimens
US5726454A (en) * 1996-05-03 1998-03-10 Taiwan Semiconductor Manufacturing Company, Ltd. Tripod for polishing a sample and for viewing the sample under a microscope
JP2005069972A (ja) * 2003-08-27 2005-03-17 Hitachi Kenki Fine Tech Co Ltd 走査型プローブ顕微鏡の探針移動制御方法
US7348076B2 (en) 2004-04-08 2008-03-25 Saint-Gobain Ceramics & Plastics, Inc. Single crystals and methods for fabricating same
US7521784B2 (en) * 2004-12-17 2009-04-21 Hewlett-Packard Development Company, L.P. System for coupling wire to semiconductor region
WO2007078316A2 (en) * 2005-05-10 2007-07-12 The Regents Of The University Of California Tapered probe structures and fabrication
PT2835653T (pt) * 2013-08-06 2023-01-04 Univ Basel Suporte de amostras para um mfa
CN107132379B (zh) * 2017-05-24 2019-10-22 中国科学院宁波材料技术与工程研究所 一种用于扫描探针显微镜的探针夹持装置
CN109406829B (zh) * 2017-08-17 2021-02-19 中国科学院物理研究所 扫描探针显微镜的扫描头
US11047650B2 (en) 2017-09-29 2021-06-29 Saint-Gobain Ceramics & Plastics, Inc. Transparent composite having a laminated structure
US11372227B2 (en) 2019-02-20 2022-06-28 Raytheon Company Microsection sample stabilizer
CN115507900B (zh) * 2022-11-11 2023-02-28 国网山东省电力公司荣成市供电公司 基于三向举升装置的隧道电缆盲区探测系统及探测方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH643397A5 (de) * 1979-09-20 1984-05-30 Ibm Raster-tunnelmikroskop.
US4709141A (en) * 1986-01-09 1987-11-24 Rockwell International Corporation Non-destructive testing of cooled detector arrays
US4857836A (en) * 1987-06-09 1989-08-15 Siemens Aktiengesellschaft Mechanical probe for optical measurement of electrical signals
US4851767A (en) * 1988-01-15 1989-07-25 International Business Machines Corporation Detachable high-speed opto-electronic sampling probe
US4891584A (en) * 1988-03-21 1990-01-02 Semitest, Inc. Apparatus for making surface photovoltage measurements of a semiconductor
EP0331148B1 (de) * 1988-03-04 1994-07-13 Kabushiki Kaisha Toshiba Mikroskop
US4928058A (en) * 1989-05-23 1990-05-22 The University Of Rochester Electro-optic signal measurement

Also Published As

Publication number Publication date
EP0383182A3 (de) 1991-05-29
DE69026732D1 (de) 1996-06-05
JP2985153B2 (ja) 1999-11-29
EP0383182B1 (de) 1996-05-01
US5041783A (en) 1991-08-20
JPH032503A (ja) 1991-01-08
EP0383182A2 (de) 1990-08-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee