DE69032945D1 - Robotereinrichtung - Google Patents
RobotereinrichtungInfo
- Publication number
- DE69032945D1 DE69032945D1 DE69032945T DE69032945T DE69032945D1 DE 69032945 D1 DE69032945 D1 DE 69032945D1 DE 69032945 T DE69032945 T DE 69032945T DE 69032945 T DE69032945 T DE 69032945T DE 69032945 D1 DE69032945 D1 DE 69032945D1
- Authority
- DE
- Germany
- Prior art keywords
- robotic device
- robotic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J21/00—Chambers provided with manipulation devices
- B25J21/005—Clean rooms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
- B25J9/1065—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
- B25J9/107—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms of the froglegs type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/12—Programme-controlled manipulators characterised by positioning means for manipulator elements electric
- B25J9/126—Rotary actuators
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US42477189A | 1989-10-20 | 1989-10-20 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69032945D1 true DE69032945D1 (de) | 1999-03-18 |
DE69032945T2 DE69032945T2 (de) | 1999-09-16 |
Family
ID=23683794
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69027273T Expired - Fee Related DE69027273T2 (de) | 1989-10-20 | 1990-10-10 | Biaxialer Roboter mit magnetischer Kupplung |
DE69032945T Expired - Fee Related DE69032945T2 (de) | 1989-10-20 | 1990-10-10 | Robotereinrichtung |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69027273T Expired - Fee Related DE69027273T2 (de) | 1989-10-20 | 1990-10-10 | Biaxialer Roboter mit magnetischer Kupplung |
Country Status (6)
Country | Link |
---|---|
US (5) | US5583408A (de) |
EP (3) | EP0423608B1 (de) |
JP (1) | JPH0755464B2 (de) |
KR (1) | KR100204161B1 (de) |
DE (2) | DE69027273T2 (de) |
ES (2) | ES2130295T3 (de) |
Families Citing this family (126)
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DE69027273T2 (de) * | 1989-10-20 | 1997-01-23 | Applied Materials Inc | Biaxialer Roboter mit magnetischer Kupplung |
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JPH0773833B2 (ja) * | 1992-04-23 | 1995-08-09 | アプライド マテリアルズ インコーポレイテッド | ロボット・アセンブリ |
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CN1046654C (zh) * | 1993-04-16 | 1999-11-24 | 布鲁克斯自动化公司 | 传送装置 |
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JP3757016B2 (ja) * | 1997-02-20 | 2006-03-22 | ローツェ株式会社 | ハンドリング用ロボット |
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US6123983A (en) * | 1998-04-23 | 2000-09-26 | Sandia Corporation | Method and apparatus for monitoring plasma processing operations |
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US6221679B1 (en) * | 1998-04-23 | 2001-04-24 | Sandia Corporation | Method and apparatus for monitoring plasma processing operations |
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-
1990
- 1990-10-10 DE DE69027273T patent/DE69027273T2/de not_active Expired - Fee Related
- 1990-10-10 EP EP90119433A patent/EP0423608B1/de not_active Expired - Lifetime
- 1990-10-10 ES ES94101717T patent/ES2130295T3/es not_active Expired - Lifetime
- 1990-10-10 EP EP94101717A patent/EP0600851B1/de not_active Expired - Lifetime
- 1990-10-10 ES ES90119433T patent/ES2090074T3/es not_active Expired - Lifetime
- 1990-10-10 EP EP98106428A patent/EP0858867A3/de not_active Withdrawn
- 1990-10-10 DE DE69032945T patent/DE69032945T2/de not_active Expired - Fee Related
- 1990-10-18 JP JP2280531A patent/JPH0755464B2/ja not_active Expired - Lifetime
- 1990-10-19 KR KR1019900016725A patent/KR100204161B1/ko not_active IP Right Cessation
-
1994
- 1994-07-20 US US08/277,781 patent/US5583408A/en not_active Expired - Lifetime
- 1994-08-30 US US08/298,382 patent/US5469035A/en not_active Expired - Lifetime
-
1995
- 1995-10-26 US US08/548,945 patent/US5656902A/en not_active Expired - Lifetime
-
1997
- 1997-04-22 US US08/844,871 patent/US5764012A/en not_active Expired - Fee Related
-
1998
- 1998-03-27 US US09/049,035 patent/US5990585A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
ES2130295T3 (es) | 1999-07-01 |
DE69032945T2 (de) | 1999-09-16 |
DE69027273D1 (de) | 1996-07-11 |
EP0600851B1 (de) | 1999-02-03 |
KR910007637A (ko) | 1991-05-30 |
JPH03136779A (ja) | 1991-06-11 |
KR100204161B1 (ko) | 1999-06-15 |
JPH0755464B2 (ja) | 1995-06-14 |
US5656902A (en) | 1997-08-12 |
US5764012A (en) | 1998-06-09 |
EP0423608B1 (de) | 1996-06-05 |
EP0600851A3 (en) | 1994-08-17 |
ES2090074T3 (es) | 1996-10-16 |
EP0423608A1 (de) | 1991-04-24 |
EP0858867A2 (de) | 1998-08-19 |
EP0600851A2 (de) | 1994-06-08 |
EP0858867A3 (de) | 1999-03-17 |
US5583408A (en) | 1996-12-10 |
US5990585A (en) | 1999-11-23 |
DE69027273T2 (de) | 1997-01-23 |
US5469035A (en) | 1995-11-21 |
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