DE69110181T2 - Verfahren zum Diamantkristallitstrukturwachstum. - Google Patents

Verfahren zum Diamantkristallitstrukturwachstum.

Info

Publication number: DE69110181T2
Authority: DE; Germany
Prior art keywords: structure growth; crystallite structure; diamond crystallite; diamond; growth
Prior art date: 1990-04-09
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

DE69110181T

Other languages

English (en)

Other versions

DE69110181D1 (de

Inventor

Ching-Hsong Wu

Michael Alan Tamor

Timothy Jay Potter

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Ford Werke GmbH

Original Assignee

Ford Werke GmbH

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1990-04-09

Filing date

1991-04-05

Publication date

1995-10-19

1991-04-05 Application filed by Ford Werke GmbH filed Critical Ford Werke GmbH

1995-07-13 Application granted granted Critical

1995-07-13 Publication of DE69110181D1 publication Critical patent/DE69110181D1/de

1995-10-19 Publication of DE69110181T2 publication Critical patent/DE69110181T2/de

2011-04-06 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Links

229910003460 diamond Inorganic materials 0.000 title 1
239000010432 diamond Substances 0.000 title 1

Classifications

- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/271—Diamond only using hot filaments

DE69110181T 1990-04-09 1991-04-05 Verfahren zum Diamantkristallitstrukturwachstum. Expired - Fee Related DE69110181T2 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US07/506,633 US5209812A (en)	1990-04-09	1990-04-09	Hot filament method for growing high purity diamond

Publications (2)

Publication Number	Publication Date
DE69110181D1 DE69110181D1 (de)	1995-07-13
DE69110181T2 true DE69110181T2 (de)	1995-10-19

Family

ID=24015386

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE69110181T Expired - Fee Related DE69110181T2 (de)	1990-04-09	1991-04-05	Verfahren zum Diamantkristallitstrukturwachstum.

Country Status (4)

Country	Link
US (1)	US5209812A (de)
EP (1)	EP0452051B1 (de)
CA (1)	CA2038401A1 (de)
DE (1)	DE69110181T2 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5443032A (en) *	1992-06-08	1995-08-22	Air Products And Chemicals, Inc.	Method for the manufacture of large single crystals
CA2127832C (en) *	1993-07-20	2001-02-20	Grant Lu	Cvd diamond radiation detector
JP3381319B2 (ja) *	1993-08-06	2003-02-24	住友電気工業株式会社	ダイヤモンド合成方法
US5510098A (en) *	1994-01-03	1996-04-23	University Of Central Florida	CVD method of producing and doping fullerenes
US5554415A (en) *	1994-01-18	1996-09-10	Qqc, Inc.	Substrate coating techniques, including fabricating materials on a surface of a substrate
US5620754A (en) *	1994-01-21	1997-04-15	Qqc, Inc.	Method of treating and coating substrates
US5731046A (en) *	1994-01-18	1998-03-24	Qqc, Inc.	Fabrication of diamond and diamond-like carbon coatings
JP3498363B2 (ja) *	1994-06-13	2004-02-16	住友電気工業株式会社	ダイヤモンドの合成方法
US6242049B1 (en) *	1994-09-08	2001-06-05	Sandia Corporation	Sealable stagnation flow geometries for the uniform deposition of materials and heat
JP3737221B2 (ja) *	1996-09-06	2006-01-18	英樹松村	薄膜作成方法及び薄膜作成装置
US20040071876A1 (en) *	1996-07-25	2004-04-15	Rakhimov Alexandr Tursunovich	Method for forming nanocrystalline diamond films for cold electron emission using hot filament reactor
JP3005670B2 (ja) *	1997-03-28	2000-01-31	工業技術院長	新規な表面電子構造を有する炭素物質及びその製造方法
US7306778B2 (en) *	2003-06-19	2007-12-11	Nanotech Llc	Diamond films and methods of making diamond films
US7554107B2 (en)	2005-11-04	2009-06-30	Nuflare Technology, Inc.	Writing method and writing apparatus of charged particle beam, positional deviation measuring method, and position measuring apparatus
US7547358B1 (en) *	2008-03-03	2009-06-16	Shapiro Zalman M	System and method for diamond deposition using a liquid-solvent carbon-transfer mechanism

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3030187A (en) *	1958-07-23	1962-04-17	Union Carbide Corp	Synthesis of diamond
US2996415A (en) *	1959-10-05	1961-08-15	Transitron Electronic Corp	Method of purifying silicon carbide
US3142539A (en) *	1960-07-01	1964-07-28	North American Aviation Inc	Method for artificial synthesis of diamonds
US3630678A (en) *	1968-06-26	1971-12-28	Univ Case Western Reserve	Diamond growth process
US4434188A (en) *	1981-12-17	1984-02-28	National Institute For Researches In Inorganic Materials	Method for synthesizing diamond
JPS60221395A (ja) *	1984-04-19	1985-11-06	Yoshio Imai	ダイヤモンド薄膜の製造方法
SE442305B (sv) *	1984-06-27	1985-12-16	Santrade Ltd	Forfarande for kemisk gasutfellning (cvd) for framstellning av en diamantbelagd sammansatt kropp samt anvendning av kroppen

1990
- 1990-04-09 US US07/506,633 patent/US5209812A/en not_active Expired - Fee Related
1991
- 1991-03-15 CA CA002038401A patent/CA2038401A1/en not_active Abandoned
- 1991-04-05 EP EP91303030A patent/EP0452051B1/de not_active Expired - Lifetime
- 1991-04-05 DE DE69110181T patent/DE69110181T2/de not_active Expired - Fee Related

Also Published As

Publication number	Publication date
EP0452051A1 (de)	1991-10-16
US5209812A (en)	1993-05-11
DE69110181D1 (de)	1995-07-13
CA2038401A1 (en)	1991-10-10
EP0452051B1 (de)	1995-06-07

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Legal Events

Date	Code	Title	Description
1996-07-04	8364	No opposition during term of opposition
2001-05-10	8339	Ceased/non-payment of the annual fee