DE69125672T2 - Prozessüberwachungsschaltung und Methode dazu - Google Patents

Prozessüberwachungsschaltung und Methode dazu

Info

Publication number: DE69125672T2
Authority: DE; Germany
Prior art keywords: monitoring circuit; process monitoring; circuit; monitoring
Prior art date: 1990-09-05
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

DE69125672T

Other languages

English (en)

Other versions

DE69125672D1 (de

Inventor

William H Gascoyne

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

LSI Corp

Original Assignee

LSI Logic Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1990-09-05

Filing date

1991-08-30

Publication date

1997-07-24

1991-08-30 Application filed by LSI Logic Corp filed Critical LSI Logic Corp

1997-05-22 Application granted granted Critical

1997-05-22 Publication of DE69125672D1 publication Critical patent/DE69125672D1/de

1997-07-24 Publication of DE69125672T2 publication Critical patent/DE69125672T2/de

2011-08-31 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Links

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
- H01L22/34—Circuits for electrically characterising or monitoring manufacturing processes, e. g. whole test die, wafers filled with test structures, on-board-devices incorporated on each die, process control monitors or pad structures thereof, devices in scribe line

DE69125672T 1990-09-05 1991-08-30 Prozessüberwachungsschaltung und Methode dazu Expired - Fee Related DE69125672T2 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US07/577,945 US5068547A (en)	1990-09-05	1990-09-05	Process monitor circuit

Publications (2)

Publication Number	Publication Date
DE69125672D1 DE69125672D1 (de)	1997-05-22
DE69125672T2 true DE69125672T2 (de)	1997-07-24

Family

ID=24310785

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE69125672T Expired - Fee Related DE69125672T2 (de)	1990-09-05	1991-08-30	Prozessüberwachungsschaltung und Methode dazu

Country Status (5)

Country	Link
US (1)	US5068547A (de)
EP (1)	EP0476871B1 (de)
JP (1)	JP3137269B2 (de)
KR (1)	KR100237504B1 (de)
DE (1)	DE69125672T2 (de)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5486786A (en) *	1994-08-09	1996-01-23	Lsi Logic Corporation	Process monitor for CMOS integrated circuits
US5631596A (en) *	1994-08-09	1997-05-20	Lsi Logic Corporation	Process monitor for CMOS integrated circuits
FR2737066B1 (fr) *	1995-07-20	1997-09-19	Matra Mhs	Dispositif de conversion analogique-numerique
DE19528733C1 (de) *	1995-08-04	1997-01-02	Siemens Ag	Integrierte Schaltung
US6005406A (en) *	1995-12-07	1999-12-21	International Business Machines Corporation	Test device and method facilitating aggressive circuit design
US5872449A (en) *	1996-01-26	1999-02-16	Lsi Logic Corporation	Semiconductor package qualification chip
US5796265A (en) *	1996-02-29	1998-08-18	Lsi Logic Corporation	Method for metal delay testing in semiconductor devices
US5796260A (en) *	1996-03-12	1998-08-18	Honeywell Inc.	Parametric test circuit
US5751161A (en) *	1996-04-04	1998-05-12	Lsi Logic Corporation	Update scheme for impedance controlled I/O buffers
US5654895A (en) *	1996-04-04	1997-08-05	Lsi Logic Corporation	Process monitor usig impedance controlled I/O controller
US5867033A (en) *	1996-05-24	1999-02-02	Lsi Logic Corporation	Circuit for testing the operation of a semiconductor device
US6097884A (en) *	1997-12-08	2000-08-01	Lsi Logic Corporation	Probe points and markers for critical paths and integrated circuits
US6124143A (en) *	1998-01-26	2000-09-26	Lsi Logic Corporation	Process monitor circuitry for integrated circuits
US6061814A (en) *	1998-04-21	2000-05-09	Lsi Logic Corporation	Test circuitry for determining the defect density of a semiconductor process as a function of individual metal layers
US6185706B1 (en)	1998-06-12	2001-02-06	Lsi Logic Corporation	Performance monitoring circuitry for integrated circuits
US6367042B1 (en)	1998-12-11	2002-04-02	Lsi Logic Corporation	Testing methodology for embedded memories using built-in self repair and identification circuitry
US6067262A (en) *	1998-12-11	2000-05-23	Lsi Logic Corporation	Redundancy analysis for embedded memories with built-in self test and built-in self repair
US6651202B1 (en)	1999-01-26	2003-11-18	Lsi Logic Corporation	Built-in self repair circuitry utilizing permanent record of defects
US6389578B1 (en) *	1999-05-26	2002-05-14	Hewlett-Packard Company	Method and apparatus for determining the strengths and weaknesses of paths in an integrated circuit
US6449749B1 (en) *	1999-11-18	2002-09-10	Pdf Solutions, Inc.	System and method for product yield prediction
US6978229B1 (en)	1999-11-18	2005-12-20	Pdf Solutions, Inc.	Efficient method for modeling and simulation of the impact of local and global variation on integrated circuits
WO2001036992A1 (en)	1999-11-18	2001-05-25	Pdf Solutions, Inc.	The passive multiplexor test structure for intergrated circuit manufacturing
US6544807B1 (en) *	2000-11-03	2003-04-08	Lsi Logic Corporation	Process monitor with statistically selected ring oscillator
US6850075B1 (en) *	2000-12-22	2005-02-01	Cypress Semiconductor Corp.	SRAM self-timed write stress test mode
US7205986B2 (en) *	2002-12-18	2007-04-17	Semiconductor Energy Laboratory Co., Ltd.	Image display device and testing method of the same
JP4624109B2 (ja) *	2003-03-25	2011-02-02	株式会社半導体エネルギー研究所	半導体装置の検査回路
US7256055B2 (en)	2003-08-25	2007-08-14	Tau-Metrix, Inc.	System and apparatus for using test structures inside of a chip during the fabrication of the chip
US7298656B2 (en) *	2004-04-30	2007-11-20	Infineon Technologies Ag	Process monitoring by comparing delays proportional to test voltages and reference voltages
US7239163B1 (en) *	2004-06-23	2007-07-03	Ridgetop Group, Inc.	Die-level process monitor and method
US7243329B2 (en) *	2004-07-02	2007-07-10	Altera Corporation	Application-specific integrated circuit equivalents of programmable logic and associated methods
US7518602B2 (en) *	2004-12-06	2009-04-14	Semiconductor Energy Laboratory Co., Ltd.	Test circuit and display device having the same
US8095907B2 (en)	2007-10-19	2012-01-10	International Business Machines Corporation	Reliability evaluation and system fail warning methods using on chip parametric monitors
US20100283051A1 (en) *	2008-01-11	2010-11-11	Nxp B.V.	Monitor cell and monitor cell placement method
JP5452983B2 (ja) *	2009-06-03	2014-03-26	株式会社メガチップス	プロセスモニタ回路およびプロセス特性の判定方法
TWI405991B (zh)	2010-04-29	2013-08-21	Ind Tech Res Inst	製程偏移偵測裝置與製程偏移偵測方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4146835A (en) *	1978-03-08	1979-03-27	Western Electric Co., Inc.	Testing the differential response times of a plurality of circuits
US4392105A (en) *	1980-12-17	1983-07-05	International Business Machines Corp.	Test circuit for delay measurements on a LSI chip
US4550405A (en) *	1982-12-23	1985-10-29	Fairchild Camera And Instrument Corporation	Deskew circuit for automatic test equipment
WO1985003817A1 (en) *	1984-02-15	1985-08-29	American Telephone & Telegraph Company	High speed cmos circuits
US4737670A (en) *	1984-11-09	1988-04-12	Lsi Logic Corporation	Delay control circuit
US4712061A (en) *	1986-02-24	1987-12-08	Gould Inc.	Small propagation delay measurement for digital logic
US4970454A (en) *	1986-12-09	1990-11-13	Texas Instruments Incorporated	Packaged semiconductor device with test circuits for determining fabrication parameters

1990
- 1990-09-05 US US07/577,945 patent/US5068547A/en not_active Expired - Lifetime
1991
- 1991-08-30 DE DE69125672T patent/DE69125672T2/de not_active Expired - Fee Related
- 1991-08-30 EP EP91307954A patent/EP0476871B1/de not_active Expired - Lifetime
- 1991-09-05 KR KR1019910015499A patent/KR100237504B1/ko not_active IP Right Cessation
- 1991-09-05 JP JP03254847A patent/JP3137269B2/ja not_active Expired - Lifetime

Also Published As

Publication number	Publication date
KR100237504B1 (ko)	2000-01-15
EP0476871B1 (de)	1997-04-16
US5068547A (en)	1991-11-26
KR920007138A (ko)	1992-04-28
JPH0582612A (ja)	1993-04-02
JP3137269B2 (ja)	2001-02-19
DE69125672D1 (de)	1997-05-22
EP0476871A1 (de)	1992-03-25

Legal Events

Date	Code	Title	Description
1998-05-14	8364	No opposition during term of opposition
1999-10-07	8339	Ceased/non-payment of the annual fee

Publication	Publication Date	Title
DE69125672D1 (de)	1997-05-22	Prozessüberwachungsschaltung und Methode dazu
BR9107045A (pt)	1993-10-13	Arranjo e metodo de filtragem
DE69534938D1 (de)	2006-05-24	Photovoltaisches Bauelement und Herstellungsverfahren
DE69417346D1 (de)	1999-04-29	Bildaufnehmer und Herstellungsverfahren
KR960012379A (ko)	1996-04-20	가열장치 및 그 제조방법, 및 그것을 이용한 처리장치
BR9301125A (pt)	1993-10-26	Aparelho e processo de minitorizacao aparelho e processo de monitorizacao
DE68906744D1 (de)	1993-07-01	Ein in-line-infiltrationsdetektionsgeraet und methode.
DE3484331D1 (de)	1991-05-02	Dekodierverfahren und vorrichtung dafuer.
DE69406723D1 (de)	1997-12-18	Organopolysiloxan und Herstellungsverfahren
DE69126643D1 (de)	1997-07-31	Methode und Vorrichtung zur Entfernung von Heparin
DE69506037T2 (de)	1999-06-10	Audioausgabeeinheit und Methode
BR8807298A (pt)	1990-04-17	Aparelho e processo de filtracao
DE69420880T2 (de)	2000-04-20	Birnenverarbeitungsverfahren und Gerät
DE69125265D1 (de)	1997-04-24	Separator und sein herstellungsverfahren
DE69131634D1 (de)	1999-10-28	Kommunikationsendgerät und Methode zum Gebrauch desselben
DE69730775D1 (de)	2004-10-28	Logische Schaltung und zugehöriges Herstellungsverfahren
DE69007779D1 (de)	1994-05-05	Trocknungsverfahren und vorrichtung dazu.
DE69513221T2 (de)	2000-05-31	Wärmedetektor und Herstellungsverfahren
DE69525496T2 (de)	2002-08-14	Leiterrahmen und Herstellungsverfahren
DE69132786D1 (de)	2001-11-29	IEEE488-Schnittstelle und Nachrichtenverarbeitungsverfahren
DE69018729T2 (de)	1995-08-17	Bildgebendes Gerät und Methode.
DE69504484T2 (de)	1999-04-15	Produktionseinrichtung und verarbeitungsbetrieb
FR2723520B1 (fr)	1997-12-26	Piece de joaillerie et son procede de fabrication
DE59009441D1 (de)	1995-08-31	Verfahren und Schaltungsanordnung zur Pegelüberwachung.
DE69328607D1 (de)	2000-06-15	Detektierschaltung und Detektierverfahren