DE69126501D1 - Kraftdetektor und Beschleunigungsdetektor - Google Patents

Kraftdetektor und Beschleunigungsdetektor

Info

Publication number
DE69126501D1
DE69126501D1 DE69126501T DE69126501T DE69126501D1 DE 69126501 D1 DE69126501 D1 DE 69126501D1 DE 69126501 T DE69126501 T DE 69126501T DE 69126501 T DE69126501 T DE 69126501T DE 69126501 D1 DE69126501 D1 DE 69126501D1
Authority
DE
Germany
Prior art keywords
detector
acceleration
force
force detector
acceleration detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69126501T
Other languages
English (en)
Other versions
DE69126501T2 (de
Inventor
Kazuhiro Okada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=26550975&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69126501(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from JP2274299A external-priority patent/JP2841240B2/ja
Priority claimed from JP2416188A external-priority patent/JP3025313B2/ja
Application filed by Individual filed Critical Individual
Publication of DE69126501D1 publication Critical patent/DE69126501D1/de
Application granted granted Critical
Publication of DE69126501T2 publication Critical patent/DE69126501T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G01L1/144—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors with associated circuitry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/165—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/167—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using piezoelectric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G01P15/0922—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the bending or flexing mode type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/105—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by magnetically sensitive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S73/00—Measuring and testing
    • Y10S73/04—Piezoelectric
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49007—Indicating transducer
DE69126501T 1990-10-12 1991-10-11 Kraftdetektor und Beschleunigungsdetektor Expired - Lifetime DE69126501T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2274299A JP2841240B2 (ja) 1990-10-12 1990-10-12 力・加速度・磁気の検出装置
JP2416188A JP3025313B2 (ja) 1990-12-31 1990-12-31 静電容量の変化を利用したセンサの製造方法

Publications (2)

Publication Number Publication Date
DE69126501D1 true DE69126501D1 (de) 1997-07-17
DE69126501T2 DE69126501T2 (de) 1997-09-25

Family

ID=26550975

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69133193T Expired - Lifetime DE69133193T2 (de) 1990-10-12 1991-10-11 Verfahren zur Herstellung eines kapazitiven Detektors mit drei Substraten, sich umgebenden Regionen und einem Arbeitskörper ( Kraft, Beschleunigung, magnetisch )
DE69126501T Expired - Lifetime DE69126501T2 (de) 1990-10-12 1991-10-11 Kraftdetektor und Beschleunigungsdetektor

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69133193T Expired - Lifetime DE69133193T2 (de) 1990-10-12 1991-10-11 Verfahren zur Herstellung eines kapazitiven Detektors mit drei Substraten, sich umgebenden Regionen und einem Arbeitskörper ( Kraft, Beschleunigung, magnetisch )

Country Status (3)

Country Link
US (8) US5421213A (de)
EP (2) EP0767363B1 (de)
DE (2) DE69133193T2 (de)

Families Citing this family (147)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6864677B1 (en) * 1993-12-15 2005-03-08 Kazuhiro Okada Method of testing a sensor
EP0461265B1 (de) 1989-12-28 1995-05-10 Wacoh Corporation Beschleunigungssensoren
US5421213A (en) * 1990-10-12 1995-06-06 Okada; Kazuhiro Multi-dimensional force detector
US6314823B1 (en) * 1991-09-20 2001-11-13 Kazuhiro Okada Force detector and acceleration detector and method of manufacturing the same
JP3027457B2 (ja) * 1991-10-25 2000-04-04 和廣 岡田 多次元方向に関する力・加速度・磁気の検出装置
DE4244560A1 (de) * 1992-12-30 1994-07-07 Akebono Brake Ind Verfahren zum Erfassen von Beschleunigung und Beschleunigungssensor
DE69322873T2 (de) * 1993-03-30 1999-07-29 Kazuhiro Okada Mehrachsen-winkelgeschwindigkeits-messaufnehmer
US6282956B1 (en) 1994-12-29 2001-09-04 Kazuhiro Okada Multi-axial angular velocity sensor
US5646346A (en) * 1994-11-10 1997-07-08 Okada; Kazuhiro Multi-axial angular velocity sensor
US5661235A (en) * 1993-10-01 1997-08-26 Hysitron Incorporated Multi-dimensional capacitive transducer
US6026677A (en) * 1993-10-01 2000-02-22 Hysitron, Incorporated Apparatus for microindentation hardness testing and surface imaging incorporating a multi-plate capacitor system
US5851851A (en) * 1994-03-07 1998-12-22 Nippondenso Co., Ltd. Method for fabricating a semiconductor acceleration sensor
JP3549590B2 (ja) * 1994-09-28 2004-08-04 和廣 岡田 加速度・角速度センサ
JP3585980B2 (ja) * 1995-02-21 2004-11-10 株式会社ワコー 角速度センサ
US6003371A (en) 1995-02-21 1999-12-21 Wacoh Corporation Angular velocity sensor
JP3433401B2 (ja) * 1995-05-18 2003-08-04 アイシン精機株式会社 静電容量型加速度センサ
JPH0949856A (ja) * 1995-05-31 1997-02-18 Wako:Kk 加速度センサ
US6000280A (en) * 1995-07-20 1999-12-14 Cornell Research Foundation, Inc. Drive electrodes for microfabricated torsional cantilevers
EP0880671A2 (de) * 1995-07-20 1998-12-02 Cornell Research Foundation, Inc. Mikrohergestelltes torsionsausleger für empfindliche krafterfassung
EP0762128B1 (de) * 1995-09-04 2000-05-17 Murata Manufacturing Co., Ltd. Beschleunigungsdetektionsvorrichtung
JPH09119943A (ja) * 1995-10-24 1997-05-06 Wako:Kk 加速度センサ
JPH09320996A (ja) * 1996-03-29 1997-12-12 Denso Corp 半導体装置の製造方法
US6940405B2 (en) * 1996-05-30 2005-09-06 Guardit Technologies Llc Portable motion detector and alarm system and method
US6076401A (en) * 1996-07-10 2000-06-20 Wacoh Corporation Angular velocity sensor
US6367326B1 (en) 1996-07-10 2002-04-09 Wacoh Corporation Angular velocity sensor
US5917264A (en) * 1996-09-05 1999-06-29 Nagano Keiki Co Ltd Electrostatic capacitance type transducer and method for producing the same
US6476620B2 (en) * 1996-09-06 2002-11-05 Ks Techno Co., Ltd. Electrostatic capacity sensor
JP4176849B2 (ja) * 1997-05-08 2008-11-05 株式会社ワコー センサの製造方法
US6269687B1 (en) * 1997-09-22 2001-08-07 Seagate Technology Llc Force sensing slider
US5886256A (en) * 1998-03-18 1999-03-23 The United States Of America As Represented By The Secretary Of The Army Ice detection sensor
DE19858826A1 (de) * 1998-12-19 2000-06-29 Micronas Intermetall Gmbh Kapazitiver Magnetfeldsensor
US7906875B2 (en) * 1999-01-19 2011-03-15 Touchsensor Technologies, Llc Touch switches and practical applications therefor
JP2000249609A (ja) * 1999-03-01 2000-09-14 Wakoo:Kk 静電容量式センサ
JP2000346865A (ja) 1999-03-26 2000-12-15 Ngk Insulators Ltd 加速度センサ素子の感度調整方法
JP2000305709A (ja) 1999-04-26 2000-11-02 Alps Electric Co Ltd 電子機器
US6497141B1 (en) 1999-06-07 2002-12-24 Cornell Research Foundation Inc. Parametric resonance in microelectromechanical structures
DE19964218C2 (de) * 1999-10-08 2003-04-10 Hahn Schickard Ges Elektromechanisches Bauelement mit einem Polymerkörper und Verfahren zur Herstellung desselben
JP4295883B2 (ja) 1999-12-13 2009-07-15 株式会社ワコー 力検出装置
US6504115B2 (en) 2000-03-07 2003-01-07 Alps Electric Co., Ltd. Multidirectional input device
EP1136939A3 (de) 2000-03-14 2004-04-14 Alps Electric Co., Ltd. Auf Kapazitätsänderung basierte Eingabevorrichtung und Erfassungseinrichtung
EP1164698B1 (de) 2000-06-16 2007-10-10 Alps Electric Co., Ltd. Eingabegerät
US6989677B2 (en) * 2000-11-30 2006-01-24 Nitta Corporation Capacitance type sensor
EP1243930A1 (de) * 2001-03-08 2002-09-25 EADS Deutschland Gmbh Mikromechanischer kapazitiver Beschleunigungssensor
JP3839267B2 (ja) * 2001-03-08 2006-11-01 株式会社ルネサステクノロジ 半導体装置及びそれを用いた通信端末装置
JPWO2002073148A1 (ja) * 2001-03-14 2004-07-02 ニッタ株式会社 静電容量式センサ
US6809529B2 (en) * 2001-08-10 2004-10-26 Wacoh Corporation Force detector
JP2003329444A (ja) * 2002-03-07 2003-11-19 Alps Electric Co Ltd 静電容量式センサ
US7024947B2 (en) 2002-03-07 2006-04-11 Alps Electric Co., Ltd. Detection device including circuit component
JP4155775B2 (ja) * 2002-03-07 2008-09-24 アルプス電気株式会社 静電容量式センサ
EP1514257A4 (de) * 2002-04-12 2015-12-30 Henry K Obermeyer Mehrachsen-joystick und wandlermittel dafür
JP4216525B2 (ja) * 2002-05-13 2009-01-28 株式会社ワコー 加速度センサおよびその製造方法
JP4090939B2 (ja) * 2002-05-29 2008-05-28 ニッタ株式会社 静電容量式センサおよびその製造方法
DE10224790B4 (de) 2002-06-04 2004-10-21 Infineon Technologies Ag Beschleunigungssensor und Verfahren zum Herstellen eines Beschleunigungssensors
DE10225714A1 (de) * 2002-06-11 2004-01-08 Eads Deutschland Gmbh Mehrachsiger monolithischer Beschleunigungssensor
JP4125931B2 (ja) * 2002-08-26 2008-07-30 株式会社ワコー 回転操作量の入力装置およびこれを利用した操作装置
JP2004140029A (ja) * 2002-10-15 2004-05-13 Sharp Corp 半導体装置、半導体モジュール、半導体装置の製造方法、及び、半導体モジュールの製造方法
JP4907050B2 (ja) * 2003-03-31 2012-03-28 株式会社ワコー 力検出装置
JP4271475B2 (ja) * 2003-03-31 2009-06-03 株式会社ワコー 力検出装置
JP4387691B2 (ja) * 2003-04-28 2009-12-16 株式会社ワコー 力検出装置
JP4359757B2 (ja) * 2003-09-17 2009-11-04 ソニー株式会社 情報表示装置
US7104134B2 (en) * 2004-03-05 2006-09-12 Agilent Technologies, Inc. Piezoelectric cantilever pressure sensor
US7032454B2 (en) * 2004-03-05 2006-04-25 Agilent Technologies, Inc. Piezoelectric cantilever pressure sensor array
US7644628B2 (en) * 2005-12-16 2010-01-12 Loadstar Sensors, Inc. Resistive force sensing device and method with an advanced communication interface
GB2417326B (en) * 2004-08-20 2008-05-21 Autoliv Dev A position sensor
US20060049001A1 (en) * 2004-09-09 2006-03-09 Mark Streitman Driven pendulum apparatus and method of operation thereof
US8448326B2 (en) * 2005-04-08 2013-05-28 Microsoft Corporation Method of manufacturing an accelerometer
US7337671B2 (en) 2005-06-03 2008-03-04 Georgia Tech Research Corp. Capacitive microaccelerometers and fabrication methods
CN101400969A (zh) * 2006-03-10 2009-04-01 康蒂特米克微电子有限公司 微机械的转速传感器
US7578189B1 (en) 2006-05-10 2009-08-25 Qualtre, Inc. Three-axis accelerometers
JP2008132583A (ja) * 2006-10-24 2008-06-12 Seiko Epson Corp Ｍｅｍｓデバイス
US8144129B2 (en) * 2007-01-05 2012-03-27 Apple Inc. Flexible touch sensing circuits
US8970503B2 (en) * 2007-01-05 2015-03-03 Apple Inc. Gestures for devices having one or more touch sensitive surfaces
JP2008190931A (ja) * 2007-02-02 2008-08-21 Wacoh Corp 加速度と角速度との双方を検出するセンサ
JP2008241448A (ja) * 2007-03-27 2008-10-09 Nitta Ind Corp センサ駆動回路
US7520170B2 (en) 2007-07-10 2009-04-21 Freescale Semiconductor, Inc. Output correction circuit for three-axis accelerometer
DE102007046017B4 (de) * 2007-09-26 2021-07-01 Robert Bosch Gmbh Sensorelement
JP5044348B2 (ja) * 2007-09-26 2012-10-10 株式会社東芝 センサ装置、及びこれを用いたセンサシステムと電子機器
US20100257948A1 (en) * 2007-10-16 2010-10-14 Siemens Ag Eccentric Load Compensated Load Cell
US7965489B2 (en) 2007-12-07 2011-06-21 METAMEMS Corp. Using coulomb forces to form 3-D reconfigurable antenna structures
US7812336B2 (en) * 2007-12-07 2010-10-12 METAMEMS Corp. Levitating substrate being charged by a non-volatile device and powered by a charged capacitor or bonding wire
US20090149038A1 (en) * 2007-12-07 2009-06-11 Metamems Llc Forming edge metallic contacts and using coulomb forces to improve ohmic contact
US8159809B2 (en) * 2007-12-07 2012-04-17 METAMEMS Corp. Reconfigurable system that exchanges substrates using coulomb forces to optimize a parameter
US7728427B2 (en) * 2007-12-07 2010-06-01 Lctank Llc Assembling stacked substrates that can form cylindrical inductors and adjustable transformers
US7946174B2 (en) * 2007-12-07 2011-05-24 METAMEMS Corp. Decelerometer formed by levitating a substrate into equilibrium
US8008070B2 (en) * 2007-12-07 2011-08-30 METAMEMS Corp. Using coulomb forces to study charateristics of fluids and biological samples
US8018009B2 (en) 2007-12-07 2011-09-13 METAMEMS Corp. Forming large planar structures from substrates using edge Coulomb forces
US8096196B2 (en) * 2007-12-14 2012-01-17 Siemens Ag Load cell
US20100112743A1 (en) * 2008-11-05 2010-05-06 Rohm Co., Ltd. Method of manufacturing semiconductor device including vibrator which is provided with side insulating film and insulating separation region formed by thermal oxidation
FR2943129B1 (fr) * 2009-03-12 2011-09-30 Commissariat Energie Atomique Dispositif de caracterisation tactile de texture de surface
US20120116251A1 (en) 2009-04-13 2012-05-10 Wellsense Technologies System and method for preventing decubitus ulcers
JP5267504B2 (ja) 2009-05-19 2013-08-21 ミツミ電機株式会社 操作入力装置及び操作入力検出装置
US8217790B2 (en) * 2009-05-26 2012-07-10 Script Michael H Portable motion detector and alarm system and method
DE102009030540A1 (de) * 2009-06-24 2010-12-30 Zollner Elektronik Ag Vorrichtung und Verfahren zum zerstörungsfreien Prüfen von elektronischen Bauteilen
JP5439068B2 (ja) * 2009-07-08 2014-03-12 株式会社ワコー 力検出装置
US9222845B2 (en) * 2009-08-21 2015-12-29 Regents Of The University Of Minnesota Flexible sensors and related systems for determining forces applied to an object, such as a surgical instrument, and methods for manufacturing same
KR101119283B1 (ko) * 2009-12-22 2012-06-05 삼성전기주식회사 관성 센서 및 그 제조 방법
EP2363717B1 (de) 2010-02-12 2012-11-14 Nxp B.V. Beschleunigungsmesser und Herstellungsverfahren
AU2011225730A1 (en) 2010-03-12 2012-09-13 Enhanced Surface Dynamics, Inc. System and method for rapid data collection from pressure sensors in a pressure sensing system
WO2012084069A1 (en) 2010-12-22 2012-06-28 Aktiebolaget Skf Force sensor
GB2492798B (en) * 2011-07-12 2013-08-14 Weston Aerospace Ltd Dual output accelerometer system
US9671304B2 (en) 2011-07-13 2017-06-06 Enhanced Surface Dynamics, Inc. Methods and systems for the manufacture and initiation of a pressure detection mat
JP2013131360A (ja) * 2011-12-21 2013-07-04 Panasonic Corp 多方向入力装置
CH706635A1 (de) * 2012-06-20 2013-12-31 Kistler Holding Ag Messelement, Messkörper und Messanordnung zum Messen einer Kraft und Verwendung eines solchen Messkörpers.
WO2014076295A2 (de) * 2012-11-19 2014-05-22 Behr-Hella Thermocontrol Gmbh Kapazitiver sensor zur erfassung einer relativbewegung zweier benachbarter körper
JP6155832B2 (ja) 2013-05-16 2017-07-05 セイコーエプソン株式会社 センサー素子、電子機器、および移動体
EP3019442A4 (de) 2013-07-08 2017-01-25 Motion Engine Inc. Mems-vorrichtung und verfahren zur herstellung
WO2015042700A1 (en) 2013-09-24 2015-04-02 Motion Engine Inc. Mems components and method of wafer-level manufacturing thereof
US9383277B2 (en) 2013-07-17 2016-07-05 Wacoh Corporation Force sensor
WO2015013827A1 (en) 2013-08-02 2015-02-05 Motion Engine Inc. Mems motion sensor for sub-resonance angular rate sensing
JP5529328B1 (ja) 2013-09-04 2014-06-25 株式会社トライフォース・マネジメント 発電素子
JP6153446B2 (ja) * 2013-10-17 2017-06-28 株式会社オーディオテクニカ 咽喉マイクロホン
JP6590812B2 (ja) 2014-01-09 2019-10-16 モーション・エンジン・インコーポレーテッド 集積ｍｅｍｓシステム
US20170030788A1 (en) 2014-04-10 2017-02-02 Motion Engine Inc. Mems pressure sensor
US11674803B2 (en) 2014-06-02 2023-06-13 Motion Engine, Inc. Multi-mass MEMS motion sensor
JP5911936B1 (ja) * 2014-09-30 2016-04-27 ファナック株式会社 変位検出方式の６軸力センサ
CN104296799B (zh) 2014-10-30 2016-08-24 京东方科技集团股份有限公司 微型传感器本体及其制造方法、微型传感器
WO2016090467A1 (en) 2014-12-09 2016-06-16 Motion Engine Inc. 3d mems magnetometer and associated methods
CN104580856A (zh) * 2014-12-25 2015-04-29 南昌欧菲光电技术有限公司 摄像头模组及具有所述摄像头模组的摄像设备
CA3220839A1 (en) 2015-01-15 2016-07-21 Motion Engine Inc. 3d mems device with hermetic cavity
US10416030B2 (en) 2015-01-26 2019-09-17 Wacoh-Tech Inc. Force sensor
KR101653914B1 (ko) * 2015-03-11 2016-09-05 성균관대학교산학협력단 힘 센서 및 이를 이용한 다축 힘/토크 측정 장치
US10436812B2 (en) * 2015-03-20 2019-10-08 Nxp Usa, Inc. Micro-electro-mechanical acceleration sensor device
WO2016163033A1 (ja) 2015-04-07 2016-10-13 株式会社トライフォース・マネジメント 力覚センサおよびこれに用いる構造体
KR101685800B1 (ko) * 2015-04-10 2016-12-13 성균관대학교산학협력단 다축 힘 센서 및 이를 이용한 다축 힘을 감지할 수 있는 집게
US9952252B2 (en) 2015-05-15 2018-04-24 Invensense, Inc. Offset rejection electrodes
US10295558B2 (en) 2015-05-15 2019-05-21 Invensense, Inc. Offset rejection electrodes
US11231441B2 (en) * 2015-05-15 2022-01-25 Invensense, Inc. MEMS structure for offset minimization of out-of-plane sensing accelerometers
TWI575232B (zh) * 2015-06-12 2017-03-21 財團法人工業技術研究院 感測裝置
US9766140B2 (en) * 2015-08-11 2017-09-19 Uneo Inc. Surface mount force sensing module
JP5996078B1 (ja) 2015-10-19 2016-09-21 株式会社トライフォース・マネジメント 発電素子
EP3513300A4 (de) 2016-09-16 2020-06-03 Verb Surgical Inc. Sensor mit mehreren freiheitsgraden
US11083418B2 (en) 2016-11-04 2021-08-10 Wellsense, Inc. Patient visualization system
US10492734B2 (en) 2016-11-04 2019-12-03 Wellsense, Inc. Patient visualization system
WO2018180346A1 (ja) * 2017-03-25 2018-10-04 アルプス電気株式会社 力覚センサ
US10429254B2 (en) * 2017-04-27 2019-10-01 Universal Cement Corporation Piezo force sensor with solid-state bonding spacer
GB2563908A (en) * 2017-06-29 2019-01-02 Impact Tech Labs Ag A force sensitive resistor
JP6257017B1 (ja) 2017-09-26 2018-01-10 株式会社トライフォース・マネジメント 力覚センサ
DE102018205159A1 (de) * 2018-04-05 2019-10-10 Deutsches Zentrum für Luft- und Raumfahrt e.V. 3D-Eingabegerät
CN108759968A (zh) * 2018-08-13 2018-11-06 三川智慧科技股份有限公司 一种两半式拼装水表壳体及其加工方法
CN110411615B (zh) * 2019-07-01 2021-08-03 杭州电子科技大学 一种高灵敏度的mems触觉传感器结构
US11611835B2 (en) 2020-06-09 2023-03-21 Infineon Technologies Ag Combined corrugated piezoelectric microphone and corrugated piezoelectric vibration sensor
US11693021B2 (en) 2020-06-09 2023-07-04 Infineon Technologies Ag Combined corrugated piezoelectric microphone and corrugated piezoelectric vibration sensor
CN112649076A (zh) * 2020-12-21 2021-04-13 合肥京东方显示技术有限公司 一种标准流量元件及其制备方法、标准流量系统
CN113280955B (zh) * 2021-05-11 2022-07-05 华中科技大学 一种具有切向力各向异性响应的柔性传感器及其制备方法
US11691871B2 (en) 2021-06-18 2023-07-04 Infineon Technologies Ag Microelectromechanical system (MEMS) vibration sensor having a segmented backplate
EP4219390A1 (de) * 2022-02-01 2023-08-02 Infineon Technologies AG Halbleiter-membransensor
CN114839398A (zh) * 2022-04-27 2022-08-02 东南大学 一种电容式柔性加速度传感器及其制备方法

Family Cites Families (97)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3270260A (en) * 1963-11-18 1966-08-30 Measurement Systems Inc Stick-operated diaphragm control
US3509583A (en) * 1965-09-09 1970-05-05 Bendix Corp Electro-mechanical hand having tactile sensing means
GB1450709A (en) * 1973-12-31 1976-09-29 Birchall D J Pressure transducers
US3915015A (en) * 1974-03-18 1975-10-28 Stanford Research Inst Strain gauge transducer system
DK139644B (da) * 1976-12-30 1979-03-19 Nils Aage Juul Eilersen Kapacitiv kraftmåler.
US4261086A (en) * 1979-09-04 1981-04-14 Ford Motor Company Method for manufacturing variable capacitance pressure transducers
DE2945200C2 (de) * 1979-11-09 1983-05-26 Krautkrämer GmbH, 5000 Köln Verfahren und Schaltungsvorrichtung zur Erzeugung von Sägezahnimpulsen sowie Verwendung derartiger Schaltungsvorrichtungen in Ultraschall-Meßgeräten
DE3008441A1 (de) * 1980-03-05 1981-09-10 Siemens AG, 1000 Berlin und 8000 München Sensor zur druck-, kraft- bzw. beschleunigungs-messung
JPS5780532A (en) * 1980-11-07 1982-05-20 Hitachi Ltd Semiconductor load converter
US4373399A (en) * 1981-02-05 1983-02-15 Beloglazov Alexei V Semiconductor strain gauge transducer
JPS57190241A (en) * 1981-05-20 1982-11-22 Kyowa Dengiyou:Kk Pressure converter and manufacture thereof
US4372162A (en) 1981-08-13 1983-02-08 Rockwell International Corporation Three-axis accelerometer having dynamic bias compensation
US4415948A (en) * 1981-10-13 1983-11-15 United Technologies Corporation Electrostatic bonded, silicon capacitive pressure transducer
US4384899A (en) * 1981-11-09 1983-05-24 Motorola Inc. Bonding method adaptable for manufacturing capacitive pressure sensing elements
GB2122842B (en) * 1982-05-29 1985-08-29 Tokyo Shibaura Electric Co An electroacoustic transducer and a method of manufacturing an electroacoustic transducer
DE3226386A1 (de) * 1982-07-15 1984-01-19 Battelle-Institut E.V., 6000 Frankfurt Vorrichtung zur dreidimensionalen kraftmessung
CH651928A5 (fr) * 1983-02-23 1985-10-15 Christof W Burckhardt Dispositif de mesure de force.
JPS59155734A (ja) * 1983-02-25 1984-09-04 Nec Corp 力変換器
JPS59166829A (ja) * 1983-03-14 1984-09-20 Copal Takeda Medical Kenkyusho:Kk 調整手段を備えた静電容量型圧力センサ−
JPS6034295A (ja) * 1983-08-03 1985-02-21 株式会社日立製作所 皮膚感覚センサ
JPS6055655A (ja) * 1983-09-07 1985-03-30 Nissan Motor Co Ltd 梁構造体を有する半導体装置
JPS60147622A (ja) * 1984-01-12 1985-08-03 Mitsubishi Petrochem Co Ltd 感圧トランスジユ−サ
JPH0663892B2 (ja) * 1984-01-31 1994-08-22 株式会社富士電機総合研究所 圧覚認識制御装置
FR2560997B1 (fr) 1984-03-06 1987-06-05 Sfena Capteur accelerometrique a structure pendulaire plane
JPS60190828A (ja) * 1984-03-12 1985-09-28 Fujita Corp 二成分土圧および間隙水圧測定用検出器
US4699006A (en) * 1984-03-19 1987-10-13 The Charles Stark Draper Laboratory, Inc. Vibratory digital integrating accelerometer
US4542436A (en) * 1984-04-10 1985-09-17 Johnson Service Company Linearized capacitive pressure transducer
US4680606A (en) * 1984-06-04 1987-07-14 Tactile Perceptions, Inc. Semiconductor transducer
JPS6126834A (ja) * 1984-07-17 1986-02-06 Shimadzu Corp 静電容量型圧力センサ
JPS6184711A (ja) * 1984-10-01 1986-04-30 Fujitsu Ltd 教示操作装置
US4586109A (en) * 1985-04-01 1986-04-29 Bourns Instruments, Inc. Batch-process silicon capacitive pressure sensor
FR2580389B2 (fr) 1985-04-16 1989-03-03 Sfena Accelerometre micro-usine a rappel electrostatique
JPS6211257A (ja) * 1985-07-08 1987-01-20 Matsushita Electronics Corp マイクロ波集積回路
US4891985A (en) * 1985-07-22 1990-01-09 Honeywell Inc. Force sensor with attached mass
JPH0821722B2 (ja) * 1985-10-08 1996-03-04 日本電装株式会社 半導体振動・加速度検出装置
JPH07112014B2 (ja) * 1986-07-09 1995-11-29 株式会社日立製作所 半導体記憶装置
JPS63108763A (ja) * 1986-10-27 1988-05-13 Nec Corp 半導体集積回路
US4719538A (en) * 1986-12-02 1988-01-12 Cox John D Force responsive capacitive transducer
US5182515A (en) * 1987-04-24 1993-01-26 Wacoh Corporation Detector for magnetism using a resistance element
US4905523A (en) * 1987-04-24 1990-03-06 Wacoh Corporation Force detector and moment detector using resistance element
US4967605A (en) * 1987-04-24 1990-11-06 Wacoh Corporation Detector for force and acceleration using resistance element
US4855866A (en) * 1987-06-06 1989-08-08 Murata Manufacturing Co., Ltd. Capacitor network
JPH0663875B2 (ja) * 1987-08-31 1994-08-22 松下電器産業株式会社 重量検出装置
DE3854347D1 (de) * 1987-09-18 1995-09-28 Wako Kk Greifer für Roboter.
US5263375A (en) * 1987-09-18 1993-11-23 Wacoh Corporation Contact detector using resistance elements and its application
JPS6486508A (en) * 1987-09-29 1989-03-31 Toshiba Corp Manufacture of chip capacitor
NL8702589A (nl) * 1987-10-30 1989-05-16 Microtel Bv Elektro-akoestische transducent van de als elektreet aangeduide soort, en een werkwijze voor het vervaardigen van een dergelijke transducent.
EP0316498B1 (de) * 1987-11-09 1992-03-04 Vibro-Meter Sa Accelerometer
GB8728442D0 (en) 1987-12-04 1988-01-13 Russell M K Triaxial accelerometers
JPH01150383A (ja) * 1987-12-07 1989-06-13 Mitsutoyo Corp パターン配線用電極体
US4864463A (en) * 1988-04-19 1989-09-05 Allied-Signal Inc. Capacitive pressure sensor
JPH0242761A (ja) * 1988-04-20 1990-02-13 Matsushita Electric Ind Co Ltd アクティブマトリクス基板の製造方法
JPH0218932A (ja) * 1988-07-07 1990-01-23 Mitsubishi Electric Corp 半導体装置の製造方法
JPH0663885B2 (ja) * 1988-09-19 1994-08-22 工業技術院長 分布型圧覚センサの製造方法
JPH0623782B2 (ja) * 1988-11-15 1994-03-30 株式会社日立製作所 静電容量式加速度センサ及び半導体圧力センサ
JPH0834297B2 (ja) * 1988-12-28 1996-03-29 三菱電機株式会社 半導体装置
US5035148A (en) * 1989-02-01 1991-07-30 Wacoh Corporation Force detector using resistance elements
US5054323A (en) * 1989-04-04 1991-10-08 The Charles Stark Draper Laboratory, Inc. Pressure distribution characterization system
JP2681215B2 (ja) * 1989-05-29 1997-11-26 株式会社ワコー 積層基板を用いたセンサの製造方法
JPH0350809A (ja) * 1989-07-19 1991-03-05 Matsushita Electric Ind Co Ltd 厚膜コンデンサ
JPH0748566B2 (ja) * 1989-09-27 1995-05-24 山武ハネウエル株式会社 加速度センサおよびその製造方法
JPH03165552A (ja) * 1989-11-24 1991-07-17 Sony Corp スタックトキャパシタ型ｄｒａｍとその製造方法
US5531092A (en) * 1989-12-28 1996-07-02 Okada; Kazuhiro Device for moving a suspended weight body
US6864677B1 (en) * 1993-12-15 2005-03-08 Kazuhiro Okada Method of testing a sensor
EP0461265B1 (de) * 1989-12-28 1995-05-10 Wacoh Corporation Beschleunigungssensoren
US5122755A (en) 1990-05-11 1992-06-16 New Sd, Inc. Capacitive position detector
US5421213A (en) * 1990-10-12 1995-06-06 Okada; Kazuhiro Multi-dimensional force detector
US6314823B1 (en) * 1991-09-20 2001-11-13 Kazuhiro Okada Force detector and acceleration detector and method of manufacturing the same
US5492020A (en) * 1991-03-30 1996-02-20 Okada; Kazuhiro Detector for a physical quantity having a self-testing function
JP3141954B2 (ja) * 1991-07-17 2001-03-07 株式会社ワコー 圧電素子を用いた力・加速度・磁気のセンサ
JP3027457B2 (ja) * 1991-10-25 2000-04-04 和廣 岡田 多次元方向に関する力・加速度・磁気の検出装置
JPH05215627A (ja) * 1992-02-04 1993-08-24 Kazuhiro Okada 多次元方向に関する力・加速度・磁気の検出装置
US5317922A (en) * 1992-04-30 1994-06-07 Ford Motor Company Capacitance transducer article and method of fabrication
US5420395A (en) * 1992-11-09 1995-05-30 American Roller Company Ceramic heater roller with zone heating
US6282956B1 (en) * 1994-12-29 2001-09-04 Kazuhiro Okada Multi-axial angular velocity sensor
US5646346A (en) * 1994-11-10 1997-07-08 Okada; Kazuhiro Multi-axial angular velocity sensor
JP3256346B2 (ja) * 1993-07-29 2002-02-12 和廣 岡田 圧電素子を用いた力・加速度・磁気のセンサ
US5661235A (en) * 1993-10-01 1997-08-26 Hysitron Incorporated Multi-dimensional capacitive transducer
US5538359A (en) * 1994-07-08 1996-07-23 Wadle; Barry Quick release boom connector
JP3549590B2 (ja) * 1994-09-28 2004-08-04 和廣 岡田 加速度・角速度センサ
JP3585980B2 (ja) * 1995-02-21 2004-11-10 株式会社ワコー 角速度センサ
US6003371A (en) * 1995-02-21 1999-12-21 Wacoh Corporation Angular velocity sensor
JPH0949856A (ja) * 1995-05-31 1997-02-18 Wako:Kk 加速度センサ
US5687080A (en) * 1995-06-20 1997-11-11 Ziba Design, Inc. Multiple axis data input apparatus and method
JPH09119943A (ja) * 1995-10-24 1997-05-06 Wako:Kk 加速度センサ
US6367326B1 (en) * 1996-07-10 2002-04-09 Wacoh Corporation Angular velocity sensor
US6076401A (en) * 1996-07-10 2000-06-20 Wacoh Corporation Angular velocity sensor
JP4176849B2 (ja) * 1997-05-08 2008-11-05 株式会社ワコー センサの製造方法
US6003057A (en) * 1997-12-24 1999-12-14 Motorola, Inc. Galois field arithmetic logic unit circuit
JP2000249609A (ja) * 1999-03-01 2000-09-14 Wakoo:Kk 静電容量式センサ
JP4295883B2 (ja) * 1999-12-13 2009-07-15 株式会社ワコー 力検出装置
US6809529B2 (en) * 2001-08-10 2004-10-26 Wacoh Corporation Force detector
JP4216525B2 (ja) * 2002-05-13 2009-01-28 株式会社ワコー 加速度センサおよびその製造方法
JP4125931B2 (ja) * 2002-08-26 2008-07-30 株式会社ワコー 回転操作量の入力装置およびこれを利用した操作装置
JP4907050B2 (ja) * 2003-03-31 2012-03-28 株式会社ワコー 力検出装置
JP4271475B2 (ja) * 2003-03-31 2009-06-03 株式会社ワコー 力検出装置
JP4387691B2 (ja) * 2003-04-28 2009-12-16 株式会社ワコー 力検出装置

Also Published As

Publication number Publication date
DE69133193T2 (de) 2003-10-09
US5531002A (en) 1996-07-02
DE69126501T2 (de) 1997-09-25
US5406848A (en) 1995-04-18
EP0767363A3 (de) 1997-07-02
US7533582B2 (en) 2009-05-19
US5421213A (en) 1995-06-06
EP0480471B1 (de) 1997-06-11
EP0767363A2 (de) 1997-04-09
DE69133193D1 (de) 2003-02-27
EP0480471A3 (en) 1993-12-29
US6053057A (en) 2000-04-25
US5811693A (en) 1998-09-22
US20080178675A1 (en) 2008-07-31
US5639973A (en) 1997-06-17
EP0480471A2 (de) 1992-04-15
EP0767363B1 (de) 2003-01-22
US6158291A (en) 2000-12-12

Similar Documents

Publication Publication Date Title
DE69126501D1 (de) Kraftdetektor und Beschleunigungsdetektor
DE9205276U1 (de) Lage- und beschleunigungsempfindlicher Schalter
BR9100471A (pt) Dispositivo de suspensao e montagem
DE69211782D1 (de) Beschleunigungssensor mit Selbst-Test und dazu gehörige Schaltung
DE69324288T2 (de) Beschleunigung- und Winkelbeschleunigungsmesser
DE69310755T2 (de) Magnetischer sensor und magnetischer detektor
DE69027045D1 (de) Phasenempfindliche differentialpolarimetrietechnik und vorrichtung
DE69514266T2 (de) Verschlussmechanismus und Sperrvorrichtung
BR9006434A (pt) Detector
EP0440011A3 (en) Force and/or measuring device
KR900006768A (ko) 진동검출기
DE69026517D1 (de) Oberflächenabscheider und dispersionsvorrichtung
DE69330985T2 (de) Winkelbeschleunigungsdetektor
DE69022936D1 (de) Beschleunigungsmessaufnehmer und Beschleunigungsmesssystem.
KR890018023U (ko) 진동검출기
DE69623008T2 (de) Seismometer und dergleichen
KR900005354U (ko) 진동검출기
FR2666149B1 (fr) Detecteur d'acceleration.
KR890018024U (ko) 진동 검출기
EP0465673A4 (en) Device for measuring acceleration and the like
DK195091D0 (da) Assayfremgangsmaade og -anordning
KR910009530U (ko) 가속도 검출기
KR900017513U (ko) 진동검출기
BR9002323A (pt) Aparelho medidor de aceleracao e sobreaceleracao
KR880017806U (ko) 가속겸용 제동 페달장치

Legal Events

Date Code Title Description
8364 No opposition during term of opposition