DE69130205D1 - Heizungsapparat für eine Halbleiterscheibe und Verfahren zum Herstellen desselben - Google Patents

Heizungsapparat für eine Halbleiterscheibe und Verfahren zum Herstellen desselben

Info

Publication number
DE69130205D1
DE69130205D1 DE69130205T DE69130205T DE69130205D1 DE 69130205 D1 DE69130205 D1 DE 69130205D1 DE 69130205 T DE69130205 T DE 69130205T DE 69130205 T DE69130205 T DE 69130205T DE 69130205 D1 DE69130205 D1 DE 69130205D1
Authority
DE
Germany
Prior art keywords
manufacturing
same
semiconductor wafer
wafer heater
heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69130205T
Other languages
English (en)
Other versions
DE69130205T2 (de
Inventor
Yusuke Niori
Kazuhiro Nobori
Ryusuke Ushikoshi
Koichi Umemoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP30328991A external-priority patent/JPH0750736B2/ja
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Publication of DE69130205D1 publication Critical patent/DE69130205D1/de
Application granted granted Critical
Publication of DE69130205T2 publication Critical patent/DE69130205T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67098Apparatus for thermal treatment
    • H01L21/67103Apparatus for thermal treatment mainly by conduction
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T279/00Chucks or sockets
    • Y10T279/23Chucks or sockets with magnetic or electrostatic means
DE69130205T 1990-12-25 1991-12-23 Heizungsapparat für eine Halbleiterscheibe und Verfahren zum Herstellen desselben Expired - Lifetime DE69130205T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP41800690 1990-12-25
JP30328991A JPH0750736B2 (ja) 1990-12-25 1991-11-19 ウエハー加熱装置及びその製造方法

Publications (2)

Publication Number Publication Date
DE69130205D1 true DE69130205D1 (de) 1998-10-22
DE69130205T2 DE69130205T2 (de) 1999-03-25

Family

ID=26563477

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69130205T Expired - Lifetime DE69130205T2 (de) 1990-12-25 1991-12-23 Heizungsapparat für eine Halbleiterscheibe und Verfahren zum Herstellen desselben

Country Status (3)

Country Link
US (1) US5280156A (de)
EP (1) EP0493089B1 (de)
DE (1) DE69130205T2 (de)

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US5280156A (en) 1994-01-18
EP0493089A1 (de) 1992-07-01
DE69130205T2 (de) 1999-03-25

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