DE69210115T2 - Thermische Tintenstrahldruckkopfstruktur und Herstellungsverfahren - Google Patents
Thermische Tintenstrahldruckkopfstruktur und HerstellungsverfahrenInfo
- Publication number
- DE69210115T2 DE69210115T2 DE69210115T DE69210115T DE69210115T2 DE 69210115 T2 DE69210115 T2 DE 69210115T2 DE 69210115 T DE69210115 T DE 69210115T DE 69210115 T DE69210115 T DE 69210115T DE 69210115 T2 DE69210115 T2 DE 69210115T2
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing process
- inkjet printhead
- thermal inkjet
- printhead structure
- thermal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14088—Structure of heating means
- B41J2/14112—Resistive element
- B41J2/14129—Layer structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/03—Specific materials used
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/13—Heads having an integrated circuit
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/724,658 US5159353A (en) | 1991-07-02 | 1991-07-02 | Thermal inkjet printhead structure and method for making the same |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69210115D1 DE69210115D1 (de) | 1996-05-30 |
DE69210115T2 true DE69210115T2 (de) | 1996-09-19 |
Family
ID=24911327
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69210115T Expired - Lifetime DE69210115T2 (de) | 1991-07-02 | 1992-06-17 | Thermische Tintenstrahldruckkopfstruktur und Herstellungsverfahren |
Country Status (5)
Country | Link |
---|---|
US (1) | US5159353A (de) |
EP (1) | EP0521634B1 (de) |
JP (1) | JP3262595B2 (de) |
DE (1) | DE69210115T2 (de) |
HK (1) | HK149696A (de) |
Families Citing this family (65)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0214880Y2 (de) * | 1985-04-16 | 1990-04-23 | ||
US5594481A (en) | 1992-04-02 | 1997-01-14 | Hewlett-Packard Company | Ink channel structure for inkjet printhead |
US5874974A (en) * | 1992-04-02 | 1999-02-23 | Hewlett-Packard Company | Reliable high performance drop generator for an inkjet printhead |
US5648804A (en) | 1992-04-02 | 1997-07-15 | Hewlett-Packard Company | Compact inkjet substrate with centrally located circuitry and edge feed ink channels |
US5638101A (en) | 1992-04-02 | 1997-06-10 | Hewlett-Packard Company | High density nozzle array for inkjet printhead |
US5648805A (en) | 1992-04-02 | 1997-07-15 | Hewlett-Packard Company | Inkjet printhead architecture for high speed and high resolution printing |
US5563642A (en) | 1992-04-02 | 1996-10-08 | Hewlett-Packard Company | Inkjet printhead architecture for high speed ink firing chamber refill |
US5604519A (en) | 1992-04-02 | 1997-02-18 | Hewlett-Packard Company | Inkjet printhead architecture for high frequency operation |
DE4213495A1 (de) * | 1992-04-24 | 1993-10-28 | Esselte Meto Int Gmbh | Markierungsstreifen |
US5350616A (en) * | 1993-06-16 | 1994-09-27 | Hewlett-Packard Company | Composite orifice plate for ink jet printer and method for the manufacture thereof |
EP0661157B1 (de) * | 1993-12-28 | 2001-05-09 | Canon Kabushiki Kaisha | Tintenstrahlaufzeichnungskopf, damit versehene Tintenstrahlaufzeichnungsvorrichtung und Herstellungsverfahren für den Tintenstrahlaufzeichnungskopf. |
US5635966A (en) * | 1994-01-11 | 1997-06-03 | Hewlett-Packard Company | Edge feed ink delivery thermal inkjet printhead structure and method of fabrication |
US5774148A (en) | 1995-10-19 | 1998-06-30 | Lexmark International, Inc. | Printhead with field oxide as thermal barrier in chip |
US6758552B1 (en) | 1995-12-06 | 2004-07-06 | Hewlett-Packard Development Company | Integrated thin-film drive head for thermal ink-jet printer |
US5883650A (en) * | 1995-12-06 | 1999-03-16 | Hewlett-Packard Company | Thin-film printhead device for an ink-jet printer |
US6239820B1 (en) | 1995-12-06 | 2001-05-29 | Hewlett-Packard Company | Thin-film printhead device for an ink-jet printer |
JPH09248912A (ja) * | 1996-01-11 | 1997-09-22 | Canon Inc | インクジェットヘッド及びヘッド用基体、インクジェットカートリッジ、並びにインクジェット装置 |
US6003977A (en) * | 1996-02-07 | 1999-12-21 | Hewlett-Packard Company | Bubble valving for ink-jet printheads |
US6126276A (en) * | 1998-03-02 | 2000-10-03 | Hewlett-Packard Company | Fluid jet printhead with integrated heat-sink |
US5844586A (en) * | 1996-04-08 | 1998-12-01 | Standard Microsystems Corporation | Process for making ink jet heater chips |
JPH1044416A (ja) * | 1996-07-31 | 1998-02-17 | Canon Inc | インクジェット記録ヘッド用基板及びそれを用いたインクジェットヘッド、インクジェットヘッドカートリッジおよび液体吐出装置 |
US5901425A (en) | 1996-08-27 | 1999-05-11 | Topaz Technologies Inc. | Inkjet print head apparatus |
JPH10135475A (ja) * | 1996-10-31 | 1998-05-22 | Semiconductor Energy Lab Co Ltd | 半導体装置およびその作製方法 |
US5710070A (en) * | 1996-11-08 | 1998-01-20 | Chartered Semiconductor Manufacturing Pte Ltd. | Application of titanium nitride and tungsten nitride thin film resistor for thermal ink jet technology |
US6110754A (en) * | 1997-07-15 | 2000-08-29 | Silverbrook Research Pty Ltd | Method of manufacture of a thermal elastic rotary impeller ink jet print head |
US6019907A (en) * | 1997-08-08 | 2000-02-01 | Hewlett-Packard Company | Forming refill for monolithic inkjet printhead |
US6102528A (en) | 1997-10-17 | 2000-08-15 | Xerox Corporation | Drive transistor for an ink jet printhead |
US5980025A (en) * | 1997-11-21 | 1999-11-09 | Xerox Corporation | Thermal inkjet printhead with increased resistance control and method for making the printhead |
US20020000626A1 (en) * | 1997-11-26 | 2002-01-03 | Advanced Micro Devices, Inc. | Improving field leakage by using a thin layer of nitride deposited by chemical vapor deposition |
US6532027B2 (en) * | 1997-12-18 | 2003-03-11 | Canon Kabushiki Kaisha | Ink jet recording head, substrate for this head, manufacturing method of this substrate and ink jet recording apparatus |
US6461812B2 (en) * | 1998-09-09 | 2002-10-08 | Agilent Technologies, Inc. | Method and multiple reservoir apparatus for fabrication of biomolecular arrays |
JP2000094696A (ja) * | 1998-09-24 | 2000-04-04 | Ricoh Co Ltd | インクジェットヘッド及びその作製方法 |
US6065823A (en) * | 1999-04-16 | 2000-05-23 | Hewlett-Packard Company | Heat spreader for ink-jet printhead |
US6688729B1 (en) * | 1999-06-04 | 2004-02-10 | Canon Kabushiki Kaisha | Liquid discharge head substrate, liquid discharge head, liquid discharge apparatus having these elements, manufacturing method of liquid discharge head, and driving method of the same |
US6299292B1 (en) | 1999-08-10 | 2001-10-09 | Lexmark International, Inc. | Driver circuit with low side data for matrix inkjet printhead, and method therefor |
US6132032A (en) * | 1999-08-13 | 2000-10-17 | Hewlett-Packard Company | Thin-film print head for thermal ink-jet printers |
US6137502A (en) * | 1999-08-27 | 2000-10-24 | Lexmark International, Inc. | Dual droplet size printhead |
US6270634B1 (en) | 1999-10-29 | 2001-08-07 | Applied Materials, Inc. | Method for plasma etching at a high etch rate |
US6481831B1 (en) | 2000-07-07 | 2002-11-19 | Hewlett-Packard Company | Fluid ejection device and method of fabricating |
US6457814B1 (en) * | 2000-12-20 | 2002-10-01 | Hewlett-Packard Company | Fluid-jet printhead and method of fabricating a fluid-jet printhead |
US6457815B1 (en) | 2001-01-29 | 2002-10-01 | Hewlett-Packard Company | Fluid-jet printhead and method of fabricating a fluid-jet printhead |
US6883894B2 (en) * | 2001-03-19 | 2005-04-26 | Hewlett-Packard Development Company, L.P. | Printhead with looped gate transistor structures |
US6616268B2 (en) * | 2001-04-12 | 2003-09-09 | Lexmark International, Inc. | Power distribution architecture for inkjet heater chip |
US6534850B2 (en) | 2001-04-16 | 2003-03-18 | Hewlett-Packard Company | Electronic device sealed under vacuum containing a getter and method of operation |
US20020158945A1 (en) | 2001-04-30 | 2002-10-31 | Miller Richard Todd | Heating element of a printhead having resistive layer over conductive layer |
US7160806B2 (en) * | 2001-08-16 | 2007-01-09 | Hewlett-Packard Development Company, L.P. | Thermal inkjet printhead processing with silicon etching |
US7083265B2 (en) * | 2001-10-31 | 2006-08-01 | Hewlett-Packard Development Company, L.P. | Circuit routing for printhead having increased corrosion resistance |
TW510858B (en) * | 2001-11-08 | 2002-11-21 | Benq Corp | Fluid injection head structure and method thereof |
TW552201B (en) * | 2001-11-08 | 2003-09-11 | Benq Corp | Fluid injection head structure and method thereof |
US6540334B1 (en) | 2002-04-30 | 2003-04-01 | Lexmark International, Inc. | Method for making ink jet printheads |
US6704996B2 (en) | 2002-04-30 | 2004-03-16 | Lexmark International, Inc. | Method for making ink jet printheads |
KR100470570B1 (ko) * | 2002-12-18 | 2005-03-09 | 삼성전자주식회사 | 잉크젯 프린터 헤드칩 |
TW580435B (en) * | 2003-06-16 | 2004-03-21 | Benq Corp | Method for fabricating a monolithic fluid eject device |
US7278706B2 (en) * | 2003-10-30 | 2007-10-09 | Hewlett-Packard Development Company, L.P. | Fluid ejection device |
US7052122B2 (en) * | 2004-02-19 | 2006-05-30 | Dimatix, Inc. | Printhead |
US7240997B2 (en) | 2004-02-25 | 2007-07-10 | Hewlett-Packard Development Company, L.P. | Fluid ejection device metal layer layouts |
US7497536B2 (en) * | 2004-04-19 | 2009-03-03 | Hewlett-Packard Development Company, L.P. | Fluid ejection device |
US7293359B2 (en) * | 2004-04-29 | 2007-11-13 | Hewlett-Packard Development Company, L.P. | Method for manufacturing a fluid ejection device |
US7387370B2 (en) * | 2004-04-29 | 2008-06-17 | Hewlett-Packard Development Company, L.P. | Microfluidic architecture |
US7195341B2 (en) * | 2004-09-30 | 2007-03-27 | Lexmark International, Inc. | Power and ground buss layout for reduced substrate size |
TWI250938B (en) * | 2005-04-25 | 2006-03-11 | Int United Technology Co Ltd | Inkjet printhead chip |
KR100911323B1 (ko) * | 2007-01-15 | 2009-08-07 | 삼성전자주식회사 | 잉크젯 프린트헤드용 발열 구조체 및 이를 구비한 잉크젯프린트헤드 |
PT2229279E (pt) | 2007-12-02 | 2012-07-25 | Hewlett Packard Development Co | Redes terrestres de matriz de cabeça de impressão electricamente ligadas e electricamente isoladas como circuito flexível |
EP3877184A4 (de) * | 2019-04-29 | 2022-06-15 | Hewlett-Packard Development Company, L.P. | Herstellung einer korrosionstoleranten mikroelektromechanischen flüssigkeitsausstossvorrichtung |
EP3962793A4 (de) | 2019-04-29 | 2023-01-04 | Hewlett-Packard Development Company, L.P. | Korrosionstolerante mikroelektromechanische flüssigkeitsausstossvorrichtung |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3852563A (en) * | 1974-02-01 | 1974-12-03 | Hewlett Packard Co | Thermal printing head |
CA1131796A (en) * | 1979-01-08 | 1982-09-14 | Tarsaim L. Batra | Method for fabricating mos device with self-aligned contacts |
US4466172A (en) * | 1979-01-08 | 1984-08-21 | American Microsystems, Inc. | Method for fabricating MOS device with self-aligned contacts |
JPS56118362A (en) * | 1980-02-22 | 1981-09-17 | Toshiba Corp | Semiconductor integrated circuit device |
DE3211761A1 (de) * | 1982-03-30 | 1983-10-06 | Siemens Ag | Verfahren zum herstellen von integrierten mos-feldeffekttransistorschaltungen in siliziumgate-technologie mit silizid beschichteten diffusionsgebieten als niederohmige leiterbahnen |
US4500895A (en) * | 1983-05-02 | 1985-02-19 | Hewlett-Packard Company | Disposable ink jet head |
US4513298A (en) * | 1983-05-25 | 1985-04-23 | Hewlett-Packard Company | Thermal ink jet printhead |
US4472875A (en) * | 1983-06-27 | 1984-09-25 | Teletype Corporation | Method for manufacturing an integrated circuit device |
US4532530A (en) * | 1984-03-09 | 1985-07-30 | Xerox Corporation | Bubble jet printing device |
US4719477A (en) * | 1986-01-17 | 1988-01-12 | Hewlett-Packard Company | Integrated thermal ink jet printhead and method of manufacture |
US4695853A (en) * | 1986-12-12 | 1987-09-22 | Hewlett-Packard Company | Thin film vertical resistor devices for a thermal ink jet printhead and methods of manufacture |
US4794409A (en) * | 1987-12-03 | 1988-12-27 | Hewlett-Packard Company | Ink jet pen having improved ink storage and distribution capabilities |
JPH0764072B2 (ja) * | 1988-03-07 | 1995-07-12 | ゼロックス コーポレーション | バブル・インクジェット印字機構のシリコン集積回路チップ |
US4947192A (en) * | 1988-03-07 | 1990-08-07 | Xerox Corporation | Monolithic silicon integrated circuit chip for a thermal ink jet printer |
US4899180A (en) * | 1988-04-29 | 1990-02-06 | Xerox Corporation | On chip heater element and temperature sensor |
US4853718A (en) * | 1988-08-15 | 1989-08-01 | Xerox Corporation | On chip conductive fluid sensing circuit |
US5216447A (en) * | 1989-01-13 | 1993-06-01 | Canon Kabushiki Kaisha | Recording head |
US4875968A (en) * | 1989-02-02 | 1989-10-24 | Xerox Corporation | Method of fabricating ink jet printheads |
JP2662446B2 (ja) * | 1989-12-11 | 1997-10-15 | キヤノン株式会社 | 記録ヘッド及び記録ヘッド用素子基板 |
US5075250A (en) * | 1991-01-02 | 1991-12-24 | Xerox Corporation | Method of fabricating a monolithic integrated circuit chip for a thermal ink jet printhead |
-
1991
- 1991-07-02 US US07/724,658 patent/US5159353A/en not_active Expired - Lifetime
-
1992
- 1992-06-17 DE DE69210115T patent/DE69210115T2/de not_active Expired - Lifetime
- 1992-06-17 EP EP92305554A patent/EP0521634B1/de not_active Expired - Lifetime
- 1992-07-02 JP JP19930292A patent/JP3262595B2/ja not_active Expired - Fee Related
-
1996
- 1996-08-08 HK HK149696A patent/HK149696A/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP0521634B1 (de) | 1996-04-24 |
DE69210115D1 (de) | 1996-05-30 |
JPH05185598A (ja) | 1993-07-27 |
JP3262595B2 (ja) | 2002-03-04 |
EP0521634A3 (en) | 1993-05-12 |
HK149696A (en) | 1996-08-16 |
US5159353A (en) | 1992-10-27 |
EP0521634A2 (de) | 1993-01-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: HEWLETT-PACKARD CO. (N.D.GES.D.STAATES DELAWARE), |
|
8327 | Change in the person/name/address of the patent owner |
Owner name: HEWLETT-PACKARD DEVELOPMENT CO., L.P., HOUSTON, TE |
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