DE69225908T2 - Gelenkarm mit übergabevorrichtung - Google Patents

Gelenkarm mit übergabevorrichtung

Info

Publication number
DE69225908T2
DE69225908T2 DE69225908T DE69225908T DE69225908T2 DE 69225908 T2 DE69225908 T2 DE 69225908T2 DE 69225908 T DE69225908 T DE 69225908T DE 69225908 T DE69225908 T DE 69225908T DE 69225908 T2 DE69225908 T2 DE 69225908T2
Authority
DE
Germany
Prior art keywords
transfer device
joint arm
arm
joint
transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69225908T
Other languages
English (en)
Other versions
DE69225908D1 (de
Inventor
Ruth Hendrickson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azenta Inc
Original Assignee
Brooks Automation Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brooks Automation Inc filed Critical Brooks Automation Inc
Application granted granted Critical
Publication of DE69225908D1 publication Critical patent/DE69225908D1/de
Publication of DE69225908T2 publication Critical patent/DE69225908T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B25J9/1065—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
    • B25J9/107—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms of the froglegs type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/18—Mechanical movements
    • Y10T74/18856—Oscillating to oscillating
    • Y10T74/1888—Geared connections
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/18—Mechanical movements
    • Y10T74/18888—Reciprocating to or from oscillating
    • Y10T74/1892—Lever and slide
    • Y10T74/18952—Lever and slide toggle transmissions
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20576—Elements
    • Y10T74/20582—Levers
    • Y10T74/20588—Levers toggle
    • Y10T74/20594—Lazy tongs
DE69225908T 1991-04-18 1992-12-30 Gelenkarm mit übergabevorrichtung Expired - Fee Related DE69225908T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/687,288 US5180276A (en) 1991-04-18 1991-04-18 Articulated arm transfer device
PCT/US1992/011066 WO1994015760A1 (en) 1991-04-18 1992-12-30 Articulated arm transfer device

Publications (2)

Publication Number Publication Date
DE69225908D1 DE69225908D1 (de) 1998-07-16
DE69225908T2 true DE69225908T2 (de) 1998-12-10

Family

ID=26785245

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69225908T Expired - Fee Related DE69225908T2 (de) 1991-04-18 1992-12-30 Gelenkarm mit übergabevorrichtung
DE0631535T Pending DE631535T1 (de) 1991-04-18 1992-12-30 Gelenkarm mit übergabevorrichtung.

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE0631535T Pending DE631535T1 (de) 1991-04-18 1992-12-30 Gelenkarm mit übergabevorrichtung.

Country Status (5)

Country Link
US (1) US5180276A (de)
EP (1) EP0631535B1 (de)
JP (1) JP3419457B2 (de)
DE (2) DE69225908T2 (de)
WO (1) WO1994015760A1 (de)

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Also Published As

Publication number Publication date
DE631535T1 (de) 1995-08-24
EP0631535A4 (de) 1995-04-26
US5180276A (en) 1993-01-19
EP0631535A1 (de) 1995-01-04
DE69225908D1 (de) 1998-07-16
JPH07504128A (ja) 1995-05-11
WO1994015760A1 (en) 1994-07-21
EP0631535B1 (de) 1998-06-10
JP3419457B2 (ja) 2003-06-23

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Legal Events

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8339 Ceased/non-payment of the annual fee