DE69226771T2 - Gerat zum optischen nachweis von verschmutzung in teilchen eines materiels mit niedrigem optischen verlust - Google Patents

Gerat zum optischen nachweis von verschmutzung in teilchen eines materiels mit niedrigem optischen verlust

Info

Publication number
DE69226771T2
DE69226771T2 DE69226771T DE69226771T DE69226771T2 DE 69226771 T2 DE69226771 T2 DE 69226771T2 DE 69226771 T DE69226771 T DE 69226771T DE 69226771 T DE69226771 T DE 69226771T DE 69226771 T2 DE69226771 T2 DE 69226771T2
Authority
DE
Germany
Prior art keywords
pollution
particles
optical
optical detection
low
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69226771T
Other languages
English (en)
Other versions
DE69226771D1 (de
Inventor
William Wolf
Robert Livermore
David Dreyfuss
John Majeski
Eugene Palecki
Thomas Simpson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EIDP Inc
Original Assignee
EI Du Pont de Nemours and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EI Du Pont de Nemours and Co filed Critical EI Du Pont de Nemours and Co
Publication of DE69226771D1 publication Critical patent/DE69226771D1/de
Application granted granted Critical
Publication of DE69226771T2 publication Critical patent/DE69226771T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/49—Scattering, i.e. diffuse reflection within a body or fluid
    • G01N21/53—Scattering, i.e. diffuse reflection within a body or fluid within a flowing fluid, e.g. smoke
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/85—Investigating moving fluids or granular solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N2021/845—Objects on a conveyor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/85—Investigating moving fluids or granular solids
    • G01N2021/8592—Grain or other flowing solid samples
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/064—Stray light conditioning
    • G01N2201/0642—Light traps; baffles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/065—Integrating spheres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/10—Scanning
    • G01N2201/108—Miscellaneous
    • G01N2201/1087—Focussed scan beam, e.g. laser
DE69226771T 1991-04-30 1992-04-29 Gerat zum optischen nachweis von verschmutzung in teilchen eines materiels mit niedrigem optischen verlust Expired - Fee Related DE69226771T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US69352491A 1991-04-30 1991-04-30
US69352391A 1991-04-30 1991-04-30
US07/863,961 US5256886A (en) 1991-04-30 1992-04-10 Apparatus for optically detecting contamination in particles of low optical-loss material
PCT/US1992/003320 WO1992019958A1 (en) 1991-04-30 1992-04-29 Apparatus for optically detecting contamination in particles of low optical-loss material

Publications (2)

Publication Number Publication Date
DE69226771D1 DE69226771D1 (de) 1998-10-01
DE69226771T2 true DE69226771T2 (de) 1999-04-22

Family

ID=27418580

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69226771T Expired - Fee Related DE69226771T2 (de) 1991-04-30 1992-04-29 Gerat zum optischen nachweis von verschmutzung in teilchen eines materiels mit niedrigem optischen verlust

Country Status (6)

Country Link
US (1) US5256886A (de)
EP (1) EP0582669B1 (de)
JP (1) JP3167329B2 (de)
CA (1) CA2108909C (de)
DE (1) DE69226771T2 (de)
WO (1) WO1992019958A1 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015205688A1 (de) * 2015-03-30 2016-10-06 Zumtobel Lighting Gmbh Verfahren und System zum Erzeugen von Lichtinszenierungen
CN111867730A (zh) * 2018-03-14 2020-10-30 格兰森斯股份公司 在积分腔内使用的样品容器和工具

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US5619253A (en) * 1993-06-25 1997-04-08 Miranda, Jr.; Henry A. Video display of indicia
US5504332A (en) * 1994-08-26 1996-04-02 Merck & Co., Inc. Method and system for determining the homogeneity of tablets
GB9422317D0 (en) * 1994-11-04 1994-12-21 Vector Computers Limited Separation of materials
US5663997A (en) * 1995-01-27 1997-09-02 Asoma Instruments, Inc. Glass composition determination method and apparatus
DE19525197A1 (de) * 1995-07-11 1997-01-16 Hoechst Ag Granularer Waschmittelbuilder
WO1997023800A1 (en) * 1995-12-26 1997-07-03 Xros, Inc. Compact document scanner or printer engine
US5929981A (en) * 1996-06-18 1999-07-27 Ohmeda Inc. System for monitoring contamination of optical elements in a Raman gas analyzer
US6570177B1 (en) 2000-01-31 2003-05-27 Dcs Corporation System, apparatus, and method for detecting defects in particles
WO2002044692A1 (en) * 2000-11-28 2002-06-06 Imeco Automazioni S.R.L. Apparatus for analyzing the characteristics of ground products
EP1273901A1 (de) * 2001-07-02 2003-01-08 Université de Liège Verfahren und Vorrichtung zur automatischen Messung der Grösse und Form von Teilchen
EP1432972A1 (de) * 2001-09-07 2004-06-30 Inficon, Inc. Signalverarbeitungsverfahren zur in-situ-teilchenüberwachung mit einem gescannten strahl
US6870610B1 (en) 2002-05-07 2005-03-22 Dcs Corporation Method and apparatus for detecting defects in a material in a liquid bath
US8014975B2 (en) * 2007-09-28 2011-09-06 Hitachi Global Storage Technologies, Netherlands B.V. FTIR and EDX spectrum library of contaminants found on a HDD and their potential sources
JP5471157B2 (ja) * 2009-08-21 2014-04-16 セントラル硝子株式会社 ガラス板面の付着物の検出方法および装置
JP2013515248A (ja) * 2009-12-22 2013-05-02 ビューラー・アクチエンゲゼルシャフト 揺動可能な生成物を測定するための装置及び方法
JP5641958B2 (ja) 2011-01-31 2014-12-17 ギガフォトン株式会社 チャンバ装置およびそれを備える極端紫外光生成装置
JP2012242340A (ja) * 2011-05-24 2012-12-10 Mitsubishi Engineering Plastics Corp 赤外線フィルター用ポリカーボネート樹脂の良否判定方法
AU2013349336B2 (en) * 2012-11-20 2017-06-22 Grainsense Oy An optical sampling apparatus and method for utilizing the sampling apparatus
US10329917B2 (en) 2013-03-05 2019-06-25 United Technologies Corporation Gas turbine engine component external surface micro-channel cooling
CA2930511C (en) * 2013-11-14 2021-12-14 Grainsense Oy Optical analyzer, optical analyzing method and sample preparation device
KR101726809B1 (ko) * 2015-04-15 2017-04-17 (주)엔클로니 약품 공급 유닛 및 이를 구비하는 약품 외관 검사 장치
KR101756198B1 (ko) * 2015-07-14 2017-07-10 이경환 침대용 선반의 결합 구조물
JP6022645B1 (ja) * 2015-07-14 2016-11-09 イシカワ技研株式会社 スリーブアウト型什器用アタッチメント
JP2017173168A (ja) * 2016-03-24 2017-09-28 日本ゼオン株式会社 異物の検出方法、異物の検出装置、エラストマーの製造方法およびエラストマーの製造装置
US10890520B2 (en) * 2016-09-06 2021-01-12 The University Of Tokyo Flow cytometer
US10275681B2 (en) 2017-06-01 2019-04-30 Germaine Laboratories, Inc. Devices and systems for image-based analysis of test media
US9983117B1 (en) * 2017-06-01 2018-05-29 Germaine Laboratories, Inc. Devices and systems for image-based analysis of test media
US11200698B2 (en) 2017-06-01 2021-12-14 Germaine Laboratories, Inc. Devices and systems for data-based analysis of objects
CN111579449B (zh) * 2020-04-21 2023-04-07 泛测（北京）环境科技有限公司 一种大气颗粒污染物空间扫描预警方法和装置

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US3920336A (en) * 1974-05-21 1975-11-18 Us Air Force System for intensification of weak absorption and collection of weak light emission
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JPS5877637A (ja) * 1981-11-02 1983-05-11 Satake Eng Co Ltd 連続式穀粒精白度測定装置
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US4740708A (en) * 1987-01-06 1988-04-26 International Business Machines Corporation Semiconductor wafer surface inspection apparatus and method
JPS6428543A (en) * 1987-07-23 1989-01-31 Shizuoka Seiki Co Ltd Quality judging apparatus for unhulled rice
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US4885473A (en) * 1988-04-29 1989-12-05 Shofner Engineering Associates, Inc. Method and apparatus for detecting particles in a fluid using a scanning beam
JPH0748065B2 (ja) * 1988-05-27 1995-05-24 信越化学工業株式会社 白色系粉体中の着色異物検査方法および装置
FR2632723B1 (fr) * 1988-06-08 1991-11-15 Commissariat Energie Atomique Systeme de detection pour photometre
US4892409A (en) * 1988-07-14 1990-01-09 Smith Harry F Photometric apparatus for multiwell plates having a positionable lens assembly
US4972258A (en) * 1989-07-31 1990-11-20 E. I. Du Pont De Nemours And Company Scanning laser microscope system and methods of use
US4988875A (en) * 1988-12-13 1991-01-29 At&T Bell Laboratories Near infrared polyethylene inspection system and method
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015205688A1 (de) * 2015-03-30 2016-10-06 Zumtobel Lighting Gmbh Verfahren und System zum Erzeugen von Lichtinszenierungen
CN111867730A (zh) * 2018-03-14 2020-10-30 格兰森斯股份公司 在积分腔内使用的样品容器和工具

Also Published As

Publication number Publication date
CA2108909C (en) 2003-09-23
US5256886A (en) 1993-10-26
WO1992019958A1 (en) 1992-11-12
EP0582669A1 (de) 1994-02-16
DE69226771D1 (de) 1998-10-01
CA2108909A1 (en) 1992-10-31
JPH07503533A (ja) 1995-04-13
EP0582669B1 (de) 1998-08-26
JP3167329B2 (ja) 2001-05-21

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee