DE69231702T2 - Verfahren zur Herstellung von Isolationszonen aus Oxid - Google Patents

Verfahren zur Herstellung von Isolationszonen aus Oxid

Info

Publication number
DE69231702T2
DE69231702T2 DE69231702T DE69231702T DE69231702T2 DE 69231702 T2 DE69231702 T2 DE 69231702T2 DE 69231702 T DE69231702 T DE 69231702T DE 69231702 T DE69231702 T DE 69231702T DE 69231702 T2 DE69231702 T2 DE 69231702T2
Authority
DE
Germany
Prior art keywords
oxide
production
isolation zones
zones
isolation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69231702T
Other languages
English (en)
Other versions
DE69231702D1 (de
Inventor
Robert Hodges
Frank Bryant
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics lnc USA
Original Assignee
STMicroelectronics lnc USA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STMicroelectronics lnc USA filed Critical STMicroelectronics lnc USA
Application granted granted Critical
Publication of DE69231702D1 publication Critical patent/DE69231702D1/de
Publication of DE69231702T2 publication Critical patent/DE69231702T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/32—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers using masks
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/015—Capping layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/117—Oxidation, selective
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S257/00—Active solid-state devices, e.g. transistors, solid-state diodes
    • Y10S257/905—Plural dram cells share common contact or common trench
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S257/00—Active solid-state devices, e.g. transistors, solid-state diodes
    • Y10S257/912—Charge transfer device using both electron and hole signal carriers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S257/00—Active solid-state devices, e.g. transistors, solid-state diodes
    • Y10S257/914—Polysilicon containing oxygen, nitrogen, or carbon, e.g. sipos
DE69231702T 1991-07-31 1992-07-30 Verfahren zur Herstellung von Isolationszonen aus Oxid Expired - Fee Related DE69231702T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/738,580 US5192707A (en) 1991-07-31 1991-07-31 Method of forming isolated regions of oxide

Publications (2)

Publication Number Publication Date
DE69231702D1 DE69231702D1 (de) 2001-04-05
DE69231702T2 true DE69231702T2 (de) 2001-09-13

Family

ID=24968593

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69231702T Expired - Fee Related DE69231702T2 (de) 1991-07-31 1992-07-30 Verfahren zur Herstellung von Isolationszonen aus Oxid

Country Status (4)

Country Link
US (2) US5192707A (de)
EP (1) EP0526212B1 (de)
JP (1) JP3273636B2 (de)
DE (1) DE69231702T2 (de)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1250233B (it) * 1991-11-29 1995-04-03 St Microelectronics Srl Procedimento per la fabbricazione di circuiti integrati in tecnologia mos.
US5310692A (en) * 1992-05-29 1994-05-10 Sgs-Thomson Microelectronics, Inc. Method of forming a MOSFET structure with planar surface
US5371035A (en) * 1993-02-01 1994-12-06 Motorola Inc. Method for forming electrical isolation in an integrated circuit device
JP2685401B2 (ja) * 1993-06-16 1997-12-03 財団法人工業技術研究院 酸化ケイ素単離領域の形成方法
KR970003893B1 (ko) * 1993-10-25 1997-03-22 삼성전자 주식회사 반도체 장치의 소자 분리 방법
DE4336869C2 (de) * 1993-10-28 2003-05-28 Gold Star Electronics Verfahren zum Herstellen eines MOS-Transistors
US5927992A (en) * 1993-12-22 1999-07-27 Stmicroelectronics, Inc. Method of forming a dielectric in an integrated circuit
US5543343A (en) * 1993-12-22 1996-08-06 Sgs-Thomson Microelectronics, Inc. Method fabricating an integrated circuit
US6034410A (en) * 1994-01-14 2000-03-07 Stmicroelectronics, Inc. MOSFET structure with planar surface
KR960005839A (ko) * 1994-07-06 1996-02-23 김주용 반도체 소자의 필드 산화막 형성방법
US5631189A (en) * 1994-07-13 1997-05-20 Nippon Telegraph And Telephone Corporation Method of forming element isolation region
US5814544A (en) * 1994-07-14 1998-09-29 Vlsi Technology, Inc. Forming a MOS transistor with a recessed channel
JP3304621B2 (ja) * 1994-07-29 2002-07-22 三菱電機株式会社 半導体装置の製造方法
US5643825A (en) * 1994-12-29 1997-07-01 Advanced Micro Devices, Inc. Integrated circuit isolation process
US5604370A (en) * 1995-07-11 1997-02-18 Advanced Micro Devices, Inc. Field implant for semiconductor device
US6313034B1 (en) 1995-08-03 2001-11-06 Chartered Semiconductor Manufacturing Method for forming integrated circuit device structures from semiconductor substrate oxidation mask layers
US5837378A (en) * 1995-09-12 1998-11-17 Micron Technology, Inc. Method of reducing stress-induced defects in silicon
DE19535150A1 (de) * 1995-09-21 1997-03-27 Mosel Vitelic Inc Verfahren zur Herstellung eines integrierten Halbleiterkreises
US5747357A (en) * 1995-09-27 1998-05-05 Mosel Vitelic, Inc. Modified poly-buffered isolation
US5702976A (en) 1995-10-24 1997-12-30 Micron Technology, Inc. Shallow trench isolation using low dielectric constant insulator
KR0171982B1 (ko) * 1995-12-02 1999-03-30 김주용 반도체 소자의 필드 산화막 형성방법
US5972776A (en) * 1995-12-22 1999-10-26 Stmicroelectronics, Inc. Method of forming a planar isolation structure in an integrated circuit
KR0172730B1 (ko) * 1995-12-30 1999-03-30 김주용 반도체 소자의 아이솔레이션 방법
US5658822A (en) * 1996-03-29 1997-08-19 Vanguard International Semiconductor Corporation Locos method with double polysilicon/silicon nitride spacer
US5899727A (en) * 1996-05-02 1999-05-04 Advanced Micro Devices, Inc. Method of making a semiconductor isolation region bounded by a trench and covered with an oxide to improve planarization
US5834360A (en) * 1996-07-31 1998-11-10 Stmicroelectronics, Inc. Method of forming an improved planar isolation structure in an integrated circuit
US5902128A (en) 1996-10-17 1999-05-11 Micron Technology, Inc. Process to improve the flow of oxide during field oxidation by fluorine doping
US5891788A (en) * 1996-11-14 1999-04-06 Micron Technology, Inc. Locus isolation technique using high pressure oxidation (hipox) and protective spacers
US5821153A (en) * 1996-12-09 1998-10-13 Taiwan Semiconductor Manufacturing Company, Ltd. Method to reduce field oxide loss from etches
JPH11214384A (ja) * 1998-01-28 1999-08-06 Mitsubishi Electric Corp 半導体装置の製造方法
US6001713A (en) * 1998-09-16 1999-12-14 Advanced Micro Devices, Inc. Methods for forming nitrogen-rich regions in a floating gate and interpoly dielectric layer in a non-volatile semiconductor memory device
US6514885B1 (en) * 2000-05-03 2003-02-04 Kabushiki Kaisha Toshiba Semiconductor device manufacturing method to reduce process induced stress and crystalline defects
US20030055863A1 (en) * 2001-07-24 2003-03-20 Spiegel Michael G. Method and apparatus for managing system resources in an information handling system
JP2005332996A (ja) * 2004-05-20 2005-12-02 Oki Electric Ind Co Ltd 半導体装置、及びその製造方法
CN114429983A (zh) * 2022-04-01 2022-05-03 北京芯可鉴科技有限公司 高压横向双扩散金属氧化物半导体场效应管及其制作方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5197385A (en) * 1975-02-21 1976-08-26 Handotaisochino seizohoho
JPS5552254A (en) * 1978-10-11 1980-04-16 Nec Corp Semiconductor device
JPS5640269A (en) * 1979-09-11 1981-04-16 Toshiba Corp Preparation of semiconductor device
US4508757A (en) * 1982-12-20 1985-04-02 International Business Machines Corporation Method of manufacturing a minimum bird's beak recessed oxide isolation structure
US4407696A (en) * 1982-12-27 1983-10-04 Mostek Corporation Fabrication of isolation oxidation for MOS circuit
DE3329074A1 (de) * 1983-08-11 1985-02-28 Siemens AG, 1000 Berlin und 8000 München Verhinderung der oxidationsmitteldiffusion bei der herstellung von halbleiterschichtanordnungen
US4580156A (en) * 1983-12-30 1986-04-01 At&T Bell Laboratories Structured resistive field shields for low-leakage high voltage devices
US4516316A (en) * 1984-03-27 1985-05-14 Advanced Micro Devices, Inc. Method of making improved twin wells for CMOS devices by controlling spatial separation
JPS6116575A (ja) * 1984-07-03 1986-01-24 Ricoh Co Ltd 半導体メモリ装置の製造方法
US4630356A (en) * 1985-09-19 1986-12-23 International Business Machines Corporation Method of forming recessed oxide isolation with reduced steepness of the birds' neck
DE3542166A1 (de) * 1985-11-29 1987-06-04 Telefunken Electronic Gmbh Halbleiterbauelement
US4740481A (en) * 1986-01-21 1988-04-26 Motorola Inc. Method of preventing hillock formation in polysilicon layer by oxygen implanation
US5028559A (en) * 1989-03-23 1991-07-02 Motorola Inc. Fabrication of devices having laterally isolated semiconductor regions
US5002898A (en) * 1989-10-19 1991-03-26 At&T Bell Laboratories Integrated-circuit device isolation
US5159430A (en) * 1991-07-24 1992-10-27 Micron Technology, Inc. Vertically integrated oxygen-implanted polysilicon resistor

Also Published As

Publication number Publication date
US5338968A (en) 1994-08-16
EP0526212A3 (de) 1995-10-04
EP0526212A2 (de) 1993-02-03
US5192707A (en) 1993-03-09
DE69231702D1 (de) 2001-04-05
EP0526212B1 (de) 2001-02-28
JPH05206115A (ja) 1993-08-13
JP3273636B2 (ja) 2002-04-08

Similar Documents

Publication Publication Date Title
DE69231702D1 (de) Verfahren zur Herstellung von Isolationszonen aus Oxid
DE69206542T2 (de) Verfahren zur Herstellung von Ethylenoxyd.
DE69116781D1 (de) Integriertes Verfahren zur Herstellung von Kohlenoxyd
DE69310781T2 (de) Verfahren zur Herstellung von Magnetkernen
DE69222979D1 (de) Verfahren zur Herstellung von Mikrolinsen
DE59304719D1 (de) Verfahren zur Herstellung von Polysilazanen
DE69214572D1 (de) Verfahren zur Herstellung von Alkoholen
DE69408236T2 (de) Verfahren zur Herstellung von Zirkoniumoxid
DE69218071T2 (de) Verfahren zur Herstellung von Eisenoxidteilchen
DE3854626D1 (de) Verfahren zur Herstellung von Komponenten aus supraleitenden oxidkeramischen Materialien.
DE69123555D1 (de) Verfahren zur Herstellung von Überzügen aus supraleitendem Oxyd
DE69213916T2 (de) Verfahren zur Herstellung von L-Ambrox
DE69217346D1 (de) Verfahren zur Herstellung von Mikroleuchtkörpern
DE69314142T2 (de) Verfahren zur Herstellung von Keramikteilen
DE59303845D1 (de) Verfahren zur Herstellung von oxidischen Schutzschichten
DE69126188T2 (de) Verfahren zur Herstellung von Mn-Zn-Ferriten
DE69513752D1 (de) Verfahren zur Herstellung von Sinterkörpern aus Zinkoxid
DE59104276D1 (de) Verfahren zur Herstellung von Formkörpern aus supraleitendem oxidkeramischem Material.
DE69319461D1 (de) Verfahren zur Herstellung von keramischen Blättern
DE59303461D1 (de) Verfahren zur Herstellung von Ethylenoxid
DE69315736D1 (de) Verfahren zur Herstellung von supraleitenden dünnen Schichten aus supraleitendem Oxidmaterial
DE69107564T2 (de) Verfahren zur Herstellung von Styrenoxid.
DE59206474D1 (de) Verfahren zur Herstellung von Keramikteilen
DE69720668D1 (de) Verfahren zur Herstellung von isolierenden Bereichen aus Oxid
DE69131611T2 (de) Verfahren zur Herstellung dünner Schichten aus Oxyd-Supraleiter

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee