DE69232631T2 - Deformierbare Farbspiegelvorrichtung und Herstellungsmethode - Google Patents

Deformierbare Farbspiegelvorrichtung und Herstellungsmethode

Info

Publication number
DE69232631T2
DE69232631T2 DE69232631T DE69232631T DE69232631T2 DE 69232631 T2 DE69232631 T2 DE 69232631T2 DE 69232631 T DE69232631 T DE 69232631T DE 69232631 T DE69232631 T DE 69232631T DE 69232631 T2 DE69232631 T2 DE 69232631T2
Authority
DE
Germany
Prior art keywords
manufacturing
mirror device
color mirror
deformable
deformable color
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69232631T
Other languages
English (en)
Other versions
DE69232631D1 (de
Inventor
William E Nelson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of DE69232631D1 publication Critical patent/DE69232631D1/de
Application granted granted Critical
Publication of DE69232631T2 publication Critical patent/DE69232631T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/201—Filters in the form of arrays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
DE69232631T 1991-07-31 1992-07-17 Deformierbare Farbspiegelvorrichtung und Herstellungsmethode Expired - Fee Related DE69232631T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/739,078 US5168406A (en) 1991-07-31 1991-07-31 Color deformable mirror device and method for manufacture

Publications (2)

Publication Number Publication Date
DE69232631D1 DE69232631D1 (de) 2002-07-11
DE69232631T2 true DE69232631T2 (de) 2002-11-28

Family

ID=24970722

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69232631T Expired - Fee Related DE69232631T2 (de) 1991-07-31 1992-07-17 Deformierbare Farbspiegelvorrichtung und Herstellungsmethode
DE69214568T Expired - Fee Related DE69214568T2 (de) 1991-07-31 1992-07-17 Deformierbare Farbspiegelvorrichtung und Herstellungsmethode

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE69214568T Expired - Fee Related DE69214568T2 (de) 1991-07-31 1992-07-17 Deformierbare Farbspiegelvorrichtung und Herstellungsmethode

Country Status (5)

Country Link
US (1) US5168406A (de)
EP (2) EP0687931B1 (de)
JP (1) JPH05203888A (de)
KR (2) KR100294036B1 (de)
DE (2) DE69232631T2 (de)

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EP0687931A2 (de) 1995-12-20
EP0529282A2 (de) 1993-03-03
DE69214568D1 (de) 1996-11-21
KR930003286A (ko) 1993-02-24
KR100294036B1 (ko) 2001-10-24
DE69214568T2 (de) 1997-02-27
EP0687931A3 (de) 1997-03-12
EP0687931B1 (de) 2002-06-05
US5168406A (en) 1992-12-01
KR100318032B1 (ko) 2001-12-22
JPH05203888A (ja) 1993-08-13
EP0529282B1 (de) 1996-10-16
EP0529282A3 (en) 1993-06-16
DE69232631D1 (de) 2002-07-11

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