DE69304276D1 - Testen und Ausprobieren der Schaltungen auf einer Wafer vor dem Teilvorgang - Google Patents

Testen und Ausprobieren der Schaltungen auf einer Wafer vor dem Teilvorgang

Info

Publication number
DE69304276D1
DE69304276D1 DE69304276T DE69304276T DE69304276D1 DE 69304276 D1 DE69304276 D1 DE 69304276D1 DE 69304276 T DE69304276 T DE 69304276T DE 69304276 T DE69304276 T DE 69304276T DE 69304276 D1 DE69304276 D1 DE 69304276D1
Authority
DE
Germany
Prior art keywords
testing
circuits
sub
wafer before
trying out
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69304276T
Other languages
English (en)
Other versions
DE69304276T2 (de
Inventor
Michael D Rostoker
Carlos Dangelo
James Koford
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LSI Corp
Original Assignee
LSI Logic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LSI Logic Corp filed Critical LSI Logic Corp
Publication of DE69304276D1 publication Critical patent/DE69304276D1/de
Application granted granted Critical
Publication of DE69304276T2 publication Critical patent/DE69304276T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/2856—Internal circuit aspects, e.g. built-in test features; Test chips; Measuring material aspects, e.g. electro migration [EM]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2884—Testing of integrated circuits [IC] using dedicated test connectors, test elements or test circuits on the IC under test
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/3185—Reconfiguring for testing, e.g. LSSD, partitioning
    • G01R31/318505—Test of Modular systems, e.g. Wafers, MCM's
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/3185—Reconfiguring for testing, e.g. LSSD, partitioning
    • G01R31/318505—Test of Modular systems, e.g. Wafers, MCM's
    • G01R31/318511—Wafer Test
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/006—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation at wafer scale level, i.e. wafer scale integration [WSI]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates
DE69304276T 1992-07-02 1993-07-01 Testen und Ausprobieren der Schaltungen auf einer Wafer vor dem Teilvorgang Expired - Lifetime DE69304276T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/908,687 US5442282A (en) 1992-07-02 1992-07-02 Testing and exercising individual, unsingulated dies on a wafer

Publications (2)

Publication Number Publication Date
DE69304276D1 true DE69304276D1 (de) 1996-10-02
DE69304276T2 DE69304276T2 (de) 1997-03-20

Family

ID=25426114

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69304276T Expired - Lifetime DE69304276T2 (de) 1992-07-02 1993-07-01 Testen und Ausprobieren der Schaltungen auf einer Wafer vor dem Teilvorgang

Country Status (5)

Country Link
US (3) US5442282A (de)
EP (1) EP0579993B1 (de)
JP (1) JPH0677298A (de)
DE (1) DE69304276T2 (de)
ES (1) ES2093325T3 (de)

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US5838163A (en) 1998-11-17
EP0579993B1 (de) 1996-08-28
ES2093325T3 (es) 1996-12-16
EP0579993A1 (de) 1994-01-26
US5539325A (en) 1996-07-23
US5442282A (en) 1995-08-15
JPH0677298A (ja) 1994-03-18
DE69304276T2 (de) 1997-03-20

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