DE69309834T2 - Gleichstrom supraleitendes Quanteninterferenz-Bauelement - Google Patents

Gleichstrom supraleitendes Quanteninterferenz-Bauelement

Info

Publication number
DE69309834T2
DE69309834T2 DE69309834T DE69309834T DE69309834T2 DE 69309834 T2 DE69309834 T2 DE 69309834T2 DE 69309834 T DE69309834 T DE 69309834T DE 69309834 T DE69309834 T DE 69309834T DE 69309834 T2 DE69309834 T2 DE 69309834T2
Authority
DE
Germany
Prior art keywords
interference device
quantum interference
superconducting quantum
superconducting
quantum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69309834T
Other languages
English (en)
Other versions
DE69309834D1 (de
Inventor
Nobuhiro Shimizu
Norio Chiba
Satoru Yabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Science Corp
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Application granted granted Critical
Publication of DE69309834D1 publication Critical patent/DE69309834D1/de
Publication of DE69309834T2 publication Critical patent/DE69309834T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/035—Measuring direction or magnitude of magnetic fields or magnetic flux using superconductive devices
    • G01R33/0354—SQUIDS
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/10—Junction-based devices
    • H10N60/12—Josephson-effect devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/825—Apparatus per se, device per se, or process of making or operating same
    • Y10S505/842—Measuring and testing
    • Y10S505/843—Electrical
    • Y10S505/845—Magnetometer
    • Y10S505/846—Magnetometer using superconductive quantum interference device, i.e. squid
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/825—Apparatus per se, device per se, or process of making or operating same
    • Y10S505/873—Active solid-state device
    • Y10S505/874—Active solid-state device with josephson junction, e.g. squid
DE69309834T 1992-08-11 1993-08-04 Gleichstrom supraleitendes Quanteninterferenz-Bauelement Expired - Fee Related DE69309834T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4214246A JP2964112B2 (ja) 1992-08-11 1992-08-11 直流駆動型超伝導量子干渉素子

Publications (2)

Publication Number Publication Date
DE69309834D1 DE69309834D1 (de) 1997-05-22
DE69309834T2 true DE69309834T2 (de) 1997-07-24

Family

ID=16652598

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69309834T Expired - Fee Related DE69309834T2 (de) 1992-08-11 1993-08-04 Gleichstrom supraleitendes Quanteninterferenz-Bauelement

Country Status (5)

Country Link
US (1) US5548130A (de)
EP (1) EP0591641B1 (de)
JP (1) JP2964112B2 (de)
CA (1) CA2103634A1 (de)
DE (1) DE69309834T2 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4433331C2 (de) * 1994-09-19 2002-06-20 Siemens Ag Magnetfeldempfindliche SQUID-Sensoreinrichtung mit Flußtransformator unter Verwendung von Hoch-T¶c¶-Supraleitermaterial
AUPM832994A0 (en) * 1994-09-21 1994-10-13 Broken Hill Proprietary Company Limited, The A method for improving the performance of thin-film josephson devices in magnetic fields
JP2909807B2 (ja) * 1995-11-22 1999-06-23 セイコーインスツルメンツ株式会社 超伝導量子干渉素子磁束計および非破壊検査装置
JP3518184B2 (ja) * 1996-08-02 2004-04-12 株式会社日立製作所 検出コイル一体型ｓｑｕｉｄ
JP2000091653A (ja) * 1998-09-07 2000-03-31 Seiko Instruments Inc 超伝導量子干渉素子
US20030068832A1 (en) * 2001-08-29 2003-04-10 Yuri Koval Submicron closed-form josephson junctions
DE10336007A1 (de) * 2002-08-02 2004-02-26 QEST Quantenelektronische Systeme Tübingen GmbH Sitz Böblingen Magnetometer
US20070054809A1 (en) * 2005-09-02 2007-03-08 National Institute Of Information And Communications Tech., Inc. Administrative Agency Superconducting structure, apparatus for processing superconducting structure, and method for processing superconducting structure
CN102790170B (zh) * 2011-05-19 2014-11-05 宇能电科技股份有限公司 磁阻感测元件及其形成方法
JP6326379B2 (ja) 2012-03-08 2018-05-16 ディー−ウェイブ システムズ，インコーポレイテッド 超伝導集積回路の製作のためのシステムおよび方法
CN104377299B (zh) * 2014-08-21 2017-09-26 中国科学院上海微系统与信息技术研究所 无磁屏蔽环境下抑制磁场干扰的squid器件的结构
JP6735619B2 (ja) * 2016-07-20 2020-08-05 日本電子株式会社 磁気共鳴測定用検出コイルの製造方法
EP3577700B1 (de) 2017-02-01 2022-03-30 D-Wave Systems Inc. Systeme und verfahren zur herstellung von supraleitenden integrierten schaltungen
EP3580702B1 (de) * 2017-03-13 2021-03-17 Google LLC Integration von schaltungselementen in eine gestapelte quanten-computing-vorrichtung
US20200152851A1 (en) 2018-11-13 2020-05-14 D-Wave Systems Inc. Systems and methods for fabricating superconducting integrated circuits
CN110649152A (zh) * 2019-09-27 2020-01-03 江苏鲁汶仪器有限公司 一种铌基超导器件刻蚀方法
CN112038479B (zh) * 2020-09-04 2022-06-24 中国科学院上海微系统与信息技术研究所 电感可调的超导量子器件及其制备方法
CN112881772B (zh) * 2020-12-31 2023-08-25 中国计量科学研究院 Squid电流传感器以及制备方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4430662A (en) * 1981-04-09 1984-02-07 Sperry Corporation Superconductive tunnel junction integrated circuit
JPS61196587A (ja) * 1985-02-26 1986-08-30 Mitsubishi Electric Corp 直流駆動型超伝導量子干渉素子
DE3515237A1 (de) * 1985-04-26 1986-10-30 Siemens AG, 1000 Berlin und 8000 München Vorrichtung zur messung schwacher magnetfelder mit wenigstens einem dc-squid
EP0246419B1 (de) * 1986-05-21 1991-04-10 Siemens Aktiengesellschaft SQUID-Magnetometer für eine Vorrichtung zur Messung schwacher Magnetfelder
US5218297A (en) * 1988-02-05 1993-06-08 Hitachi, Ltd. Superconductive quantum interference device in high temperature environments having reduced inductance and improved thermal noise response
JPH01217981A (ja) * 1988-02-26 1989-08-31 Mitsubishi Electric Corp 超電導量子干渉素子
JP2780473B2 (ja) * 1990-09-20 1998-07-30 株式会社島津製作所 Ｄｃ―ｓｑｕｉｄ素子およびその製造方法
JPH04130676A (ja) * 1990-09-20 1992-05-01 Shimadzu Corp 準平面型ジョセフソン接合素子を用いたｄｃ―ｓｑｕｉｄ
JP2764115B2 (ja) * 1991-02-26 1998-06-11 セイコーインスツルメンツ株式会社 高感度磁場検出器の製造方法

Also Published As

Publication number Publication date
EP0591641A1 (de) 1994-04-13
US5548130A (en) 1996-08-20
JP2964112B2 (ja) 1999-10-18
JPH0661536A (ja) 1994-03-04
CA2103634A1 (en) 1994-02-12
EP0591641B1 (de) 1997-04-16
DE69309834D1 (de) 1997-05-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: SII NANO TECHNOLOGY INC., CHIBA, JP

8328 Change in the person/name/address of the agent

Representative=s name: WIESE KONNERTH FISCHER PATENTANWAELTE PARTNERSCHAF

8328 Change in the person/name/address of the agent

Representative=s name: SCHROETER LEHMANN FISCHER & NEUGEBAUER, 81479 MUEN

8339 Ceased/non-payment of the annual fee