DE69310260D1 - Integrierter Winkelbeschleunigungsmesser mit kapazitiven Gebern - Google Patents
Integrierter Winkelbeschleunigungsmesser mit kapazitiven GebernInfo
- Publication number
- DE69310260D1 DE69310260D1 DE69310260T DE69310260T DE69310260D1 DE 69310260 D1 DE69310260 D1 DE 69310260D1 DE 69310260 T DE69310260 T DE 69310260T DE 69310260 T DE69310260 T DE 69310260T DE 69310260 D1 DE69310260 D1 DE 69310260D1
- Authority
- DE
- Germany
- Prior art keywords
- capacitive sensors
- angular accelerometer
- integrated angular
- integrated
- accelerometer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0888—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values for indicating angular acceleration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Micromachines (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/862,909 US5251484A (en) | 1992-04-03 | 1992-04-03 | Rotational accelerometer |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69310260D1 true DE69310260D1 (de) | 1997-06-05 |
DE69310260T2 DE69310260T2 (de) | 1997-08-14 |
Family
ID=25339713
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69310260T Expired - Lifetime DE69310260T2 (de) | 1992-04-03 | 1993-03-26 | Integrierter Winkelbeschleunigungsmesser mit kapazitiven Gebern |
Country Status (4)
Country | Link |
---|---|
US (1) | US5251484A (de) |
EP (1) | EP0564186B1 (de) |
JP (1) | JP3315750B2 (de) |
DE (1) | DE69310260T2 (de) |
Families Citing this family (45)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3707691A1 (de) * | 1987-03-11 | 1988-09-22 | Basf Ag | Mit einer gehaerteten harzmischung gebundene mineral- und textil-vliese |
EP0543901B1 (de) * | 1990-08-17 | 1995-10-04 | Analog Devices, Inc. | Monolithischer beschleunigungsmesser |
US5650568A (en) * | 1993-02-10 | 1997-07-22 | The Charles Stark Draper Laboratory, Inc. | Gimballed vibrating wheel gyroscope having strain relief features |
US5555765A (en) * | 1993-02-10 | 1996-09-17 | The Charles Stark Draper Laboratory, Inc. | Gimballed vibrating wheel gyroscope |
DE4341271B4 (de) * | 1993-12-03 | 2005-11-03 | Robert Bosch Gmbh | Beschleunigungssensor aus kristallinem Material und Verfahren zur Herstellung dieses Beschleunigungssensors |
US6088185A (en) * | 1998-06-05 | 2000-07-11 | Seagate Technology, Inc. | Rotational vibration detection using a velocity sense coil |
US6285522B1 (en) | 1998-06-05 | 2001-09-04 | Seagate Technology Llc | Rotational vibration compensation using a dedicated surface with a constant frequency pattern |
US6222336B1 (en) | 1998-06-05 | 2001-04-24 | Seagate Technology Llc | Rotational vibration detection using spindle motor velocity sense coils |
US6304406B1 (en) | 1998-06-05 | 2001-10-16 | Seagate Technology Llc | Rotational vibration compensation using a fixed head and a constant frequency pattern |
DE19938206A1 (de) * | 1999-08-12 | 2001-02-15 | Bosch Gmbh Robert | Mikromechanischer Drehbeschleunigungssensor |
EP1083144B1 (de) | 1999-09-10 | 2008-05-07 | STMicroelectronics S.r.l. | Gegen mechanische Spannungen unempfindliche mikroelektromechanische Struktur |
DE69932516T2 (de) * | 1999-09-10 | 2007-02-15 | Stmicroelectronics S.R.L., Agrate Brianza | Integrierter Halbleiter-Inertialsensor mit Mikroantrieb zur Kalibration |
US6282961B1 (en) | 1999-09-24 | 2001-09-04 | Cda Astro Intercorp | Permanent magnet rotary accelerometer |
US6750152B1 (en) | 1999-10-01 | 2004-06-15 | Delphi Technologies, Inc. | Method and apparatus for electrically testing and characterizing formation of microelectric features |
US6428713B1 (en) | 1999-10-01 | 2002-08-06 | Delphi Technologies, Inc. | MEMS sensor structure and microfabrication process therefor |
US6257062B1 (en) | 1999-10-01 | 2001-07-10 | Delphi Technologies, Inc. | Angular Accelerometer |
US6393914B1 (en) | 2001-02-13 | 2002-05-28 | Delphi Technologies, Inc. | Angular accelerometer |
US6611071B2 (en) | 2001-08-17 | 2003-08-26 | Siemens Automotive Inc. | Embedded electronics for high convection cooling in an engine cooling motor application |
US6761070B2 (en) | 2002-01-31 | 2004-07-13 | Delphi Technologies, Inc. | Microfabricated linear accelerometer |
US6666092B2 (en) | 2002-02-28 | 2003-12-23 | Delphi Technologies, Inc. | Angular accelerometer having balanced inertia mass |
US6718826B2 (en) | 2002-02-28 | 2004-04-13 | Delphi Technologies, Inc. | Balanced angular accelerometer |
JP2006519362A (ja) * | 2003-02-28 | 2006-08-24 | ビ−エイイ− システムズ パブリック リミテッド カンパニ− | 加速度計 |
US20050235751A1 (en) * | 2004-04-27 | 2005-10-27 | Zarabadi Seyed R | Dual-axis accelerometer |
US7194376B2 (en) * | 2004-04-27 | 2007-03-20 | Delphi Technologies, Inc. | Circuit and method of processing multiple-axis sensor output signals |
US7250322B2 (en) * | 2005-03-16 | 2007-07-31 | Delphi Technologies, Inc. | Method of making microsensor |
US20060207327A1 (en) | 2005-03-16 | 2006-09-21 | Zarabadi Seyed R | Linear accelerometer |
CN100401070C (zh) * | 2006-03-09 | 2008-07-09 | 上海交通大学 | 电容式微流体角加速度计 |
US8462109B2 (en) | 2007-01-05 | 2013-06-11 | Invensense, Inc. | Controlling and accessing content using motion processing on mobile devices |
US8047075B2 (en) | 2007-06-21 | 2011-11-01 | Invensense, Inc. | Vertically integrated 3-axis MEMS accelerometer with electronics |
US8141424B2 (en) | 2008-09-12 | 2012-03-27 | Invensense, Inc. | Low inertia frame for detecting coriolis acceleration |
US20100071467A1 (en) * | 2008-09-24 | 2010-03-25 | Invensense | Integrated multiaxis motion sensor |
US8952832B2 (en) * | 2008-01-18 | 2015-02-10 | Invensense, Inc. | Interfacing application programs and motion sensors of a device |
US7796872B2 (en) * | 2007-01-05 | 2010-09-14 | Invensense, Inc. | Method and apparatus for producing a sharp image from a handheld device containing a gyroscope |
US7934423B2 (en) * | 2007-12-10 | 2011-05-03 | Invensense, Inc. | Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics |
US8020441B2 (en) * | 2008-02-05 | 2011-09-20 | Invensense, Inc. | Dual mode sensing for vibratory gyroscope |
US8508039B1 (en) | 2008-05-08 | 2013-08-13 | Invensense, Inc. | Wafer scale chip scale packaging of vertically integrated MEMS sensors with electronics |
US20090265671A1 (en) * | 2008-04-21 | 2009-10-22 | Invensense | Mobile devices with motion gesture recognition |
US8250921B2 (en) * | 2007-07-06 | 2012-08-28 | Invensense, Inc. | Integrated motion processing unit (MPU) with MEMS inertial sensing and embedded digital electronics |
JP5036904B2 (ja) * | 2008-04-11 | 2012-09-26 | ラムバス・インコーポレーテッド | 可撓性基板を使用する変位感知 |
CN103003704B (zh) * | 2011-05-23 | 2016-05-04 | 深迪半导体(上海)有限公司 | 感测旋转及加速度两者的微机电系统装置 |
KR101729184B1 (ko) * | 2012-06-22 | 2017-04-21 | 고쿠리츠켄큐카이하츠호진 상교기쥬츠 소고켄큐쇼 | 회전각가속도 측정 장치 |
US9250146B2 (en) * | 2013-02-12 | 2016-02-02 | Western New England University | Multidimensional strain gage |
DE102015211387A1 (de) * | 2015-06-19 | 2016-12-22 | Robert Bosch Gmbh | Drei-achsiger Drehbeschleunigungssensor |
EP3546954B1 (de) * | 2016-01-07 | 2022-12-14 | Analog Devices, Inc. | 3-achsen-winkelbeschleunigungsmesser |
US10732198B2 (en) | 2017-08-09 | 2020-08-04 | Analog Devices, Inc. | Integrated linear and angular MEMS accelerometers |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SU583397A1 (ru) * | 1976-01-04 | 1977-12-05 | Tarkhanov Oleg V | Емкостной преобразователь угловых ускорений |
SU1035523A1 (ru) * | 1981-06-05 | 1983-08-15 | Московский Ордена Ленина И Ордена Октябрьской Революции Энергетический Институт | Устройство дл измерени угловых ускорений |
US4435737A (en) * | 1981-12-16 | 1984-03-06 | Rockwell International Corporation | Low cost capacitive accelerometer |
SU1040424A1 (ru) * | 1982-03-03 | 1983-09-07 | Предприятие П/Я А-1891 | Угловой акселерометр |
DE4022464C2 (de) * | 1990-07-14 | 2000-12-28 | Bosch Gmbh Robert | Beschleunigungssensor |
-
1992
- 1992-04-03 US US07/862,909 patent/US5251484A/en not_active Expired - Lifetime
-
1993
- 1993-03-26 DE DE69310260T patent/DE69310260T2/de not_active Expired - Lifetime
- 1993-03-26 EP EP93302361A patent/EP0564186B1/de not_active Expired - Lifetime
- 1993-04-05 JP JP07732293A patent/JP3315750B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH0618551A (ja) | 1994-01-25 |
US5251484A (en) | 1993-10-12 |
JP3315750B2 (ja) | 2002-08-19 |
DE69310260T2 (de) | 1997-08-14 |
EP0564186A1 (de) | 1993-10-06 |
EP0564186B1 (de) | 1997-05-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: HEWLETT-PACKARD CO. (N.D.GES.D.STAATES DELAWARE), |
|
8327 | Change in the person/name/address of the patent owner |
Owner name: HEWLETT-PACKARD DEVELOPMENT CO., L.P., HOUSTON, TE |