DE69310260T2 - Integrierter Winkelbeschleunigungsmesser mit kapazitiven Gebern - Google Patents

Integrierter Winkelbeschleunigungsmesser mit kapazitiven Gebern

Info

Publication number
DE69310260T2
DE69310260T2 DE69310260T DE69310260T DE69310260T2 DE 69310260 T2 DE69310260 T2 DE 69310260T2 DE 69310260 T DE69310260 T DE 69310260T DE 69310260 T DE69310260 T DE 69310260T DE 69310260 T2 DE69310260 T2 DE 69310260T2
Authority
DE
Germany
Prior art keywords
capacitive sensors
angular accelerometer
integrated angular
integrated
accelerometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69310260T
Other languages
English (en)
Other versions
DE69310260D1 (de
Inventor
Mark D Mastache
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hewlett Packard Development Co LP
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Application granted granted Critical
Publication of DE69310260D1 publication Critical patent/DE69310260D1/de
Publication of DE69310260T2 publication Critical patent/DE69310260T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0888—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values for indicating angular acceleration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
DE69310260T 1992-04-03 1993-03-26 Integrierter Winkelbeschleunigungsmesser mit kapazitiven Gebern Expired - Lifetime DE69310260T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/862,909 US5251484A (en) 1992-04-03 1992-04-03 Rotational accelerometer

Publications (2)

Publication Number Publication Date
DE69310260D1 DE69310260D1 (de) 1997-06-05
DE69310260T2 true DE69310260T2 (de) 1997-08-14

Family

ID=25339713

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69310260T Expired - Lifetime DE69310260T2 (de) 1992-04-03 1993-03-26 Integrierter Winkelbeschleunigungsmesser mit kapazitiven Gebern

Country Status (4)

Country Link
US (1) US5251484A (de)
EP (1) EP0564186B1 (de)
JP (1) JP3315750B2 (de)
DE (1) DE69310260T2 (de)

Families Citing this family (45)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3707691A1 (de) * 1987-03-11 1988-09-22 Basf Ag Mit einer gehaerteten harzmischung gebundene mineral- und textil-vliese
EP0543901B1 (de) * 1990-08-17 1995-10-04 Analog Devices, Inc. Monolithischer beschleunigungsmesser
US5650568A (en) * 1993-02-10 1997-07-22 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope having strain relief features
US5555765A (en) * 1993-02-10 1996-09-17 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope
DE4341271B4 (de) * 1993-12-03 2005-11-03 Robert Bosch Gmbh Beschleunigungssensor aus kristallinem Material und Verfahren zur Herstellung dieses Beschleunigungssensors
US6088185A (en) * 1998-06-05 2000-07-11 Seagate Technology, Inc. Rotational vibration detection using a velocity sense coil
US6285522B1 (en) 1998-06-05 2001-09-04 Seagate Technology Llc Rotational vibration compensation using a dedicated surface with a constant frequency pattern
US6222336B1 (en) 1998-06-05 2001-04-24 Seagate Technology Llc Rotational vibration detection using spindle motor velocity sense coils
US6304406B1 (en) 1998-06-05 2001-10-16 Seagate Technology Llc Rotational vibration compensation using a fixed head and a constant frequency pattern
DE19938206A1 (de) * 1999-08-12 2001-02-15 Bosch Gmbh Robert Mikromechanischer Drehbeschleunigungssensor
EP1083144B1 (de) 1999-09-10 2008-05-07 STMicroelectronics S.r.l. Gegen mechanische Spannungen unempfindliche mikroelektromechanische Struktur
DE69932516T2 (de) * 1999-09-10 2007-02-15 Stmicroelectronics S.R.L., Agrate Brianza Integrierter Halbleiter-Inertialsensor mit Mikroantrieb zur Kalibration
US6282961B1 (en) 1999-09-24 2001-09-04 Cda Astro Intercorp Permanent magnet rotary accelerometer
US6750152B1 (en) 1999-10-01 2004-06-15 Delphi Technologies, Inc. Method and apparatus for electrically testing and characterizing formation of microelectric features
US6428713B1 (en) 1999-10-01 2002-08-06 Delphi Technologies, Inc. MEMS sensor structure and microfabrication process therefor
US6257062B1 (en) 1999-10-01 2001-07-10 Delphi Technologies, Inc. Angular Accelerometer
US6393914B1 (en) 2001-02-13 2002-05-28 Delphi Technologies, Inc. Angular accelerometer
US6611071B2 (en) 2001-08-17 2003-08-26 Siemens Automotive Inc. Embedded electronics for high convection cooling in an engine cooling motor application
US6761070B2 (en) 2002-01-31 2004-07-13 Delphi Technologies, Inc. Microfabricated linear accelerometer
US6666092B2 (en) 2002-02-28 2003-12-23 Delphi Technologies, Inc. Angular accelerometer having balanced inertia mass
US6718826B2 (en) 2002-02-28 2004-04-13 Delphi Technologies, Inc. Balanced angular accelerometer
JP2006519362A (ja) * 2003-02-28 2006-08-24 ビ−エイイ−　システムズ　パブリック　リミテッド　カンパニ− 加速度計
US20050235751A1 (en) * 2004-04-27 2005-10-27 Zarabadi Seyed R Dual-axis accelerometer
US7194376B2 (en) * 2004-04-27 2007-03-20 Delphi Technologies, Inc. Circuit and method of processing multiple-axis sensor output signals
US7250322B2 (en) * 2005-03-16 2007-07-31 Delphi Technologies, Inc. Method of making microsensor
US20060207327A1 (en) 2005-03-16 2006-09-21 Zarabadi Seyed R Linear accelerometer
CN100401070C (zh) * 2006-03-09 2008-07-09 上海交通大学 电容式微流体角加速度计
US8462109B2 (en) 2007-01-05 2013-06-11 Invensense, Inc. Controlling and accessing content using motion processing on mobile devices
US8047075B2 (en) 2007-06-21 2011-11-01 Invensense, Inc. Vertically integrated 3-axis MEMS accelerometer with electronics
US8141424B2 (en) 2008-09-12 2012-03-27 Invensense, Inc. Low inertia frame for detecting coriolis acceleration
US20100071467A1 (en) * 2008-09-24 2010-03-25 Invensense Integrated multiaxis motion sensor
US8952832B2 (en) * 2008-01-18 2015-02-10 Invensense, Inc. Interfacing application programs and motion sensors of a device
US7796872B2 (en) * 2007-01-05 2010-09-14 Invensense, Inc. Method and apparatus for producing a sharp image from a handheld device containing a gyroscope
US7934423B2 (en) * 2007-12-10 2011-05-03 Invensense, Inc. Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics
US8020441B2 (en) * 2008-02-05 2011-09-20 Invensense, Inc. Dual mode sensing for vibratory gyroscope
US8508039B1 (en) 2008-05-08 2013-08-13 Invensense, Inc. Wafer scale chip scale packaging of vertically integrated MEMS sensors with electronics
US20090265671A1 (en) * 2008-04-21 2009-10-22 Invensense Mobile devices with motion gesture recognition
US8250921B2 (en) * 2007-07-06 2012-08-28 Invensense, Inc. Integrated motion processing unit (MPU) with MEMS inertial sensing and embedded digital electronics
JP5036904B2 (ja) * 2008-04-11 2012-09-26 ラムバス・インコーポレーテッド 可撓性基板を使用する変位感知
CN103003704B (zh) * 2011-05-23 2016-05-04 深迪半导体(上海)有限公司 感测旋转及加速度两者的微机电系统装置
KR101729184B1 (ko) * 2012-06-22 2017-04-21 고쿠리츠켄큐카이하츠호진 상교기쥬츠 소고켄큐쇼 회전각가속도 측정 장치
US9250146B2 (en) * 2013-02-12 2016-02-02 Western New England University Multidimensional strain gage
DE102015211387A1 (de) * 2015-06-19 2016-12-22 Robert Bosch Gmbh Drei-achsiger Drehbeschleunigungssensor
EP3546954B1 (de) * 2016-01-07 2022-12-14 Analog Devices, Inc. 3-achsen-winkelbeschleunigungsmesser
US10732198B2 (en) 2017-08-09 2020-08-04 Analog Devices, Inc. Integrated linear and angular MEMS accelerometers

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU583397A1 (ru) * 1976-01-04 1977-12-05 Tarkhanov Oleg V Емкостной преобразователь угловых ускорений
SU1035523A1 (ru) * 1981-06-05 1983-08-15 Московский Ордена Ленина И Ордена Октябрьской Революции Энергетический Институт Устройство дл измерени угловых ускорений
US4435737A (en) * 1981-12-16 1984-03-06 Rockwell International Corporation Low cost capacitive accelerometer
SU1040424A1 (ru) * 1982-03-03 1983-09-07 Предприятие П/Я А-1891 Угловой акселерометр
DE4022464C2 (de) * 1990-07-14 2000-12-28 Bosch Gmbh Robert Beschleunigungssensor

Also Published As

Publication number Publication date
JPH0618551A (ja) 1994-01-25
US5251484A (en) 1993-10-12
JP3315750B2 (ja) 2002-08-19
EP0564186A1 (de) 1993-10-06
DE69310260D1 (de) 1997-06-05
EP0564186B1 (de) 1997-05-02

Similar Documents

Publication Publication Date Title
DE69310260T2 (de) Integrierter Winkelbeschleunigungsmesser mit kapazitiven Gebern
DE69325165D1 (de) Verschiebungssensor
DE59207130D1 (de) Kapazitiver Drehwinkelsensor
DE69323618T2 (de) Pyrheliometrischer sensor
DE69222687T2 (de) Diebstahlsicherungssensor
DE59304596D1 (de) Sensoranordnung
DE69423004T2 (de) Abgeschirmter kapazitiver geber
DE69325705T2 (de) Kapazitiver feuchtigkeitsfühler
DE69331397D1 (de) Drehsensor
DE69406823T2 (de) Geschwindigkeitssensor
DE69412199D1 (de) Weggeber
DE59500186D1 (de) Kapazitiver Beschleunigungssensor
DE59006845D1 (de) Kapazitiver Sensor.
FI915153A0 (fi) Anturi
DE69323602T2 (de) Piezoelektrische Messfühler
DE68908229T2 (de) Kapazitiver Gewichtssensor.
DE69316986D1 (de) Positionsensoren
DE59309578D1 (de) Beschleunigungssensor
KR900010398A (ko) 가속도 감지기
DE9116730U1 (de) Beschleunigungssensor mit integrierter Empfindlichkeitskontrolle
BR7202178U (pt) Sensor de deslocamento angular
DE69410313D1 (de) Weggeber
DK135493A (da) Følerarrangement
DE69333129D1 (de) Winkelgeschwindigkeitssensor
DE9116926U1 (de) Meßwertaufnehmer

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: HEWLETT-PACKARD CO. (N.D.GES.D.STAATES DELAWARE),

8327 Change in the person/name/address of the patent owner

Owner name: HEWLETT-PACKARD DEVELOPMENT CO., L.P., HOUSTON, TE