DE69329445T2 - Dünnschicht-Magnetkopf ohne Kontaktbrücke und Herstellungsverfahren dafür - Google Patents
Dünnschicht-Magnetkopf ohne Kontaktbrücke und Herstellungsverfahren dafürInfo
- Publication number
- DE69329445T2 DE69329445T2 DE69329445T DE69329445T DE69329445T2 DE 69329445 T2 DE69329445 T2 DE 69329445T2 DE 69329445 T DE69329445 T DE 69329445T DE 69329445 T DE69329445 T DE 69329445T DE 69329445 T2 DE69329445 T2 DE 69329445T2
- Authority
- DE
- Germany
- Prior art keywords
- thin film
- manufacturing process
- magnetic head
- film magnetic
- contact bridge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000010409 thin film Substances 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/53—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone involving the removal of at least part of the materials of the treated article, e.g. etching, drying of hardened concrete
- C04B41/5338—Etching
- C04B41/5353—Wet etching, e.g. with etchants dissolved in organic solvents
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/91—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics involving the removal of part of the materials of the treated articles, e.g. etching
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
- G11B5/3106—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/313—Disposition of layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/313—Disposition of layers
- G11B5/3133—Disposition of layers including layers not usually being a part of the electromagnetic transducer structure and providing additional features, e.g. for improving heat radiation, reduction of power dissipation, adaptations for measurement or indication of gap depth or other properties of the structure
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/40—Protective measures on heads, e.g. against excessive temperature
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B19/00—Driving, starting, stopping record carriers not specifically of filamentary or web form, or of supports therefor; Control thereof; Control of operating function ; Driving both disc and head
- G11B19/02—Control of operating function, e.g. switching from recording to reproducing
- G11B19/04—Arrangements for preventing, inhibiting, or warning against double recording on the same blank or against other recording or reproducing malfunctions
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/313—Disposition of layers
- G11B5/3143—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49043—Depositing magnetic layer or coating
- Y10T29/49044—Plural magnetic deposition layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49043—Depositing magnetic layer or coating
- Y10T29/49046—Depositing magnetic layer or coating with etching or machining of magnetic material
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/4906—Providing winding
- Y10T29/49064—Providing winding by coating
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/918,725 US5326429A (en) | 1992-07-21 | 1992-07-21 | Process for making studless thin film magnetic head |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69329445D1 DE69329445D1 (de) | 2000-10-26 |
DE69329445T2 true DE69329445T2 (de) | 2001-01-18 |
Family
ID=25440846
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69329445T Expired - Fee Related DE69329445T2 (de) | 1992-07-21 | 1993-07-16 | Dünnschicht-Magnetkopf ohne Kontaktbrücke und Herstellungsverfahren dafür |
Country Status (6)
Country | Link |
---|---|
US (4) | US5326429A (de) |
EP (2) | EP0938079A3 (de) |
JP (1) | JPH06207280A (de) |
DE (1) | DE69329445T2 (de) |
HK (1) | HK1013883A1 (de) |
SG (1) | SG47801A1 (de) |
Families Citing this family (70)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5820770A (en) * | 1992-07-21 | 1998-10-13 | Seagate Technology, Inc. | Thin film magnetic head including vias formed in alumina layer and process for making the same |
US5326429A (en) * | 1992-07-21 | 1994-07-05 | Seagate Technology, Inc. | Process for making studless thin film magnetic head |
US5621595A (en) * | 1992-10-20 | 1997-04-15 | Cohen; Uri | Pinched-gap magnetic recording thin film head |
US5945007A (en) | 1992-10-20 | 1999-08-31 | Cohen; Uri | Method for etching gap-vias in a magnetic thin film head and product |
US5350629A (en) * | 1993-03-01 | 1994-09-27 | Storage Technology Corporation | Magnetoresistive device and barrier formation process |
BE1008051A3 (nl) * | 1994-01-27 | 1996-01-03 | Koninkl Philips Electronics Nv | Werkwijze voor het vervaardigen van een magneetkopeenheid, werkwijze voor het vervaardigen van een magneetkop, magneetkopeenheid en magneetkop ten gebruike in de magneetkopeenheid. |
US5751512A (en) * | 1994-01-28 | 1998-05-12 | Seagate Technology, Inc. | Data storage format for data storage devices having a radial offset between read and write elements |
JP2931523B2 (ja) * | 1994-06-24 | 1999-08-09 | ティーディーケイ株式会社 | 薄膜磁気ヘッドの製造方法 |
US6195232B1 (en) | 1995-08-24 | 2001-02-27 | Torohead, Inc. | Low-noise toroidal thin film head with solenoidal coil |
US5703740A (en) * | 1995-08-24 | 1997-12-30 | Velocidata, Inc. | Toroidal thin film head |
JPH09128717A (ja) * | 1995-10-30 | 1997-05-16 | Fujitsu Ltd | 薄膜磁気ヘッドとその製造方法及び磁気記録装置 |
US6861290B1 (en) * | 1995-12-19 | 2005-03-01 | Micron Technology, Inc. | Flip-chip adaptor package for bare die |
US5872684A (en) * | 1997-05-15 | 1999-02-16 | International Business Machines Corporation | Air bearing slider having a relieved trailing edge |
US5996212A (en) * | 1997-05-23 | 1999-12-07 | U.S. Philips Corporation | Method of manufacturing a body having a structure of layers |
JP3052898B2 (ja) * | 1997-06-18 | 2000-06-19 | ヤマハ株式会社 | 磁気ヘッドスライダのレール面の加工方法 |
US5966800A (en) * | 1997-07-28 | 1999-10-19 | Read-Rite Corporation | Method of making a magnetic head with aligned pole tips and pole layers formed of high magnetic moment material |
US6137660A (en) * | 1997-12-29 | 2000-10-24 | Matsushita-Kotobuki Electronics | Method for reducing ESD and imaging damage during focused ion beam definition of magnetoresistive head write track width |
US6099699A (en) * | 1998-04-22 | 2000-08-08 | Matsushita-Kotobuki Electronics Industries, Ltd. | Thin encapsulation process for making thin film read/write heads |
JP2000011323A (ja) * | 1998-06-16 | 2000-01-14 | Hitachi Metals Ltd | 薄膜磁気ヘッド |
US6198609B1 (en) | 1998-11-09 | 2001-03-06 | Read-Rite Corporation | CPP Magnetoresistive device with reduced edge effect and method for making same |
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JP3532439B2 (ja) | 1999-03-02 | 2004-05-31 | アルプス電気株式会社 | 磁気ヘッド |
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JP4130868B2 (ja) * | 2001-03-19 | 2008-08-06 | 株式会社日立グローバルストレージテクノロジーズ | 垂直記録用磁気ヘッド及びそれを搭載した磁気ディスク装置 |
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US7248434B2 (en) * | 2004-03-10 | 2007-07-24 | Hitachi Global Storage Technologies Netherlands B.V. | Planarized perpendicular pole tip system and method for manufacturing the same |
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US7523550B2 (en) * | 2006-04-25 | 2009-04-28 | Hitachi Global Storage Technologies Netherlands B.V. | Process to open connection vias on a planarized surface |
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US8163655B2 (en) * | 2008-09-15 | 2012-04-24 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method for forming a sacrificial sandwich structure |
US9224416B2 (en) | 2012-04-24 | 2015-12-29 | Seagate Technology Llc | Near field transducers including nitride materials |
US9251837B2 (en) | 2012-04-25 | 2016-02-02 | Seagate Technology Llc | HAMR NFT materials with improved thermal stability |
US8427925B2 (en) | 2010-02-23 | 2013-04-23 | Seagate Technology Llc | HAMR NFT materials with improved thermal stability |
US9202754B2 (en) | 2012-04-23 | 2015-12-01 | Seagate Technology Llc | Laser submounts formed using etching process |
CN104769672B (zh) * | 2012-04-25 | 2019-05-14 | 希捷科技有限公司 | 包括近场换能器和粘合层的器件 |
US8945731B2 (en) | 2012-06-29 | 2015-02-03 | Seagate Technology Llc | Interlayer for device including NFT and cladding layers |
US9245573B2 (en) | 2013-06-24 | 2016-01-26 | Seagate Technology Llc | Methods of forming materials for at least a portion of a NFT and NFTs formed using the same |
US9058824B2 (en) | 2013-06-24 | 2015-06-16 | Seagate Technology Llc | Devices including a gas barrier layer |
JP6038843B2 (ja) | 2013-06-24 | 2016-12-07 | シーゲイト テクノロジー エルエルシーSeagate Technology LLC | 少なくとも1つの相互混合層を含む装置 |
US9502070B2 (en) | 2013-06-24 | 2016-11-22 | Seagate Technology Llc | Materials for near field transducers, near field tranducers containing same, and methods of forming |
KR101741617B1 (ko) | 2013-06-24 | 2017-05-30 | 시게이트 테크놀로지 엘엘씨 | 적어도 하나의 접착층을 포함하는 디바이스들 및 접착층들을 형성하는 방법 |
US9691423B2 (en) | 2013-11-08 | 2017-06-27 | Seagate Technology Llc | Devices including at least one adhesion layer and methods of forming adhesion layers |
US9263074B2 (en) | 2013-11-08 | 2016-02-16 | Seagate Technology Llc | Devices including at least one adhesion layer |
US9570098B2 (en) | 2013-12-06 | 2017-02-14 | Seagate Technology Llc | Methods of forming near field transducers and near field transducers formed thereby |
US9697856B2 (en) | 2013-12-06 | 2017-07-04 | Seagate Techology LLC | Methods of forming near field transducers and near field transducers formed thereby |
US9666220B2 (en) | 2014-05-25 | 2017-05-30 | Seagate Technology Llc | Devices including a near field transducer and at least one associated adhesion layer |
US9822444B2 (en) | 2014-11-11 | 2017-11-21 | Seagate Technology Llc | Near-field transducer having secondary atom higher concentration at bottom of the peg |
US9620150B2 (en) | 2014-11-11 | 2017-04-11 | Seagate Technology Llc | Devices including an amorphous gas barrier layer |
US9552833B2 (en) | 2014-11-11 | 2017-01-24 | Seagate Technology Llc | Devices including a multilayer gas barrier layer |
US10510364B2 (en) | 2014-11-12 | 2019-12-17 | Seagate Technology Llc | Devices including a near field transducer (NFT) with nanoparticles |
US10102872B2 (en) | 2015-03-24 | 2018-10-16 | Seagate Technology Llc | Devices including at least one multilayer adhesion layer |
US9928859B2 (en) | 2015-05-28 | 2018-03-27 | Seagate Technology Llc | Near field transducers (NFTS) and methods of making |
US9620152B2 (en) | 2015-05-28 | 2017-04-11 | Seagate Technology Llc | Near field transducers (NFTS) and methods of making |
WO2016191668A1 (en) | 2015-05-28 | 2016-12-01 | Seagate Technology Llc | Near field transducer (nft) including peg and disc of different materials |
US9269380B1 (en) | 2015-07-10 | 2016-02-23 | Seagate Technology Llc | Devices including a near field transducer (NFT), at least one cladding layer and interlayer there between |
US9852748B1 (en) | 2015-12-08 | 2017-12-26 | Seagate Technology Llc | Devices including a NFT having at least one amorphous alloy layer |
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-
1992
- 1992-07-21 US US07/918,725 patent/US5326429A/en not_active Expired - Fee Related
-
1993
- 1993-07-16 EP EP99201525A patent/EP0938079A3/de not_active Withdrawn
- 1993-07-16 SG SG1996004435A patent/SG47801A1/en unknown
- 1993-07-16 DE DE69329445T patent/DE69329445T2/de not_active Expired - Fee Related
- 1993-07-16 EP EP93305598A patent/EP0580368B1/de not_active Expired - Lifetime
- 1993-07-20 JP JP5179063A patent/JPH06207280A/ja active Pending
-
1995
- 1995-06-05 US US08/466,323 patent/US5835315A/en not_active Expired - Fee Related
- 1995-06-05 US US08/466,514 patent/US5657192A/en not_active Expired - Fee Related
- 1995-07-31 US US08/510,049 patent/US5659451A/en not_active Expired - Fee Related
-
1998
- 1998-12-23 HK HK98115092A patent/HK1013883A1/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP0938079A3 (de) | 1999-09-15 |
HK1013883A1 (en) | 1999-09-10 |
EP0580368A2 (de) | 1994-01-26 |
US5659451A (en) | 1997-08-19 |
US5326429A (en) | 1994-07-05 |
US5657192A (en) | 1997-08-12 |
EP0580368B1 (de) | 2000-09-20 |
US5835315A (en) | 1998-11-10 |
DE69329445D1 (de) | 2000-10-26 |
JPH06207280A (ja) | 1994-07-26 |
EP0938079A2 (de) | 1999-08-25 |
SG47801A1 (en) | 1998-04-17 |
EP0580368A3 (en) | 1996-03-20 |
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8327 | Change in the person/name/address of the patent owner |
Owner name: SEAGATE TECHNOLOGY LLC, SCOTTS VALLEY, CALIF., US |
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8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |