DE69331876D1 - Ausrichtung von integriert-optischen komponenten - Google Patents

Ausrichtung von integriert-optischen komponenten

Info

Publication number
DE69331876D1
DE69331876D1 DE69331876T DE69331876T DE69331876D1 DE 69331876 D1 DE69331876 D1 DE 69331876D1 DE 69331876 T DE69331876 T DE 69331876T DE 69331876 T DE69331876 T DE 69331876T DE 69331876 D1 DE69331876 D1 DE 69331876D1
Authority
DE
Germany
Prior art keywords
alignment
integrated
optical components
optical
components
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69331876T
Other languages
English (en)
Other versions
DE69331876T2 (de
Inventor
Anthony David Welbourn
Kenneth Cooper
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IPG Photonics Corp
Original Assignee
British Telecommunications PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by British Telecommunications PLC filed Critical British Telecommunications PLC
Publication of DE69331876D1 publication Critical patent/DE69331876D1/de
Application granted granted Critical
Publication of DE69331876T2 publication Critical patent/DE69331876T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
    • G02B6/4232—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using the surface tension of fluid solder to align the elements, e.g. solder bump techniques
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
    • G02B6/423—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • H01L2224/8112—Aligning
    • H01L2224/81143—Passive alignment, i.e. self alignment, e.g. using surface energy, chemical reactions, thermal equilibrium
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/975—Substrate or mask aligning feature
DE69331876T 1992-01-28 1993-01-20 Ausrichtung von integrierten optischen Komponenten Expired - Lifetime DE69331876T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP92300714 1992-01-28
PCT/GB1993/000121 WO1993015424A1 (en) 1992-01-28 1993-01-20 Alignment of integrated optical components

Publications (2)

Publication Number Publication Date
DE69331876D1 true DE69331876D1 (de) 2002-06-06
DE69331876T2 DE69331876T2 (de) 2002-11-28

Family

ID=8211251

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69331876T Expired - Lifetime DE69331876T2 (de) 1992-01-28 1993-01-20 Ausrichtung von integrierten optischen Komponenten

Country Status (8)

Country Link
US (1) US5656507A (de)
EP (1) EP0624257B1 (de)
JP (1) JPH07503328A (de)
KR (1) KR950700554A (de)
AU (1) AU670922B2 (de)
CA (1) CA2128534C (de)
DE (1) DE69331876T2 (de)
WO (1) WO1993015424A1 (de)

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EP0647091A1 (de) * 1993-10-05 1995-04-05 AT&T Corp. Passive Ausrichtung von Bauteilen mit einem durch Mikro-Bearbeitung hergestellten Werkzeug
US5377900A (en) * 1993-12-29 1995-01-03 At&T Corp. Method of precisely positioning and mating two workpieces
EP0783714B1 (de) * 1994-09-26 2001-11-28 Infineon Technologies AG Koppelanordnung zum optischen aneinanderkoppeln eines oeic-bausteins und optischer fasern
JP2655112B2 (ja) * 1994-12-22 1997-09-17 日本電気株式会社 光モジュールの実装方法および構造
JP3658426B2 (ja) * 1995-01-23 2005-06-08 株式会社日立製作所 光半導体装置
SE512121C2 (sv) 1995-12-19 2000-01-31 Ericsson Telefon Ab L M Förfarande för att passivt upplinjera ett vågledardon på ett substrat
US6031856A (en) * 1997-10-30 2000-02-29 Motorola, Inc. Method, article of manufacture, and optical package for eliminating tilt angle between a header and an optical emitter mounted thereon
SE513858C2 (sv) 1998-03-06 2000-11-13 Ericsson Telefon Ab L M Flerskiktsstruktur samt förfarande för att tillverka flerskiktsmoduler
WO2001006285A2 (en) 1999-07-16 2001-01-25 Hybrid Micro Technologies Aps Hybrid integration of active and passive optical components on an si-board
EP1122567A1 (de) * 2000-02-02 2001-08-08 Corning Incorporated Passive Ausrichtung unter Verwendung von geneigter Sockelwand
JP3656543B2 (ja) * 2000-10-25 2005-06-08 松下電器産業株式会社 電子部品実装方法
US6754427B2 (en) * 2001-02-08 2004-06-22 Shipley Company, L.L.C. Method and device passively locating a fiber stub in a groove
DE10146865B4 (de) * 2001-09-22 2005-04-21 Mergeoptics Gmbh Anordnung für ein System zur Datenübertragung
US6876085B1 (en) * 2001-09-24 2005-04-05 Nortel Networks Limited Signal layer interconnect using tapered traces
US6818464B2 (en) * 2001-10-17 2004-11-16 Hymite A/S Double-sided etching technique for providing a semiconductor structure with through-holes, and a feed-through metalization process for sealing the through-holes
US7039273B2 (en) * 2003-08-12 2006-05-02 Tyler Sims Solder seals within a switching system
US7681306B2 (en) * 2004-04-28 2010-03-23 Hymite A/S Method of forming an assembly to house one or more micro components
GB0813784D0 (en) 2008-07-28 2008-09-03 Ct Integrated Photonics Ltd Optical intergration system
US9882073B2 (en) * 2013-10-09 2018-01-30 Skorpios Technologies, Inc. Structures for bonding a direct-bandgap chip to a silicon photonic device
US11181688B2 (en) 2009-10-13 2021-11-23 Skorpios Technologies, Inc. Integration of an unprocessed, direct-bandgap chip into a silicon photonic device
US10188153B1 (en) 2011-12-28 2019-01-29 Strap Appeal Garment system for interchangeable covers for garment straps
US10750807B1 (en) 2011-12-28 2020-08-25 Strap Appeal Garment system for interchangeable covers for garment straps
JP6379489B2 (ja) * 2014-01-06 2018-08-29 富士通株式会社 光コネクタハウジングの実装方法、光コネクタハウジング、及びこれを用いた光モジュール
US10852492B1 (en) * 2014-10-29 2020-12-01 Acacia Communications, Inc. Techniques to combine two integrated photonic substrates
CN111509555B (zh) 2016-02-19 2024-02-27 镁可微波技术有限公司 光子集成电路及其制造方法和基板以及半导体激光器
US10189706B2 (en) * 2016-11-08 2019-01-29 Dunan Microstaq, Inc. Method for self-aligning solder-attached MEMS die to a mounting surface
JP6977267B2 (ja) 2017-02-02 2021-12-08 富士通オプティカルコンポーネンツ株式会社 光デバイス及び光デバイスの製造方法

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE463297C (de) * 1928-07-26 Guenther Von Heyman Schaltvorrichtung fuer Zahnraederwechselgetriebe von Kraftfahrzeugen
GB1553065A (en) * 1978-01-28 1979-09-19 Int Computers Ltd Circuit structures including integrated circuits
JPS59155162A (ja) * 1983-02-23 1984-09-04 Fujitsu Ltd 半導体装置の製造方法
US4565314A (en) * 1983-09-09 1986-01-21 At&T Bell Laboratories Registration and assembly of integrated circuit packages
US4545610A (en) * 1983-11-25 1985-10-08 International Business Machines Corporation Method for forming elongated solder connections between a semiconductor device and a supporting substrate
US5009476A (en) * 1984-01-16 1991-04-23 Texas Instruments Incorporated Semiconductor layer with optical communication between chips disposed therein
GB8522429D0 (en) * 1985-09-10 1985-10-16 Plessey Co Plc Alignment for hybrid device
ATE61487T1 (de) * 1985-10-16 1991-03-15 British Telecomm Ablenkungsvorrichtung fuer strahlung.
US4878611A (en) * 1986-05-30 1989-11-07 American Telephone And Telegraph Company, At&T Bell Laboratories Process for controlling solder joint geometry when surface mounting a leadless integrated circuit package on a substrate
GB2208943B (en) * 1987-08-19 1991-07-31 Plessey Co Plc Alignment of fibre arrays
GB2215087B (en) * 1988-02-03 1992-04-01 Plessey Co Plc A method of processing substrates for mounting optical elements and components
US4904036A (en) * 1988-03-03 1990-02-27 American Telephone And Telegraph Company, At&T Bell Laboratories Subassemblies for optoelectronic hybrid integrated circuits
US4810557A (en) * 1988-03-03 1989-03-07 American Telephone And Telegraph Company, At&T Bell Laboratories Method of making an article comprising a tandem groove, and article produced by the method
US4949148A (en) * 1989-01-11 1990-08-14 Bartelink Dirk J Self-aligning integrated circuit assembly
AU637874B2 (en) * 1990-01-23 1993-06-10 Sumitomo Electric Industries, Ltd. Substrate for packaging a semiconductor device
CA2034703A1 (en) * 1990-01-23 1991-07-24 Masanori Nishiguchi Substrate for packaging a semiconductor device
US5023881A (en) * 1990-06-19 1991-06-11 At&T Bell Laboratories Photonics module and alignment method
CA2077161A1 (en) * 1991-09-13 1993-03-14 Thomas W. Fitzgerald Method of establishing soldered connections

Also Published As

Publication number Publication date
EP0624257B1 (de) 2002-05-02
CA2128534C (en) 2003-01-07
AU3360893A (en) 1993-09-01
AU670922B2 (en) 1996-08-08
DE69331876T2 (de) 2002-11-28
WO1993015424A1 (en) 1993-08-05
JPH07503328A (ja) 1995-04-06
EP0624257A1 (de) 1994-11-17
CA2128534A1 (en) 1993-08-05
KR950700554A (ko) 1995-01-16
US5656507A (en) 1997-08-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: IPG PHOTONICS CORP., OXFORD, MASS., US