DE69404354D1 - Verbesserte Elektroden-Zwischenschicht für Materialien mit hohen dielektrisches Konstante - Google Patents

Verbesserte Elektroden-Zwischenschicht für Materialien mit hohen dielektrisches Konstante

Info

Publication number
DE69404354D1
DE69404354D1 DE69404354T DE69404354T DE69404354D1 DE 69404354 D1 DE69404354 D1 DE 69404354D1 DE 69404354 T DE69404354 T DE 69404354T DE 69404354 T DE69404354 T DE 69404354T DE 69404354 D1 DE69404354 D1 DE 69404354D1
Authority
DE
Germany
Prior art keywords
materials
dielectric constant
high dielectric
improved electrode
electrode interlayer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69404354T
Other languages
English (en)
Other versions
DE69404354T2 (de
Inventor
Scott R Summerfelt
Howard R Beratan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Application granted granted Critical
Publication of DE69404354D1 publication Critical patent/DE69404354D1/de
Publication of DE69404354T2 publication Critical patent/DE69404354T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/30—Stacked capacitors
    • H01G4/306—Stacked capacitors made by thin film techniques
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G7/00—Capacitors in which the capacitance is varied by non-mechanical means; Processes of their manufacture
    • H01G7/06—Capacitors in which the capacitance is varied by non-mechanical means; Processes of their manufacture having a dielectric selected for the variation of its permittivity with applied voltage, i.e. ferroelectric capacitors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H01L28/55—Capacitors with a dielectric comprising a perovskite structure material
    • H01L28/56—Capacitors with a dielectric comprising a perovskite structure material the dielectric comprising two or more layers, e.g. comprising buffer layers, seed layers, gradient layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B53/00—Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory capacitors

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Semiconductor Memories (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
DE69404354T 1993-03-31 1994-03-28 Verbesserte Elektroden-Zwischenschicht für Materialien mit hohen dielektrisches Konstante Expired - Fee Related DE69404354T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/041,025 US5471364A (en) 1993-03-31 1993-03-31 Electrode interface for high-dielectric-constant materials

Publications (2)

Publication Number Publication Date
DE69404354D1 true DE69404354D1 (de) 1997-09-04
DE69404354T2 DE69404354T2 (de) 1998-01-22

Family

ID=21914311

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69404354T Expired - Fee Related DE69404354T2 (de) 1993-03-31 1994-03-28 Verbesserte Elektroden-Zwischenschicht für Materialien mit hohen dielektrisches Konstante

Country Status (4)

Country Link
US (3) US5471364A (de)
EP (1) EP0618598B1 (de)
JP (1) JPH06350029A (de)
DE (1) DE69404354T2 (de)

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Also Published As

Publication number Publication date
US5471364A (en) 1995-11-28
DE69404354T2 (de) 1998-01-22
EP0618598A1 (de) 1994-10-05
US6362068B1 (en) 2002-03-26
JPH06350029A (ja) 1994-12-22
EP0618598B1 (de) 1997-07-23
US5781404A (en) 1998-07-14

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