DE69407208D1 - Optisches Instrument und Verfahren zur Verschiebungsmessung einer Skala - Google Patents
Optisches Instrument und Verfahren zur Verschiebungsmessung einer SkalaInfo
- Publication number
- DE69407208D1 DE69407208D1 DE69407208T DE69407208T DE69407208D1 DE 69407208 D1 DE69407208 D1 DE 69407208D1 DE 69407208 T DE69407208 T DE 69407208T DE 69407208 T DE69407208 T DE 69407208T DE 69407208 D1 DE69407208 D1 DE 69407208D1
- Authority
- DE
- Germany
- Prior art keywords
- scale
- optical instrument
- measuring displacement
- displacement
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006073 displacement reaction Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 230000003287 optical effect Effects 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP08636293A JP3144143B2 (ja) | 1993-04-13 | 1993-04-13 | 光学式変位測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69407208D1 true DE69407208D1 (de) | 1998-01-22 |
DE69407208T2 DE69407208T2 (de) | 1998-04-02 |
Family
ID=13884780
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69407208T Expired - Lifetime DE69407208T2 (de) | 1993-04-13 | 1994-04-12 | Optisches Instrument und Verfahren zur Verschiebungsmessung einer Skala |
Country Status (4)
Country | Link |
---|---|
US (1) | US5499096A (de) |
EP (1) | EP0620418B1 (de) |
JP (1) | JP3144143B2 (de) |
DE (1) | DE69407208T2 (de) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999046602A1 (en) * | 1998-03-09 | 1999-09-16 | Gou Lite Ltd. | Optical translation measurement |
JP3325840B2 (ja) * | 1998-10-19 | 2002-09-17 | 株式会社ミツトヨ | 反射型ホログラムスケール及びこれを用いた光学式変位測定装置 |
US20030174343A1 (en) * | 2002-03-18 | 2003-09-18 | Mitutoyo Corporation | Optical displacement sensing device with reduced sensitivity to misalignment |
JP4381671B2 (ja) * | 2002-10-23 | 2009-12-09 | ソニーマニュファクチュアリングシステムズ株式会社 | 変位検出装置 |
US6970255B1 (en) * | 2003-04-23 | 2005-11-29 | Nanometrics Incorporated | Encoder measurement based on layer thickness |
JP4722474B2 (ja) | 2004-12-24 | 2011-07-13 | 株式会社ミツトヨ | 変位検出装置 |
NL1036323A1 (nl) * | 2007-12-27 | 2009-06-30 | Asml Holding Nv | Folded optical encoder and applications for same. |
US7864336B2 (en) * | 2008-04-28 | 2011-01-04 | Agilent Technologies, Inc. | Compact Littrow encoder |
JP5159663B2 (ja) * | 2009-02-13 | 2013-03-06 | キヤノン株式会社 | 原点検出装置、変位測定装置および電子機器 |
JP5326174B2 (ja) * | 2010-08-26 | 2013-10-30 | 独立行政法人日本原子力研究開発機構 | 亀裂開口幅と亀裂形状の同時測定方法及び装置 |
DE102010063253A1 (de) * | 2010-12-16 | 2012-06-21 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
WO2013070871A1 (en) * | 2011-11-09 | 2013-05-16 | Zygo Corporation | Double pass interferometric encoder system |
JP5984554B2 (ja) * | 2012-07-25 | 2016-09-06 | Dmg森精機株式会社 | 変位検出装置 |
JP5984555B2 (ja) * | 2012-07-25 | 2016-09-06 | Dmg森精機株式会社 | 変位検出装置 |
NO20130884A1 (no) * | 2013-06-21 | 2014-12-22 | Sinvent As | Sensorelement med optisk forskyvning |
JP6322069B2 (ja) * | 2014-07-02 | 2018-05-09 | Dmg森精機株式会社 | 変位検出装置 |
JP2016223999A (ja) * | 2015-06-03 | 2016-12-28 | 並木精密宝石株式会社 | 反射型エンコーダ |
TWI509215B (zh) * | 2015-07-02 | 2015-11-21 | Ta Jen Kuo | 高準確度即時鑑別光電玻璃基板的裝置及其方法 |
JP2018040620A (ja) | 2016-09-06 | 2018-03-15 | 太陽誘電株式会社 | 変位計測装置及び変位計測方法 |
DE102020118659A1 (de) * | 2019-07-17 | 2021-01-21 | Dmg Mori Co., Ltd. | Detektionsvorrichtung |
CN112577431B (zh) * | 2019-09-29 | 2022-02-08 | 上海微电子装备(集团)股份有限公司 | 光栅尺测量装置及测量方法 |
CN111207673A (zh) * | 2020-01-17 | 2020-05-29 | 中北大学 | 一种基于等腰三角闪耀光栅结构的位移传感器 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6375518A (ja) * | 1986-09-18 | 1988-04-05 | Tokyo Seimitsu Co Ltd | 移動量検出装置 |
JP2603305B2 (ja) * | 1988-07-19 | 1997-04-23 | キヤノン株式会社 | 変位測定装置 |
JP2586120B2 (ja) * | 1988-09-22 | 1997-02-26 | キヤノン株式会社 | エンコーダー |
US5035507A (en) * | 1988-12-21 | 1991-07-30 | Mitutoyo Corporation | Grating-interference type displacement meter apparatus |
EP0425726B1 (de) * | 1989-11-02 | 1993-05-12 | Dr. Johannes Heidenhain GmbH | Positionsmesseinrichtung |
JPH0430220A (ja) * | 1990-05-28 | 1992-02-03 | Hitachi Ltd | ソフトウエアメンテナンス方式 |
JP3038860B2 (ja) * | 1990-09-21 | 2000-05-08 | キヤノン株式会社 | エンコーダ |
JPH05232318A (ja) * | 1991-02-19 | 1993-09-10 | Sony Magnescale Inc | 反射形ホログラムスケール |
-
1993
- 1993-04-13 JP JP08636293A patent/JP3144143B2/ja not_active Expired - Fee Related
-
1994
- 1994-04-12 EP EP94105618A patent/EP0620418B1/de not_active Expired - Lifetime
- 1994-04-12 DE DE69407208T patent/DE69407208T2/de not_active Expired - Lifetime
- 1994-04-13 US US08/227,128 patent/US5499096A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0620418B1 (de) | 1997-12-10 |
EP0620418A1 (de) | 1994-10-19 |
US5499096A (en) | 1996-03-12 |
JPH06300520A (ja) | 1994-10-28 |
JP3144143B2 (ja) | 2001-03-12 |
DE69407208T2 (de) | 1998-04-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69407208T2 (de) | Optisches Instrument und Verfahren zur Verschiebungsmessung einer Skala | |
DE69620371T2 (de) | Verfahren zur Messung von Dimensionen von Mustern auf einer Probe | |
DE69409513T2 (de) | Verfahren zur geometrischen messung | |
DE69128357D1 (de) | Verfahren um eigenschaften und/oder zusammensetzungsdaten einer probe zu bestimmen | |
DE59610818D1 (de) | Verfahren und vorrichtung zur messung von lichtbündeln | |
DE69118295T2 (de) | Vorrichtung und Verfahren zur Messung einer Probe | |
DE69428612T2 (de) | Verfahren und Vorrichtung zur Durchführung einer Zeitskalenmodifikation von Sprachsignalen | |
DE59810995D1 (de) | MR-Anordnung mit einem medizinischen Instrument und Verfahren zur Positionsbestimmung des medizinischen Instruments | |
DE69413331T2 (de) | Verbessertes gerät und verfahren zur optischen messung der eigenschaften einer substanz | |
DE69837517D1 (de) | Verfahren und kompaktes System zur hochgenauen Inspektion einer Photomaske | |
DE69223207T2 (de) | Verfahren und Vorrichtung zur Messung einer Verlagerung | |
DE69428086T2 (de) | Verfahren zur Fernmessung von Prozessmesswerten | |
DE69411778T2 (de) | Verfahren und Vorrichtung zur Messung einer Temperaturverteilung | |
DE69616720D1 (de) | Verfahren und Gerät zur Lagemessung eines Satelliten | |
DE69412944D1 (de) | Trägheitsmesseinheit und Verfahren zur Erhöhung ihrer Messgenauigkeit | |
DE69427316T2 (de) | Verfahren zur Positionierung einer elektronischen Sonde einer Spannungsmesseinrichtung | |
DE69632437D1 (de) | Verfahren und Vorrichtung zur Messung optischer Werte | |
DE69312193T2 (de) | Verfahren und Vorrichtung zur Steuerung eines Messinstrumentes | |
DE69629248D1 (de) | Verfahren und Vorrichtung zur Messung des nichtlinearen Brechungsindexkoeffizienten eines einwelligen lichtwellenleiters | |
DE69321816D1 (de) | Methode und Instrument zur Messung eines Zellenabstandes eines doppelbrechenden Teiles | |
DE69613269T2 (de) | Verfahren und Vorrichtung zur Messung des Kerr-Nichtlinearitätskoeffizienten in einer optischen Einmodenfaser | |
DE59209430D1 (de) | Verfahren und Vorrichtung zur optischen Messung von Distanzen | |
DE69426468D1 (de) | Verfahren und Gerät zur Abstandsmessung | |
DE59501466D1 (de) | Verfahren zur Kalibrierung eines pH-Messelementes | |
DE4498896T1 (de) | Verfahren und Vorrichtung zur optischen Formmessung langgestreckter Objekte |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: MAGNESCALE CO., LTD., TOKYO, JP |