DE69407208T2 - Optisches Instrument und Verfahren zur Verschiebungsmessung einer Skala - Google Patents

Optisches Instrument und Verfahren zur Verschiebungsmessung einer Skala

Info

Publication number
DE69407208T2
DE69407208T2 DE69407208T DE69407208T DE69407208T2 DE 69407208 T2 DE69407208 T2 DE 69407208T2 DE 69407208 T DE69407208 T DE 69407208T DE 69407208 T DE69407208 T DE 69407208T DE 69407208 T2 DE69407208 T2 DE 69407208T2
Authority
DE
Germany
Prior art keywords
scale
optical instrument
measuring displacement
displacement
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69407208T
Other languages
English (en)
Other versions
DE69407208D1 (de
Inventor
Hideaki Tamiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Magnescale Co Ltd
Original Assignee
Sony Precision Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Precision Technology Inc filed Critical Sony Precision Technology Inc
Application granted granted Critical
Publication of DE69407208D1 publication Critical patent/DE69407208D1/de
Publication of DE69407208T2 publication Critical patent/DE69407208T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
DE69407208T 1993-04-13 1994-04-12 Optisches Instrument und Verfahren zur Verschiebungsmessung einer Skala Expired - Lifetime DE69407208T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP08636293A JP3144143B2 (ja) 1993-04-13 1993-04-13 光学式変位測定装置

Publications (2)

Publication Number Publication Date
DE69407208D1 DE69407208D1 (de) 1998-01-22
DE69407208T2 true DE69407208T2 (de) 1998-04-02

Family

ID=13884780

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69407208T Expired - Lifetime DE69407208T2 (de) 1993-04-13 1994-04-12 Optisches Instrument und Verfahren zur Verschiebungsmessung einer Skala

Country Status (4)

Country Link
US (1) US5499096A (de)
EP (1) EP0620418B1 (de)
JP (1) JP3144143B2 (de)
DE (1) DE69407208T2 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU6633798A (en) * 1998-03-09 1999-09-27 Gou Lite Ltd. Optical translation measurement
JP3325840B2 (ja) * 1998-10-19 2002-09-17 株式会社ミツトヨ 反射型ホログラムスケール及びこれを用いた光学式変位測定装置
US20030174343A1 (en) * 2002-03-18 2003-09-18 Mitutoyo Corporation Optical displacement sensing device with reduced sensitivity to misalignment
JP4381671B2 (ja) * 2002-10-23 2009-12-09 ソニーマニュファクチュアリングシステムズ株式会社 変位検出装置
US6970255B1 (en) * 2003-04-23 2005-11-29 Nanometrics Incorporated Encoder measurement based on layer thickness
JP4722474B2 (ja) 2004-12-24 2011-07-13 株式会社ミツトヨ 変位検出装置
NL1036323A1 (nl) * 2007-12-27 2009-06-30 Asml Holding Nv Folded optical encoder and applications for same.
US7864336B2 (en) * 2008-04-28 2011-01-04 Agilent Technologies, Inc. Compact Littrow encoder
JP5159663B2 (ja) * 2009-02-13 2013-03-06 キヤノン株式会社 原点検出装置、変位測定装置および電子機器
JP5326174B2 (ja) * 2010-08-26 2013-10-30 独立行政法人日本原子力研究開発機構 亀裂開口幅と亀裂形状の同時測定方法及び装置
DE102010063253A1 (de) * 2010-12-16 2012-06-21 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
JP5714780B2 (ja) * 2011-11-09 2015-05-07 ザイゴ コーポレーションＺｙｇｏ Ｃｏｒｐｏｒａｔｉｏｎ ダブルパス干渉方式エンコーダシステム
JP5984554B2 (ja) * 2012-07-25 2016-09-06 Dmg森精機株式会社 変位検出装置
JP5984555B2 (ja) * 2012-07-25 2016-09-06 Dmg森精機株式会社 変位検出装置
NO20130884A1 (no) * 2013-06-21 2014-12-22 Sinvent As Sensorelement med optisk forskyvning
JP6322069B2 (ja) * 2014-07-02 2018-05-09 Dmg森精機株式会社 変位検出装置
JP2016223999A (ja) * 2015-06-03 2016-12-28 並木精密宝石株式会社 反射型エンコーダ
TWI509215B (zh) * 2015-07-02 2015-11-21 Ta Jen Kuo 高準確度即時鑑別光電玻璃基板的裝置及其方法
JP2018040620A (ja) 2016-09-06 2018-03-15 太陽誘電株式会社 変位計測装置及び変位計測方法
DE102020118659A1 (de) * 2019-07-17 2021-01-21 Dmg Mori Co., Ltd. Detektionsvorrichtung
CN112577431B (zh) * 2019-09-29 2022-02-08 上海微电子装备（集团）股份有限公司 光栅尺测量装置及测量方法
CN111207673A (zh) * 2020-01-17 2020-05-29 中北大学 一种基于等腰三角闪耀光栅结构的位移传感器

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6375518A (ja) * 1986-09-18 1988-04-05 Tokyo Seimitsu Co Ltd 移動量検出装置
JP2603305B2 (ja) * 1988-07-19 1997-04-23 キヤノン株式会社 変位測定装置
JP2586120B2 (ja) * 1988-09-22 1997-02-26 キヤノン株式会社 エンコーダー
US5035507A (en) * 1988-12-21 1991-07-30 Mitutoyo Corporation Grating-interference type displacement meter apparatus
DE58904369D1 (de) * 1989-11-02 1993-06-17 Heidenhain Gmbh Dr Johannes Positionsmesseinrichtung.
JPH0430220A (ja) * 1990-05-28 1992-02-03 Hitachi Ltd ソフトウエアメンテナンス方式
JP3038860B2 (ja) * 1990-09-21 2000-05-08 キヤノン株式会社 エンコーダ
JPH05232318A (ja) * 1991-02-19 1993-09-10 Sony Magnescale Inc 反射形ホログラムスケール

Also Published As

Publication number Publication date
EP0620418A1 (de) 1994-10-19
JP3144143B2 (ja) 2001-03-12
DE69407208D1 (de) 1998-01-22
JPH06300520A (ja) 1994-10-28
EP0620418B1 (de) 1997-12-10
US5499096A (en) 1996-03-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: MAGNESCALE CO., LTD., TOKYO, JP