DE69409834T2 - Integrierter laserleistungsdetektor - Google Patents

Integrierter laserleistungsdetektor

Info

Publication number
DE69409834T2
DE69409834T2 DE69409834T DE69409834T DE69409834T2 DE 69409834 T2 DE69409834 T2 DE 69409834T2 DE 69409834 T DE69409834 T DE 69409834T DE 69409834 T DE69409834 T DE 69409834T DE 69409834 T2 DE69409834 T2 DE 69409834T2
Authority
DE
Germany
Prior art keywords
laser power
power detector
integrated laser
integrated
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69409834T
Other languages
English (en)
Other versions
DE69409834D1 (de
Inventor
Mary Hibbs-Brenner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Finisar Corp
Original Assignee
Honeywell Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Inc filed Critical Honeywell Inc
Publication of DE69409834D1 publication Critical patent/DE69409834D1/de
Application granted granted Critical
Publication of DE69409834T2 publication Critical patent/DE69409834T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
    • H01S5/18341—Intra-cavity contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
    • H01S5/0262—Photo-diodes, e.g. transceiver devices, bidirectional devices
    • H01S5/0264—Photo-diodes, e.g. transceiver devices, bidirectional devices for monitoring the laser-output
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
    • H01S5/18358—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] containing spacer layers to adjust the phase of the light wave in the cavity
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/305—Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure
    • H01S5/3054—Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure p-doping
DE69409834T 1993-12-29 1994-12-16 Integrierter laserleistungsdetektor Expired - Lifetime DE69409834T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/175,016 US5475701A (en) 1993-12-29 1993-12-29 Integrated laser power monitor
PCT/US1994/014472 WO1995018479A1 (en) 1993-12-29 1994-12-16 Integrated laser power monitor

Publications (2)

Publication Number Publication Date
DE69409834D1 DE69409834D1 (de) 1998-05-28
DE69409834T2 true DE69409834T2 (de) 1998-09-17

Family

ID=22638487

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69409834T Expired - Lifetime DE69409834T2 (de) 1993-12-29 1994-12-16 Integrierter laserleistungsdetektor

Country Status (6)

Country Link
US (1) US5475701A (de)
EP (1) EP0737376B1 (de)
JP (1) JPH09507339A (de)
CA (1) CA2179519A1 (de)
DE (1) DE69409834T2 (de)
WO (1) WO1995018479A1 (de)

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US5812582A (en) * 1995-10-03 1998-09-22 Methode Electronics, Inc. Vertical cavity surface emitting laser feedback system and method
US5663944A (en) * 1995-12-29 1997-09-02 Samsung Electronics Co., Ltd. Vertical cavity laser light beam monitored by reflection of a half mirror, with application in optical pick-up
US5648979A (en) * 1995-12-29 1997-07-15 Samsung Electronics Co. Ltd. Assembly of VCSEL light source and VCSEL optical detector
KR0185950B1 (ko) * 1996-04-25 1999-04-15 김광호 레이저다이오드의 광출력모니터링패케지
US5774486A (en) * 1996-04-30 1998-06-30 Motorola, Inc. Waveguide power monitoring system for vertical cavity surface emitting lasers
US5764674A (en) * 1996-06-28 1998-06-09 Honeywell Inc. Current confinement for a vertical cavity surface emitting laser
US5757837A (en) * 1996-10-16 1998-05-26 The Regents Of The University Of California Intracavity quantum well photodetector integrated within a vertical-cavity surface-emitting laser and method of operating same
US5892786A (en) * 1997-03-26 1999-04-06 The United States Of America As Represented By The Secretary Of The Air Force Output control of vertical microcavity light emitting device
US6055262A (en) * 1997-06-11 2000-04-25 Honeywell Inc. Resonant reflector for improved optoelectronic device performance and enhanced applicability
DE19735925A1 (de) * 1997-08-08 1999-02-25 Siemens Ag Optische Sendeeinrichtung
US6037644A (en) * 1997-09-12 2000-03-14 The Whitaker Corporation Semi-transparent monitor detector for surface emitting light emitting devices
US6064683A (en) * 1997-12-12 2000-05-16 Honeywell Inc. Bandgap isolated light emitter
US6069908A (en) * 1998-02-09 2000-05-30 Hewlwtt-Packard Company N-drive or P-drive VCSEL array
DE19807783A1 (de) * 1998-02-18 1999-09-02 Siemens Ag Bauelement mit einem Lichtsender und einem Lichtempfänger
DE19807782A1 (de) * 1998-02-18 1999-09-02 Siemens Ag Bauelement mit einem Lichtsender und einem Lichtempfänger
KR100618969B1 (ko) 1999-07-12 2006-08-31 삼성전자주식회사 광송수신 모듈
US6577658B1 (en) 1999-09-20 2003-06-10 E20 Corporation, Inc. Method and apparatus for planar index guided vertical cavity surface emitting lasers
US6905900B1 (en) 2000-11-28 2005-06-14 Finisar Corporation Versatile method and system for single mode VCSELs
US6990135B2 (en) 2002-10-28 2006-01-24 Finisar Corporation Distributed bragg reflector for optoelectronic device
US7065124B2 (en) 2000-11-28 2006-06-20 Finlsar Corporation Electron affinity engineered VCSELs
US6836501B2 (en) * 2000-12-29 2004-12-28 Finisar Corporation Resonant reflector for increased wavelength and polarization control
TWI227799B (en) * 2000-12-29 2005-02-11 Honeywell Int Inc Resonant reflector for increased wavelength and polarization control
US6727520B2 (en) 2000-12-29 2004-04-27 Honeywell International Inc. Spatially modulated reflector for an optoelectronic device
US6782027B2 (en) 2000-12-29 2004-08-24 Finisar Corporation Resonant reflector for use with optoelectronic devices
US6693933B2 (en) 2001-03-15 2004-02-17 Honeywell International Inc. Vertical cavity master oscillator power amplifier
US7831151B2 (en) 2001-06-29 2010-11-09 John Trezza Redundant optical device array
US6569593B2 (en) * 2001-08-16 2003-05-27 Eastman Kodak Company Oriented polyester imaging element with nacreous pigment
US6782019B2 (en) * 2001-08-16 2004-08-24 Applied Optoelectronics, Inc. VCSEL with heat-spreading layer
US6606199B2 (en) 2001-10-10 2003-08-12 Honeywell International Inc. Graded thickness optical element and method of manufacture therefor
US7085300B2 (en) * 2001-12-28 2006-08-01 Finisar Corporation Integral vertical cavity surface emitting laser and power monitor
US6844537B2 (en) 2001-12-31 2005-01-18 Honeywell International Inc. Method and device for measuring the velocity of a moving surface
US7831152B2 (en) * 2002-06-04 2010-11-09 Finisar Corporation Optical transceiver
US6965626B2 (en) 2002-09-03 2005-11-15 Finisar Corporation Single mode VCSEL
US7274882B2 (en) * 2002-10-30 2007-09-25 Finisar Corporation Method and apparatus for monitoring the power level of two or more optical transmitters
US6813293B2 (en) 2002-11-21 2004-11-02 Finisar Corporation Long wavelength VCSEL with tunnel junction, and implant
US20040179566A1 (en) * 2003-03-11 2004-09-16 Aharon El-Bahar Multi-color stacked semiconductor lasers
US7298942B2 (en) 2003-06-06 2007-11-20 Finisar Corporation Pluggable optical optic system having a lens fiber stop
US7433381B2 (en) 2003-06-25 2008-10-07 Finisar Corporation InP based long wavelength VCSEL
US7075962B2 (en) 2003-06-27 2006-07-11 Finisar Corporation VCSEL having thermal management
US7054345B2 (en) 2003-06-27 2006-05-30 Finisar Corporation Enhanced lateral oxidation
US7277461B2 (en) * 2003-06-27 2007-10-02 Finisar Corporation Dielectric VCSEL gain guide
US6961489B2 (en) 2003-06-30 2005-11-01 Finisar Corporation High speed optical system
US7149383B2 (en) 2003-06-30 2006-12-12 Finisar Corporation Optical system with reduced back reflection
US7210857B2 (en) 2003-07-16 2007-05-01 Finisar Corporation Optical coupling system
US6887801B2 (en) 2003-07-18 2005-05-03 Finisar Corporation Edge bead control method and apparatus
JP3738849B2 (ja) * 2003-08-07 2006-01-25 セイコーエプソン株式会社 面発光型半導体レーザ、光モジュール、ならびに光伝達装置
KR20050019484A (ko) * 2003-08-19 2005-03-03 삼성전자주식회사 광검출소자가 일체적으로 성장된 장파장 수직 면발광 레이저
US7031363B2 (en) 2003-10-29 2006-04-18 Finisar Corporation Long wavelength VCSEL device processing
US7289547B2 (en) * 2003-10-29 2007-10-30 Cubic Wafer, Inc. Laser and detector device
US7184455B2 (en) * 2004-06-25 2007-02-27 Finisar Corporation Mirrors for reducing the effects of spontaneous emissions in photodiodes
US7403553B2 (en) 2004-06-25 2008-07-22 Finisar Corporation Absorbing layers for reduced spontaneous emission effects in an integrated photodiode
US7801199B2 (en) * 2004-06-25 2010-09-21 Finisar Corporation Vertical cavity surface emitting laser with photodiode having reduced spontaneous emissions
US7418021B2 (en) * 2004-06-25 2008-08-26 Finisar Corporation Optical apertures for reducing spontaneous emissions in photodiodes
US7359419B2 (en) * 2004-06-25 2008-04-15 Finisar Corporation Vertical cavity surface emitting laser optimized for thermal sensitivity
US7366217B2 (en) 2004-06-25 2008-04-29 Finisar Corporation Optimizing mirror reflectivity for reducing spontaneous emissions in photodiodes
US7746911B2 (en) * 2004-06-25 2010-06-29 Finisar Corporation Geometric optimizations for reducing spontaneous emissions in photodiodes
US7184454B2 (en) * 2004-06-25 2007-02-27 Finisar Corporation Light emitting device with an integrated monitor photodiode
US7920612B2 (en) 2004-08-31 2011-04-05 Finisar Corporation Light emitting semiconductor device having an electrical confinement barrier near the active region
US7829912B2 (en) 2006-07-31 2010-11-09 Finisar Corporation Efficient carrier injection in a semiconductor device
US7596165B2 (en) 2004-08-31 2009-09-29 Finisar Corporation Distributed Bragg Reflector for optoelectronic device
EP1800255A4 (de) * 2004-10-15 2012-06-06 Auto Sense Llc Objekterkennungssystem mit vcsel-diodenarray
US7277463B2 (en) * 2004-12-30 2007-10-02 Finisar Corporation Integrated light emitting device and photodiode with ohmic contact
US7253386B2 (en) * 2005-12-12 2007-08-07 Xerox Corporation Method and apparatus for monitoring and controlling laser intensity in a ROS scanning system
JP2008187108A (ja) * 2007-01-31 2008-08-14 Seiko Epson Corp 光素子およびその製造方法
US8031752B1 (en) 2007-04-16 2011-10-04 Finisar Corporation VCSEL optimized for high speed data
WO2009001283A2 (en) * 2007-06-27 2008-12-31 Koninklijke Philips Electronics N.V. Optical sensor module and its manufacture
DE102007046027A1 (de) * 2007-09-26 2009-04-02 Osram Opto Semiconductors Gmbh Optoelektronischer Halbleiterchip mit einer Mehrfachquantentopfstruktur
US9165591B2 (en) 2013-08-07 2015-10-20 Seagate Technology Llc Grating based laser and power monitor for a heat-assisted magnetic recording device
US10008826B1 (en) * 2015-05-01 2018-06-26 Sae Magnetics (H.K.) Ltd. Surface-emitting semiconductor laser
US9559493B2 (en) 2015-06-09 2017-01-31 Sae Magnetics (H.K.) Ltd. Power monitoring device and transmitter having same
US9547142B1 (en) 2015-09-16 2017-01-17 Sae Magnetics (H.K.) Ltd. Optical transmitter module
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Also Published As

Publication number Publication date
EP0737376B1 (de) 1998-04-22
US5475701A (en) 1995-12-12
EP0737376A1 (de) 1996-10-16
WO1995018479A1 (en) 1995-07-06
JPH09507339A (ja) 1997-07-22
DE69409834D1 (de) 1998-05-28
CA2179519A1 (en) 1995-07-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: FINISAR CORP.(N.D.GES.D.STAATES DELAWARE), SUNNYVA