DE69410918D1 - Zirconiummembranstruktur, Herstellungsverfahren hierfür, und Piezoelektrisch/Elektrostriktives Dünnfilmelement mit dieser Struktur - Google Patents

Zirconiummembranstruktur, Herstellungsverfahren hierfür, und Piezoelektrisch/Elektrostriktives Dünnfilmelement mit dieser Struktur

Info

Publication number
DE69410918D1
DE69410918D1 DE69410918T DE69410918T DE69410918D1 DE 69410918 D1 DE69410918 D1 DE 69410918D1 DE 69410918 T DE69410918 T DE 69410918T DE 69410918 T DE69410918 T DE 69410918T DE 69410918 D1 DE69410918 D1 DE 69410918D1
Authority
DE
Germany
Prior art keywords
piezoelectric
thin film
manufacturing process
film element
process therefor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69410918T
Other languages
English (en)
Other versions
DE69410918T2 (de
Inventor
Yukihisa Takeuchi
Tsutomu Nanataki
Hideo Masumori
Katsuyuki Takeuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Publication of DE69410918D1 publication Critical patent/DE69410918D1/de
Application granted granted Critical
Publication of DE69410918T2 publication Critical patent/DE69410918T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/008—Transmitting or indicating the displacement of flexible diaphragms using piezoelectric devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B18/00—Layered products essentially comprising ceramics, e.g. refractory products
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
    • C04B35/486—Fine ceramics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/34—Oxidic
    • C04B2237/345—Refractory metal oxides
    • C04B2237/348—Zirconia, hafnia, zirconates or hafnates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
    • C04B2237/704—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the ceramic layers or articles
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/80—Joining the largest surface of one substrate with a smaller surface of the other substrate, e.g. butt joining or forming a T-joint
DE69410918T 1993-10-14 1994-10-13 Zirconiummembranstruktur, Herstellungsverfahren hierfür, und Piezoelektrisch/Elektrostriktives Dünnfilmelement mit dieser Struktur Expired - Lifetime DE69410918T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP25729793 1993-10-14
JP14832094A JP3280799B2 (ja) 1993-10-14 1994-06-29 薄肉ジルコニアダイヤフラム構造体及びその製造法並びにそれを用いた圧電／電歪膜型素子

Publications (2)

Publication Number Publication Date
DE69410918D1 true DE69410918D1 (de) 1998-07-16
DE69410918T2 DE69410918T2 (de) 1998-12-17

Family

ID=26478558

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69410918T Expired - Lifetime DE69410918T2 (de) 1993-10-14 1994-10-13 Zirconiummembranstruktur, Herstellungsverfahren hierfür, und Piezoelektrisch/Elektrostriktives Dünnfilmelement mit dieser Struktur

Country Status (4)

Country Link
US (2) US5517076A (de)
EP (1) EP0649008B1 (de)
JP (1) JP3280799B2 (de)
DE (1) DE69410918T2 (de)

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US6004644A (en) * 1994-07-26 1999-12-21 Ngk Insulators, Ltd. Zirconia diaphragm structure and piezoelectric/electrostrictive film element having the zirconia diaphragm structure
JP3280799B2 (ja) * 1993-10-14 2002-05-13 日本碍子株式会社 薄肉ジルコニアダイヤフラム構造体及びその製造法並びにそれを用いた圧電／電歪膜型素子
US5634999A (en) * 1994-09-06 1997-06-03 Ngk Insulators, Ltd. Method of producing ceramic diaphragm structure having convex diaphragm portion
DE69518548T2 (de) * 1994-11-09 2001-04-19 Ngk Insulators Ltd Verfahren zur Herstellung eines keramischen Substrates
JP3471447B2 (ja) 1994-11-16 2003-12-02 日本碍子株式会社 セラミックダイヤフラム構造体およびその製造方法
JP3439570B2 (ja) * 1995-05-08 2003-08-25 日本碍子株式会社 ダイヤフラム構造体
US5728244A (en) * 1995-05-26 1998-03-17 Ngk Insulators, Ltd. Process for production of ceramic member having fine throughholes
JP3320947B2 (ja) * 1995-05-26 2002-09-03 日本碍子株式会社 微細貫通孔を有するセラミック部材
US5696423A (en) * 1995-06-29 1997-12-09 Motorola, Inc. Temperature compenated resonator and method
JP3320596B2 (ja) * 1995-09-27 2002-09-03 日本碍子株式会社 圧電／電歪膜型素子及びその製造方法
JP3429126B2 (ja) * 1996-01-09 2003-07-22 日本碍子株式会社 微細貫通孔を有するセラミック部材の製造方法
JP3267151B2 (ja) * 1996-04-12 2002-03-18 ミノルタ株式会社 圧電振動部材およびその製造方法
EP0813254B1 (de) * 1996-06-14 2001-10-17 Ngk Insulators, Ltd. Verfahren zur Herstellung einer keramischen Membranstruktur
US5895702A (en) * 1996-07-16 1999-04-20 Ngk Insulators, Ltd. Ceramic member
US5958165A (en) * 1996-07-19 1999-09-28 Ngk Insulators, Ltd. Method of manufacturing ceramic member
US6072269A (en) * 1996-07-23 2000-06-06 Ngk Insulators, Ltd. Ceramic member with an electrode and a plurality of tapered through holes for controlling the ejection of particles by switching the sign of a charge on the electrode
US6265811B1 (en) * 1996-11-29 2001-07-24 Ngk Insulators, Ltd. Ceramic element, method for producing ceramic element, display device, relay device and capacitor
JP3592023B2 (ja) * 1997-03-04 2004-11-24 日本碍子株式会社 機能性膜素子の製造方法
WO1998041822A1 (en) * 1997-03-20 1998-09-24 Crotzer David R Dust sensor apparatus
US6247371B1 (en) * 1997-04-04 2001-06-19 Ngk Insulators, Ltd. Three-axis sensor
KR100545928B1 (ko) * 1997-12-23 2006-01-25 어낵시스 발처스 리미티드 용량식 진공 측정 셀
JP4334139B2 (ja) 1997-12-23 2009-09-30 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング 容量式の真空測定セルのためのダイヤフラム
DE19859914A1 (de) * 1998-07-22 2000-02-03 Samsung Electro Mech Verfahren zum Herstellen eines Aktuators für einen Tintenstrahldruckkopf
US6572830B1 (en) 1998-10-09 2003-06-03 Motorola, Inc. Integrated multilayered microfludic devices and methods for making the same
US6592696B1 (en) 1998-10-09 2003-07-15 Motorola, Inc. Method for fabricating a multilayered structure and the structures formed by the method
EP1314472A1 (de) * 1998-10-09 2003-05-28 Motorola, Inc. Integrierte Vielschichtmikrofluidbauteile und Verfahren zu ihrer Herstellung
JP3965515B2 (ja) * 1999-10-01 2007-08-29 日本碍子株式会社 圧電／電歪デバイス及びその製造方法
US6249075B1 (en) 1999-11-18 2001-06-19 Lucent Technologies Inc. Surface micro-machined acoustic transducers
US6424237B1 (en) * 2000-12-21 2002-07-23 Agilent Technologies, Inc. Bulk acoustic resonator perimeter reflection system
DE10240671A1 (de) * 2002-09-04 2004-03-18 Christian Bauer Gmbh + Co Klopfsensor eines Verbrennungsmotors
JP2004301321A (ja) * 2003-03-14 2004-10-28 Ntn Corp オルタネータ用軸受およびプーリ用軸受
US7141915B2 (en) * 2003-07-22 2006-11-28 Ngk Insulators, Ltd. Actuator device
EP1648038B1 (de) * 2003-07-22 2011-02-16 NGK Insulators, Ltd. Stellgliedelement und einrichtung mit stellgliedelement
DE102004005954A1 (de) * 2004-02-02 2005-08-18 E.G.O. Elektro-Gerätebau GmbH Bedieneinrichtung für ein Elektrogerät mit einem Bedien-Feld und einem Sensorelement darunter sowie Verfahren zum Betrieb der Bedieneinrichtung
KR100747459B1 (ko) * 2005-10-21 2007-08-09 엘지전자 주식회사 모듈의 충돌 방지가 보장되는 멀티태스킹 방법 및 이동단말기
US8850893B2 (en) * 2007-12-05 2014-10-07 Valtion Teknillinen Tutkimuskeskus Device for measuring pressure, variation in acoustic pressure, a magnetic field, acceleration, vibration, or the composition of a gas
DE102008046336A1 (de) * 2008-09-09 2010-03-11 Osram Gesellschaft mit beschränkter Haftung LTCC-Schichtstapel
CN114249603A (zh) * 2021-11-10 2022-03-29 湖南大学 一种氧化铝隔膜及其制备方法和应用

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GB2161647A (en) * 1984-07-10 1986-01-15 Gen Electric Co Plc Piezoelectric devices
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JPH065217B2 (ja) * 1985-03-07 1994-01-19 日産自動車株式会社 空燃比制御装置
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US5089455A (en) * 1989-08-11 1992-02-18 Corning Incorporated Thin flexible sintered structures
US5210455A (en) * 1990-07-26 1993-05-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive actuator having ceramic substrate having recess defining thin-walled portion
DE69223096T2 (de) * 1991-07-18 1998-05-28 Ngk Insulators Ltd Piezoelektrischer/elektrostriktiver Element mit einem keramischen Substrat aus stabilisiertem Zirkoniumdioxid
JP3144949B2 (ja) * 1992-05-27 2001-03-12 日本碍子株式会社 圧電／電歪アクチュエータ
JP3106026B2 (ja) * 1993-02-23 2000-11-06 日本碍子株式会社 圧電／電歪アクチュエータ
US5526112A (en) * 1993-03-05 1996-06-11 Sahagen; Armen N. Probe for monitoring a fluid medium
DE69413619T2 (de) * 1993-07-27 1999-04-01 Ngk Insulators Ltd Membranstruktur aus Zirkoniumoxid, Verfahren zu ihrer Herstellung und eine piezoelektrische/elektrostriktive Schichtenanordnung mit der Membranstruktur aus Zirkoniumoxid
JP3280799B2 (ja) * 1993-10-14 2002-05-13 日本碍子株式会社 薄肉ジルコニアダイヤフラム構造体及びその製造法並びにそれを用いた圧電／電歪膜型素子

Also Published As

Publication number Publication date
EP0649008A2 (de) 1995-04-19
EP0649008A3 (de) 1995-10-18
JP3280799B2 (ja) 2002-05-13
US5733670A (en) 1998-03-31
DE69410918T2 (de) 1998-12-17
EP0649008B1 (de) 1998-06-10
JPH07162048A (ja) 1995-06-23
US5517076A (en) 1996-05-14

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