DE69416838T2 - Vorrichtung zur spektralanalyse unter einer mehrzahl von winkeln - Google Patents

Vorrichtung zur spektralanalyse unter einer mehrzahl von winkeln

Info

Publication number
DE69416838T2
DE69416838T2 DE69416838T DE69416838T DE69416838T2 DE 69416838 T2 DE69416838 T2 DE 69416838T2 DE 69416838 T DE69416838 T DE 69416838T DE 69416838 T DE69416838 T DE 69416838T DE 69416838 T2 DE69416838 T2 DE 69416838T2
Authority
DE
Germany
Prior art keywords
spectral analysis
analysis under
multiple angle
angle
under
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69416838T
Other languages
English (en)
Other versions
DE69416838D1 (de
Inventor
Allan Rosencwaig
David Willenborg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Therma Wave Inc
Original Assignee
Therma Wave Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Therma Wave Inc filed Critical Therma Wave Inc
Publication of DE69416838D1 publication Critical patent/DE69416838D1/de
Application granted granted Critical
Publication of DE69416838T2 publication Critical patent/DE69416838T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0641—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
DE69416838T 1993-07-16 1994-06-14 Vorrichtung zur spektralanalyse unter einer mehrzahl von winkeln Expired - Fee Related DE69416838T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/093,178 US5412473A (en) 1993-07-16 1993-07-16 Multiple angle spectroscopic analyzer utilizing interferometric and ellipsometric devices
PCT/US1994/006679 WO1995002814A1 (en) 1993-07-16 1994-06-14 Multiple angle spectroscopic analyzer

Publications (2)

Publication Number Publication Date
DE69416838D1 DE69416838D1 (de) 1999-04-08
DE69416838T2 true DE69416838T2 (de) 1999-10-07

Family

ID=22237587

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69416838T Expired - Fee Related DE69416838T2 (de) 1993-07-16 1994-06-14 Vorrichtung zur spektralanalyse unter einer mehrzahl von winkeln

Country Status (5)

Country Link
US (2) US5412473A (de)
EP (2) EP0882976A1 (de)
JP (1) JPH09504861A (de)
DE (1) DE69416838T2 (de)
WO (1) WO1995002814A1 (de)

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EP0882976A1 (de) 1998-12-09
EP0708918B1 (de) 1999-03-03
EP0708918A1 (de) 1996-05-01
US5596406A (en) 1997-01-21
DE69416838D1 (de) 1999-04-08
JPH09504861A (ja) 1997-05-13
US5412473A (en) 1995-05-02

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