DE69431488D1 - Verfahren für die schnelle Datenerfassung bei der Köhärenz-Scanning-Interferometrie - Google Patents
Verfahren für die schnelle Datenerfassung bei der Köhärenz-Scanning-InterferometrieInfo
- Publication number
- DE69431488D1 DE69431488D1 DE69431488T DE69431488T DE69431488D1 DE 69431488 D1 DE69431488 D1 DE 69431488D1 DE 69431488 T DE69431488 T DE 69431488T DE 69431488 T DE69431488 T DE 69431488T DE 69431488 D1 DE69431488 D1 DE 69431488D1
- Authority
- DE
- Germany
- Prior art keywords
- procedure
- data acquisition
- fast data
- scanning interferometry
- coherence scanning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02007—Two or more frequencies or sources used for interferometric measurement
- G01B9/02009—Two or more frequencies or sources used for interferometric measurement by using two or more low coherence lengths using different or varying spectral width
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
- G01B9/02072—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer by calibration or testing of interferometer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
- G01B9/02078—Caused by ambiguity
- G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02083—Interferometers characterised by particular signal processing and presentation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/0209—Low-coherence interferometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/04—Measuring microscopes
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/011,963 US5402234A (en) | 1992-08-31 | 1993-02-01 | Method and apparatus for the rapid acquisition of data in coherence scanning interferometry |
PCT/US1994/000659 WO1994018523A1 (en) | 1993-02-01 | 1994-01-13 | Method and apparatus for the rapid acquisition of data in coherence scanning interferometry |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69431488D1 true DE69431488D1 (de) | 2002-11-07 |
DE69431488T2 DE69431488T2 (de) | 2003-06-26 |
Family
ID=21752721
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69431488T Expired - Lifetime DE69431488T2 (de) | 1993-02-01 | 1994-01-13 | Verfahren für die schnelle Datenerfassung bei der Köhärenz-Scanning-Interferometrie |
Country Status (5)
Country | Link |
---|---|
US (1) | US5402234A (de) |
EP (1) | EP0746745B1 (de) |
JP (1) | JP2682742B2 (de) |
DE (1) | DE69431488T2 (de) |
WO (1) | WO1994018523A1 (de) |
Families Citing this family (67)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5640465A (en) * | 1992-02-14 | 1997-06-17 | Smitt; Asbjorn | Method and apparatus for on-line tiled thresholding in scanners based on prescan |
US5502578A (en) * | 1994-03-16 | 1996-03-26 | Contex A/S | Optical scanner having a variable resolution |
DE4429416A1 (de) * | 1994-08-19 | 1996-02-22 | Velzel Christiaan H F | Verfahren und Interferenzmikroskop zum Mikroskopieren eines Objektes zur Erzielung einer Auflösung jenseits der Beugungsgrenze (Superauflösung) |
US5642207A (en) * | 1994-09-16 | 1997-06-24 | Contex A/S | Color scanner with variable line resolution |
US5598265A (en) * | 1995-04-06 | 1997-01-28 | Zygo Corporation | Method for profiling an object surface using a large equivalent wavelength and system therefor |
EP0768511A1 (de) * | 1995-10-16 | 1997-04-16 | European Community | Optisches Verfahren für dreidimensionale Profilometrie basiert auf der Verarbeitung von Speckle-Bildern in Teilkohärenter Beleuchtung, und Interferometer zur Durchführung dieses Verfahrens |
DE19622429A1 (de) * | 1996-06-04 | 1997-12-11 | Wagner Int | Verfahren und Vorrichtung zum Bestimmen der Beschaffenheit einer Werkstückoberfläche |
US5739906A (en) * | 1996-06-07 | 1998-04-14 | The United States Of America As Represented By The Secretary Of Commerce | Interferometric thickness variation test method for windows and silicon wafers using a diverging wavefront |
US6104703A (en) * | 1996-12-20 | 2000-08-15 | Cornell Research Foundation, Inc. | Communication systems and methods employing receivers with estimators |
JPH10253892A (ja) * | 1997-03-11 | 1998-09-25 | Olympus Optical Co Ltd | 位相干渉顕微鏡 |
US5784164A (en) * | 1997-03-20 | 1998-07-21 | Zygo Corporation | Method and apparatus for automatically and simultaneously determining best focus and orientation of objects to be measured by broad-band interferometric means |
US5852498A (en) * | 1997-04-04 | 1998-12-22 | Kairos Scientific Inc. | Optical instrument having a variable optical filter |
US6028670A (en) * | 1998-01-19 | 2000-02-22 | Zygo Corporation | Interferometric methods and systems using low coherence illumination |
FR2783323B1 (fr) | 1998-09-10 | 2000-10-13 | Suisse Electronique Microtech | Dispositif interferometrique pour relever les caracteristiques de reflexion et/ou de transmission optiques en profondeur d'un objet |
JP3796363B2 (ja) * | 1998-10-30 | 2006-07-12 | キヤノン株式会社 | 位置検出装置及びそれを用いた露光装置 |
AUPQ139899A0 (en) * | 1999-07-02 | 1999-07-29 | University Of Western Australia, The | Closed loop optical coherence topography |
US6195168B1 (en) | 1999-07-22 | 2001-02-27 | Zygo Corporation | Infrared scanning interferometry apparatus and method |
EP1332332B1 (de) * | 2000-11-02 | 2010-04-14 | Zygo Corporation | Verfahren und vorrichtung zur höhenabtastenden interferometrie mit phasendifferenz-analyse |
WO2002079718A1 (en) * | 2001-03-29 | 2002-10-10 | Georgia Tech Research Corporation | System and method for surface profiling |
US6643025B2 (en) | 2001-03-29 | 2003-11-04 | Georgia Tech Research Corporation | Microinterferometer for distance measurements |
KR20040058365A (ko) * | 2001-12-05 | 2004-07-03 | 세미컨덕터 테크놀로지스 앤드 인스트루먼츠.인크. | 백색광 간섭 측정계를 사용하는 검사 시스템 및 검사 방법 |
GB2385417B (en) * | 2002-03-14 | 2004-01-21 | Taylor Hobson Ltd | Surface profiling apparatus |
US7385707B2 (en) * | 2002-03-14 | 2008-06-10 | Taylor Hobson Limited | Surface profiling apparatus |
US7116430B2 (en) * | 2002-03-29 | 2006-10-03 | Georgia Technology Research Corporation | Highly-sensitive displacement-measuring optical device |
US7518737B2 (en) * | 2002-03-29 | 2009-04-14 | Georgia Tech Research Corp. | Displacement-measuring optical device with orifice |
US7440117B2 (en) * | 2002-03-29 | 2008-10-21 | Georgia Tech Research Corp. | Highly-sensitive displacement-measuring optical device |
US6724487B2 (en) | 2002-06-06 | 2004-04-20 | Eastman Kodak Company | Apparatus and method for measuring digital imager, package and wafer bow and deviation from flatness |
US7139081B2 (en) * | 2002-09-09 | 2006-11-21 | Zygo Corporation | Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures |
US7869057B2 (en) * | 2002-09-09 | 2011-01-11 | Zygo Corporation | Multiple-angle multiple-wavelength interferometer using high-NA imaging and spectral analysis |
GB2395777B (en) | 2002-11-27 | 2005-12-28 | Taylor Hobson Ltd | A surface profiling apparatus |
US7106454B2 (en) * | 2003-03-06 | 2006-09-12 | Zygo Corporation | Profiling complex surface structures using scanning interferometry |
US7324214B2 (en) * | 2003-03-06 | 2008-01-29 | Zygo Corporation | Interferometer and method for measuring characteristics of optically unresolved surface features |
US7177029B2 (en) | 2003-07-10 | 2007-02-13 | Zygo Corporation | Stroboscopic interferometry with frequency domain analysis |
US7298494B2 (en) * | 2003-09-15 | 2007-11-20 | Zygo Corporation | Methods and systems for interferometric analysis of surfaces and related applications |
US7280267B2 (en) * | 2004-02-19 | 2007-10-09 | Agilent Technologies, Inc. | Device for remotely stimulating and measuring electronic signals through a fiber optic cable |
US7277183B2 (en) * | 2004-04-22 | 2007-10-02 | Zygo Corporation | Vibration resistant interferometry |
US6963434B1 (en) * | 2004-04-30 | 2005-11-08 | Asml Holding N.V. | System and method for calculating aerial image of a spatial light modulator |
US20060012582A1 (en) * | 2004-07-15 | 2006-01-19 | De Lega Xavier C | Transparent film measurements |
US7485847B2 (en) * | 2004-12-08 | 2009-02-03 | Georgia Tech Research Corporation | Displacement sensor employing discrete light pulse detection |
WO2006078718A1 (en) * | 2005-01-20 | 2006-07-27 | Zygo Corporation | Interferometer for determining characteristics of an object surface |
US7884947B2 (en) * | 2005-01-20 | 2011-02-08 | Zygo Corporation | Interferometry for determining characteristics of an object surface, with spatially coherent illumination |
WO2007044786A2 (en) * | 2005-10-11 | 2007-04-19 | Zygo Corporation | Interferometry method and system including spectral decomposition |
FI20060331A0 (fi) * | 2006-04-05 | 2006-04-05 | Kari Seppaelae | Menetelmä ja laitteisto muodon mittauksen/tunnistukseen |
TWI428559B (zh) * | 2006-07-21 | 2014-03-01 | Zygo Corp | 在低同調干涉下系統性效應之補償方法和系統 |
US7710580B2 (en) * | 2006-10-27 | 2010-05-04 | Zygo Corporation | Vibration resistant interferometry |
US7924435B2 (en) * | 2006-12-22 | 2011-04-12 | Zygo Corporation | Apparatus and method for measuring characteristics of surface features |
US7889355B2 (en) * | 2007-01-31 | 2011-02-15 | Zygo Corporation | Interferometry for lateral metrology |
US7619746B2 (en) * | 2007-07-19 | 2009-11-17 | Zygo Corporation | Generating model signals for interferometry |
US8072611B2 (en) * | 2007-10-12 | 2011-12-06 | Zygo Corporation | Interferometric analysis of under-resolved features |
JP5222954B2 (ja) * | 2007-11-13 | 2013-06-26 | ザイゴ コーポレーション | 偏光スキャンを利用した干渉計 |
WO2009079334A2 (en) * | 2007-12-14 | 2009-06-25 | Zygo Corporation | Analyzing surface structure using scanning interferometry |
US8004688B2 (en) * | 2008-11-26 | 2011-08-23 | Zygo Corporation | Scan error correction in low coherence scanning interferometry |
US7986414B2 (en) * | 2009-01-30 | 2011-07-26 | Corning Incorporated | Measurement of multiple surface test objects with frequency scanning interferometer |
US8320031B1 (en) * | 2009-12-10 | 2012-11-27 | The Boeing Company | Method for real time holographic fringe blazing by determining adjacent fringe minima and blazing intermediate the minima |
JP5493152B2 (ja) | 2010-08-06 | 2014-05-14 | 株式会社ミツトヨ | 形状測定装置 |
GB2483481A (en) * | 2010-09-09 | 2012-03-14 | Phase Vision Ltd | Method and apparatus of measuring the shape of an object |
US8698891B2 (en) | 2011-03-09 | 2014-04-15 | Zygo Corporation | Object thickness and surface profile measurements |
JP6522344B2 (ja) * | 2014-01-10 | 2019-05-29 | Ntn株式会社 | 高さ検出装置、塗布装置および高さ検出方法 |
ES2662124T3 (es) * | 2014-02-21 | 2018-04-05 | Abb Schweiz Ag | Sensor interferométrico |
CN106796125B (zh) * | 2014-02-21 | 2019-06-18 | Abb 瑞士股份有限公司 | 具有微分调制相位检测的干涉测定传感器 |
KR102523972B1 (ko) * | 2015-10-27 | 2023-04-20 | 삼성전자주식회사 | 광 셔터를 포함하는 3차원 깊이 센서를 이용한 거리측정방법 |
JP6749814B2 (ja) * | 2015-11-12 | 2020-09-02 | Ntn株式会社 | 高さ検出装置およびそれを搭載した塗布装置 |
EP3376156B1 (de) * | 2015-11-12 | 2022-03-02 | NTN Corporation | Höhendetektionsvorrichtung und beschichtungsvorrichtung mit einer solchen vorrichtung |
WO2018093637A1 (en) * | 2016-11-18 | 2018-05-24 | Zygo Corporation | Method and apparatus for optimizing the optical performance of interferometers |
US10948284B1 (en) * | 2017-10-06 | 2021-03-16 | Filmetrics, Inc. | Optical profilometer with color outputs |
JP2019152570A (ja) * | 2018-03-05 | 2019-09-12 | 東芝メモリ株式会社 | 測定装置 |
CN113029366B (zh) * | 2021-03-11 | 2022-09-23 | 深圳中科飞测科技股份有限公司 | 零相位差位置寻找方法、扫描系统及存储介质 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3574280D1 (en) * | 1985-12-23 | 1989-12-21 | Ibm Deutschland | Method and arrangement for optically determining surface profiles |
US4818110A (en) * | 1986-05-06 | 1989-04-04 | Kla Instruments Corporation | Method and apparatus of using a two beam interference microscope for inspection of integrated circuits and the like |
US4732483A (en) * | 1987-03-19 | 1988-03-22 | Zygo Corporation | Interferometric surface profiler |
US4869593A (en) * | 1988-04-22 | 1989-09-26 | Zygo Corporation | Interferometric surface profiler |
JPH01282411A (ja) * | 1988-05-06 | 1989-11-14 | Brother Ind Ltd | レーザ走査型表面粗さ測定装置 |
US4978219A (en) * | 1988-05-06 | 1990-12-18 | Brother Kogyo Kabushiki Kaisha | Surface roughness measuring apparatus utilizing deflectable laser beams |
US4948253A (en) * | 1988-10-28 | 1990-08-14 | Zygo Corporation | Interferometric surface profiler for spherical surfaces |
JPH02173505A (ja) * | 1988-12-26 | 1990-07-05 | Brother Ind Ltd | 光波干渉型微細表面形状測定装置 |
JPH0378609A (ja) * | 1989-08-23 | 1991-04-03 | Brother Ind Ltd | 光スキッド式表面粗さ計測装置 |
US5112129A (en) * | 1990-03-02 | 1992-05-12 | Kla Instruments Corporation | Method of image enhancement for the coherence probe microscope with applications to integrated circuit metrology |
US5122648A (en) * | 1990-06-01 | 1992-06-16 | Wyko Corporation | Apparatus and method for automatically focusing an interference microscope |
DE4108944A1 (de) * | 1991-03-19 | 1992-09-24 | Haeusler Gerd | Verfahren und einrichtung zur beruehrungslosen erfassung der oberflaechengestalt von diffus streuenden objekten |
US5133601A (en) * | 1991-06-12 | 1992-07-28 | Wyko Corporation | Rough surface profiler and method |
US5204734A (en) * | 1991-06-12 | 1993-04-20 | Wyko Corporation | Rough surface profiler and method |
US5210591A (en) * | 1991-08-02 | 1993-05-11 | Hughes Aircraft Company | Interferometric ball bearing test station |
-
1993
- 1993-02-01 US US08/011,963 patent/US5402234A/en not_active Expired - Lifetime
-
1994
- 1994-01-13 JP JP6518061A patent/JP2682742B2/ja not_active Expired - Lifetime
- 1994-01-13 WO PCT/US1994/000659 patent/WO1994018523A1/en active IP Right Grant
- 1994-01-13 EP EP94907841A patent/EP0746745B1/de not_active Expired - Lifetime
- 1994-01-13 DE DE69431488T patent/DE69431488T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US5402234A (en) | 1995-03-28 |
EP0746745A1 (de) | 1996-12-11 |
EP0746745B1 (de) | 2002-10-02 |
WO1994018523A1 (en) | 1994-08-18 |
EP0746745A4 (de) | 1997-12-17 |
JP2682742B2 (ja) | 1997-11-26 |
JPH08502828A (ja) | 1996-03-26 |
DE69431488T2 (de) | 2003-06-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8328 | Change in the person/name/address of the agent |
Representative=s name: EFFERT UND KOLLEGEN, 12487 BERLIN |
|
8328 | Change in the person/name/address of the agent |
Representative=s name: WABLAT-LANGE-KARTHAUS, 14129 BERLIN |