DE69431488T2 - Verfahren für die schnelle Datenerfassung bei der Köhärenz-Scanning-Interferometrie - Google Patents

Verfahren für die schnelle Datenerfassung bei der Köhärenz-Scanning-Interferometrie

Info

Publication number
DE69431488T2
DE69431488T2 DE69431488T DE69431488T DE69431488T2 DE 69431488 T2 DE69431488 T2 DE 69431488T2 DE 69431488 T DE69431488 T DE 69431488T DE 69431488 T DE69431488 T DE 69431488T DE 69431488 T2 DE69431488 T2 DE 69431488T2
Authority
DE
Germany
Prior art keywords
procedure
data acquisition
fast data
scanning interferometry
coherence scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69431488T
Other languages
English (en)
Other versions
DE69431488D1 (de
Inventor
L Deck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zygo Corp
Original Assignee
Zygo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zygo Corp filed Critical Zygo Corp
Publication of DE69431488D1 publication Critical patent/DE69431488D1/de
Application granted granted Critical
Publication of DE69431488T2 publication Critical patent/DE69431488T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G01B9/02009—Two or more frequencies or sources used for interferometric measurement by using two or more low coherence lengths using different or varying spectral width
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G01B9/02072—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer by calibration or testing of interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/04—Measuring microscopes
DE69431488T 1993-02-01 1994-01-13 Verfahren für die schnelle Datenerfassung bei der Köhärenz-Scanning-Interferometrie Expired - Lifetime DE69431488T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/011,963 US5402234A (en) 1992-08-31 1993-02-01 Method and apparatus for the rapid acquisition of data in coherence scanning interferometry
PCT/US1994/000659 WO1994018523A1 (en) 1993-02-01 1994-01-13 Method and apparatus for the rapid acquisition of data in coherence scanning interferometry

Publications (2)

Publication Number Publication Date
DE69431488D1 DE69431488D1 (de) 2002-11-07
DE69431488T2 true DE69431488T2 (de) 2003-06-26

Family

ID=21752721

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69431488T Expired - Lifetime DE69431488T2 (de) 1993-02-01 1994-01-13 Verfahren für die schnelle Datenerfassung bei der Köhärenz-Scanning-Interferometrie

Country Status (5)

Country Link
US (1) US5402234A (de)
EP (1) EP0746745B1 (de)
JP (1) JP2682742B2 (de)
DE (1) DE69431488T2 (de)
WO (1) WO1994018523A1 (de)

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JP6522344B2 (ja) * 2014-01-10 2019-05-29 Ntn株式会社 高さ検出装置、塗布装置および高さ検出方法
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JP6749814B2 (ja) 2015-11-12 2020-09-02 Ntn株式会社 高さ検出装置およびそれを搭載した塗布装置
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Also Published As

Publication number Publication date
DE69431488D1 (de) 2002-11-07
WO1994018523A1 (en) 1994-08-18
EP0746745A1 (de) 1996-12-11
EP0746745A4 (de) 1997-12-17
JP2682742B2 (ja) 1997-11-26
EP0746745B1 (de) 2002-10-02
JPH08502828A (ja) 1996-03-26
US5402234A (en) 1995-03-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: EFFERT UND KOLLEGEN, 12487 BERLIN

8328 Change in the person/name/address of the agent

Representative=s name: WABLAT-LANGE-KARTHAUS, 14129 BERLIN