DE69432074T2 - Mikromechanischer querbeschleunigungsmesser - Google Patents
Mikromechanischer querbeschleunigungsmesserInfo
- Publication number
- DE69432074T2 DE69432074T2 DE69432074T DE69432074T DE69432074T2 DE 69432074 T2 DE69432074 T2 DE 69432074T2 DE 69432074 T DE69432074 T DE 69432074T DE 69432074 T DE69432074 T DE 69432074T DE 69432074 T2 DE69432074 T2 DE 69432074T2
- Authority
- DE
- Germany
- Prior art keywords
- micromechanical
- accelerator
- cross
- micromechanical cross
- cross accelerator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
- G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
- B81B3/0051—For defining the movement, i.e. structures that guide or limit the movement of an element
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
- G01P1/006—Details of instruments used for thermal compensation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/028—Electrodynamic magnetometers
- G01R33/0286—Electrodynamic magnetometers comprising microelectromechanical systems [MEMS]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0228—Inertial sensors
- B81B2201/0235—Accelerometers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0109—Bridges
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0136—Comb structures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
- G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/067,264 US5563343A (en) | 1993-05-26 | 1993-05-26 | Microelectromechanical lateral accelerometer |
US08/246,265 US5610335A (en) | 1993-05-26 | 1994-05-19 | Microelectromechanical lateral accelerometer |
PCT/US1994/005499 WO1994028427A1 (en) | 1993-05-26 | 1994-05-23 | Microelectromechanical lateral accelerometer |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69432074D1 DE69432074D1 (de) | 2003-03-06 |
DE69432074T2 true DE69432074T2 (de) | 2003-06-12 |
Family
ID=26747678
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69432074T Expired - Lifetime DE69432074T2 (de) | 1993-05-26 | 1994-05-23 | Mikromechanischer querbeschleunigungsmesser |
Country Status (5)
Country | Link |
---|---|
US (1) | US5610335A (de) |
EP (1) | EP0702796B1 (de) |
JP (2) | JP3657606B2 (de) |
DE (1) | DE69432074T2 (de) |
WO (1) | WO1994028427A1 (de) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE112006003849B4 (de) * | 2006-04-24 | 2012-09-20 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zum Betreiben eines oszillierend auslenkbaren mikromechanischen Elements |
DE102015001128A1 (de) * | 2015-01-29 | 2016-08-04 | Northrop Grumman Litef Gmbh | Beschleunigungssensor mit Federkraftkompensation |
DE102017207453A1 (de) * | 2017-05-04 | 2018-11-08 | Robert Bosch Gmbh | Mikromechanischer Inertialsensor |
DE102006051207B4 (de) | 2006-10-30 | 2019-09-12 | Robert Bosch Gmbh | Mikromechanisches Bauelement mit einer Mikroschwingvorrichtung und Verfahren zum Abgleich eines Bauelements |
DE102019114996A1 (de) * | 2019-06-04 | 2020-12-10 | Northrop Grumman Litef Gmbh | Beschleunigungsmessvorrichtung mit verbesserter Biasstabilität |
Families Citing this family (106)
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DE19547642A1 (de) * | 1994-12-20 | 1996-06-27 | Zexel Corp | Beschleunigungssensor und Verfahren zu dessen Herstellung |
US5587518A (en) * | 1994-12-23 | 1996-12-24 | Ford Motor Company | Accelerometer with a combined self-test and ground electrode |
US6316796B1 (en) | 1995-05-24 | 2001-11-13 | Lucas Novasensor | Single crystal silicon sensor with high aspect ratio and curvilinear structures |
US6084257A (en) * | 1995-05-24 | 2000-07-04 | Lucas Novasensor | Single crystal silicon sensor with high aspect ratio and curvilinear structures |
US5640133A (en) * | 1995-06-23 | 1997-06-17 | Cornell Research Foundation, Inc. | Capacitance based tunable micromechanical resonators |
KR100363246B1 (ko) * | 1995-10-27 | 2003-02-14 | 삼성전자 주식회사 | 진동구조물및진동구조물의고유진동수제어방법 |
KR100363247B1 (ko) * | 1995-10-28 | 2003-02-14 | 삼성전자 주식회사 | 진동구조물및그것의고유진동수제어방법 |
US5856722A (en) * | 1996-01-02 | 1999-01-05 | Cornell Research Foundation, Inc. | Microelectromechanics-based frequency signature sensor |
US5817942A (en) | 1996-02-28 | 1998-10-06 | The Charles Stark Draper Laboratory, Inc. | Capacitive in-plane accelerometer |
EP0822415B1 (de) * | 1996-07-31 | 2003-03-26 | STMicroelectronics S.r.l. | Integrierter kapazitiver Halbleiter-Beschleunigungsmessaufnehmer sowie Verfahren zu seiner Herstellung |
DE19643342A1 (de) * | 1996-10-21 | 1998-04-30 | Bosch Gmbh Robert | Verfahren und Vorrichtung zum Messen einer physikalischen Größe |
US6128122A (en) * | 1998-09-18 | 2000-10-03 | Seagate Technology, Inc. | Micromachined mirror with stretchable restoring force member |
EP0877255A1 (de) * | 1997-05-09 | 1998-11-11 | TMS Technologies, Inc. | Mikromechanischer Beschleunigungssensor zur Verwendung in Kraftfahrzeugen |
DE69726718T2 (de) * | 1997-07-31 | 2004-10-07 | St Microelectronics Srl | Verfahren zum Herstellen hochempfindlicher integrierter Beschleunigungs- und Gyroskopsensoren und Sensoren, die derartig hergestellt werden |
FR2769369B1 (fr) * | 1997-10-08 | 1999-12-24 | Sercel Rech Const Elect | Accelerometre a plaque mobile, avec moteur electrostatique de contre-reaction |
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DE112006003849B4 (de) * | 2006-04-24 | 2012-09-20 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zum Betreiben eines oszillierend auslenkbaren mikromechanischen Elements |
DE102006051207B4 (de) | 2006-10-30 | 2019-09-12 | Robert Bosch Gmbh | Mikromechanisches Bauelement mit einer Mikroschwingvorrichtung und Verfahren zum Abgleich eines Bauelements |
DE102015001128A1 (de) * | 2015-01-29 | 2016-08-04 | Northrop Grumman Litef Gmbh | Beschleunigungssensor mit Federkraftkompensation |
US10168351B2 (en) | 2015-01-29 | 2019-01-01 | Northrop Grumman Litef Gmbh | Acceleration sensor having spring force compensation |
DE102015001128B4 (de) | 2015-01-29 | 2021-09-30 | Northrop Grumman Litef Gmbh | Beschleunigungssensor mit Federkraftkompensation |
DE102017207453A1 (de) * | 2017-05-04 | 2018-11-08 | Robert Bosch Gmbh | Mikromechanischer Inertialsensor |
DE102019114996A1 (de) * | 2019-06-04 | 2020-12-10 | Northrop Grumman Litef Gmbh | Beschleunigungsmessvorrichtung mit verbesserter Biasstabilität |
Also Published As
Publication number | Publication date |
---|---|
DE69432074D1 (de) | 2003-03-06 |
WO1994028427A1 (en) | 1994-12-08 |
JPH08510837A (ja) | 1996-11-12 |
EP0702796A4 (de) | 1997-01-22 |
US5610335A (en) | 1997-03-11 |
JP2005140792A (ja) | 2005-06-02 |
EP0702796A1 (de) | 1996-03-27 |
EP0702796B1 (de) | 2003-01-29 |
JP3657606B2 (ja) | 2005-06-08 |
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