DE69508160T2 - Verbesserte mikromechanische Geräte - Google Patents

Verbesserte mikromechanische Geräte

Info

Publication number
DE69508160T2
DE69508160T2 DE69508160T DE69508160T DE69508160T2 DE 69508160 T2 DE69508160 T2 DE 69508160T2 DE 69508160 T DE69508160 T DE 69508160T DE 69508160 T DE69508160 T DE 69508160T DE 69508160 T2 DE69508160 T2 DE 69508160T2
Authority
DE
Germany
Prior art keywords
micromechanical devices
improved micromechanical
improved
devices
micromechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69508160T
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English (en)
Other versions
DE69508160D1 (de
Inventor
Toshiyuki Nmi Kaeriyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Application granted granted Critical
Publication of DE69508160D1 publication Critical patent/DE69508160D1/de
Publication of DE69508160T2 publication Critical patent/DE69508160T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/90—Methods
DE69508160T 1994-07-29 1995-07-25 Verbesserte mikromechanische Geräte Expired - Lifetime DE69508160T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/283,486 US5485304A (en) 1994-07-29 1994-07-29 Support posts for micro-mechanical devices

Publications (2)

Publication Number Publication Date
DE69508160D1 DE69508160D1 (de) 1999-04-15
DE69508160T2 true DE69508160T2 (de) 1999-08-12

Family

ID=23086290

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69508160T Expired - Lifetime DE69508160T2 (de) 1994-07-29 1995-07-25 Verbesserte mikromechanische Geräte

Country Status (5)

Country Link
US (3) US5485304A (de)
EP (1) EP0694801B1 (de)
JP (1) JP3790285B2 (de)
KR (1) KR100413014B1 (de)
DE (1) DE69508160T2 (de)

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US5485304A (en) 1996-01-16
EP0694801A3 (de) 1996-04-24
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US5646768A (en) 1997-07-08
EP0694801B1 (de) 1999-03-10
JPH0862518A (ja) 1996-03-08
DE69508160D1 (de) 1999-04-15
KR100413014B1 (ko) 2004-03-25
US5497262A (en) 1996-03-05
JP3790285B2 (ja) 2006-06-28
KR960005747A (ko) 1996-02-23

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