DE69527165T2 - Verfahren zur Herstellung einer vorübergehenden Kontaktierung zu einem integrierten Halbleiterschaltkreis - Google Patents

Verfahren zur Herstellung einer vorübergehenden Kontaktierung zu einem integrierten Halbleiterschaltkreis

Info

Publication number
DE69527165T2
DE69527165T2 DE69527165T DE69527165T DE69527165T2 DE 69527165 T2 DE69527165 T2 DE 69527165T2 DE 69527165 T DE69527165 T DE 69527165T DE 69527165 T DE69527165 T DE 69527165T DE 69527165 T2 DE69527165 T2 DE 69527165T2
Authority
DE
Germany
Prior art keywords
producing
semiconductor circuit
integrated semiconductor
temporary contact
temporary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69527165T
Other languages
English (en)
Other versions
DE69527165D1 (de
Inventor
Shigetsugu Muramatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinko Electric Industries Co Ltd
Original Assignee
Shinko Electric Industries Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinko Electric Industries Co Ltd filed Critical Shinko Electric Industries Co Ltd
Publication of DE69527165D1 publication Critical patent/DE69527165D1/de
Application granted granted Critical
Publication of DE69527165T2 publication Critical patent/DE69527165T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2884—Testing of integrated circuits [IC] using dedicated test connectors, test elements or test circuits on the IC under test
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3157—Partial encapsulation or coating
    • H01L23/3164—Partial encapsulation or coating the coating being a foil
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/4985—Flexible insulating substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01078—Platinum [Pt]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01079—Gold [Au]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/1517—Multilayer substrate
    • H01L2924/15172—Fan-out arrangement of the internal vias
    • H01L2924/15173—Fan-out arrangement of the internal vias in a single layer of the multilayer substrate
DE69527165T 1994-03-01 1995-03-01 Verfahren zur Herstellung einer vorübergehenden Kontaktierung zu einem integrierten Halbleiterschaltkreis Expired - Fee Related DE69527165T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP03105994A JP3378338B2 (ja) 1994-03-01 1994-03-01 半導体集積回路装置

Publications (2)

Publication Number Publication Date
DE69527165D1 DE69527165D1 (de) 2002-08-01
DE69527165T2 true DE69527165T2 (de) 2002-11-21

Family

ID=12320911

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69527165T Expired - Fee Related DE69527165T2 (de) 1994-03-01 1995-03-01 Verfahren zur Herstellung einer vorübergehenden Kontaktierung zu einem integrierten Halbleiterschaltkreis

Country Status (5)

Country Link
US (2) US5904488A (de)
EP (1) EP0670596B1 (de)
JP (1) JP3378338B2 (de)
KR (1) KR100206026B1 (de)
DE (1) DE69527165T2 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19640304C2 (de) * 1996-09-30 2000-10-12 Siemens Ag Chipmodul insbesondere zur Implantation in einen Chipkartenkörper
US7898275B1 (en) * 1997-10-03 2011-03-01 Texas Instruments Incorporated Known good die using existing process infrastructure
US6331735B1 (en) * 1998-09-25 2001-12-18 Advanced Micro Devices, Inc. Method to improve chip scale package electrostatic discharge performance and suppress marking artifacts
DE20011590U1 (de) * 2000-07-03 2000-09-07 Infineon Technologies Ag Halbleiterchip-Modul mit Schutzfolie
DE10107399A1 (de) * 2001-02-14 2002-09-12 Infineon Technologies Ag Elektronisches Bauteil mit Kantenschutz
TW543052B (en) * 2001-03-05 2003-07-21 Nitto Denko Corp Manufacturing method of ceramic green sheet, manufacturing method of multilayer ceramic electronic components, and carrier sheet for ceramic green sheets
DE10300958A1 (de) * 2003-01-13 2004-07-22 Epcos Ag Modul mit Verkapselung
KR20060079754A (ko) * 2003-06-25 2006-07-06 어드밴스드 인터커넥트 테크놀로지스 리미티드 반도체 패키지용 칩 패드가 라우트된 리드 프레임
TWI224849B (en) * 2004-01-02 2004-12-01 Advanced Semiconductor Eng Quad flat flip chip package and lead frame
DE102004027787A1 (de) * 2004-06-08 2006-01-05 Infineon Technologies Ag Halbleiterbauteile mit Kunststoffgehäuse und Verfahren zur Herstellung derselben
DE102004057493A1 (de) * 2004-11-29 2006-06-01 Siemens Ag Umhüllung von auf einem Substrat angeordneten Bauelementen
DE102010062823A1 (de) * 2010-12-10 2012-06-21 Tesa Se Klebmasse und Verfahren zur Kapselung einer elektronischen Anordnung
CN107492528A (zh) * 2016-06-13 2017-12-19 恩智浦美国有限公司 具有石墨烯条带的柔性半导体装置
KR20180064583A (ko) * 2016-12-05 2018-06-15 삼성디스플레이 주식회사 칩 온 필름 패키지 및 이를 포함하는 표시 장치

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3289046A (en) * 1964-05-19 1966-11-29 Gen Electric Component chip mounted on substrate with heater pads therebetween
US3868724A (en) * 1973-11-21 1975-02-25 Fairchild Camera Instr Co Multi-layer connecting structures for packaging semiconductor devices mounted on a flexible carrier
US4246595A (en) * 1977-03-08 1981-01-20 Matsushita Electric Industrial Co., Ltd. Electronics circuit device and method of making the same
JPS53147968A (en) * 1977-05-30 1978-12-23 Hitachi Ltd Thick film circuit board
JPS6248050A (ja) * 1985-08-28 1987-03-02 Seiei Kosan Kk 半導体デバイス等のパツケ−ジング方法
JPH01206651A (ja) * 1988-02-15 1989-08-18 Mitsui Toatsu Chem Inc 半導体装置
FR2634608B1 (fr) * 1988-07-22 1994-05-06 Etat Francais Cnet Reseau domotique cable multipoints reconfigurable de distribution simultanee et/ou alternative de plusieurs types de signaux, notamment de signaux d'images en bande de base, et procede de configuration d'un tel reseau
JPH0373559A (ja) * 1989-08-15 1991-03-28 Mitsubishi Electric Corp 半導体装置及びその製造方法
US5130783A (en) * 1991-03-04 1992-07-14 Texas Instruments Incorporated Flexible film semiconductor package
FR2674681A1 (fr) * 1991-03-28 1992-10-02 Em Microelectronic Marin Sa Composant electronique ultramince et procede pour sa fabrication.
US5414298A (en) * 1993-03-26 1995-05-09 Tessera, Inc. Semiconductor chip assemblies and components with pressure contact
JP3111797B2 (ja) * 1994-04-01 2000-11-27 富士電機株式会社 薄膜光電変換モジュールの製造方法および製造装置
US5739050A (en) * 1996-01-26 1998-04-14 Micron Technology, Inc. Method and apparatus for assembling a semiconductor package for testing

Also Published As

Publication number Publication date
DE69527165D1 (de) 2002-08-01
JPH07240433A (ja) 1995-09-12
US5904488A (en) 1999-05-18
KR100206026B1 (ko) 1999-07-01
EP0670596A3 (de) 1996-03-27
EP0670596A2 (de) 1995-09-06
JP3378338B2 (ja) 2003-02-17
US6011300A (en) 2000-01-04
EP0670596B1 (de) 2002-06-26

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee