DE69529477D1 - Verfahren zur herstellung eines kapazitiven absolutdrucksensors - Google Patents

Verfahren zur herstellung eines kapazitiven absolutdrucksensors

Info

Publication number
DE69529477D1
DE69529477D1 DE69529477T DE69529477T DE69529477D1 DE 69529477 D1 DE69529477 D1 DE 69529477D1 DE 69529477 T DE69529477 T DE 69529477T DE 69529477 T DE69529477 T DE 69529477T DE 69529477 D1 DE69529477 D1 DE 69529477D1
Authority
DE
Germany
Prior art keywords
producing
pressure sensor
absolute pressure
capacitive absolute
capacitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69529477T
Other languages
English (en)
Other versions
DE69529477T2 (de
Inventor
H Ko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Case Western Reserve University
Original Assignee
Case Western Reserve University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Case Western Reserve University filed Critical Case Western Reserve University
Publication of DE69529477D1 publication Critical patent/DE69529477D1/de
Application granted granted Critical
Publication of DE69529477T2 publication Critical patent/DE69529477T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
DE69529477T 1994-11-22 1995-11-09 Verfahren zur herstellung eines kapazitiven absolutdrucksensors Expired - Fee Related DE69529477T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/343,712 US5528452A (en) 1994-11-22 1994-11-22 Capacitive absolute pressure sensor
PCT/US1995/014770 WO1996016418A1 (en) 1994-11-22 1995-11-09 Capacitive absolute pressure sensor and method

Publications (2)

Publication Number Publication Date
DE69529477D1 true DE69529477D1 (de) 2003-02-27
DE69529477T2 DE69529477T2 (de) 2003-07-31

Family

ID=23347305

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69529477T Expired - Fee Related DE69529477T2 (de) 1994-11-22 1995-11-09 Verfahren zur herstellung eines kapazitiven absolutdrucksensors
DE0818046T Pending DE818046T1 (de) 1994-11-22 1995-11-09 Kapazitiver absolutdrucksensor

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE0818046T Pending DE818046T1 (de) 1994-11-22 1995-11-09 Kapazitiver absolutdrucksensor

Country Status (13)

Country Link
US (2) US5528452A (de)
EP (2) EP0818046B1 (de)
JP (1) JPH10509241A (de)
KR (1) KR100355421B1 (de)
CN (1) CN1092836C (de)
AU (1) AU686916B2 (de)
BR (1) BR9509747A (de)
CA (1) CA2205169C (de)
DE (2) DE69529477T2 (de)
ES (1) ES2118672T1 (de)
PL (1) PL179139B1 (de)
RU (1) RU2171455C2 (de)
WO (1) WO1996016418A1 (de)

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CN107957273A (zh) * 2018-01-16 2018-04-24 北京先通康桥医药科技有限公司 具有触压和超声功能的传感器
CN108426658B (zh) * 2018-03-26 2020-05-19 温州大学 环接触高量程电容式微压力传感器
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CN109141691A (zh) * 2018-09-10 2019-01-04 沈阳工业大学 一种联动膜电容式压力敏感芯片及其制造方法
CN110044537A (zh) * 2019-03-27 2019-07-23 西人马联合测控（泉州）科技有限公司 压力传感器及其制造方法
CN112034204A (zh) * 2020-08-01 2020-12-04 沈阳工业大学 一种联动接触电容式加速度敏感芯片及其制造方法
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CN112964417B (zh) * 2021-04-09 2023-04-14 午芯(辽宁省)高科技有限公司 一种双动极板电容式压力敏感芯片

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Also Published As

Publication number Publication date
WO1996016418A1 (en) 1996-05-30
EP0818046A4 (de) 1998-12-02
CA2205169A1 (en) 1996-05-30
CN1172547A (zh) 1998-02-04
EP0818046B1 (de) 2003-01-22
KR100355421B1 (ko) 2002-12-18
CA2205169C (en) 2002-10-15
PL179139B1 (pl) 2000-07-31
MX9703726A (es) 1998-07-31
AU4158196A (en) 1996-06-17
DE69529477T2 (de) 2003-07-31
BR9509747A (pt) 1997-10-21
JPH10509241A (ja) 1998-09-08
EP1286147A1 (de) 2003-02-26
RU2171455C2 (ru) 2001-07-27
US5528452A (en) 1996-06-18
ES2118672T1 (es) 1998-10-01
CN1092836C (zh) 2002-10-16
US5585311A (en) 1996-12-17
DE818046T1 (de) 1998-07-16
EP0818046A1 (de) 1998-01-14
PL320670A1 (en) 1997-10-27
AU686916B2 (en) 1998-02-12
KR987000672A (ko) 1998-03-30

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